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Extract from the Register of European Patents

EP About this file: EP1984787

EP1984787 - ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  14.03.2014
Database last updated on 03.10.2024
Most recent event   Tooltip14.03.2014No opposition filed within time limitpublished on 16.04.2014  [2014/16]
Applicant(s)For all designated states
Carl Zeiss SMT GmbH
Rudolf-Eber-Strasse 2
73447 Oberkochen / DE
[2011/10]
Former [2008/44]For all designated states
Carl Zeiss SMT AG
Rudolf-Eber-Strasse 2
73447 Oberkochen / DE
Inventor(s)01 / WANGLER, Johannes
An der Reute 15
89551 Königsbronn / DE
02 / SIEKMANN, Heiko
Weisse Steige 64
73431 Aalen / DE
03 / WEIBLE, Kenneth
Cret-Taconnet 24
CH-2000 Neuchâtel / CH
04 / SCHARNWEBER, Ralf
Schleifbrückenstr. 11
1
73430 Aalen / DE
05 / MAUL, Manfred
Elchweg 29
73434 Aalen / DE
06 / DEGUENTHER, Markus
Langäckerweg 20
73432 Aalen / DE
07 / LAYH, Michael
Heulenbergweg 30
73432 Aalen / DE
08 / SCHOLZ, Axel
Joseph-Haydn-Str. 40
73430 Aalen / DE
09 / SPENGLER, Uwe
Schönblick 28
D-91757 Trochtelfingen / DE
10 / VÖLKEL, Reinhard
Rue de Combat-Borel 17
CH-2000 Neuchâtel / CH
 [2009/12]
Former [2008/51]01 / WANGLER, Johannes
An der Reute 15
89551 Königsbronn / DE
02 / SIEKMANN, Heiko
Weisse Steige 64
73431 Aalen / DE
03 / WEIBLE, Kenneth
Cret-Taconnet 24
CH-2000 Neuchâtel / CH
04 / SCHARNWEBER, Ralf
Schleifbrückenstr. 11
1
73430 Aalen / DE
05 / MAUL, Manfred
Elchweg 29
73434 Aalen / DE
06 / DEGUENTHER, Markus
Langäckerweg 20
73432 Aalen / DE
07 / LAYH, Michael
Heulenbergweg 30
73432 Aalen / DE
08 / SCHOLZ, Axel
Joseph-Haydn-Str. 40
73430 Aalen / DE
09 / SPENGLER, Uwe
Schönblick 28
91757 Trochtelfingen / DE
10 / VÖLKEL, Reinhard
Rue de Combat-Borel 17
CH-2000 Neuchâtel / CH
Former [2008/44]01 / WANGLER, Johannes
An der Reute 15
89551 Königsbronn / DE
02 / SIEKMANN, Heiko
Weisse Steige 64
73431 Aalen / DE
03 / WEIBLE, Kenneth
Cret-Taconnet 24
CH-2000 Neuchâtel / CH
04 / SCHARNWEBER, Ralf
Silcherstr. 13
73430 Aalen / DE
05 / MAUL, Manfred
Elchweg 29
73434 Aalen / DE
06 / DEGUENTHER, Markus
Langäckerweg 20
73432 Aalen / DE
07 / LAYH, Michael
Himmlinger Weg 33
73430 Aalen / DE
08 / SCHOLZ, Axel
Joseph-Haydn-Str. 40
73430 Aalen / DE
09 / SPENGLER, Uwe
Schönblick 28
91757 Trochtelfingen / DE
10 / VÖLKEL, Reinhard
Rue de Combat-Borel 17
CH-2000 Neuchâtel / CH
Representative(s)Schwanhäusser, Gernot, et al
Ostertag & Partner
Patentanwälte mbB
Epplestrasse 14
70597 Stuttgart / DE
[N/P]
Former [2013/19]Schwanhäusser, Gernot, et al
Ostertag & Partner
Patentanwälte
Epplestr. 14
70597 Stuttgart / DE
Former [2008/44]Schwanhäusser, Gernot, et al
Ostertag & Partner Patentanwälte Epplestr. 14
70597 Stuttgart / DE
Application number, filing date07703454.414.02.2007
[2008/44]
WO2007EP01267
Priority number, dateUS20060774850P17.02.2006         Original published format: US 774850 P
[2008/44]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2007093396
Date:23.08.2007
Language:EN
[2007/34]
Type: A1 Application with search report 
No.:EP1984787
Date:29.10.2008
Language:EN
The application published by WIPO in one of the EPO official languages on 23.08.2007 takes the place of the publication of the European patent application.
[2008/44]
Type: B1 Patent specification 
No.:EP1984787
Date:08.05.2013
Language:EN
[2013/19]
Search report(s)International search report - published on:EP23.08.2007
ClassificationIPC:G03F7/20
[2008/44]
CPC:
G03F7/70075 (EP,KR,US); G03F7/70191 (KR,US); G02B27/0911 (US);
G02B3/0056 (US); G03F7/70058 (KR,US); G03F7/70083 (EP,KR,US);
G03F7/70158 (EP,KR,US); G03F7/7055 (KR) (-)
Designated contracting statesDE,   FR,   NL [2009/12]
Former [2008/44]AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HU,  IE,  IS,  IT,  LI,  LT,  LU,  LV,  MC,  NL,  PL,  PT,  RO,  SE,  SI,  SK,  TR 
TitleGerman:BELEUCHTUNGSSYSTEM FÜR EINE MIKROLITHOGRAPHIE-PROJEKTIONS-BELICHTUNGSVORRICHTUNG[2008/44]
English:ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS[2008/44]
French:SYSTEME D'ECLAIRAGE POUR UN APPAREIL D'EXPOSITION DE PROJECTION MICROLITHOGRAPHIQUE[2008/44]
Entry into regional phase22.03.2008National basic fee paid 
22.03.2008Designation fee(s) paid 
22.03.2008Examination fee paid 
Examination procedure22.03.2008Amendment by applicant (claims and/or description)
22.03.2008Examination requested  [2008/44]
18.09.2008Loss of particular rights, legal effect: designated state(s)
24.10.2008Despatch of communication of loss of particular rights: designated state(s) AT, BE, BG, CH, CY, CZ, DK, EE, ES, FI, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, PL, PT, RO, SE, SI, SK, TR
15.01.2009Despatch of a communication from the examining division (Time limit: M06)
08.06.2009Reply to a communication from the examining division
07.12.2010Despatch of a communication from the examining division (Time limit: M06)
06.05.2011Reply to a communication from the examining division
12.10.2012Communication of intention to grant the patent
13.02.2013Disapproval of the communication of intention to grant the patent by the applicant or resumption of examination proceedings by the EPO
01.03.2013Communication of intention to grant the patent
20.03.2013Fee for grant paid
20.03.2013Fee for publishing/printing paid
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  15.01.2009
Opposition(s)11.02.2014No opposition filed within time limit [2014/16]
Fees paidRenewal fee
18.02.2009Renewal fee patent year 03
24.02.2010Renewal fee patent year 04
22.02.2011Renewal fee patent year 05
22.02.2012Renewal fee patent year 06
21.02.2013Renewal fee patent year 07
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Cited inInternational search[XA]US5815248  (NISHI KENJI [JP], et al) [X] 1-3,5-9,30,31,43,58,85,91 * figure 1 * * figure 6 * * column 13, lines 8-28 * * column 12, lines 10-13 * [A] 89,90;
 [X]JP2003090959  (RICOH KK) [X] 86,92,93 * abstract * * paragraph [0001] ** figures 2,6 *;
 [DX]US6583937  (WANGLER JOHANNES [DE], et al) [DX] 82 * figures 2A,2B * * column 11, lines 55-59 * * figure 7A *;
 [DX]WO2005078522  (ZEISS CARL SMT AG [DE], et al) [DX] 83,84 * figures 1,4,19-21 * * page 35, line 12 - page 36, line 14 *
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.