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EP1990828
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Extract from the Register of European Patents
EP Citations: EP1990828
| Cited in | Search | Type: | Patent literature | Publication No.: | JPH09251208
[X] (NIKON CORP) [X] 1-18 * abstract * * figures 1,2 *; | Type: | Patent literature | Publication No.: | US2006139603
[XP] (LIN BURN J [TW]) [XP] 1-18 * abstract * * paragraph [0020] *; | Type: | Patent literature | Publication No.: | EP1255162
[Y] (ASML NETHERLANDS BV [NL]) [Y] 1,13-15,18 * paragraphs [0024] - [0030]; figure 2 *; | Type: | Patent literature | Publication No.: | US2001028448
[Y] (MORI KENICHIRO [JP]) [Y] 1,13-15,18 * figure 1 * * paragraph [0042] * | Cited in | International search | Type: | Patent literature | Publication No.: | JP2003163158
[X] (PENTAX CORP); | Type: | Patent literature | Publication No.: | JPH04130710
[Y] (HITACHI LTD); | Type: | Patent literature | Publication No.: | JPH10116778
[Y] (CANON KK); | Type: | Patent literature | Publication No.: | JPH09162110
[Y] (NIKON CORP) | Cited in | by applicant | Type: | Patent literature | Publication No.: | JP2001297976
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| Type: | Patent literature | Publication No.: | US6341007
| Type: | Patent literature | Publication No.: | US6400441
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| Type: | Patent literature | Publication No.: | US4666273
| Type: | Patent literature | Publication No.: | JPH11195602
| Type: | Patent literature | Publication No.: | WO03065428
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| Type: | Patent literature | Publication No.: | WO2004107011
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| Type: | Patent literature | Publication No.: | WO9949504
| Type: | Patent literature | Publication No.: | JP2004289126
| Type: | Patent literature | Publication No.: | US2004165159
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| Type: | Patent literature | Publication No.: | WO2004055803
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| Type: | Patent literature | Publication No.: | WO2005029559
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| Type: | Patent literature | Publication No.: | US2005280791
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| Type: | Patent literature | Publication No.: | WO2005059617
| Type: | Patent literature | Publication No.: | WO2005059618
| Type: | Patent literature | Publication No.: | WO2004019128
| Type: | Patent literature | Publication No.: | US2005248856
| Type: | Patent literature | Publication No.: | JPH11135400
| Type: | Patent literature | Publication No.: | JPH10123692
| Type: | Patent literature | Publication No.: | JP2000164504
| Type: | Patent literature | Publication No.: | US6897963
| Type: | Patent literature | Publication No.: | JPH08313842
| Type: | Patent literature | Publication No.: | JP2004304135
| Type: | Patent literature | Publication No.: | US6778257
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