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Extract from the Register of European Patents

EP About this file: EP1876258

EP1876258 - SPUTTERING TARGET [Right-click to bookmark this link]
StatusThe application has been refused
Status updated on  01.05.2015
Database last updated on 31.08.2024
Most recent event   Tooltip01.05.2015Refusal of applicationpublished on 03.06.2015  [2015/23]
Applicant(s)For all designated states
JX Nippon Mining & Metals Corporation
6-3, Otemachi 2-chome Chiyoda-ku
Tokyo 100-8164 / JP
[2011/39]
Former [2008/02]For all designated states
Nippon Mining & Metals Co., Ltd.
10-1, Toranomon 2-chome Minato-ku Tokyo
105-0001 / JP
Inventor(s)01 / MIYASHITA, Hirohito Isohara Fac. of Nippon M&M Co.
187-4, Usuba, Hanakawa-cho, Kitaibaraki-shi
Ibaraki 3191535 / JP
 [2008/02]
Representative(s)Hoarton, Lloyd Douglas Charles, et al
Forresters IP LLP
Skygarden
Erika-Mann-Strasse 11
80636 München / DE
[N/P]
Former [2012/13]Hoarton, Lloyd Douglas Charles, et al
Forrester & Boehmert
SkyGarden
Erika-Mann-Strasse 11
80636 München / DE
Former [2008/44]Hoarton, Lloyd Douglas Charles
Forrester & Boehmert Pettenkoferstrasse 20-22
80336 Munich / DE
Former [2008/02]Hoarton, Lloyd Douglas Charles
Forrester & Boehmert Pettenkoferstrasse 20-22
80336 München / DE
Application number, filing date06730171.328.03.2006
[2008/02]
WO2006JP306223
Priority number, dateJP2005013222428.04.2005         Original published format: JP 2005132224
[2008/02]
Filing languageJA
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2006117949
Date:09.11.2006
Language:JA
[2006/45]
Type: A1 Application with search report 
No.:EP1876258
Date:09.01.2008
Language:EN
[2008/02]
Search report(s)International search report - published on:JP09.11.2006
(Supplementary) European search report - dispatched on:EP15.07.2008
ClassificationIPC:C23C14/34
[2008/02]
CPC:
C23C14/3414 (EP,KR,US); C22C1/02 (KR); C22C27/02 (KR);
C23C14/14 (KR); C23C14/54 (KR)
Designated contracting statesDE,   FR [2008/32]
Former [2008/02]AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HU,  IE,  IS,  IT,  LI,  LT,  LU,  LV,  MC,  NL,  PL,  PT,  RO,  SE,  SI,  SK,  TR 
Extension statesALNot yet paid
BANot yet paid
HRNot yet paid
MKNot yet paid
YUNot yet paid
TitleGerman:SPUTTERTARGET[2008/02]
English:SPUTTERING TARGET[2008/02]
French:CIBLE DE PULVERISATION[2008/02]
Entry into regional phase26.10.2007Translation filed 
26.10.2007National basic fee paid 
26.10.2007Search fee paid 
26.10.2007Designation fee(s) paid 
26.10.2007Examination fee paid 
Examination procedure25.09.2006Request for preliminary examination filed
International Preliminary Examining Authority: JP
26.10.2007Examination requested  [2008/02]
21.01.2009Despatch of a communication from the examining division (Time limit: M06)
21.05.2009Reply to a communication from the examining division
09.12.2011Despatch of a communication from the examining division (Time limit: M04)
13.04.2012Reply to a communication from the examining division
30.05.2013Date of oral proceedings
12.06.2013Despatch of communication that the application is refused, reason: substantive examination [2015/23]
12.06.2013Minutes of oral proceedings despatched
27.04.2015Application refused, date of legal effect [2015/23]
Appeal following examination01.08.2013Appeal received No.  T2252/13
18.10.2013Statement of grounds filed
27.04.2015Result of appeal procedure: appeal of the applicant withdrawn
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  21.01.2009
Fees paidRenewal fee
14.03.2008Renewal fee patent year 03
13.03.2009Renewal fee patent year 04
15.03.2010Renewal fee patent year 05
15.03.2011Renewal fee patent year 06
14.03.2012Renewal fee patent year 07
11.03.2013Renewal fee patent year 08
12.03.2014Renewal fee patent year 09
10.03.2015Renewal fee patent year 10
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Documents cited:Search[X]US2002026965  (MICHALUK CHRISTOPHER A [US], et al) [X] 1-5 * paragraph [0051] *;
 [X]  - WICKERSHAM CHARLES E ET AL, "Tantalum angular sputter emission distributions", COMPENDEX, ENGINEERING INFORMATION, INC., NEW YORK, NY, US, Database accession no. E2005179064023, XP002486593 [X] 1-5 * abstract *
    [ ] - JOM; JOM NOVEMBER 2004, (200411), vol. 56, no. 11, page 210
ExaminationWO03025238
    - JIANG A ET AL, "Investigation of the structure of beta-tantalum", THIN SOLID FILMS, ELSEVIER-SEQUOIA S.A. LAUSANNE, CH, (20030801), vol. 437, no. 1-2, doi:10.1016/S0040-6090(03)00702-8, ISSN 0040-6090, pages 116 - 122, XP004438583

DOI:   http://dx.doi.org/10.1016/S0040-6090(03)00702-8
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.