EP1850372 - TEMPERATURE SETTING METHOD FOR HEAT TREATING PLATE, TEMPERATURE SETTING DEVICE FOR HEAT TREATING PLATE, PROGRAM AND COMPUTER-READABLE RECORDING MEDIUM FOR RECORDING THE PROGRAM [Right-click to bookmark this link] | |||
Former [2007/44] | TEMPERATURE SETTING METHOD FOR HEAT TREATING PLATE, TEMPERATURE SETTING DEVICE FOR HEAT TREATING PLATE, PROGRAM AND COMPUTER-READABLE RECORDING MEDIUM RECORDING PROGRAM | ||
[2011/41] | Status | The application is deemed to be withdrawn Status updated on 10.08.2012 Database last updated on 22.08.2024 | Most recent event Tooltip | 10.08.2012 | Application deemed to be withdrawn | published on 12.09.2012 [2012/37] | Applicant(s) | For all designated states TOKYO ELECTRON LIMITED 3-6 Akasaka 5-chome Minato-ku Tokyo 107-8481 / JP | [N/P] |
Former [2007/44] | For all designated states TOKYO ELECTRON LIMITED 3-6 Akasaka 5-chome Minato-ku Tokyo 107-8481 / JP | Inventor(s) | 01 /
JYOUSAKA, Megumi, c/o Tokyo Electron Kyushu Ltd. 1-1, Fukuhara Koshi-machi Kikuchi-gun Kumamoto 861-1116 / JP | 02 /
TOMITA, Hiroshi, c/o Tokyo Electron Kyushu Ltd. 1-1, Fukuhara Koshi-machi Kikuchi-gun Kumamoto 861-1116 / JP | 03 /
TADOKORO, Masahide, c/o Tokyo Electron Kyushu Ltd. 1-1, Fukuhara Koshi-machi Kikuchi-gun Kumamoto 861-1116 / JP | [2011/48] |
Former [2007/44] | 01 /
JYOUSAKA, Megumi c/o TOKYO ELECTRON KYUSHU LIMITED, 1-1, Fukuhara Koshi-machi, Kikuchi-gun, Kumamoto, 8611116 / JP | ||
02 /
TOMITA, Hiroshi c/o TOKYO ELECTRON KYUSHU LIMITED, 1-1, Fukuhara Koshi-machi, Kikuchi-gun, Kumamoto, 8611116 / JP | |||
03 /
TADOKORO, Masahide c/o TOKYO ELECTRON KYUSHU LIMITED, 1-1, Fukuhara Koshi-machi, Kikuchi-gun, Kumamoto, 8611116 / JP | Representative(s) | Hoffmann Eitle Patent- und Rechtsanwälte PartmbB Arabellastrasse 30 81925 München / DE | [N/P] |
Former [2008/31] | HOFFMANN EITLE Patent- und Rechtsanwälte Arabellastrasse 4 81925 München / DE | ||
Former [2007/44] | HOFFMANN EITLE Patent- und Rechtsanwälte Arabellastrasse 4 81925 München / DE | Application number, filing date | 06713303.3 | 08.02.2006 | [2007/44] | WO2006JP302160 | Priority number, date | JP20050037955 | 15.02.2005 Original published format: JP 2005037955 | [2007/44] | Filing language | JA | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2006087955 | Date: | 24.08.2006 | Language: | JA | [2006/34] | Type: | A1 Application with search report | No.: | EP1850372 | Date: | 31.10.2007 | Language: | EN | [2007/44] | Search report(s) | International search report - published on: | JP | 24.08.2006 | (Supplementary) European search report - dispatched on: | EP | 09.09.2010 | Classification | IPC: | H01L21/00, G03F7/38, H01L21/027 | [2010/41] | CPC: |
H01L21/67109 (EP,KR,US);
H01L21/67248 (EP,KR,US);
G03F7/38 (EP,KR,US);
H01L21/67103 (EP,KR,US);
H01L21/67178 (EP,KR,US);
H01L21/67184 (EP,KR,US);
|
Former IPC [2007/44] | H01L21/027, G03F7/38 | Designated contracting states | DE, FR, IT [2008/21] |
Former [2007/44] | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR | Extension states | AL | Not yet paid | BA | Not yet paid | HR | Not yet paid | MK | Not yet paid | YU | Not yet paid | Title | German: | TEMPERATUREINSTELLVERFAHREN FÜR EINE WÄRMEBEHANDLUNGSPLATTE, TEMPERATUREINSTELLVORRICHTUNG FÜR EINE WÄRMEBEHANDLUNGSPLATTE, PROGRAMM UND EIN DAS PROGRAMM AUFZEICHNENDES COMPUTERLESBARES AUFZEICHNUNGSMEDIUM | [2011/41] | English: | TEMPERATURE SETTING METHOD FOR HEAT TREATING PLATE, TEMPERATURE SETTING DEVICE FOR HEAT TREATING PLATE, PROGRAM AND COMPUTER-READABLE RECORDING MEDIUM FOR RECORDING THE PROGRAM | [2011/41] | French: | PROCEDE ET DISPOSITIF DE REGLAGE DE LA TEMPERATURE POUR PLAQUE DE TRAITEMENT THERMIQUE, PROGRAMME ET MOYEN D'ENREGISTREMENT DU PROGRAMME LISIBLE PAR L'ORDINATEUR | [2011/41] |
Former [2007/44] | TEMPERATUREINSTELLVERFAHREN FÜR EINE WÄRMEBEHANDLUNGSPLATTE, TEMPERATUREINSTELLEINRICHTUNG FÜR EINE WÄRMEBEHANDLUNGSPLATTE, PROGRAMM UND EIN DAS PROGRAMM AUFZEICHNENDES COMPUTERLESBARES AUFZEICHNUNGSMEDIUM | ||
Former [2007/44] | TEMPERATURE SETTING METHOD FOR HEAT TREATING PLATE, TEMPERATURE SETTING DEVICE FOR HEAT TREATING PLATE, PROGRAM AND COMPUTER-READABLE RECORDING MEDIUM RECORDING PROGRAM | ||
Former [2007/44] | PROCEDE ET DISPOSITIF DE REGLAGE DE LA TEMPERATURE POUR PLAQUE DE TRAITEMENT THERMIQUE, PROGRAMME ET PROGRAMME D'ENREGISTREMENT D'UN SUPPORT LISIBLE PAR LA MACHINE | Entry into regional phase | 10.08.2007 | Translation filed | 10.08.2007 | National basic fee paid | 10.08.2007 | Search fee paid | 10.08.2007 | Designation fee(s) paid | 10.08.2007 | Examination fee paid | Examination procedure | 10.08.2007 | Examination requested [2007/44] | 23.03.2011 | Amendment by applicant (claims and/or description) | 27.04.2011 | Despatch of a communication from the examining division (Time limit: M04) | 24.08.2011 | Reply to a communication from the examining division | 09.11.2011 | Communication of intention to grant the patent | 20.03.2012 | Application deemed to be withdrawn, date of legal effect [2012/37] | 25.04.2012 | Despatch of communication that the application is deemed to be withdrawn, reason: fee for grant / fee for printing not paid in time [2012/37] | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 27.04.2011 | Fees paid | Renewal fee | 21.02.2008 | Renewal fee patent year 03 | 27.03.2008 | Renewal fee patent year 04 | 23.02.2010 | Renewal fee patent year 05 | 23.02.2011 | Renewal fee patent year 06 | Penalty fee | Additional fee for renewal fee | 29.02.2012 | 07   M06   Not yet paid |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [X]US2003054642 (KAGOTANI HIROSHI [JP], et al) [X] 1-16* paragraph [0042] - paragraph [0092]; figures 1-16 *; | [X]EP1308783 (TOKYO ELECTRON LTD [JP]) [X] 1-16 * paragraph [0056] - paragraph [0061]; figures 12-16 * |