Extract from the Register of European Patents

EP About this file: EP1746386

EP1746386 - Method of measuring three-dimensional surface roughness of a structure [Right-click to bookmark this link]
StatusThe application is deemed to be withdrawn
Status updated on  23.01.2009
Database last updated on 18.03.2026
Most recent event   Tooltip23.01.2009Application deemed to be withdrawnpublished on 25.02.2009  [2009/09]
Applicant(s)For all designated states
FEI COMPANY
5350 NE Dawson Creek Drive
Hillsboro, Oregon 97124-5793 / US
[2007/04]
Inventor(s)01 / Chitturi, Prasanna
19730 NW Dorchester Way
Hillsboro, OR 97124 / US
02 / Hong, Liang
2765 NW John Olsen Ave. no. G96
Hillsboro, OR 97124 / US
03 / Henry, Craig
19897 SW Holly Woods Ct
Aloha, OR 97007 / US
04 / Notte, John
18 Lawndale Circle
Gloucester, MA 01930 / US
 [2007/04]
Representative(s)Bakker, Hendrik, et al
FEI Company
Patent Department
P.O. Box 1745
5602 BS Eindhoven / NL
[N/P]
Former [2008/17]Bakker, Hendrik, et al
FEI Company Patent Department P.O. Box 1745
5602 BS Eindhoven / NL
Former [2007/04]Bakker, Hendrik, et al
FEI Company Patent Department P.O. Box 80066
5600 KA Eindhoven / NL
Application number, filing date06117358.918.07.2006
[2007/04]
Priority number, dateUS20050700654P19.07.2005         Original published format: US 700654 P
US2005025211517.10.2005         Original published format: US 252115
[2007/04]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report 
No.:EP1746386
Date:24.01.2007
Language:EN
[2007/04]
Type: A3 Search report 
No.:EP1746386
Date:01.08.2007
[2007/31]
Search report(s)(Supplementary) European search report - dispatched on:EP02.07.2007
ClassificationIPC:G01B21/30, G01N23/22, H01L21/66, G01B15/08, G03F7/20
[2007/27]
CPC:
G03F7/70625 (EP,US); G01B15/08 (EP,US); G01N23/2251 (EP,US)
Former IPC [2007/04]G01B21/30
Designated contracting statesDE,   FR,   GB [2008/15]
Former [2007/04]AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HU,  IE,  IS,  IT,  LI,  LT,  LU,  LV,  MC,  NL,  PL,  PT,  RO,  SE,  SI,  SK,  TR 
TitleGerman:Verfahren zur dreidimensionalen Vermessung der Oberflächenrauhigkeit einer Struktur[2007/04]
English:Method of measuring three-dimensional surface roughness of a structure[2007/04]
French:Procédé de mesure tridimensionelle de la rugosité de la surface d'une structure[2007/04]
Examination procedure18.07.2006Examination requested  [2007/04]
02.02.2008Loss of particular rights, legal effect: designated state(s)
25.02.2008Despatch of a communication from the examining division (Time limit: M06)
11.03.2008Despatch of communication of loss of particular rights: designated state(s) AT, BE, BG, CH, CY, CZ, DK, EE, ES, FI, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR
09.09.2008Application deemed to be withdrawn, date of legal effect  [2009/09]
10.10.2008Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time  [2009/09]
Fees paidRenewal fee
25.07.2008Renewal fee patent year 03
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Documents cited:Search[XY] US2004158409  (TESHIMA JANET et al.)
 [XY] US2002189330  (MANCEVSKI VLADIMIR et al.) [X] 1-8,10-20 * paragraph [0003] - paragraph [0008] * * paragraph [0067] - paragraph [0069] * * paragraphs [0081] , [0083] , [0087] , [0089]; figures 1A,2 * * paragraphs [0107] , [0110] , [0113] * * paragraph [0138] - paragraph [0155]; figures 8-10A,B * * paragraph [0179] - paragraph [0183]; figures 17A,B * * paragraph [0191] * * paragraph [0199] - paragraph [0206] * * paragraph [0244] *[Y] 9
 [XY] US2002097913  (IKEDA TAKAHIRO et al.) [Y] 9
 [YA] US2003190069  (NIKITIN ARKADY et al.) [Y] 9 * paragraph [0220] - paragraph [0223]; figures 37,50,51 * * paragraph [0251] - paragraph [0252] *[A] 1-8,10-20
 [XY]   L. HOLZER, F. INDUTNYI, PH. GASSER, B. MNCH, M. WEGMANN: "Three-dimensional analysis of porous BaTiO3 ceramics using FIB nanotomography", JOURNAL OF MICROSCOPY, vol. 216, October 2004 (2004-10-01), pages 84 - 95, XP002435362

DOI:   http://dx.doi.org/10.1111/j.0022-2720.2004.01397.x
 [A]   STEER T J ET AL: "3-D focused ion beam mapping of nanoindentation zones in a Cu-Ti multilayered coating", PREPARATION AND CHARACTERIZATION, ELSEVIER SEQUOIA, NL, vol. 413, no. 1-2, 24 June 2002 (2002-06-24), pages 147 - 154, XP004369920, ISSN: 0040-6090

DOI:   http://dx.doi.org/10.1016/S0040-6090(02)00283-3
by applicantUS5851413
 US5435850
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