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Extract from the Register of European Patents

EP About this file: EP1848552

EP1848552 - SPUTTERING TARGET AND METHOD OF FABRICATION [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  16.08.2013
Database last updated on 18.09.2024
Most recent event   Tooltip17.07.2015Lapse of the patent in a contracting state
New state(s): HU, LU		published on 19.08.2015  [2015/34]
Applicant(s)For all designated states
Global Advanced Metals, USA, Inc.
880 Winter Street
Waltham MA 02451 / US
[2012/46]
Former [2007/44]For all designated states
Cabot Corporation
2 Seaport Lane Suite 1300
Boston MA 02210-2019 / US
Inventor(s)01 / WICKERSHAM, Charles, E., Jr.
571 Arden Road
Columbus, OH 43214 / US
02 / LEVIT, Vladimir, I.
177 Woodsview Way
Hillard, OH 32026 / US
03 / ALEXANDER, P., Todd
856 Farragut Road
Berwyn, PA 19312 / US
 [2007/44]
Representative(s)Grünecker Patent- und Rechtsanwälte PartG mbB
Leopoldstrasse 4
80802 München / DE
[N/P]
Former [2012/41]Grünecker, Kinkeldey, Stockmair & Schwanhäusser
Leopoldstrasse 4
80802 München / DE
Former [2007/44]Grünecker, Kinkeldey, Stockmair & Schwanhäusser Anwaltssozietät
Maximilianstrasse 58
80538 München / DE
Application number, filing date06734440.807.02.2006
[2007/44]
WO2006US04143
Priority number, dateUS2005005553510.02.2005         Original published format: US 55535
[2007/44]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report
No.:WO2006086319
Date:17.08.2006
Language:EN
[2006/33]
Type: A2 Application without search report 
No.:EP1848552
Date:31.10.2007
Language:EN
The application published by WIPO in one of the EPO official languages on 17.08.2006 takes the place of the publication of the European patent application.
[2007/44]
Type: B1 Patent specification 
No.:EP1848552
Date:10.10.2012
Language:EN
[2012/41]
Search report(s)International search report - published on:EP28.12.2006
ClassificationIPC:B21B1/02, B21B1/38, C23C14/34
[2007/44]
CPC:
C22C27/02 (EP,US); B21B1/02 (EP,KR,US); B21B1/38 (KR);
B21H1/02 (EP,US); C22F1/18 (EP,US); C23C14/34 (KR);
C23C14/3414 (EP,US); Y10T428/12243 (EP,US) (-)
Designated contracting statesAT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   NL,   PL,   PT,   RO,   SE,   SI,   SK,   TR [2007/44]
TitleGerman:SPUTTERTARGET UND HERSTELLUNGSVERFAHREN DAFÜR[2007/44]
English:SPUTTERING TARGET AND METHOD OF FABRICATION[2007/44]
French:CIBLE DE PULVERISATION ET SON PROCEDE DE FABRICATION[2007/44]
Entry into regional phase29.08.2007National basic fee paid 
29.08.2007Designation fee(s) paid 
29.08.2007Examination fee paid 
Examination procedure29.08.2007Examination requested  [2007/44]
05.02.2009Despatch of a communication from the examining division (Time limit: M04)
12.06.2009Reply to a communication from the examining division
30.09.2010Despatch of a communication from the examining division (Time limit: M04)
09.02.2011Reply to a communication from the examining division
19.04.2012Communication of intention to grant the patent
29.08.2012Fee for grant paid
29.08.2012Fee for publishing/printing paid
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  05.02.2009
Opposition(s)11.07.2013No opposition filed within time limit [2013/38]
Fees paidRenewal fee
08.02.2008Renewal fee patent year 03
09.02.2009Renewal fee patent year 04
08.02.2010Renewal fee patent year 05
08.02.2011Renewal fee patent year 06
07.02.2012Renewal fee patent year 07
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU07.02.2006
BE10.10.2012
CY10.10.2012
CZ10.10.2012
DK10.10.2012
EE10.10.2012
FI10.10.2012
IT10.10.2012
LT10.10.2012
LV10.10.2012
NL10.10.2012
PL10.10.2012
RO10.10.2012
SE10.10.2012
SI10.10.2012
SK10.10.2012
TR10.10.2012
BG10.01.2013
GR11.01.2013
ES21.01.2013
GB07.02.2013
IE07.02.2013
LU07.02.2013
IS10.02.2013
PT11.02.2013
CH28.02.2013
FR28.02.2013
LI28.02.2013
MC28.02.2013
[2015/34]
Former [2015/32]BE10.10.2012
CY10.10.2012
CZ10.10.2012
DK10.10.2012
EE10.10.2012
FI10.10.2012
IT10.10.2012
LT10.10.2012
LV10.10.2012
NL10.10.2012
PL10.10.2012
RO10.10.2012
SE10.10.2012
SI10.10.2012
SK10.10.2012
TR10.10.2012
BG10.01.2013
GR11.01.2013
ES21.01.2013
GB07.02.2013
IE07.02.2013
IS10.02.2013
PT11.02.2013
CH28.02.2013
FR28.02.2013
LI28.02.2013
MC28.02.2013
Former [2014/09]BE10.10.2012
CY10.10.2012
CZ10.10.2012
DK10.10.2012
EE10.10.2012
FI10.10.2012
IT10.10.2012
LT10.10.2012
LV10.10.2012
NL10.10.2012
PL10.10.2012
RO10.10.2012
SE10.10.2012
SI10.10.2012
SK10.10.2012
BG10.01.2013
GR11.01.2013
ES21.01.2013
GB07.02.2013
IE07.02.2013
IS10.02.2013
PT11.02.2013
CH28.02.2013
FR28.02.2013
LI28.02.2013
MC28.02.2013
Former [2014/07]BE10.10.2012
CY10.10.2012
CZ10.10.2012
DK10.10.2012
EE10.10.2012
FI10.10.2012
IT10.10.2012
LT10.10.2012
LV10.10.2012
NL10.10.2012
PL10.10.2012
RO10.10.2012
SE10.10.2012
SI10.10.2012
SK10.10.2012
BG10.01.2013
GR11.01.2013
ES21.01.2013
IE07.02.2013
IS10.02.2013
PT11.02.2013
CH28.02.2013
FR28.02.2013
LI28.02.2013
MC28.02.2013
Former [2013/48]BE10.10.2012
CY10.10.2012
CZ10.10.2012
DK10.10.2012
EE10.10.2012
FI10.10.2012
IT10.10.2012
LT10.10.2012
LV10.10.2012
NL10.10.2012
PL10.10.2012
RO10.10.2012
SE10.10.2012
SI10.10.2012
SK10.10.2012
BG10.01.2013
GR11.01.2013
ES21.01.2013
IS10.02.2013
PT11.02.2013
CH28.02.2013
LI28.02.2013
MC28.02.2013
Former [2013/42]BE10.10.2012
CY10.10.2012
CZ10.10.2012
DK10.10.2012
EE10.10.2012
FI10.10.2012
IT10.10.2012
LT10.10.2012
LV10.10.2012
NL10.10.2012
PL10.10.2012
RO10.10.2012
SE10.10.2012
SI10.10.2012
SK10.10.2012
BG10.01.2013
GR11.01.2013
ES21.01.2013
IS10.02.2013
PT11.02.2013
MC28.02.2013
Former [2013/37]BE10.10.2012
CY10.10.2012
CZ10.10.2012
DK10.10.2012
EE10.10.2012
FI10.10.2012
IT10.10.2012
LT10.10.2012
LV10.10.2012
NL10.10.2012
PL10.10.2012
RO10.10.2012
SE10.10.2012
SI10.10.2012
SK10.10.2012
BG10.01.2013
GR11.01.2013
ES21.01.2013
IS10.02.2013
PT11.02.2013
Former [2013/35]BE10.10.2012
CY10.10.2012
CZ10.10.2012
DK10.10.2012
EE10.10.2012
FI10.10.2012
LT10.10.2012
LV10.10.2012
NL10.10.2012
PL10.10.2012
SE10.10.2012
SI10.10.2012
SK10.10.2012
BG10.01.2013
GR11.01.2013
ES21.01.2013
IS10.02.2013
PT11.02.2013
Former [2013/34]BE10.10.2012
CY10.10.2012
DK10.10.2012
FI10.10.2012
LT10.10.2012
LV10.10.2012
NL10.10.2012
PL10.10.2012
SE10.10.2012
SI10.10.2012
BG10.01.2013
GR11.01.2013
ES21.01.2013
IS10.02.2013
PT11.02.2013
Former [2013/28]BE10.10.2012
CY10.10.2012
FI10.10.2012
LT10.10.2012
LV10.10.2012
NL10.10.2012
PL10.10.2012
SE10.10.2012
SI10.10.2012
GR11.01.2013
ES21.01.2013
IS10.02.2013
PT11.02.2013
Former [2013/24]BE10.10.2012
CY10.10.2012
FI10.10.2012
LT10.10.2012
LV10.10.2012
NL10.10.2012
PL10.10.2012
SE10.10.2012
SI10.10.2012
GR11.01.2013
ES21.01.2013
IS10.02.2013
Former [2013/23]CY10.10.2012
FI10.10.2012
LT10.10.2012
LV10.10.2012
NL10.10.2012
PL10.10.2012
SE10.10.2012
SI10.10.2012
ES21.01.2013
IS10.02.2013
Former [2013/22]FI10.10.2012
LT10.10.2012
NL10.10.2012
SE10.10.2012
SI10.10.2012
ES21.01.2013
IS10.02.2013
Former [2013/21]LT10.10.2012
SE10.10.2012
SI10.10.2012
Former [2013/20]LT10.10.2012
SI10.10.2012
Former [2013/11]SI10.10.2012
Cited inInternational search[XY]DE645631  (KRONPRINZ A G FUER METALLINDUS) [X] 1,3,18,19,22-24,26,27 * page 1; figure 1; claims 1,4 * [Y] 2,4,5,7-9,14-17,25;
 [X]US6302977  (LIU YINSHI [US]) [X] 1,3,18,19,22-24,26,27 * figures 1,11; claims 1,6,7 *;
 [DX]US6348113  (MICHALUK CHRISTOPHER A [US], et al) [DX] 1,3,18,19,22-24,26,27* claims 1,6 *;
 [XY]WO0236847  (HONEYWELL INT INC [US]) [X] 1,24 * page 12, line 15 - line 21; figure 2 * [Y] 2,4,5,7-9,14-17,25;
 [X]WO0242513  (CABOT CORP [US]) [X] 1,3,18,19,22-24,26,27 * figures 4a,4b,5 *;
 [XY]WO02070765  (STARCK H C INC [US], et al) [X] 1,24 * figure 1 * [Y] 2,4,5,7-9,14-17,25;
 [DX]US2002153071  (SEGAL V M [US], et al) [DX] 1,3,18,19,22-24,26,27 * figures 2,3; claims 14,33 *;
 [X]WO2004111295  (CABOT CORP [US], et al) [X] 1,3,18,19,22-24,26,27 * figures 1A,1B,2-5; claims 1,8,9 *
by applicantDE645631
 US4884746
 US5615465
 US6193821
 US6238494
 US6348113
 US6348139
 US2002063056
 US2002112789
 US2002125128
 US6462339
 US2002153071
 US2003089429
 US20030089429
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.