EP1844495 - MANUFACTURING METHOD FOR SEMICONDUCTOR CHIPS [Right-click to bookmark this link] | |||
Former [2007/42] | MANUFACTURING METHOD FOR SEMICONDUCTOR CHIPS, AND SEMICONDUCTOR CHIP | ||
[2011/06] | Status | No opposition filed within time limit Status updated on 01.06.2012 Database last updated on 04.11.2024 | Most recent event Tooltip | 18.07.2014 | Lapse of the patent in a contracting state New state(s): HU | published on 20.08.2014 [2014/34] | Applicant(s) | For all designated states Panasonic Corporation 1006, Oaza Kadoma Kadoma-shi Osaka 571-8501 / JP | [N/P] |
Former [2008/47] | For all designated states Panasonic Corporation 1006, Oaza Kadoma Kadoma-shi Osaka 571-8501 / JP | ||
Former [2007/42] | For all designated states MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. 1006, Oaza Kadoma, Kadoma-shi Osaka 571-8501 / JP | Inventor(s) | 01 /
ARITA, Kiyoshi c/o Matsushita Electric Industrial Co., Ltd. 19F Matsushita IMP Bldg., 3-7, Shiromi 1-chome Chuo-ku Osaka-shi, Osaka 540-6319 / JP | [2007/42] | Representative(s) | Eisenführ Speiser Patentanwälte Rechtsanwälte PartGmbB Postfach 10 60 78 28060 Bremen / DE | [N/P] |
Former [2008/40] | Eisenführ, Speiser & Partner Patentanwälte Rechtsanwälte Postfach 10 60 78 28060 Bremen / DE | ||
Former [2007/42] | Eisenführ, Speiser & Partner Patentanwälte Rechtsanwälte Postfach 10 60 78 28060 Bremen / DE | Application number, filing date | 06701421.7 | 23.01.2006 | [2007/42] | WO2006JP301376 | Priority number, date | JP20050015362 | 24.01.2005 Original published format: JP 2005015362 | [2007/42] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | WO2006078071 | Date: | 27.07.2006 | Language: | EN | [2006/30] | Type: | A2 Application without search report | No.: | EP1844495 | Date: | 17.10.2007 | Language: | EN | The application published by WIPO in one of the EPO official languages on 27.07.2006 takes the place of the publication of the European patent application. | [2007/42] | Type: | B1 Patent specification | No.: | EP1844495 | Date: | 27.07.2011 | Language: | EN | [2011/30] | Search report(s) | International search report - published on: | EP | 14.09.2006 | Classification | IPC: | H01L21/78, H01L21/68, H01L21/3065, H01L21/00, H01L21/308 | [2011/06] | CPC: |
H01L21/3065 (EP,US);
H01L21/30 (KR);
H01J37/32082 (EP,US);
H01L21/308 (EP,US);
H01L21/67069 (EP,US);
H01L21/6835 (EP,US);
H01L21/6836 (EP,US);
H01L21/78 (EP,KR,US);
H01L2221/68327 (EP,US);
|
Former IPC [2007/42] | H01L21/78, H01L21/68, H01L21/3065 | Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR [2007/42] | Extension states | AL | Not yet paid | BA | Not yet paid | HR | Not yet paid | MK | Not yet paid | YU | Not yet paid | Title | German: | HERSTELLUNGSVERFAHREN FÜR HALBLEITERCHIPS | [2011/06] | English: | MANUFACTURING METHOD FOR SEMICONDUCTOR CHIPS | [2011/06] | French: | PROCEDE DE PRODUCTION DES PUCES SEMI-CONDUCTRICES | [2011/06] |
Former [2007/42] | HERSTELLUNGSVERFAHREN FÜR HALBLEITERCHIPS UND HALBLEITERCHIP | ||
Former [2007/42] | MANUFACTURING METHOD FOR SEMICONDUCTOR CHIPS, AND SEMICONDUCTOR CHIP | ||
Former [2007/42] | PUCE SEMI-CONDUCTRICE ET SON PROCEDE DE PRODUCTION | Entry into regional phase | 24.08.2007 | National basic fee paid | 24.08.2007 | Designation fee(s) paid | 24.08.2007 | Examination fee paid | Examination procedure | 24.08.2007 | Examination requested [2007/42] | 02.04.2008 | Despatch of a communication from the examining division (Time limit: M04) | 13.08.2008 | Reply to a communication from the examining division | 26.08.2008 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time | 11.02.2011 | Communication of intention to grant the patent | 27.05.2011 | Fee for grant paid | 27.05.2011 | Fee for publishing/printing paid | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 02.04.2008 | Opposition(s) | 02.05.2012 | No opposition filed within time limit [2012/27] | Request for further processing for: | The application is deemed to be withdrawn due to failure to reply to the examination report | 13.08.2008 | Request for further processing filed | 13.08.2008 | Full payment received (date of receipt of payment) | Fees paid | Renewal fee | 31.01.2008 | Renewal fee patent year 03 | 19.03.2008 | Renewal fee patent year 04 | 01.02.2010 | Renewal fee patent year 05 | 31.01.2011 | Renewal fee patent year 06 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 23.01.2006 | AT | 27.07.2011 | BE | 27.07.2011 | CY | 27.07.2011 | CZ | 27.07.2011 | DK | 27.07.2011 | EE | 27.07.2011 | FI | 27.07.2011 | IT | 27.07.2011 | LT | 27.07.2011 | LV | 27.07.2011 | NL | 27.07.2011 | PL | 27.07.2011 | RO | 27.07.2011 | SE | 27.07.2011 | SI | 27.07.2011 | SK | 27.07.2011 | TR | 27.07.2011 | BG | 27.10.2011 | GR | 28.10.2011 | ES | 07.11.2011 | IS | 27.11.2011 | PT | 28.11.2011 | GB | 23.01.2012 | IE | 23.01.2012 | LU | 23.01.2012 | CH | 31.01.2012 | FR | 31.01.2012 | LI | 31.01.2012 | MC | 31.01.2012 | [2014/34] |
Former [2014/27] | AT | 27.07.2011 | |
BE | 27.07.2011 | ||
CY | 27.07.2011 | ||
CZ | 27.07.2011 | ||
DK | 27.07.2011 | ||
EE | 27.07.2011 | ||
FI | 27.07.2011 | ||
IT | 27.07.2011 | ||
LT | 27.07.2011 | ||
LV | 27.07.2011 | ||
NL | 27.07.2011 | ||
PL | 27.07.2011 | ||
RO | 27.07.2011 | ||
SE | 27.07.2011 | ||
SI | 27.07.2011 | ||
SK | 27.07.2011 | ||
TR | 27.07.2011 | ||
BG | 27.10.2011 | ||
GR | 28.10.2011 | ||
ES | 07.11.2011 | ||
IS | 27.11.2011 | ||
PT | 28.11.2011 | ||
GB | 23.01.2012 | ||
IE | 23.01.2012 | ||
LU | 23.01.2012 | ||
CH | 31.01.2012 | ||
FR | 31.01.2012 | ||
LI | 31.01.2012 | ||
MC | 31.01.2012 | ||
Former [2014/21] | AT | 27.07.2011 | |
BE | 27.07.2011 | ||
CY | 27.07.2011 | ||
CZ | 27.07.2011 | ||
DK | 27.07.2011 | ||
EE | 27.07.2011 | ||
FI | 27.07.2011 | ||
IT | 27.07.2011 | ||
LT | 27.07.2011 | ||
LV | 27.07.2011 | ||
NL | 27.07.2011 | ||
PL | 27.07.2011 | ||
RO | 27.07.2011 | ||
SE | 27.07.2011 | ||
SI | 27.07.2011 | ||
SK | 27.07.2011 | ||
TR | 27.07.2011 | ||
BG | 27.10.2011 | ||
GR | 28.10.2011 | ||
ES | 07.11.2011 | ||
IS | 27.11.2011 | ||
PT | 28.11.2011 | ||
GB | 23.01.2012 | ||
IE | 23.01.2012 | ||
CH | 31.01.2012 | ||
FR | 31.01.2012 | ||
LI | 31.01.2012 | ||
MC | 31.01.2012 | ||
Former [2013/29] | AT | 27.07.2011 | |
BE | 27.07.2011 | ||
CY | 27.07.2011 | ||
CZ | 27.07.2011 | ||
DK | 27.07.2011 | ||
EE | 27.07.2011 | ||
FI | 27.07.2011 | ||
IT | 27.07.2011 | ||
LT | 27.07.2011 | ||
LV | 27.07.2011 | ||
NL | 27.07.2011 | ||
PL | 27.07.2011 | ||
RO | 27.07.2011 | ||
SE | 27.07.2011 | ||
SI | 27.07.2011 | ||
SK | 27.07.2011 | ||
BG | 27.10.2011 | ||
GR | 28.10.2011 | ||
ES | 07.11.2011 | ||
IS | 27.11.2011 | ||
PT | 28.11.2011 | ||
GB | 23.01.2012 | ||
IE | 23.01.2012 | ||
CH | 31.01.2012 | ||
FR | 31.01.2012 | ||
LI | 31.01.2012 | ||
MC | 31.01.2012 | ||
Former [2013/22] | AT | 27.07.2011 | |
BE | 27.07.2011 | ||
CY | 27.07.2011 | ||
CZ | 27.07.2011 | ||
DK | 27.07.2011 | ||
EE | 27.07.2011 | ||
FI | 27.07.2011 | ||
IT | 27.07.2011 | ||
LT | 27.07.2011 | ||
LV | 27.07.2011 | ||
NL | 27.07.2011 | ||
PL | 27.07.2011 | ||
RO | 27.07.2011 | ||
SE | 27.07.2011 | ||
SI | 27.07.2011 | ||
SK | 27.07.2011 | ||
GR | 28.10.2011 | ||
ES | 07.11.2011 | ||
IS | 27.11.2011 | ||
PT | 28.11.2011 | ||
GB | 23.01.2012 | ||
IE | 23.01.2012 | ||
CH | 31.01.2012 | ||
FR | 31.01.2012 | ||
LI | 31.01.2012 | ||
MC | 31.01.2012 | ||
Former [2013/08] | AT | 27.07.2011 | |
BE | 27.07.2011 | ||
CY | 27.07.2011 | ||
CZ | 27.07.2011 | ||
DK | 27.07.2011 | ||
EE | 27.07.2011 | ||
FI | 27.07.2011 | ||
IT | 27.07.2011 | ||
LT | 27.07.2011 | ||
LV | 27.07.2011 | ||
NL | 27.07.2011 | ||
PL | 27.07.2011 | ||
RO | 27.07.2011 | ||
SE | 27.07.2011 | ||
SI | 27.07.2011 | ||
SK | 27.07.2011 | ||
GR | 28.10.2011 | ||
IS | 27.11.2011 | ||
PT | 28.11.2011 | ||
GB | 23.01.2012 | ||
IE | 23.01.2012 | ||
CH | 31.01.2012 | ||
FR | 31.01.2012 | ||
LI | 31.01.2012 | ||
MC | 31.01.2012 | ||
Former [2013/04] | AT | 27.07.2011 | |
BE | 27.07.2011 | ||
CY | 27.07.2011 | ||
CZ | 27.07.2011 | ||
DK | 27.07.2011 | ||
EE | 27.07.2011 | ||
FI | 27.07.2011 | ||
IT | 27.07.2011 | ||
LT | 27.07.2011 | ||
LV | 27.07.2011 | ||
NL | 27.07.2011 | ||
PL | 27.07.2011 | ||
RO | 27.07.2011 | ||
SE | 27.07.2011 | ||
SI | 27.07.2011 | ||
SK | 27.07.2011 | ||
GR | 28.10.2011 | ||
IS | 27.11.2011 | ||
PT | 28.11.2011 | ||
GB | 23.01.2012 | ||
CH | 31.01.2012 | ||
FR | 31.01.2012 | ||
LI | 31.01.2012 | ||
MC | 31.01.2012 | ||
Former [2012/49] | AT | 27.07.2011 | |
BE | 27.07.2011 | ||
CY | 27.07.2011 | ||
CZ | 27.07.2011 | ||
DK | 27.07.2011 | ||
EE | 27.07.2011 | ||
FI | 27.07.2011 | ||
IT | 27.07.2011 | ||
LT | 27.07.2011 | ||
LV | 27.07.2011 | ||
NL | 27.07.2011 | ||
PL | 27.07.2011 | ||
RO | 27.07.2011 | ||
SE | 27.07.2011 | ||
SI | 27.07.2011 | ||
SK | 27.07.2011 | ||
GR | 28.10.2011 | ||
IS | 27.11.2011 | ||
PT | 28.11.2011 | ||
GB | 23.01.2012 | ||
CH | 31.01.2012 | ||
LI | 31.01.2012 | ||
MC | 31.01.2012 | ||
Former [2012/46] | AT | 27.07.2011 | |
BE | 27.07.2011 | ||
CY | 27.07.2011 | ||
CZ | 27.07.2011 | ||
DK | 27.07.2011 | ||
EE | 27.07.2011 | ||
FI | 27.07.2011 | ||
IT | 27.07.2011 | ||
LT | 27.07.2011 | ||
LV | 27.07.2011 | ||
NL | 27.07.2011 | ||
PL | 27.07.2011 | ||
RO | 27.07.2011 | ||
SE | 27.07.2011 | ||
SI | 27.07.2011 | ||
SK | 27.07.2011 | ||
GR | 28.10.2011 | ||
IS | 27.11.2011 | ||
PT | 28.11.2011 | ||
GB | 23.01.2012 | ||
MC | 31.01.2012 | ||
Former [2012/37] | AT | 27.07.2011 | |
BE | 27.07.2011 | ||
CY | 27.07.2011 | ||
CZ | 27.07.2011 | ||
DK | 27.07.2011 | ||
EE | 27.07.2011 | ||
FI | 27.07.2011 | ||
IT | 27.07.2011 | ||
LT | 27.07.2011 | ||
LV | 27.07.2011 | ||
NL | 27.07.2011 | ||
PL | 27.07.2011 | ||
RO | 27.07.2011 | ||
SE | 27.07.2011 | ||
SI | 27.07.2011 | ||
SK | 27.07.2011 | ||
GR | 28.10.2011 | ||
IS | 27.11.2011 | ||
PT | 28.11.2011 | ||
MC | 31.01.2012 | ||
Former [2012/33] | AT | 27.07.2011 | |
BE | 27.07.2011 | ||
CY | 27.07.2011 | ||
CZ | 27.07.2011 | ||
DK | 27.07.2011 | ||
EE | 27.07.2011 | ||
FI | 27.07.2011 | ||
IT | 27.07.2011 | ||
LT | 27.07.2011 | ||
LV | 27.07.2011 | ||
NL | 27.07.2011 | ||
PL | 27.07.2011 | ||
RO | 27.07.2011 | ||
SE | 27.07.2011 | ||
SI | 27.07.2011 | ||
SK | 27.07.2011 | ||
GR | 28.10.2011 | ||
IS | 27.11.2011 | ||
PT | 28.11.2011 | ||
Former [2012/23] | AT | 27.07.2011 | |
BE | 27.07.2011 | ||
CY | 27.07.2011 | ||
CZ | 27.07.2011 | ||
EE | 27.07.2011 | ||
FI | 27.07.2011 | ||
IT | 27.07.2011 | ||
LT | 27.07.2011 | ||
LV | 27.07.2011 | ||
NL | 27.07.2011 | ||
PL | 27.07.2011 | ||
RO | 27.07.2011 | ||
SE | 27.07.2011 | ||
SI | 27.07.2011 | ||
SK | 27.07.2011 | ||
GR | 28.10.2011 | ||
IS | 27.11.2011 | ||
PT | 28.11.2011 | ||
Former [2012/21] | AT | 27.07.2011 | |
BE | 27.07.2011 | ||
CY | 27.07.2011 | ||
CZ | 27.07.2011 | ||
FI | 27.07.2011 | ||
LT | 27.07.2011 | ||
LV | 27.07.2011 | ||
NL | 27.07.2011 | ||
PL | 27.07.2011 | ||
SE | 27.07.2011 | ||
SI | 27.07.2011 | ||
GR | 28.10.2011 | ||
IS | 27.11.2011 | ||
PT | 28.11.2011 | ||
Former [2012/12] | AT | 27.07.2011 | |
BE | 27.07.2011 | ||
CY | 27.07.2011 | ||
FI | 27.07.2011 | ||
LT | 27.07.2011 | ||
LV | 27.07.2011 | ||
NL | 27.07.2011 | ||
PL | 27.07.2011 | ||
SE | 27.07.2011 | ||
SI | 27.07.2011 | ||
GR | 28.10.2011 | ||
IS | 27.11.2011 | ||
PT | 28.11.2011 | ||
Former [2012/11] | AT | 27.07.2011 | |
BE | 27.07.2011 | ||
FI | 27.07.2011 | ||
LT | 27.07.2011 | ||
LV | 27.07.2011 | ||
NL | 27.07.2011 | ||
PL | 27.07.2011 | ||
SE | 27.07.2011 | ||
SI | 27.07.2011 | ||
GR | 28.10.2011 | ||
IS | 27.11.2011 | ||
PT | 28.11.2011 | ||
Former [2012/10] | BE | 27.07.2011 | |
FI | 27.07.2011 | ||
LT | 27.07.2011 | ||
NL | 27.07.2011 | ||
SE | 27.07.2011 | ||
GR | 28.10.2011 | ||
IS | 27.11.2011 | ||
PT | 28.11.2011 | ||
Former [2012/09] | BE | 27.07.2011 | |
FI | 27.07.2011 | ||
LT | 27.07.2011 | ||
NL | 27.07.2011 | ||
IS | 27.11.2011 | ||
PT | 28.11.2011 | ||
Former [2012/08] | LT | 27.07.2011 | |
NL | 27.07.2011 | ||
IS | 27.11.2011 |