EP1872386 - DEVICE AND METHOD FOR APPLICATION OF AN EVEN THIN FLUID LAYER TO SUBSTRATES [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 22.07.2011 Database last updated on 29.06.2024 | Most recent event Tooltip | 04.10.2013 | Lapse of the patent in a contracting state New state(s): HU | published on 06.11.2013 [2013/45] | Applicant(s) | For all designated states Schmid Technology Systems GmbH Johann-Liesenberger-Strasse 7 78078 Niedereschach / DE | [2008/01] | Inventor(s) | 01 /
BUCHNER, Christian Ziegelhütte 17 69151 Neckargmünd / DE | 02 /
BRUNNER, Johann Birkenstrasse 3 75217 Birkenfeld / DE | 03 /
KALMBACH, Helmut Zollernstrasse 9 72250 Freudenstadt / DE | 04 /
GENTISCHER, Josef Schurwaldstrasse 1 71384 Weinstadt / DE | [2008/01] | Representative(s) | DREISS Patentanwälte PartG mbB Postfach 10 37 62 70032 Stuttgart / DE | [N/P] |
Former [2008/35] | Dreiss, Fuhlendorf, Steimle & Becker Patentanwälte Postfach 10 37 62 70032 Stuttgart / DE | ||
Former [2008/01] | Dreiss, Fuhlendorf, Steimle & Becker Patentanwälte Postfach 10 37 62 70032 Stuttgart / DE | Application number, filing date | 06707647.1 | 28.03.2006 | [2008/01] | WO2006EP02797 | Priority number, date | DE20051019686 | 22.04.2005 Original published format: DE102005019686 | [2008/01] | Filing language | DE | Procedural language | DE | Publication | Type: | A1 Application with search report | No.: | WO2006111247 | Date: | 26.10.2006 | Language: | DE | [2006/43] | Type: | A1 Application with search report | No.: | EP1872386 | Date: | 02.01.2008 | Language: | DE | The application published by WIPO in one of the EPO official languages on 26.10.2006 takes the place of the publication of the European patent application. | [2008/01] | Type: | B1 Patent specification | No.: | EP1872386 | Date: | 15.09.2010 | Language: | DE | [2010/37] | Search report(s) | International search report - published on: | EP | 26.10.2006 | Classification | IPC: | H01L21/00 | [2008/01] | CPC: |
B05B17/0615 (EP,US);
H01L31/18 (KR);
B05B14/00 (EP,US);
B05B7/0012 (EP,US);
H01L21/00 (KR);
H01L21/02 (KR);
H01L21/6715 (EP,US);
H01L21/67748 (EP,US);
H01L31/04 (KR);
H01L31/1804 (EP,US);
Y02E10/547 (EP,US);
Y02P70/10 (EP);
Y02P70/50 (EP,US)
(-)
| Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR [2008/01] | Extension states | AL | Not yet paid | BA | Not yet paid | HR | Not yet paid | MK | Not yet paid | YU | Not yet paid | Title | German: | EINRICHTUNG UND VERFAHREN ZUM AUFBRINGEN EINER GLEICHMÄSSIGEN, DÜNNEN FLÜSSIGKEITSSCHICHT AUF SUBSTRATE | [2008/01] | English: | DEVICE AND METHOD FOR APPLICATION OF AN EVEN THIN FLUID LAYER TO SUBSTRATES | [2008/01] | French: | DISPOSITIF ET PROCEDE POUR APPLIQUER UNE COUCHE DE LIQUIDE MINCE ET HOMOGENE SUR DES SUBSTRATS | [2010/18] |
Former [2008/01] | DISPOSITIF ET PROCEDE POUR APPLIQUER UNE MINCE COUCHE DE LIQUIDE HOMOGENE SUR DES SUBSTRATS | Entry into regional phase | 09.10.2007 | National basic fee paid | 09.10.2007 | Designation fee(s) paid | 09.10.2007 | Examination fee paid | Examination procedure | 09.10.2007 | Examination requested [2008/01] | 11.11.2009 | Despatch of a communication from the examining division (Time limit: M04) | 30.01.2010 | Reply to a communication from the examining division | 19.04.2010 | Communication of intention to grant the patent | 03.08.2010 | Fee for grant paid | 03.08.2010 | Fee for publishing/printing paid | Opposition(s) | 16.06.2011 | No opposition filed within time limit [2011/34] | Fees paid | Renewal fee | 09.10.2007 | Renewal fee patent year 03 | 25.03.2009 | Renewal fee patent year 04 | 09.03.2010 | Renewal fee patent year 05 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | CY | 15.09.2010 | CZ | 15.09.2010 | DK | 15.09.2010 | EE | 15.09.2010 | FI | 15.09.2010 | HU | 15.09.2010 | IE | 15.09.2010 | LT | 15.09.2010 | LV | 15.09.2010 | PL | 15.09.2010 | RO | 15.09.2010 | SE | 15.09.2010 | SI | 15.09.2010 | SK | 15.09.2010 | BG | 15.12.2010 | GR | 16.12.2010 | IS | 15.01.2011 | PT | 17.01.2011 | LU | 28.03.2011 | MC | 31.03.2011 | [2013/45] |
Former [2013/42] | CY | 15.09.2010 | |
CZ | 15.09.2010 | ||
DK | 15.09.2010 | ||
EE | 15.09.2010 | ||
FI | 15.09.2010 | ||
IE | 15.09.2010 | ||
LT | 15.09.2010 | ||
LV | 15.09.2010 | ||
PL | 15.09.2010 | ||
RO | 15.09.2010 | ||
SE | 15.09.2010 | ||
SI | 15.09.2010 | ||
SK | 15.09.2010 | ||
BG | 15.12.2010 | ||
GR | 16.12.2010 | ||
IS | 15.01.2011 | ||
PT | 17.01.2011 | ||
LU | 28.03.2011 | ||
MC | 31.03.2011 | ||
Former [2013/25] | CY | 15.09.2010 | |
CZ | 15.09.2010 | ||
DK | 15.09.2010 | ||
EE | 15.09.2010 | ||
FI | 15.09.2010 | ||
IE | 15.09.2010 | ||
LT | 15.09.2010 | ||
LV | 15.09.2010 | ||
PL | 15.09.2010 | ||
RO | 15.09.2010 | ||
SE | 15.09.2010 | ||
SI | 15.09.2010 | ||
SK | 15.09.2010 | ||
GR | 16.12.2010 | ||
IS | 15.01.2011 | ||
PT | 17.01.2011 | ||
LU | 28.03.2011 | ||
MC | 31.03.2011 | ||
Former [2011/49] | CY | 15.09.2010 | |
CZ | 15.09.2010 | ||
DK | 15.09.2010 | ||
EE | 15.09.2010 | ||
FI | 15.09.2010 | ||
IE | 15.09.2010 | ||
LT | 15.09.2010 | ||
LV | 15.09.2010 | ||
PL | 15.09.2010 | ||
RO | 15.09.2010 | ||
SE | 15.09.2010 | ||
SI | 15.09.2010 | ||
SK | 15.09.2010 | ||
GR | 16.12.2010 | ||
IS | 15.01.2011 | ||
PT | 17.01.2011 | ||
MC | 31.03.2011 | ||
Former [2011/40] | CY | 15.09.2010 | |
CZ | 15.09.2010 | ||
DK | 15.09.2010 | ||
EE | 15.09.2010 | ||
FI | 15.09.2010 | ||
IE | 15.09.2010 | ||
LT | 15.09.2010 | ||
LV | 15.09.2010 | ||
PL | 15.09.2010 | ||
RO | 15.09.2010 | ||
SE | 15.09.2010 | ||
SI | 15.09.2010 | ||
SK | 15.09.2010 | ||
GR | 16.12.2010 | ||
IS | 15.01.2011 | ||
PT | 17.01.2011 | ||
Former [2011/29] | CY | 15.09.2010 | |
CZ | 15.09.2010 | ||
EE | 15.09.2010 | ||
FI | 15.09.2010 | ||
IE | 15.09.2010 | ||
LT | 15.09.2010 | ||
LV | 15.09.2010 | ||
PL | 15.09.2010 | ||
RO | 15.09.2010 | ||
SE | 15.09.2010 | ||
SI | 15.09.2010 | ||
SK | 15.09.2010 | ||
GR | 16.12.2010 | ||
IS | 15.01.2011 | ||
PT | 17.01.2011 | ||
Former [2011/23] | CY | 15.09.2010 | |
CZ | 15.09.2010 | ||
EE | 15.09.2010 | ||
FI | 15.09.2010 | ||
IE | 15.09.2010 | ||
LT | 15.09.2010 | ||
LV | 15.09.2010 | ||
PL | 15.09.2010 | ||
SE | 15.09.2010 | ||
SI | 15.09.2010 | ||
SK | 15.09.2010 | ||
GR | 16.12.2010 | ||
IS | 15.01.2011 | ||
Former [2011/19] | CY | 15.09.2010 | |
FI | 15.09.2010 | ||
IE | 15.09.2010 | ||
LT | 15.09.2010 | ||
LV | 15.09.2010 | ||
PL | 15.09.2010 | ||
SE | 15.09.2010 | ||
SI | 15.09.2010 | ||
GR | 16.12.2010 | ||
Former [2011/17] | CY | 15.09.2010 | |
FI | 15.09.2010 | ||
LT | 15.09.2010 | ||
LV | 15.09.2010 | ||
PL | 15.09.2010 | ||
SE | 15.09.2010 | ||
SI | 15.09.2010 | ||
GR | 16.12.2010 | ||
Former [2011/09] | LT | 15.09.2010 | Cited in | International search | [A]WO9316812 (DYMAX CORP [US]) [A] 1-20 * abstract *; | [A]US2003039766 (BARNES MICHAEL [US], et al) [A] 1-20 * paragraph [0030] - paragraph [0031] * * paragraph [0044] - paragraph [0050]; figures 4,5 *; | [E]DE102005019686 (SCHMID TECHNOLOGY SYSTEMS GMBH [DE]) [E] 1-20* the whole document * |