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EP1876495
European procedure
Extract from the Register of European Patents
EP Federated register: EP1876495
| COMPOSITION COMPRISING POLYMER HAVING ETHYLENE-DICARBONYL STRUCTURE FOR USE IN FORMING ANTI-REFLECTIVE COATING FOR LITHOGRAPHY | ||||
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Application No.EP06731784 |
Publication No.EP1876495 |
ApplicantNissan Chemical Industries, Ltd. |
IPC |
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Publication No. |
Proprietor | Invalidation date |
Not in force since |
Renewal fees last paid |
Record last updated |
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| Designated contracting states | DE FR GB IT NL | Extension states | AL BA HR MK YU |