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EP1902464
European procedure
Extract from the Register of European Patents
EP About this file: EP1902464
| EP1902464 - DEVICE FOR STORING SUBSTRATES [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 17.04.2020 Database last updated on 15.11.2024 | |
| Former | The patent has been granted Status updated on 10.05.2019 | ||
| Former | Grant of patent is intended Status updated on 06.01.2019 | ||
| Former | Examination is in progress Status updated on 13.04.2018 | Most recent event Tooltip | 31.07.2020 | Lapse of the patent in a contracting state New state(s): FR | published on 02.09.2020 [2020/36] | Applicant(s) | For all designated states Murata Machinery, Ltd. 3, Minami Ochiai-cho Kisshoin Minami-ku Kyoto-shi Kyoto 601-8326 / JP | [2019/08] |
| Former [2018/52] | For all designated states Brooks CCS RS AG Lohstampfestrasse 11 8274 Tägerwilen / CH | ||
| Former [2008/13] | For all designated states Tec-Sem AG Lohstampfestrasse 11 8274 Tägerwilen / CH | Inventor(s) | 01 /
JAEGER, Erich Dachsweg 13 CH-8500 Frauenfeld / CH | 02 /
BALG, Christian Palmenweg 9 CH-8274 Tägerwilen / CH | [2008/13] | Representative(s) | Weickmann & Weickmann PartmbB Postfach 860 820 81635 München / DE | [2019/24] |
| Former [2008/13] | Klein, Friedrich Jürgen, et al Patentanwälte Klein & Klein Grienbachstrasse 11 6300 Zug / CH | Application number, filing date | 06752907.3 | 06.07.2006 | [2008/13] | WO2006CH00356 | Priority number, date | CH20050001150 | 09.07.2005 Original published format: CH 11502005 | [2008/13] | Filing language | DE | Procedural language | DE | Publication | Type: | A2 Application without search report | No.: | WO2007006166 | Date: | 18.01.2007 | Language: | DE | [2007/03] | Type: | A2 Application without search report | No.: | EP1902464 | Date: | 26.03.2008 | Language: | DE | The application published by WIPO in one of the EPO official languages on 18.01.2007 takes the place of the publication of the European patent application. | [2008/13] | Type: | B1 Patent specification | No.: | EP1902464 | Date: | 12.06.2019 | Language: | DE | [2019/24] | Search report(s) | International search report - published on: | EP | 29.03.2007 | Classification | IPC: | H01L21/67, H01L21/673, H01L21/677 | [2019/03] | CPC: |
H01L21/67346 (EP,KR,US);
H01L21/67265 (EP,KR,US);
H01L21/67309 (KR);
H01L21/67389 (KR);
H01L21/67769 (EP,KR,US)
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| Former IPC [2008/13] | H01L21/673, H01L21/677, H01L21/00 | Designated contracting states | CH, DE, FR, LI [2019/24] |
| Former [2008/33] | CH, DE, FR, LI | ||
| Former [2008/13] | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR | Extension states | RS | Not yet paid | Title | German: | VORRICHTUNG ZUR LAGERUNG VON SUBSTRATEN | [2008/13] | English: | DEVICE FOR STORING SUBSTRATES | [2008/13] | French: | DISPOSITIF POUR STOCKER DES SUPPORTS | [2008/13] | Entry into regional phase | 01.02.2008 | National basic fee paid | 01.02.2008 | Designation fee(s) paid | 01.02.2008 | Examination fee paid | Examination procedure | 01.02.2008 | Examination requested [2008/13] | 11.02.2008 | Loss of particular rights, legal effect: designated state(s) | 18.03.2008 | Despatch of communication of loss of particular rights: designated state(s) AT, BE, BG, CY, CZ, DK, EE, ES, FI, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR | 21.11.2008 | Despatch of a communication from the examining division (Time limit: M06) | 21.05.2009 | Reply to a communication from the examining division | 05.04.2018 | Despatch of a communication from the examining division (Time limit: M04) | 19.09.2018 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time | 12.11.2018 | Reply to a communication from the examining division | 07.01.2019 | Communication of intention to grant the patent | 30.04.2019 | Fee for grant paid | 30.04.2019 | Fee for publishing/printing paid | 30.04.2019 | Receipt of the translation of the claim(s) | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 21.11.2008 | Opposition(s) | 13.03.2020 | No opposition filed within time limit [2020/21] | Request for further processing for: | The application is deemed to be withdrawn due to failure to reply to the examination report | 12.11.2018 | Request for further processing filed | 12.11.2018 | Full payment received (date of receipt of payment) Request granted | 23.11.2018 | Decision despatched | Fees paid | Renewal fee | 31.07.2008 | Renewal fee patent year 03 | 31.07.2009 | Renewal fee patent year 04 | 28.07.2010 | Renewal fee patent year 05 | 29.07.2011 | Renewal fee patent year 06 | 30.07.2012 | Renewal fee patent year 07 | 30.07.2013 | Renewal fee patent year 08 | 31.07.2014 | Renewal fee patent year 09 | 31.07.2015 | Renewal fee patent year 10 | 30.01.2017 | Renewal fee patent year 11 | 31.07.2017 | Renewal fee patent year 12 | 27.07.2018 | Renewal fee patent year 13 | Penalty fee | Additional fee for renewal fee | 31.07.2016 | 11 M06 Fee paid on 30.01.2017 |
| Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | CH | 31.07.2019 | LI | 31.07.2019 | FR | 12.08.2019 | [2020/36] |
| Former [2020/25] | CH | 31.07.2019 | |
| LI | 31.07.2019 | Cited in | International search | [XDAY]WO2005006407 (TEC SEM AG [CH], et al) [XD] 1-7,14-17 * the whole document * [A] 18-21 [Y] 8-13,22-25,27,28; | [Y]EP1414060 (BROOKS PRI AUTOMATION GERMANY [DE]) [Y] 8-13,27,28 * abstract * * figures 5,6 * * paragraphs [0002] - [0008] - [0012] - [0015] - [0020] , [0021] , [0029] - [0033] *; | [A]JPH0986666 ; | [A]DE19535871 (JENOPTIK JENA GMBH [DE]) [A] 8-13,27,28 * abstract * * figures 1-3 * * column 3, line 12 - column 3 * * column 5, line 33 - column 5, line 43 *; | [XAY]WO9738439 (COMMISSARIAT ENERGIE ATOMIQUE [FR], et al) [X] 18-21,26 * abstract * * figures 1-32 * * page 2, line 4 - page 13, line 31 * * page 26, line 25 - page 32, line 19 * * page 35, line 5 - page 37, line 5 * * page 52, line 6 - line 22 * [A] 1,3 [Y] 22-25; | [A]US2004182472 (AGGARWAL RAVINDER [US]) [A] 18-26 * abstract * * figure 4 * | [A] - PATENT ABSTRACTS OF JAPAN, (19970731), vol. 1997, no. 07, & JP09086666 A 19970331 (ROHM CO LTD) [A] 1-7 * abstract * * paragraph [0004] * | [A] - RITZMANN, HEINZ, "Single Wafer Management Systems and Bare Wafer Storage as Key to Increased Yield and Productivity", 2005 IEEE/SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE AND WORKSHOP PROCEEDINGS, Piscataway, NJ, USA (IEEE Cat. No. 05CH37654)., (20050411), ISBN 0-7803-8996-4, pages 91 - 95, XP002371536 [A] 1-28 * the whole document * | Examination | US6647616 |