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Extract from the Register of European Patents

EP About this file: EP1899084

EP1899084 - METHOD AND DEVICE FOR CLEANING OR DRYING POT-LIKE HOLLOW BODIES, PARTICULARLY TRANSPORT CONTAINERS FOR SEMICONDUCTOR WAFERS [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  09.11.2018
Database last updated on 02.11.2024
FormerThe patent has been granted
Status updated on  01.12.2017
FormerGrant of patent is intended
Status updated on  10.07.2017
Most recent event   Tooltip05.06.2020Lapse of the patent in a contracting state
New state(s): HU, PT		published on 08.07.2020  [2020/28]
Applicant(s)For all designated states
Dynamic Microsystems Semiconductor Equipment GmbH
Im Wiesengrund 17
78315 Radolfzell / DE
[2018/01]
Former [2008/12]For all designated states
Dynamic Microsystems Semiconductor Equipment GmbH
Im Wiesengrund 17
78315 Radolfzell / DE
Inventor(s)01 / REBSTOCK, Lutz
Im Mühlgarten 2c
78343 Gaienhofen / DE
 [2008/22]
Former [2008/12]01 / REBSTOCK, Lutz
Im Möösle 14A
78343 Gaienhofen / DE
Representative(s)Dehns Germany Partnerschaft mbB
Postfach 33 04 29
80064 München / DE
[N/P]
Former [2018/01]m patent group
Postfach 33 04 29
80064 München / DE
Former [2008/12]Duhme, Torsten, et al
Witte, Weller & Partner Patentanwälte Postfach 10 54 62
70047 Stuttgart / DE
Application number, filing date06742677.525.04.2006
[2008/12]
WO2006EP03797
Priority number, dateDE2005103027521.06.2005         Original published format: DE102005030275
[2008/12]
Filing languageDE
Procedural languageDE
PublicationType: A1 Application with search report
No.:WO2006136224
Date:28.12.2006
Language:DE
[2006/52]
Type: A1 Application with search report 
No.:EP1899084
Date:19.03.2008
Language:DE
The application published by WIPO in one of the EPO official languages on 28.12.2006 takes the place of the publication of the European patent application.
[2008/12]
Type: B1 Patent specification 
No.:EP1899084
Date:03.01.2018
Language:DE
[2018/01]
Search report(s)International search report - published on:EP28.12.2006
ClassificationIPC:B08B9/08, H01L21/00
[2008/12]
CPC:
H01L21/67051 (EP); B08B9/0861 (EP)
Designated contracting statesAT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   NL,   PL,   PT,   RO,   SE,   SI,   SK,   TR [2018/01]
Former [2008/12]AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HU,  IE,  IS,  IT,  LI,  LT,  LU,  LV,  MC,  NL,  PL,  PT,  RO,  SE,  SI,  SK,  TR 
TitleGerman:VERFAHREN UND VORRICHTUNG ZUM REINIGEN ODER TROCKNEN VON TOPFARTIGEN HOHLKÖRPERN, INSBESONDERE VON TRANSPORTBEHÄLTERN FÜR HALBLEITERWAFER[2008/12]
English:METHOD AND DEVICE FOR CLEANING OR DRYING POT-LIKE HOLLOW BODIES, PARTICULARLY TRANSPORT CONTAINERS FOR SEMICONDUCTOR WAFERS[2008/12]
French:PROCEDE ET DISPOSITIF POUR NETTOYER OU SECHER DES ELEMENTS CREUX DE TYPE CREUSETS, NOTAMMENT POUR DES CONTENANTS DE TRANSPORT DE TRANCHES DE SEMI-CONDUCTEURS[2008/12]
Entry into regional phase15.01.2008National basic fee paid 
15.01.2008Designation fee(s) paid 
15.01.2008Examination fee paid 
Examination procedure15.01.2008Examination requested  [2008/12]
31.03.2011Despatch of a communication from the examining division (Time limit: M06)
26.01.2012Reply to a communication from the examining division
27.02.2015Despatch of a communication from the examining division (Time limit: M04)
26.10.2015Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time
04.01.2016Reply to a communication from the examining division
11.07.2017Communication of intention to grant the patent
21.11.2017Fee for grant paid
21.11.2017Fee for publishing/printing paid
21.11.2017Receipt of the translation of the claim(s)
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  31.03.2011
Opposition(s)05.10.2018No opposition filed within time limit [2018/50]
Request for further processing for:The application is deemed to be withdrawn due to failure to reply to the examination report
04.01.2016Request for further processing filed
04.01.2016Full payment received (date of receipt of payment)
Request granted
26.01.2016Decision despatched
The application is deemed to be withdrawn due to failure to reply to the examination report
26.01.2012Request for further processing filed
26.01.2012Full payment received (date of receipt of payment)
Request granted
10.02.2012Decision despatched
Fees paidRenewal fee
15.01.2008Renewal fee patent year 03
23.04.2009Renewal fee patent year 04
25.03.2010Renewal fee patent year 05
21.04.2011Renewal fee patent year 06
22.03.2012Renewal fee patent year 07
20.04.2013Renewal fee patent year 08
27.03.2014Renewal fee patent year 09
21.04.2015Renewal fee patent year 10
19.02.2016Renewal fee patent year 11
28.04.2017Renewal fee patent year 12
Opt-out from the exclusive  Tooltip
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Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU25.04.2006
CY03.01.2018
CZ03.01.2018
DK03.01.2018
EE03.01.2018
ES03.01.2018
FI03.01.2018
IT03.01.2018
LT03.01.2018
LV03.01.2018
MC03.01.2018
NL03.01.2018
PL03.01.2018
PT03.01.2018
RO03.01.2018
SE03.01.2018
SI03.01.2018
SK03.01.2018
TR03.01.2018
BG03.04.2018
GR04.04.2018
AT25.04.2018
GB25.04.2018
IE25.04.2018
LU25.04.2018
BE30.04.2018
CH30.04.2018
FR30.04.2018
LI30.04.2018
IS03.05.2018
[2020/27]
Former [2020/16]CY03.01.2018
CZ03.01.2018
DK03.01.2018
EE03.01.2018
ES03.01.2018
FI03.01.2018
IT03.01.2018
LT03.01.2018
LV03.01.2018
MC03.01.2018
NL03.01.2018
PL03.01.2018
RO03.01.2018
SE03.01.2018
SI03.01.2018
SK03.01.2018
TR03.01.2018
BG03.04.2018
GR04.04.2018
AT25.04.2018
GB25.04.2018
IE25.04.2018
LU25.04.2018
BE30.04.2018
CH30.04.2018
FR30.04.2018
LI30.04.2018
IS03.05.2018
Former [2019/46]CY03.01.2018
CZ03.01.2018
DK03.01.2018
EE03.01.2018
ES03.01.2018
FI03.01.2018
IT03.01.2018
LT03.01.2018
LV03.01.2018
MC03.01.2018
NL03.01.2018
PL03.01.2018
RO03.01.2018
SE03.01.2018
SI03.01.2018
SK03.01.2018
BG03.04.2018
GR04.04.2018
AT25.04.2018
GB25.04.2018
IE25.04.2018
LU25.04.2018
BE30.04.2018
CH30.04.2018
FR30.04.2018
LI30.04.2018
IS03.05.2018
Former [2019/23]CY03.01.2018
CZ03.01.2018
DK03.01.2018
EE03.01.2018
ES03.01.2018
FI03.01.2018
IT03.01.2018
LT03.01.2018
LV03.01.2018
MC03.01.2018
NL03.01.2018
PL03.01.2018
RO03.01.2018
SE03.01.2018
SI03.01.2018
SK03.01.2018
BG03.04.2018
GR04.04.2018
GB25.04.2018
IE25.04.2018
LU25.04.2018
BE30.04.2018
CH30.04.2018
FR30.04.2018
LI30.04.2018
IS03.05.2018
Former [2019/19]CY03.01.2018
CZ03.01.2018
DK03.01.2018
EE03.01.2018
ES03.01.2018
FI03.01.2018
IT03.01.2018
LT03.01.2018
LV03.01.2018
MC03.01.2018
NL03.01.2018
PL03.01.2018
RO03.01.2018
SE03.01.2018
SI03.01.2018
SK03.01.2018
BG03.04.2018
GR04.04.2018
GB25.04.2018
IE25.04.2018
LU25.04.2018
BE30.04.2018
CH30.04.2018
LI30.04.2018
IS03.05.2018
Former [2019/12]CY03.01.2018
CZ03.01.2018
DK03.01.2018
EE03.01.2018
ES03.01.2018
FI03.01.2018
IT03.01.2018
LT03.01.2018
LV03.01.2018
MC03.01.2018
NL03.01.2018
PL03.01.2018
RO03.01.2018
SE03.01.2018
SI03.01.2018
SK03.01.2018
BG03.04.2018
GR04.04.2018
GB25.04.2018
LU25.04.2018
BE30.04.2018
CH30.04.2018
LI30.04.2018
IS03.05.2018
Former [2019/08]CY03.01.2018
CZ03.01.2018
DK03.01.2018
EE03.01.2018
ES03.01.2018
FI03.01.2018
IT03.01.2018
LT03.01.2018
LV03.01.2018
MC03.01.2018
NL03.01.2018
PL03.01.2018
RO03.01.2018
SE03.01.2018
SK03.01.2018
BG03.04.2018
GR04.04.2018
LU25.04.2018
IS03.05.2018
Former [2018/52]CY03.01.2018
CZ03.01.2018
DK03.01.2018
EE03.01.2018
ES03.01.2018
FI03.01.2018
IT03.01.2018
LT03.01.2018
LV03.01.2018
MC03.01.2018
NL03.01.2018
PL03.01.2018
RO03.01.2018
SE03.01.2018
SK03.01.2018
BG03.04.2018
GR04.04.2018
IS03.05.2018
Former [2018/51]CY03.01.2018
CZ03.01.2018
DK03.01.2018
EE03.01.2018
ES03.01.2018
FI03.01.2018
IT03.01.2018
LT03.01.2018
LV03.01.2018
NL03.01.2018
PL03.01.2018
RO03.01.2018
SE03.01.2018
SK03.01.2018
BG03.04.2018
GR04.04.2018
IS03.05.2018
Former [2018/50]CY03.01.2018
CZ03.01.2018
EE03.01.2018
ES03.01.2018
FI03.01.2018
IT03.01.2018
LT03.01.2018
LV03.01.2018
NL03.01.2018
PL03.01.2018
RO03.01.2018
SE03.01.2018
SK03.01.2018
BG03.04.2018
GR04.04.2018
IS03.05.2018
Former [2018/47]CY03.01.2018
ES03.01.2018
FI03.01.2018
IT03.01.2018
LT03.01.2018
LV03.01.2018
NL03.01.2018
PL03.01.2018
SE03.01.2018
BG03.04.2018
GR04.04.2018
IS03.05.2018
Former [2018/40]CY03.01.2018
ES03.01.2018
FI03.01.2018
LT03.01.2018
LV03.01.2018
NL03.01.2018
PL03.01.2018
SE03.01.2018
BG03.04.2018
GR04.04.2018
IS03.05.2018
Former [2018/39]CY03.01.2018
ES03.01.2018
FI03.01.2018
LT03.01.2018
LV03.01.2018
NL03.01.2018
PL03.01.2018
SE03.01.2018
GR04.04.2018
IS03.05.2018
Former [2018/38]CY03.01.2018
ES03.01.2018
FI03.01.2018
LT03.01.2018
NL03.01.2018
PL03.01.2018
GR04.04.2018
IS03.05.2018
Former [2018/37]CY03.01.2018
ES03.01.2018
FI03.01.2018
LT03.01.2018
NL03.01.2018
PL03.01.2018
GR04.04.2018
Former [2018/36]CY03.01.2018
ES03.01.2018
FI03.01.2018
LT03.01.2018
NL03.01.2018
PL03.01.2018
Former [2018/35]CY03.01.2018
FI03.01.2018
LT03.01.2018
NL03.01.2018
Former [2018/34]FI03.01.2018
LT03.01.2018
NL03.01.2018
Cited inInternational search[XA]JPH11283954  ;
 [XA]US5238503  (PHENIX ROBERT B [US], et al) [X] 1-7,10-12,16,17 * abstract * * column 3, line 25 - column 4, line 20 * * column 7, line 36 - column 9, line 54 * * column 13, line 20 - column 15, line 30 * [A] 8,9,13-15,18
 [XA]  - PATENT ABSTRACTS OF JAPAN, (20000131), vol. 2000, no. 01, & JP11283954 A 19991015 (DAINIPPON SCREEN MFG CO LTD) [X] 1,6-10,12,16-18 * abstract * [A] 2-5,11,13-15
by applicantUS5238503
 WO2005001888
 WO0217355
 JPH11283954
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.