EP1911501 - A regeneration method of etching solution, an etching method and an etching system [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 03.08.2012 Database last updated on 22.08.2024 | Most recent event Tooltip | 04.10.2013 | Lapse of the patent in a contracting state New state(s): HU | published on 06.11.2013 [2013/45] | Applicant(s) | For all designated states Apprecia Technology Inc. 32-2 Honcho 1-chome Nakano-ku Tokyo 164-0012 / JP | [2009/31] |
Former [2008/16] | For all designated states m. FSI Ltd. 32-2, Honcho 1-chome, Nakano-ku Tokyo 164-0012 / JP | Inventor(s) | 01 /
Izuta, Nobuhiko c/o Okayama Technology Center of m. FSI Ltd. 5311 Haga Okayama-shi Okayama 701-1221 / JP | 02 /
Watatsu, Haruru c/o Okayama Technology Center of m. FSI Ltd. 5311 Haga Okayama-shi Okayama 701-1221 / JP | [2011/39] |
Former [2008/16] | 01 /
Izuta, Nobuhiko c/o Okayama Technology Center of m. FSI Ltd. 5311 Haga Okayama-shi Okayama 701-1221 / JP | ||
02 /
Watatsu, Haruru c/o Okayama Technology Center of m. FSI Ltd. 5311 Haga Okayama-shi Okayama 701-1221 / JP | Representative(s) | Hartz, Nikolai Wächtershäuser & Hartz Patentanwaltspartnerschaft mbB Weinstrasse 8 80333 München / DE | [N/P] |
Former [2011/39] | Hartz, Nikolai Wächtershäuser & Hartz Patentanwaltspartnerschaft Weinstrasse 8 80333 München / DE | ||
Former [2009/39] | Hartz, Nikolai Wächtershäuser & Hartz Patentanwälte Weinstrasse 8 80333 München / DE | ||
Former [2008/16] | Hartz, Nikolai Wächtershauser & Hartz Weinstrasse 8 80333 München / DE | Application number, filing date | 07019492.3 | 04.10.2007 | [2008/16] | Priority number, date | JP20060279098 | 12.10.2006 Original published format: JP 2006279098 | [2008/16] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP1911501 | Date: | 16.04.2008 | Language: | EN | [2008/16] | Type: | A3 Search report | No.: | EP1911501 | Date: | 11.03.2009 | [2009/11] | Type: | B1 Patent specification | No.: | EP1911501 | Date: | 28.09.2011 | Language: | EN | [2011/39] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 09.02.2009 | Classification | IPC: | B01D29/60, B01D29/56, B01D29/66, C09K13/04 | [2009/11] | CPC: |
C09K13/04 (EP,US);
H01L21/3063 (KR)
|
Former IPC [2008/16] | B01D29/52, B01D29/56, C09K13/04 | Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MT, NL, PL, PT, RO, SE, SI, SK, TR [2008/16] | Title | German: | Regenerierungsverfahren für Ätzlösungen, Ätzverfahren und Ätzsystem | [2008/16] | English: | A regeneration method of etching solution, an etching method and an etching system | [2008/16] | French: | Procédé de régénération d'une solution de gravure, procédé de gravure et système de gravure | [2008/16] | Examination procedure | 30.07.2008 | Examination requested [2008/37] | 24.06.2009 | Despatch of a communication from the examining division (Time limit: M06) | 30.12.2009 | Reply to a communication from the examining division | 16.07.2010 | Despatch of a communication from the examining division (Time limit: M06) | 09.12.2010 | Reply to a communication from the examining division | 29.04.2011 | Communication of intention to grant the patent | 04.08.2011 | Fee for grant paid | 04.08.2011 | Fee for publishing/printing paid | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 24.06.2009 | Opposition(s) | 29.06.2012 | No opposition filed within time limit [2012/36] | Fees paid | Renewal fee | 20.10.2009 | Renewal fee patent year 03 | 13.10.2010 | Renewal fee patent year 04 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | AT | 28.09.2011 | BE | 28.09.2011 | CY | 28.09.2011 | CZ | 28.09.2011 | DK | 28.09.2011 | EE | 28.09.2011 | FI | 28.09.2011 | HU | 28.09.2011 | IT | 28.09.2011 | LT | 28.09.2011 | LV | 28.09.2011 | MT | 28.09.2011 | NL | 28.09.2011 | PL | 28.09.2011 | RO | 28.09.2011 | SE | 28.09.2011 | SI | 28.09.2011 | SK | 28.09.2011 | TR | 28.09.2011 | IE | 04.10.2011 | LU | 04.10.2011 | CH | 31.10.2011 | LI | 31.10.2011 | MC | 31.10.2011 | BG | 28.12.2011 | GB | 28.12.2011 | GR | 29.12.2011 | ES | 08.01.2012 | IS | 28.01.2012 | PT | 30.01.2012 | [2013/45] |
Former [2013/44] | AT | 28.09.2011 | |
BE | 28.09.2011 | ||
CY | 28.09.2011 | ||
CZ | 28.09.2011 | ||
DK | 28.09.2011 | ||
EE | 28.09.2011 | ||
FI | 28.09.2011 | ||
IT | 28.09.2011 | ||
LT | 28.09.2011 | ||
LV | 28.09.2011 | ||
MT | 28.09.2011 | ||
NL | 28.09.2011 | ||
PL | 28.09.2011 | ||
RO | 28.09.2011 | ||
SE | 28.09.2011 | ||
SI | 28.09.2011 | ||
SK | 28.09.2011 | ||
TR | 28.09.2011 | ||
IE | 04.10.2011 | ||
LU | 04.10.2011 | ||
CH | 31.10.2011 | ||
LI | 31.10.2011 | ||
MC | 31.10.2011 | ||
BG | 28.12.2011 | ||
GB | 28.12.2011 | ||
GR | 29.12.2011 | ||
ES | 08.01.2012 | ||
IS | 28.01.2012 | ||
PT | 30.01.2012 | ||
Former [2013/29] | AT | 28.09.2011 | |
BE | 28.09.2011 | ||
CY | 28.09.2011 | ||
CZ | 28.09.2011 | ||
DK | 28.09.2011 | ||
EE | 28.09.2011 | ||
FI | 28.09.2011 | ||
IT | 28.09.2011 | ||
LT | 28.09.2011 | ||
LV | 28.09.2011 | ||
MT | 28.09.2011 | ||
NL | 28.09.2011 | ||
PL | 28.09.2011 | ||
RO | 28.09.2011 | ||
SE | 28.09.2011 | ||
SI | 28.09.2011 | ||
SK | 28.09.2011 | ||
IE | 04.10.2011 | ||
LU | 04.10.2011 | ||
CH | 31.10.2011 | ||
LI | 31.10.2011 | ||
MC | 31.10.2011 | ||
BG | 28.12.2011 | ||
GB | 28.12.2011 | ||
GR | 29.12.2011 | ||
ES | 08.01.2012 | ||
IS | 28.01.2012 | ||
PT | 30.01.2012 | ||
Former [2013/25] | AT | 28.09.2011 | |
BE | 28.09.2011 | ||
CY | 28.09.2011 | ||
CZ | 28.09.2011 | ||
DK | 28.09.2011 | ||
EE | 28.09.2011 | ||
FI | 28.09.2011 | ||
IT | 28.09.2011 | ||
LT | 28.09.2011 | ||
LV | 28.09.2011 | ||
MT | 28.09.2011 | ||
NL | 28.09.2011 | ||
PL | 28.09.2011 | ||
RO | 28.09.2011 | ||
SE | 28.09.2011 | ||
SI | 28.09.2011 | ||
SK | 28.09.2011 | ||
IE | 04.10.2011 | ||
LU | 04.10.2011 | ||
CH | 31.10.2011 | ||
LI | 31.10.2011 | ||
MC | 31.10.2011 | ||
GB | 28.12.2011 | ||
GR | 29.12.2011 | ||
ES | 08.01.2012 | ||
IS | 28.01.2012 | ||
PT | 30.01.2012 | ||
Former [2013/22] | AT | 28.09.2011 | |
BE | 28.09.2011 | ||
CY | 28.09.2011 | ||
CZ | 28.09.2011 | ||
DK | 28.09.2011 | ||
EE | 28.09.2011 | ||
FI | 28.09.2011 | ||
IT | 28.09.2011 | ||
LT | 28.09.2011 | ||
LV | 28.09.2011 | ||
MT | 28.09.2011 | ||
NL | 28.09.2011 | ||
PL | 28.09.2011 | ||
RO | 28.09.2011 | ||
SE | 28.09.2011 | ||
SI | 28.09.2011 | ||
SK | 28.09.2011 | ||
IE | 04.10.2011 | ||
CH | 31.10.2011 | ||
LI | 31.10.2011 | ||
MC | 31.10.2011 | ||
GB | 28.12.2011 | ||
GR | 29.12.2011 | ||
ES | 08.01.2012 | ||
IS | 28.01.2012 | ||
PT | 30.01.2012 | ||
Former [2013/14] | AT | 28.09.2011 | |
BE | 28.09.2011 | ||
CY | 28.09.2011 | ||
CZ | 28.09.2011 | ||
DK | 28.09.2011 | ||
EE | 28.09.2011 | ||
FI | 28.09.2011 | ||
IT | 28.09.2011 | ||
LT | 28.09.2011 | ||
LV | 28.09.2011 | ||
MT | 28.09.2011 | ||
NL | 28.09.2011 | ||
PL | 28.09.2011 | ||
RO | 28.09.2011 | ||
SE | 28.09.2011 | ||
SI | 28.09.2011 | ||
SK | 28.09.2011 | ||
IE | 04.10.2011 | ||
CH | 31.10.2011 | ||
LI | 31.10.2011 | ||
MC | 31.10.2011 | ||
GB | 28.12.2011 | ||
GR | 29.12.2011 | ||
IS | 28.01.2012 | ||
PT | 30.01.2012 | ||
Former [2012/47] | AT | 28.09.2011 | |
BE | 28.09.2011 | ||
CY | 28.09.2011 | ||
CZ | 28.09.2011 | ||
DK | 28.09.2011 | ||
EE | 28.09.2011 | ||
FI | 28.09.2011 | ||
IT | 28.09.2011 | ||
LT | 28.09.2011 | ||
LV | 28.09.2011 | ||
NL | 28.09.2011 | ||
PL | 28.09.2011 | ||
RO | 28.09.2011 | ||
SE | 28.09.2011 | ||
SI | 28.09.2011 | ||
SK | 28.09.2011 | ||
IE | 04.10.2011 | ||
CH | 31.10.2011 | ||
LI | 31.10.2011 | ||
MC | 31.10.2011 | ||
GB | 28.12.2011 | ||
GR | 29.12.2011 | ||
IS | 28.01.2012 | ||
PT | 30.01.2012 | ||
Former [2012/46] | AT | 28.09.2011 | |
BE | 28.09.2011 | ||
CY | 28.09.2011 | ||
CZ | 28.09.2011 | ||
DK | 28.09.2011 | ||
EE | 28.09.2011 | ||
FI | 28.09.2011 | ||
IT | 28.09.2011 | ||
LT | 28.09.2011 | ||
LV | 28.09.2011 | ||
NL | 28.09.2011 | ||
PL | 28.09.2011 | ||
RO | 28.09.2011 | ||
SE | 28.09.2011 | ||
SI | 28.09.2011 | ||
SK | 28.09.2011 | ||
CH | 31.10.2011 | ||
LI | 31.10.2011 | ||
MC | 31.10.2011 | ||
GB | 28.12.2011 | ||
GR | 29.12.2011 | ||
IS | 28.01.2012 | ||
PT | 30.01.2012 | ||
Former [2012/37] | AT | 28.09.2011 | |
BE | 28.09.2011 | ||
CY | 28.09.2011 | ||
CZ | 28.09.2011 | ||
DK | 28.09.2011 | ||
EE | 28.09.2011 | ||
FI | 28.09.2011 | ||
IT | 28.09.2011 | ||
LT | 28.09.2011 | ||
LV | 28.09.2011 | ||
NL | 28.09.2011 | ||
PL | 28.09.2011 | ||
RO | 28.09.2011 | ||
SE | 28.09.2011 | ||
SI | 28.09.2011 | ||
SK | 28.09.2011 | ||
CH | 31.10.2011 | ||
LI | 31.10.2011 | ||
MC | 31.10.2011 | ||
GR | 29.12.2011 | ||
IS | 28.01.2012 | ||
PT | 30.01.2012 | ||
Former [2012/35] | AT | 28.09.2011 | |
BE | 28.09.2011 | ||
CY | 28.09.2011 | ||
CZ | 28.09.2011 | ||
DK | 28.09.2011 | ||
EE | 28.09.2011 | ||
FI | 28.09.2011 | ||
IT | 28.09.2011 | ||
LT | 28.09.2011 | ||
LV | 28.09.2011 | ||
NL | 28.09.2011 | ||
RO | 28.09.2011 | ||
SE | 28.09.2011 | ||
SI | 28.09.2011 | ||
SK | 28.09.2011 | ||
CH | 31.10.2011 | ||
LI | 31.10.2011 | ||
MC | 31.10.2011 | ||
GR | 29.12.2011 | ||
IS | 28.01.2012 | ||
PT | 30.01.2012 | ||
Former [2012/33] | AT | 28.09.2011 | |
BE | 28.09.2011 | ||
CY | 28.09.2011 | ||
CZ | 28.09.2011 | ||
EE | 28.09.2011 | ||
FI | 28.09.2011 | ||
IT | 28.09.2011 | ||
LT | 28.09.2011 | ||
LV | 28.09.2011 | ||
NL | 28.09.2011 | ||
RO | 28.09.2011 | ||
SE | 28.09.2011 | ||
SI | 28.09.2011 | ||
SK | 28.09.2011 | ||
CH | 31.10.2011 | ||
LI | 31.10.2011 | ||
MC | 31.10.2011 | ||
GR | 29.12.2011 | ||
IS | 28.01.2012 | ||
PT | 30.01.2012 | ||
Former [2012/24] | AT | 28.09.2011 | |
BE | 28.09.2011 | ||
CY | 28.09.2011 | ||
CZ | 28.09.2011 | ||
EE | 28.09.2011 | ||
FI | 28.09.2011 | ||
IT | 28.09.2011 | ||
LT | 28.09.2011 | ||
LV | 28.09.2011 | ||
NL | 28.09.2011 | ||
RO | 28.09.2011 | ||
SE | 28.09.2011 | ||
SI | 28.09.2011 | ||
SK | 28.09.2011 | ||
MC | 31.10.2011 | ||
GR | 29.12.2011 | ||
IS | 28.01.2012 | ||
PT | 30.01.2012 | ||
Former [2012/23] | AT | 28.09.2011 | |
BE | 28.09.2011 | ||
CY | 28.09.2011 | ||
CZ | 28.09.2011 | ||
EE | 28.09.2011 | ||
FI | 28.09.2011 | ||
IT | 28.09.2011 | ||
LT | 28.09.2011 | ||
LV | 28.09.2011 | ||
NL | 28.09.2011 | ||
RO | 28.09.2011 | ||
SE | 28.09.2011 | ||
SI | 28.09.2011 | ||
SK | 28.09.2011 | ||
GR | 29.12.2011 | ||
IS | 28.01.2012 | ||
PT | 30.01.2012 | ||
Former [2012/21] | AT | 28.09.2011 | |
BE | 28.09.2011 | ||
CY | 28.09.2011 | ||
CZ | 28.09.2011 | ||
FI | 28.09.2011 | ||
LT | 28.09.2011 | ||
LV | 28.09.2011 | ||
SE | 28.09.2011 | ||
SI | 28.09.2011 | ||
GR | 29.12.2011 | ||
IS | 28.01.2012 | ||
Former [2012/18] | AT | 28.09.2011 | |
BE | 28.09.2011 | ||
CY | 28.09.2011 | ||
FI | 28.09.2011 | ||
LT | 28.09.2011 | ||
LV | 28.09.2011 | ||
SE | 28.09.2011 | ||
SI | 28.09.2011 | ||
GR | 29.12.2011 | ||
Former [2012/12] | AT | 28.09.2011 | |
CY | 28.09.2011 | ||
FI | 28.09.2011 | ||
LT | 28.09.2011 | ||
LV | 28.09.2011 | ||
SE | 28.09.2011 | ||
SI | 28.09.2011 | ||
GR | 29.12.2011 | ||
Former [2012/11] | AT | 28.09.2011 | |
FI | 28.09.2011 | ||
LT | 28.09.2011 | ||
LV | 28.09.2011 | ||
SE | 28.09.2011 | ||
SI | 28.09.2011 | ||
GR | 29.12.2011 | ||
Former [2012/09] | FI | 28.09.2011 | |
LT | 28.09.2011 | ||
Former [2012/08] | LT | 28.09.2011 | Documents cited: | Search | [A]EP0675266 (ABB MANAGEMENT AG [CH]) [A] 1* abstract *; | [Y]JPH09219388 (MITSUBISHI ELECTRIC CORP) [Y] 4 * paragraphs [0004] , [0007] , [0012]; figures 2,7 *; | [Y]DE19740327 (UNIV KARLSRUHE [DE]) [Y] 1 * column 3, lines 4-32; figure 1; claim 1 *; | [YX]US2003168413 (BRETT ELKE [DE], et al) [Y] 1 * paragraphs [0010] , [0011]; figures 1-4; claim 1 * [X] 5; | [Y]JP2005260179 (TOSHIBA CORP) [Y] 1,4 * paragraphs [0005] , [0017] , [0018] , [0042] , [0044]; figure 4; claims 9,11 * |