blank Quick help
blank Maintenance news

Scheduled maintenance

Regular maintenance outages:
between 05.00 and 05.15 hrs CET (Monday to Sunday).

Other outages
Availability
Register Forum

2022.02.11

More...
blank News flashes

News Flashes

New version of the European Patent Register – SPC proceedings information in the Unitary Patent Register.

2024-07-24

More...
blank Related links

Release notes
European Patent Register Assistant
European Patent Register Resource Book
European Patent Register – pocket guide
FAQ - European Patent Register
FAQ - Register Alert
Federated Register (Flyer)
Global Dossier (Flyer)
Register events
Deep link coverage
Federated Register content
The Patent Information Tour
Fair use charter

Extract from the Register of European Patents

EP About this file: EP1850372

EP1850372 - TEMPERATURE SETTING METHOD FOR HEAT TREATING PLATE, TEMPERATURE SETTING DEVICE FOR HEAT TREATING PLATE, PROGRAM AND COMPUTER-READABLE RECORDING MEDIUM FOR RECORDING THE PROGRAM [Right-click to bookmark this link]
Former [2007/44]TEMPERATURE SETTING METHOD FOR HEAT TREATING PLATE, TEMPERATURE SETTING DEVICE FOR HEAT TREATING PLATE, PROGRAM AND COMPUTER-READABLE RECORDING MEDIUM RECORDING PROGRAM
[2011/41]
StatusThe application is deemed to be withdrawn
Status updated on  10.08.2012
Database last updated on 22.08.2024
Most recent event   Tooltip10.08.2012Application deemed to be withdrawnpublished on 12.09.2012  [2012/37]
Applicant(s)For all designated states
TOKYO ELECTRON LIMITED
3-6 Akasaka 5-chome Minato-ku
Tokyo 107-8481 / JP
[N/P]
Former [2007/44]For all designated states
TOKYO ELECTRON LIMITED
3-6 Akasaka 5-chome Minato-ku
Tokyo 107-8481 / JP
Inventor(s)01 / JYOUSAKA, Megumi, c/o Tokyo Electron Kyushu Ltd.
1-1, Fukuhara
Koshi-machi
Kikuchi-gun
Kumamoto 861-1116 / JP
02 / TOMITA, Hiroshi, c/o Tokyo Electron Kyushu Ltd.
1-1, Fukuhara
Koshi-machi
Kikuchi-gun
Kumamoto 861-1116 / JP
03 / TADOKORO, Masahide, c/o Tokyo Electron Kyushu Ltd.
1-1, Fukuhara
Koshi-machi
Kikuchi-gun
Kumamoto 861-1116 / JP
 [2011/48]
Former [2007/44]01 / JYOUSAKA, Megumi
c/o TOKYO ELECTRON KYUSHU LIMITED, 1-1, Fukuhara
Koshi-machi, Kikuchi-gun, Kumamoto, 8611116 / JP
02 / TOMITA, Hiroshi
c/o TOKYO ELECTRON KYUSHU LIMITED, 1-1, Fukuhara
Koshi-machi, Kikuchi-gun, Kumamoto, 8611116 / JP
03 / TADOKORO, Masahide
c/o TOKYO ELECTRON KYUSHU LIMITED, 1-1, Fukuhara
Koshi-machi, Kikuchi-gun, Kumamoto, 8611116 / JP
Representative(s)Hoffmann Eitle
Patent- und Rechtsanwälte PartmbB
Arabellastrasse 30
81925 München / DE
[N/P]
Former [2008/31]HOFFMANN EITLE
Patent- und Rechtsanwälte Arabellastrasse 4
81925 München / DE
Former [2007/44]HOFFMANN EITLE
Patent- und Rechtsanwälte Arabellastrasse 4
81925 München / DE
Application number, filing date06713303.308.02.2006
[2007/44]
WO2006JP302160
Priority number, dateJP2005003795515.02.2005         Original published format: JP 2005037955
[2007/44]
Filing languageJA
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2006087955
Date:24.08.2006
Language:JA
[2006/34]
Type: A1 Application with search report 
No.:EP1850372
Date:31.10.2007
Language:EN
[2007/44]
Search report(s)International search report - published on:JP24.08.2006
(Supplementary) European search report - dispatched on:EP09.09.2010
ClassificationIPC:H01L21/00, G03F7/38, H01L21/027
[2010/41]
CPC:
H01L21/67109 (EP,KR,US); H01L21/67248 (EP,KR,US); G03F7/38 (EP,KR,US);
H01L21/67103 (EP,KR,US); H01L21/67178 (EP,KR,US); H01L21/67184 (EP,KR,US);
H01L21/67748 (EP,KR,US); H01L22/12 (KR) (-)
Former IPC [2007/44]H01L21/027, G03F7/38
Designated contracting statesDE,   FR,   IT [2008/21]
Former [2007/44]AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HU,  IE,  IS,  IT,  LI,  LT,  LU,  LV,  MC,  NL,  PL,  PT,  RO,  SE,  SI,  SK,  TR 
Extension statesALNot yet paid
BANot yet paid
HRNot yet paid
MKNot yet paid
YUNot yet paid
TitleGerman:TEMPERATUREINSTELLVERFAHREN FÜR EINE WÄRMEBEHANDLUNGSPLATTE, TEMPERATUREINSTELLVORRICHTUNG FÜR EINE WÄRMEBEHANDLUNGSPLATTE, PROGRAMM UND EIN DAS PROGRAMM AUFZEICHNENDES COMPUTERLESBARES AUFZEICHNUNGSMEDIUM[2011/41]
English:TEMPERATURE SETTING METHOD FOR HEAT TREATING PLATE, TEMPERATURE SETTING DEVICE FOR HEAT TREATING PLATE, PROGRAM AND COMPUTER-READABLE RECORDING MEDIUM FOR RECORDING THE PROGRAM[2011/41]
French:PROCEDE ET DISPOSITIF DE REGLAGE DE LA TEMPERATURE POUR PLAQUE DE TRAITEMENT THERMIQUE, PROGRAMME ET MOYEN D'ENREGISTREMENT DU PROGRAMME LISIBLE PAR L'ORDINATEUR[2011/41]
Former [2007/44]TEMPERATUREINSTELLVERFAHREN FÜR EINE WÄRMEBEHANDLUNGSPLATTE, TEMPERATUREINSTELLEINRICHTUNG FÜR EINE WÄRMEBEHANDLUNGSPLATTE, PROGRAMM UND EIN DAS PROGRAMM AUFZEICHNENDES COMPUTERLESBARES AUFZEICHNUNGSMEDIUM
Former [2007/44]TEMPERATURE SETTING METHOD FOR HEAT TREATING PLATE, TEMPERATURE SETTING DEVICE FOR HEAT TREATING PLATE, PROGRAM AND COMPUTER-READABLE RECORDING MEDIUM RECORDING PROGRAM
Former [2007/44]PROCEDE ET DISPOSITIF DE REGLAGE DE LA TEMPERATURE POUR PLAQUE DE TRAITEMENT THERMIQUE, PROGRAMME ET PROGRAMME D'ENREGISTREMENT D'UN SUPPORT LISIBLE PAR LA MACHINE
Entry into regional phase10.08.2007Translation filed 
10.08.2007National basic fee paid 
10.08.2007Search fee paid 
10.08.2007Designation fee(s) paid 
10.08.2007Examination fee paid 
Examination procedure10.08.2007Examination requested  [2007/44]
23.03.2011Amendment by applicant (claims and/or description)
27.04.2011Despatch of a communication from the examining division (Time limit: M04)
24.08.2011Reply to a communication from the examining division
09.11.2011Communication of intention to grant the patent
20.03.2012Application deemed to be withdrawn, date of legal effect  [2012/37]
25.04.2012Despatch of communication that the application is deemed to be withdrawn, reason: fee for grant / fee for printing not paid in time  [2012/37]
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  27.04.2011
Fees paidRenewal fee
21.02.2008Renewal fee patent year 03
27.03.2008Renewal fee patent year 04
23.02.2010Renewal fee patent year 05
23.02.2011Renewal fee patent year 06
Penalty fee
Additional fee for renewal fee
29.02.201207   M06   Not yet paid
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:Search[X]US2003054642  (KAGOTANI HIROSHI [JP], et al) [X] 1-16* paragraph [0042] - paragraph [0092]; figures 1-16 *;
 [X]EP1308783  (TOKYO ELECTRON LTD [JP]) [X] 1-16 * paragraph [0056] - paragraph [0061]; figures 12-16 *
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.