EP1851589 - TOPCOAT MATERIALS FOR IMMERSION LITHOGRAPHY [Right-click to bookmark this link] | |||
Former [2007/45] | IMMERSION TOPCOAT MATERIALS WITH IMPROVED PERFORMANCE | ||
[2010/14] | Status | No opposition filed within time limit Status updated on 20.05.2011 Database last updated on 31.08.2024 | Most recent event Tooltip | 04.10.2013 | Lapse of the patent in a contracting state New state(s): HU | published on 06.11.2013 [2013/45] | Applicant(s) | For all designated states International Business Machines Corporation New Orchard Road Armonk, NY 10504 / US | [N/P] |
Former [2007/45] | For all designated states International Business Machines Corporation New Orchard Road Armonk, New York 10504 / US | Inventor(s) | 01 /
ALLEN, Robert, David 6186 Calle Del Conejo San Jose, California 95120 / US | 02 /
BROCK, Phillip, Joe 757 Carolina Avenue Sunnyvale, California 94085 / US | 03 /
GIL, Dario 28 Foxwood Drive, 6 Pleasantville, New York 10570 / US | 04 /
HINSBERG, William, Dinan 40635 Ladero Street Fremont, California 94539 / US | 05 /
LARSON, Carl, Eric 6513 Lovely Creek Court San Jose, California 95123 / US | 06 /
SUNDBERG, Linda, Karin 859 University Avenue, 3 Los Gatos, California 95032 / US | 07 /
WALLRAFF, Gregory, Michael 16925 Del Monte Avenue, 142 Morgan Hill, California 95037 / US | [2007/45] | Representative(s) | Burt, Roger James IBM United Kingdom Limited Intellectual Property Department Hursley Park Winchester Hampshire SO21 2JN / GB | [N/P] |
Former [2007/45] | Burt, Roger James IBM United Kingdom Limited, Intellectual Property Law, MP 110, Hursley Park, Hursley Winchester, Hampshire SO21 2JN / GB | Application number, filing date | 06735757.4 | 22.02.2006 | [2007/45] | WO2006US06225 | Priority number, date | US20050063940 | 23.02.2005 Original published format: US 63940 | [2007/45] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | WO2006091648 | Date: | 31.08.2006 | Language: | EN | [2006/35] | Type: | A2 Application without search report | No.: | EP1851589 | Date: | 07.11.2007 | Language: | EN | The application published by WIPO in one of the EPO official languages on 31.08.2006 takes the place of the publication of the European patent application. | [2007/45] | Type: | B1 Patent specification | No.: | EP1851589 | Date: | 14.07.2010 | Language: | EN | [2010/28] | Search report(s) | International search report - published on: | US | 22.11.2007 | (Supplementary) European search report - dispatched on: | EP | 20.07.2009 | Classification | IPC: | G03F7/11, G03F7/20 | [2010/14] | CPC: |
G03F7/11 (EP,US);
G03F7/2041 (EP,US);
G03F7/0046 (EP,US);
Y10S430/108 (EP,US);
Y10S430/111 (EP,US)
|
Former IPC [2008/04] | G03C1/00 | ||
Former IPC [2007/45] | G03C1/76 | Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR [2007/45] | Extension states | AL | Not yet paid | BA | Not yet paid | HR | Not yet paid | MK | Not yet paid | YU | Not yet paid | Title | German: | DECKSCHICHTMATERIALIEN FÜR DIE IMMERSION-LITHOGRAPHIE | [2010/14] | English: | TOPCOAT MATERIALS FOR IMMERSION LITHOGRAPHY | [2010/14] | French: | MATERIAUX POUR COUCHE DE PROTECTION EN LITHOGRAPHIE PAR IMMERSION | [2010/14] |
Former [2007/45] | TAUCHFÄHIGE DECKSCHICHTMATERIALIEN MIT VERBESSERTER LEISTUNG | ||
Former [2007/45] | IMMERSION TOPCOAT MATERIALS WITH IMPROVED PERFORMANCE | ||
Former [2007/45] | BAIN DE COUCHE DE FINITION A RENDEMENT ACCRU | Entry into regional phase | 06.09.2007 | National basic fee paid | 06.09.2007 | Search fee paid | 06.09.2007 | Designation fee(s) paid | 06.09.2007 | Examination fee paid | Examination procedure | 06.09.2007 | Examination requested [2007/45] | 24.08.2009 | Amendment by applicant (claims and/or description) | 22.03.2010 | Communication of intention to grant the patent | 19.05.2010 | Fee for grant paid | 19.05.2010 | Fee for publishing/printing paid | Opposition(s) | 15.04.2011 | No opposition filed within time limit [2011/25] | Fees paid | Renewal fee | 26.02.2008 | Renewal fee patent year 03 | 18.02.2009 | Renewal fee patent year 04 | 22.02.2010 | Renewal fee patent year 05 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | AT | 14.07.2010 | BE | 14.07.2010 | CY | 14.07.2010 | CZ | 14.07.2010 | DK | 14.07.2010 | EE | 14.07.2010 | FI | 14.07.2010 | HU | 14.07.2010 | IT | 14.07.2010 | LT | 14.07.2010 | LV | 14.07.2010 | NL | 14.07.2010 | PL | 14.07.2010 | RO | 14.07.2010 | SE | 14.07.2010 | SI | 14.07.2010 | SK | 14.07.2010 | TR | 14.07.2010 | BG | 14.10.2010 | GR | 15.10.2010 | ES | 25.10.2010 | IS | 14.11.2010 | PT | 15.11.2010 | IE | 22.02.2011 | LU | 22.02.2011 | CH | 28.02.2011 | LI | 28.02.2011 | MC | 28.02.2011 | [2013/45] |
Former [2013/44] | AT | 14.07.2010 | |
BE | 14.07.2010 | ||
CY | 14.07.2010 | ||
CZ | 14.07.2010 | ||
DK | 14.07.2010 | ||
EE | 14.07.2010 | ||
FI | 14.07.2010 | ||
IT | 14.07.2010 | ||
LT | 14.07.2010 | ||
LV | 14.07.2010 | ||
NL | 14.07.2010 | ||
PL | 14.07.2010 | ||
RO | 14.07.2010 | ||
SE | 14.07.2010 | ||
SI | 14.07.2010 | ||
SK | 14.07.2010 | ||
TR | 14.07.2010 | ||
BG | 14.10.2010 | ||
GR | 15.10.2010 | ||
ES | 25.10.2010 | ||
IS | 14.11.2010 | ||
PT | 15.11.2010 | ||
IE | 22.02.2011 | ||
LU | 22.02.2011 | ||
CH | 28.02.2011 | ||
LI | 28.02.2011 | ||
MC | 28.02.2011 | ||
Former [2013/25] | AT | 14.07.2010 | |
BE | 14.07.2010 | ||
CY | 14.07.2010 | ||
CZ | 14.07.2010 | ||
DK | 14.07.2010 | ||
EE | 14.07.2010 | ||
FI | 14.07.2010 | ||
IT | 14.07.2010 | ||
LT | 14.07.2010 | ||
LV | 14.07.2010 | ||
NL | 14.07.2010 | ||
PL | 14.07.2010 | ||
RO | 14.07.2010 | ||
SE | 14.07.2010 | ||
SI | 14.07.2010 | ||
SK | 14.07.2010 | ||
BG | 14.10.2010 | ||
GR | 15.10.2010 | ||
ES | 25.10.2010 | ||
IS | 14.11.2010 | ||
PT | 15.11.2010 | ||
IE | 22.02.2011 | ||
LU | 22.02.2011 | ||
CH | 28.02.2011 | ||
LI | 28.02.2011 | ||
MC | 28.02.2011 | ||
Former [2012/08] | AT | 14.07.2010 | |
BE | 14.07.2010 | ||
CY | 14.07.2010 | ||
CZ | 14.07.2010 | ||
DK | 14.07.2010 | ||
EE | 14.07.2010 | ||
FI | 14.07.2010 | ||
IT | 14.07.2010 | ||
LT | 14.07.2010 | ||
LV | 14.07.2010 | ||
NL | 14.07.2010 | ||
PL | 14.07.2010 | ||
RO | 14.07.2010 | ||
SE | 14.07.2010 | ||
SI | 14.07.2010 | ||
SK | 14.07.2010 | ||
BG | 14.10.2010 | ||
GR | 15.10.2010 | ||
ES | 25.10.2010 | ||
IS | 14.11.2010 | ||
PT | 15.11.2010 | ||
IE | 22.02.2011 | ||
CH | 28.02.2011 | ||
LI | 28.02.2011 | ||
MC | 28.02.2011 | ||
Former [2011/48] | AT | 14.07.2010 | |
BE | 14.07.2010 | ||
CY | 14.07.2010 | ||
CZ | 14.07.2010 | ||
DK | 14.07.2010 | ||
EE | 14.07.2010 | ||
FI | 14.07.2010 | ||
IT | 14.07.2010 | ||
LT | 14.07.2010 | ||
LV | 14.07.2010 | ||
NL | 14.07.2010 | ||
PL | 14.07.2010 | ||
RO | 14.07.2010 | ||
SE | 14.07.2010 | ||
SI | 14.07.2010 | ||
SK | 14.07.2010 | ||
BG | 14.10.2010 | ||
GR | 15.10.2010 | ||
ES | 25.10.2010 | ||
IS | 14.11.2010 | ||
PT | 15.11.2010 | ||
CH | 28.02.2011 | ||
LI | 28.02.2011 | ||
MC | 28.02.2011 | ||
Former [2011/45] | AT | 14.07.2010 | |
BE | 14.07.2010 | ||
CY | 14.07.2010 | ||
CZ | 14.07.2010 | ||
DK | 14.07.2010 | ||
EE | 14.07.2010 | ||
FI | 14.07.2010 | ||
IT | 14.07.2010 | ||
LT | 14.07.2010 | ||
LV | 14.07.2010 | ||
NL | 14.07.2010 | ||
PL | 14.07.2010 | ||
RO | 14.07.2010 | ||
SE | 14.07.2010 | ||
SI | 14.07.2010 | ||
SK | 14.07.2010 | ||
BG | 14.10.2010 | ||
GR | 15.10.2010 | ||
ES | 25.10.2010 | ||
IS | 14.11.2010 | ||
PT | 15.11.2010 | ||
MC | 28.02.2011 | ||
Former [2011/29] | AT | 14.07.2010 | |
BE | 14.07.2010 | ||
CY | 14.07.2010 | ||
CZ | 14.07.2010 | ||
DK | 14.07.2010 | ||
EE | 14.07.2010 | ||
FI | 14.07.2010 | ||
IT | 14.07.2010 | ||
LT | 14.07.2010 | ||
LV | 14.07.2010 | ||
NL | 14.07.2010 | ||
PL | 14.07.2010 | ||
RO | 14.07.2010 | ||
SE | 14.07.2010 | ||
SI | 14.07.2010 | ||
SK | 14.07.2010 | ||
BG | 14.10.2010 | ||
GR | 15.10.2010 | ||
ES | 25.10.2010 | ||
IS | 14.11.2010 | ||
PT | 15.11.2010 | ||
Former [2011/23] | AT | 14.07.2010 | |
BE | 14.07.2010 | ||
CY | 14.07.2010 | ||
CZ | 14.07.2010 | ||
DK | 14.07.2010 | ||
EE | 14.07.2010 | ||
FI | 14.07.2010 | ||
LT | 14.07.2010 | ||
LV | 14.07.2010 | ||
NL | 14.07.2010 | ||
PL | 14.07.2010 | ||
SE | 14.07.2010 | ||
SI | 14.07.2010 | ||
SK | 14.07.2010 | ||
BG | 14.10.2010 | ||
GR | 15.10.2010 | ||
IS | 14.11.2010 | ||
PT | 15.11.2010 | ||
Former [2011/19] | AT | 14.07.2010 | |
BE | 14.07.2010 | ||
CY | 14.07.2010 | ||
DK | 14.07.2010 | ||
FI | 14.07.2010 | ||
LT | 14.07.2010 | ||
LV | 14.07.2010 | ||
NL | 14.07.2010 | ||
PL | 14.07.2010 | ||
SE | 14.07.2010 | ||
SI | 14.07.2010 | ||
BG | 14.10.2010 | ||
GR | 15.10.2010 | ||
IS | 14.11.2010 | ||
PT | 15.11.2010 | ||
Former [2011/17] | AT | 14.07.2010 | |
BE | 14.07.2010 | ||
CY | 14.07.2010 | ||
FI | 14.07.2010 | ||
LT | 14.07.2010 | ||
LV | 14.07.2010 | ||
NL | 14.07.2010 | ||
PL | 14.07.2010 | ||
SE | 14.07.2010 | ||
SI | 14.07.2010 | ||
BG | 14.10.2010 | ||
GR | 15.10.2010 | ||
IS | 14.11.2010 | ||
PT | 15.11.2010 | ||
Former [2011/09] | AT | 14.07.2010 | |
LT | 14.07.2010 | ||
NL | 14.07.2010 | Documents cited: | Search | [X]JP2004083900 (CENTRAL GLASS CO LTD) [X] 1,2 * page 29; example 24; table 1 * * page 29, paragraph 140 ** page 27, paragraph 130 *; | [PX]EP1589377 (SHINETSU CHEMICAL CO [JP]) [PX] 1,2,7-10 * polymer 1; page 14, lines 45-55, paragraph 57 * * page 18, paragraph 63 * * claim 1 * * polymer 1; page 18; table 1 *; | [E]EP1720067 (CENTRAL GLASS CO LTD [JP]) [E] 1-4,6 * page 13, paragraph 56 * * page 20; example 14; table 3 * | International search | [X]US2004131965 (LEE GEUN SU [KR]); | [X]US2004248034 (HENDERSON CLIFFORD L [US], et al); | [X]US6861199 (LEE GEUN SU [KR]) | by applicant | US5240812 | US5595861 | US5744537 | US5879853 | US6057080 | US6274295 | - L. GEPPERT, "Chip Making's Wet New World", IEEE SPECTRUM, (200405), vol. 41, no. 5, pages 29 - 33 |