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EP1929071
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EP About this file: EP1929071
| EP1929071 - COMPOSITION AND METHOD FOR ENHANCING POT LIFE OF HYDROGEN PEROXIDE-CONTAINING CMP SLURRIES [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 31.07.2015 Database last updated on 30.10.2024 | Most recent event Tooltip | 31.07.2015 | Application deemed to be withdrawn | published on 02.09.2015 [2015/36] | Applicant(s) | For all designated states CABOT MICROELECTRONICS CORPORATION Legal Department 870 North Commons Drive Aurora, IL 60504 / US | [2008/24] | Inventor(s) | 01 /
WANG, Yuchun c/o Legal Department Cabot Microelectronics Corporation 870 North Commons Drive Aurora, Illinois 60504 / US | 02 /
LU, Bin c/o Legal Department Cabot Microelectronics Corporation 870 N. Commons Drive Aurora, Illinois 60504 / US | 03 /
PARKER, John c/o Legal Department Cabot Microelectronics Corporation 870 North Commons Drive Aurora, Illinois 60504 / US | 04 /
MARTIN, Roger c/o Legal Department Cabot Microelectronics Corporation 870 N. Commons Drive Aurora, Illinois 60504 / US | [2008/24] | Representative(s) | Trueman, Lucy Petra Barker Brettell LLP 100 Hagley Road Edgbaston Birmingham B16 8QQ / GB | [N/P] |
| Former [2008/24] | Trueman, Lucy Petra Barker Brettell LLP 138 Hagley Road Edgbaston Birmingham B16 9PW / GB | Application number, filing date | 06803687.0 | 15.09.2006 | [2008/24] | WO2006US36057 | Priority number, date | US20050238236 | 29.09.2005 Original published format: US 238236 | [2008/24] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2007040956 | Date: | 12.04.2007 | Language: | EN | [2007/15] | Type: | A1 Application with search report | No.: | EP1929071 | Date: | 11.06.2008 | Language: | EN | The application published by WIPO in one of the EPO official languages on 12.04.2007 takes the place of the publication of the European patent application. | [2008/24] | Search report(s) | International search report - published on: | EP | 12.04.2007 | Classification | IPC: | C23F3/06, C09G1/02, H01L21/321 | [2008/24] | CPC: |
C09G1/02 (EP,US);
H01L21/304 (KR);
C09K3/14 (KR);
C23F3/06 (EP,US);
H01L21/3212 (EP,US)
| Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, LV, MC, NL, PL, PT, RO, SE, SI, SK, TR [2008/24] | Title | German: | ZUSAMMENSETZUNG UND VERFAHREN ZUR VERLÄNGERUNG DER TOPFZEIT VON WASSERSTOFFPEROXID ENTHALTENDEN CMP-AUFSCHLÄMMUNGEN | [2008/24] | English: | COMPOSITION AND METHOD FOR ENHANCING POT LIFE OF HYDROGEN PEROXIDE-CONTAINING CMP SLURRIES | [2008/24] | French: | COMPOSITION ET PROCEDE POUR AMELIORER LA VIE EN POT DE PATES DE POLISSAGE CHIMICO-MECANIQUE CONTENANT DU PEROXYDE D'HYDROGENE | [2008/24] | Entry into regional phase | 31.03.2008 | National basic fee paid | 31.03.2008 | Designation fee(s) paid | 31.03.2008 | Examination fee paid | Examination procedure | 28.03.2008 | Amendment by applicant (claims and/or description) | 31.03.2008 | Examination requested [2008/24] | 11.12.2012 | Despatch of a communication from the examining division (Time limit: M04) | 10.04.2013 | Reply to a communication from the examining division | 31.03.2015 | Application deemed to be withdrawn, date of legal effect [2015/36] | 28.04.2015 | Despatch of communication that the application is deemed to be withdrawn, reason: renewal fee not paid in time [2015/36] | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 11.12.2012 | Fees paid | Renewal fee | 05.09.2008 | Renewal fee patent year 03 | 29.09.2009 | Renewal fee patent year 04 | 07.09.2010 | Renewal fee patent year 05 | 08.09.2011 | Renewal fee patent year 06 | 26.09.2012 | Renewal fee patent year 07 | 09.09.2013 | Renewal fee patent year 08 | Penalty fee | Additional fee for renewal fee | 30.09.2014 | 09 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | International search | [A]EP0276774 (MICRO IMAGE TECHNOLOGY LTD [GB]) [A] 1-28* page 4, lines 18-23; claim -; table I *; | [X]EP1125999 (FUJIMI INC [JP], et al) [X] 1-28 * paragraph [0021] - paragraph [0033]; example 1; claim - *; | [A]US6530967 (MISRA ASHUTOSH [US]) [A] 1-28 * page 1, line 20 - page 3, line 21; claim - *; | [A]US2005090104 (YANG KAI [TW], et al) [A] 1-28 * paragraph [0008] - paragraph [0011] * * paragraph [0033] - paragraph [0046] *; | [A] - NICHOLES K ET AL, "PEROXIDE CONTROL IN CU/W CMP SLURRY", EUROPEAN SEMICONDUCTOR, ANGEL PUBLISHING, GB, (200004), vol. 22, no. 4, ISSN 0265-6027, pages 51 - 52,54, XP001112992 [A] 1-28 * the whole document * |