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EP1867015

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Extract from the Register of European Patents

EP About this file: EP1867015

EP1867015 - 6 KHz AND ABOVE GAS DISCHARGE LASER SYSTEM [Right-click to bookmark this link]
Status	No opposition filed within time limit Status updated on 27.09.2013 Database last updated on 07.10.2024
Most recent event Tooltip	27.09.2013	No opposition filed within time limit	published on 30.10.2013 [2013/44]
Applicant(s)	For all designated states Cymer, Inc. 17075 Thornmint Court San Diego, CA 92127 / US
	[2007/51]
Inventor(s)	01 / UJAZDOWSKI, Richard C. 14540 Twin Peaks Road Poway, CA 92064 / US
	02 / NESS, Richard M. 9248 Citrus View Court San Diego, CA 92126 / US
	03 / ALGOTS, J. Martin 11015 Scripps Ranch Blvd. San Diego, California 92131 / US
	04 / FLEUROV, Vladimir B. 20856 Viento Vialle Esondido, CA 92025 / US
	05 / PALENSCHAT, Frederick A. 13702 Shoal Summit Drive San Diego, CA 92128 / US
	06 / GILLESPIE, Walter D. 13004 Pomerad Way Poway, CA 92064 / US
	07 / MOOSMAN, Bryan G. 1557 Archer Road San Marcos, CA 92078 / US
	08 / STEIGER, Thomas D. 12080 Tivoli Park Row, 8 San Diego, CA 92128 / US
	09 / SMITH, Brett D. 23787 Aspen Drive Murrieta, CA 92562 / US
	10 / MCKELVY, Thomas E. 24527 Del Amo Road Ramona, CA 92065 / US
	[2008/16]
Former [2007/51]	01 / UJAZDOWSKI, Richard C. 14540 Twin Peaks Road Poway, CA 92064 / US
	02 / NESS, Richard M. 9248 Citrus View Court San Diego, CA 92126 / US
	03 / ALGOTS, J. Martin 11015 Scripps Ranch Blvd. San Diego, California 92131 / US
	04 / FLEUROV, Vladimir B. 20856 Viento Vialle Esondido, CA 92025 / US
	05 / PALENSCHAT, Frederick A. 14966 Avenida Venusto, 76 San Diego, CA 92128 / US
	06 / GILLESPIE, Walter D. 13004 Pomerad Way Poway, CA 92064 / US
	07 / MOOSMAN, Bryan G. 1557 Archer Road San Marcos, CA 92078 / US
	08 / STEIGER, Thomas D. 12080 Tivoli Park Row, 8 San Diego, CA 92128 / US
	09 / SMITH, Brett D. 23787 Aspen Drive Murrieta, CA 92562 / US
	10 / MCKELVY, Thomas E. 24527 Del Amo Road Ramona, CA 92065 / US
Representative(s)	Grünecker Patent- und Rechtsanwälte PartG mbB Leopoldstrasse 4 80802 München / DE
	[N/P]
Former [2012/47]	Grünecker, Kinkeldey, Stockmair & Schwanhäusser Leopoldstrasse 4 80802 München / DE
Former [2008/23]	Grünecker, Kinkeldey, Stockmair & Schwanhäusser Anwaltssozietät Leopoldstrasse 4 80802 München / DE
Former [2007/51]	Grünecker, Kinkeldey, Stockmair & Schwanhäusser Anwaltssozietät Maximilianstrasse 58 D-80538 München / DE
Application number, filing date	06748829.6	27.03.2006
	[2007/51]
	WO2006US11339
Priority number, date	US20050095976	31.03.2005 Original published format: US 95976
	[2007/51]
Filing language	EN
Procedural language	EN
Publication	Type:	A2 Application without search report
	No.:	WO2006105119
	Date:	05.10.2006
	Language:	EN
	[2006/40]
	Type:	A2 Application without search report
	No.:	EP1867015
	Date:	19.12.2007
	Language:	EN
	The application published by WIPO in one of the EPO official languages on 05.10.2006 takes the place of the publication of the European patent application.
	[2007/51]
	Type:	B1 Patent specification
	No.:	EP1867015
	Date:	21.11.2012
	Language:	EN
	[2012/47]
Search report(s)	International search report - published on:	US	16.10.2008
	(Supplementary) European search report - dispatched on:	EP	06.10.2010
Classification	IPC:	H01F27/08, H01S3/03, H01S3/08, H01S3/22, H01F27/22, H01F38/02, H05K7/20, H01S3/036, H01S3/041, H01F3/10, H01F38/10, // H01S3/225, H01S3/04, H01S3/23	[2012/19]
	CPC:	H01S3/036 (EP,US); H01S3/041 (EP,KR,US); H01F27/22 (EP,US); H01F3/10 (EP,US); H01F38/10 (EP,US); H01F27/266 (EP,US); (+) H01S3/0404 (EP,US); H01S3/097 (EP,US); H01S3/09702 (EP,US); H01S3/225 (EP,US); H01S3/2308 (EP,US) (-)
	Former IPC [2010/44]	H01F27/08, H01S3/03, H01S3/08, H01S3/22, H01F27/22, H01F38/02, H05K7/20, // H01S3/225, H01S3/04, H01S3/23
	Former IPC [2009/02]	H01F27/08, H01S3/03, H01S3/08, H01S3/22
	Former IPC [2007/51]	H01S3/22, H01S3/223
Designated contracting states	DE, FR, NL [2008/28]
Former [2007/51]	AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR
Title	German:	GASENTLADUNGSLASERSYSTEM MIT 6 KHz UND MEHR	[2012/25]
	English:	6 KHz AND ABOVE GAS DISCHARGE LASER SYSTEM	[2007/51]
	French:	SYSTEME LASER A DECHARGE DE GAZ A 6 KHz ET PLUS	[2012/25]
	Former [2007/51]	GASENTLADUNGSLASERSYSTEM MIT 6 KHZ UND MEHR
	Former [2007/51]	SYSTEME LASER A DECHARGE DE GAZ A 6 KHZ ET PLUS
Entry into regional phase	17.10.2007	National basic fee paid
	17.10.2007	Search fee paid
	17.10.2007	Designation fee(s) paid
	17.10.2007	Examination fee paid
Examination procedure	17.10.2007	Examination requested [2007/51]
	04.05.2011	Amendment by applicant (claims and/or description)
	09.03.2012	Despatch of a communication from the examining division (Time limit: M02)
	15.03.2012	Reply to a communication from the examining division
	31.05.2012	Communication of intention to grant the patent
	09.10.2012	Fee for grant paid
	09.10.2012	Fee for publishing/printing paid
Divisional application(s)	The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 09.03.2012
Opposition(s)	22.08.2013	No opposition filed within time limit [2013/44]
Fees paid	Renewal fee
	27.03.2008	Renewal fee patent year 03
	26.03.2009	Renewal fee patent year 04
	25.03.2010	Renewal fee patent year 05
	29.03.2011	Renewal fee patent year 06
	26.03.2012	Renewal fee patent year 07
Opt-out from the exclusive Tooltip competence of the Unified Patent Court	See the Register of the Unified Patent Court for opt-out data
	Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:	Search	[Y]JPH05327251 (SONY CORP) [Y] 1-8 * abstract *;
		[Y]US6198761 (VON BERGMANN HUBERTUS [ZA], et al) [Y] 1-8 * column 3, line 50 - column 4, line 63; figures 1,3 * * column 6, line 50 - line 63 *;
		[A]US2001019923 (MOLL ROGER [FR], et al) [A] 1-8* column 3 - column 4; figures 1-4 *;
		[Y]US6404637 (HUTCHISON RANDALL D [US], et al) [Y] 1-8 * column 4, line 20 - line 30; figure 2 *;
		[A]US6442181 (OLIVER I ROGER [US], et al) [A] 1-8 * figures 8A-15 *;
		[Y]DE10206271 (CONTI TEMIC MICROELECTRONIC [DE]) [Y] 1-8 * paragraph [0020]; figure 1 *;
		[YD]US2004264521 (NESS RICHARD M [US], et al) [YD] 1-8 * paragraph [0033] - paragraph [0035]; figures 2-5 *
	International search	[Y]US6198761 (VON BERGMANN HUBERTUS [ZA], et al);
		[Y]US6404637 (HUTCHISON RANDALL D [US], et al);
		[Y]US6426488 (SCHIELKE TASSO [DE]);
		[Y]US5448580 (BIRX DANIEL L [US], et al);
		[Y]US5730016 (ZITTEL GUNTER H [US]);
		[Y]US5153892 (KAWAKUBO YUKIO [JP], et al);
		[Y]US2003142714 (YAMASHITA TOSHIO [JP], et al);
		[X]US4686680 (HOAG ETHAN [US], et al);
		[Y]US3638137 (KRUPKE WILLIAM F)
		[Y] - MULTI-CONTACT AG BASEL CH, "The Multilam Principle", MULTILAM TECHNOLOGY, MC-DTP, (200206), XP008144662

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