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Extract from the Register of European Patents

EP About this file: EP1983548

EP1983548 - Emitter chamber, charged particle apparatus and method for operating same [Right-click to bookmark this link]
StatusThe application is deemed to be withdrawn
Status updated on  18.09.2009
Database last updated on 07.10.2024
Most recent event   Tooltip18.09.2009Application deemed to be withdrawnpublished on 21.10.2009  [2009/43]
Applicant(s)For all designated states
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
Ammerthalstrasse 20a
85551 Heimstetten / DE
[2008/43]
Inventor(s)01 / Adamec, Pavel
Am See 29
85540 Haar / DE
02 / Zhou, Fang
Sonnenstrasse 19
85622 Feldkirchen / DE
 [2008/43]
Representative(s)Zimmermann, Gerd Heinrich, et al
Zimmermann & Partner Patentanwälte mbB
Postfach 330 920
80069 München / DE
[N/P]
Former [2008/43]Zimmermann, Gerd Heinrich, et al
Zimmermann & Partner Postfach 330 920
80069 München / DE
Application number, filing date07008107.020.04.2007
[2008/43]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report 
No.:EP1983548
Date:22.10.2008
Language:EN
[2008/43]
Search report(s)(Supplementary) European search report - dispatched on:EP07.08.2007
ClassificationIPC:H01J37/073, H01J37/18, H01J7/18
[2008/43]
CPC:
H01J37/065 (EP,US); H01J37/073 (EP,US); H01J37/18 (EP,US);
H01J7/18 (EP,US); H01J2237/022 (EP,US); H01J2237/06341 (EP,US);
H01J2237/1825 (EP,US); H01J2237/188 (EP,US) (-)
Designated contracting states(deleted) [2009/27]
Former [2008/43]AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HU,  IE,  IS,  IT,  LI,  LT,  LU,  LV,  MC,  MT,  NL,  PL,  PT,  RO,  SE,  SI,  SK,  TR 
TitleGerman:Emitterkammer, Ladungsträgerteilchenstrahlvorrichtung und Bedienungsverfahren[2008/43]
English:Emitter chamber, charged particle apparatus and method for operating same[2008/43]
French:Chambre d'émetteur, appareil à particule chargée et son procédé de fonctionnement[2008/43]
Examination procedure23.04.2009Application deemed to be withdrawn, date of legal effect  [2009/43]
03.06.2009Despatch of communication that the application is deemed to be withdrawn, reason: examination fee not paid in time  [2009/43]
Fees paidPenalty fee
Additional fee for renewal fee
30.04.200903   M06   Not yet paid
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:Search[Y]GB953801  (HERAEUS GMBH W C) [Y] 10 * page 1, lines 60-84 * * page 2, lines 22-27 * * claims 1-5 *;
 [XY]US3678333  (COATES VINCENT J, et al) [X] 1-8,11-15,18,19,22-27,32 * abstract * * column 2, lines 67-75 * * column 3, lines 55-60 * * column 3, line 74 - column 5, line 59 * * column 6, line 58 - column 7, line 6 * * claims 1-5 * [Y] 9,10;
 [XY]US5111054  (SLINGERLAND HENDRIK N [NL]) [X] 1-8,11,14-18,22-26,28,29 * abstract * * column 2, line 29 - column 4, line 8 * [Y] 27,30-32;
 [A]US5150001  (CREWE ALBERT V [US]) [A] 1-32 * abstract * * column 2 ** column 4 *;
 [XY]US5399860  (MIYOSHI MOTOSUKE [US], et al) [X] 1-8,11-13,15,16,19-25 * abstract * * column 4, lines 45-52 * * column 5, line 49 - column 6, line 24 * * column 6, line 62 - column 7, line 2 * [Y] 27,30-32;
 [Y]US2003081726  (KOCH LOTHAR [DE]) [Y] 9 * paragraph [0039] *;
 [X]US2006231773  (KATAGIRI SOUICHI [JP], et al) [X] 1-8,11,13-16,18,19,22-25 * abstract * * paragraphs [0132] , [0136] *;
 [Y]  - LI YULIN ET AL, "Design and pumping characteristics of a compact titanium-vanadium non-evaporable getter pump", JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A. VACUUM, SURFACES AND FILMS, AMERICAN INSTITUTE OF PHYSICS, NEW YORK, NY, US, (199805), vol. 16, no. 3, ISSN 0734-2101, pages 1139 - 1144, XP012003912 [Y] 9 * abstract * * page 1139, column R, paragraph 2 *

DOI:   http://dx.doi.org/10.1116/1.581248
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.