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EP1954704
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EP Citations: EP1954704
| Cited in | International search | Type: | Patent literature | Publication No.: | US5130172
[X] (HICKS ROBERT F [US], et al) [X] 1,3,6-12 * the whole document *; | Type: | Patent literature | Publication No.: | JPH05209272
[ ] (NEC CORP); | Type: | Patent literature | Publication No.: | WO03050323
[X] (APPLIED MATERIALS INC [US]) [X] 1 * Whole document; Table 4 *; | Type: | Patent literature | Publication No.: | WO2004095557
[X] (TOKYO ELECTRON LTD [JP], et al) [X] 1,3,6-12 * the whole document *; | Type: | Patent literature | Publication No.: | JP2005069726
[X] (MITSUBISHI MATERIALS CORP) [X] 1 * Whole document, in particular page 8, (Cp)2TaH3 *; | Type: | Patent literature | Publication No.: | US2006121307
[PX] (MATSUZAWA KOUMEI [JP], et al) [PX] 1,3,6-12 * the whole document *; | Type: | Non-patent literature | Publication information: | [X] - GORY, V., "Convenient method of synthesis of Cp2TaH3", RUSSIAN CHEMICAL BULLETIN, (1995), vol. 44, no. 10, pages 1970 - 1970, XP002427861 [X] 4,5 * the whole document * | DOI: | http://dx.doi.org/10.1007/BF00707241 | Type: | Non-patent literature | Publication information: | [X] - SCHROCK, R.R. ET AL., "Multiple Metal-Carbon bonds. 7. Preparation and characterization of Ta (eta5-C5H5)2(CH2)(CH3), a Study of its Decomposition, and some simple Reactions", JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, (1978), vol. 100, no. 8, pages 2389 - 2399, XP002427862 [X] 2,3 * see page 2396 * | DOI: | http://dx.doi.org/10.1021/ja00476a022 | Type: | Non-patent literature | Publication information: | [X] - CAMANYES, SANTIAGO ET AL, "Theoretical Study of the Hydrogen Exchange Coupling in the Metallocene Trihydride Complexes [(C5H5)2MH3]n+ (M = Mo, W, n = 1; M = Nb, Ta, n = 0)", JOURNAL OF THE AMERICAN CHEMICAL SOCIETY , 118(19), 4617-21 CODEN: JACSAT; ISSN: 0002-7863, (1996), XP002427863 [X] 1,3 * the whole document * | DOI: | http://dx.doi.org/10.1021/ja952689r | Type: | Non-patent literature | Publication information: | [X] - GIRLING, REUBEN B. ET AL, "Vibrational spectra of terminal metal hydrides: solution and matrix-isolation studies of [(.eta.-C5H5)2MHn]x+ (M = Re, Mo, W, Nb, Ta; n = 1-3; x = 0, 1)", INORGANIC CHEMISTRY , 25(1), 31-6 CODEN: INOCAJ; ISSN: 0020-1669, (1986), XP002427864 [X] 1,3 * the whole document * | DOI: | http://dx.doi.org/10.1021/ic00221a010 | Type: | Non-patent literature | Publication information: | [X] - LOKSHIN, B. V. ET AL, "Spectroscopy of unstable complexes of organometallic compounds with small molecules at low temperatures", JOURNAL OF MOLECULAR STRUCTURE , 222(1-2), 11-20 CODEN: JMOSB4; ISSN: 0022-2860, (1990), XP002427865 [X] 1,3 * the whole document * | DOI: | http://dx.doi.org/10.1016/0022-2860(90)80003-3 | Type: | Non-patent literature | Publication information: | [X] - TSUNENARI, KINJI, "Chemical vapor phase growth of tungsten film", CA, CHEMICAL ABSTRACTS SERVICE, COLUMBUS, OHIO, US, Database accession no. 120:20202, URL: STN, XP002427868 [X] 6-12 * abstract * | Type: | Non-patent literature | Publication information: | [X] - SPEE, C. I. M. A. ET AL, "Tungsten deposition by organometallic chemical vapor deposition with organotungsten precursors", MATERIALS SCIENCE & ENGINEERING, B: SOLID-STATE MATERIALS FOR ADVANCED TECHNOLOGY , B17(1-3), 108-11 CODEN: MSBTEK; ISSN: 0921-5107, (1993), XP002427866 [X] 6-12 * the whole document * | DOI: | http://dx.doi.org/10.1016/0921-5107(93)90090-A |