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Extract from the Register of European Patents

EP About this file: EP2010355

EP2010355 - APPARATUS FOR LASER ANNEALING OF LARGE SUBSTRATES AND METHOD FOR LASER ANNEALING OF LARGE SUBSTRATES [Right-click to bookmark this link]
StatusThe application is deemed to be withdrawn
Status updated on  08.03.2013
Database last updated on 03.10.2024
Most recent event   Tooltip08.03.2013Application deemed to be withdrawnpublished on 10.04.2013  [2013/15]
Applicant(s)For all designated states
Carl Zeiss Laser Optics GmbH
Carl-Zeiss-Strasse 22
73447 Oberkochen / DE
[2009/02]
Inventor(s)01 / EGGER, Rafael
Stolzingstrasse 6
81927 München / DE
02 / MARCZUK, Piotr
Reiherstrasse 15
AALEN 73434 / DE
03 / SEIFERT, Wolfgang
Heidestrasse 46
AALEN 73431 / DE
04 / TRITSCHLER, Thorsten
Franz-Liszt-Strasse 7
73430 Aalen / DE
05 / ZENZINGER, Markus
Promenade 25
89073 Ulm / DE
06 / ANDERL, Willi
Posener Strasse 7
HÜTTLINGEN 73460 / DE
07 / WALTHER, Jörg
August-Lämmle-Strasse 9
89547 Gerstetten / DE
 [2009/02]
Representative(s)Carl Zeiss AG - Patentabteilung
Carl-Zeiss-Straße 22
73447 Oberkochen / DE
[N/P]
Former [2009/02]Carl Zeiss AG - Patentabteilung
Carl Zeiss AG c/o Patentabteilung Carl-Zeiss-Straße 22
D-73447 Oberkochen / DE
Application number, filing date07727502.229.03.2007
[2009/02]
WO2007EP53030
Priority number, dateUS20060745333P21.04.2006         Original published format: US 745333 P
[2009/02]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2007122061
Date:01.11.2007
Language:EN
[2007/44]
Type: A1 Application with search report 
No.:EP2010355
Date:07.01.2009
Language:EN
The application published by WIPO in one of the EPO official languages on 01.11.2007 takes the place of the publication of the European patent application.
[2009/02]
Search report(s)International search report - published on:EP01.11.2007
ClassificationIPC:B23K26/06, B23K26/08, G02B27/09, B23K26/073, H01L21/20
[2009/02]
CPC:
G02B27/09 (EP,KR,US); B23K26/0604 (EP,KR); B23K26/0648 (EP,KR);
B23K26/0652 (EP,KR); B23K26/066 (EP,KR); B23K26/0738 (EP,KR);
B23K26/0823 (EP,KR); B23K26/083 (EP,KR); H01L21/02422 (EP,KR);
H01L21/02532 (EP,KR); H01L21/02678 (EP,KR); H01L21/02686 (EP,KR);
H01L21/02691 (EP,KR,US); H01L27/1285 (EP,KR) (-)
Designated contracting statesDE [2009/22]
Former [2009/02]AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HU,  IE,  IS,  IT,  LI,  LT,  LU,  LV,  MC,  MT,  NL,  PL,  PT,  RO,  SE,  SI,  SK,  TR 
Extension statesALNot yet paid
BANot yet paid
HRNot yet paid
MKNot yet paid
RSNot yet paid
TitleGerman:VORRICHTUNG ZUM LASERAUSGLÜHEN GROSSER SUBSTRATE UND VERFAHREN ZUM LASERAUSGLÜHEN GROSSER SUBSTRATE[2009/02]
English:APPARATUS FOR LASER ANNEALING OF LARGE SUBSTRATES AND METHOD FOR LASER ANNEALING OF LARGE SUBSTRATES[2009/02]
French:APPAREIL ET PROCÉDÉ DE RECUIT AU LASER DE GRANDS SUBSTRATS[2009/02]
Entry into regional phase10.11.2008National basic fee paid 
10.11.2008Designation fee(s) paid 
10.11.2008Examination fee paid 
Examination procedure10.11.2008Amendment by applicant (claims and/or description)
10.11.2008Examination requested  [2009/02]
22.11.2008Loss of particular rights, legal effect: designated state(s)
08.01.2009Despatch of communication of loss of particular rights: designated state(s) AT, BE, BG, CH, CY, CZ, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, MT, NL, PL, PT, RO, SE, SI, SK, TR
02.10.2012Application deemed to be withdrawn, date of legal effect  [2013/15]
09.11.2012Despatch of communication that the application is deemed to be withdrawn, reason: renewal fee not paid in time  [2013/15]
Fees paidRenewal fee
13.03.2009Renewal fee patent year 03
26.03.2010Renewal fee patent year 04
24.03.2011Renewal fee patent year 05
Penalty fee
Additional fee for renewal fee
31.03.201206   M06   Not yet paid
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Cited inInternational search[XY]JPH10209069  (SUMITOMO HEAVY INDUSTRIES) [X] 1-10 * abstract * * paragraphs [0007] , [0010] * [Y] 2,3,8-10;
 [X]US6335509  (JUNG YUN HO [KR]) [X] 11,17,18,22 * column 3, line 41 - column 4, line 32 * * column 4, line 59 - column 5, line 10 * * figures 3,6 *;
 [X]US2003089691  (TANAKA KOICHIRO [JP]) [X] 11,17,18,22 * figures 1a,1b,2 ** paragraph [0048] - paragraph [0053] *;
 [X]US2003112322  (TANAKA KOICHIRO [JP]) [X] 11-22 * paragraphs [0015] , [0016] * * paragraph [0050] - paragraph [0070] * * figures 1,3 *;
 [X]US6717105  (OKAMOTO TATSUKI [JP], et al) [X] 11,17,18,22 * column 4, line 48 - column 5, line 35 * * column 8, line 49 - column 9, line 12 * * figures 1,5 *;
 [XY]US2004084427  (TALWAR SOMIT [US], et al) [X] 1,4-7 * figures 1a-1c,12 * * paragraphs [0035] , [0044] - [0049] * * paragraph [0124] - paragraph [0125] * [Y] 2,3,8-10;
 [A]US2005170572  (HONGO MIKIO [JP], et al) [A] 1-10 * paragraph [0017] - paragraph [0018] *;
 [Y]US2005247684  (TANAKA KOICHIRO [JP]) [Y] 2,3,8-10 * paragraph [0043] - paragraph [0045] * * paragraph [0049] - paragraph [0050] * * figures 1,2 *
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.