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EP2032738
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EP About this file: EP2032738
| EP2032738 - METHOD AND APPARATUS FOR ATOMIC LAYER DEPOSITION USING AN ATMOSPHERIC PRESSURE GLOW DISCHARGE PLASMA [Right-click to bookmark this link] | Status | The application has been refused Status updated on 01.03.2019 Database last updated on 03.09.2024 | |
| Former | Examination is in progress Status updated on 09.11.2016 | Most recent event Tooltip | 01.03.2019 | Refusal of application | published on 03.04.2019 [2019/14] | Applicant(s) | For all designated states Fuji Film Manufacturing Europe B.V. Oudenstaart 1 5047 TK Tilburg / NL | [2009/11] | Inventor(s) | 01 /
DE VRIES, Hindrik Willem Hooglandstraat 21 5045 CM Tilburg / NL | 02 /
KESSELS, W., M., M. Bijsterveldenlaan 13 5045 ZZ Tilburg / NL | 03 /
CREATORE, Mariadriana Westerduinweg 3 1755 LE Petten / NL | 04 /
VAN DE SANDEN, Mauritius, Cornelius, Maria P.F. Bergmansstraat 4 NL-5017 JH Tilburg / NL | [2012/49] |
| Former [2009/11] | 01 /
DE VRIES, Hindrik Willem Hooglandstraat 21 5045 CM Tilburg / NL | ||
| 02 /
KESSELS, W., M., M. Bijsterveldenlaan 13 5045 ZZ Tilburg / NL | |||
| 03 /
CREATORE, Mariadriana Valenberg 10 NL-5508 BZ Veldhoven / NL | |||
| 04 /
VAN DE SANDEN, Mauritius, Cornelius, Maria P.F. Bergmansstraat 4 NL-5017 JH Tilburg / NL | Representative(s) | Nederlandsch Octrooibureau P.O. Box 29720 2502 LS The Hague / NL | [2013/28] |
| Former [2009/11] | Ketelaars, Maarten F.J.M., et al Nederlandsch Octrooibureau J.W. Frisolaan 13 2517 JS Den Haag / NL | Application number, filing date | 07747493.0 | 07.06.2007 | [2009/11] | WO2007NL50270 | Priority number, date | EP20060115603 | 16.06.2006 Original published format: EP 06115603 | [2009/11] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2007145513 | Date: | 21.12.2007 | Language: | EN | [2007/51] | Type: | A1 Application with search report | No.: | EP2032738 | Date: | 11.03.2009 | Language: | EN | The application published by WIPO in one of the EPO official languages on 21.12.2007 takes the place of the publication of the European patent application. | [2009/11] | Search report(s) | International search report - published on: | EP | 21.12.2007 | Classification | IPC: | C23C16/455, C23C16/509 | [2009/11] | CPC: |
C23C16/45551 (EP,US);
C23C16/45542 (EP,US);
C23C16/45595 (EP,US);
C23C16/515 (EP,US)
| Designated contracting states | DE, FR, GB, NL [2009/28] |
| Former [2009/11] | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MT, NL, PL, PT, RO, SE, SI, SK, TR | Extension states | AL | Not yet paid | BA | Not yet paid | HR | Not yet paid | MK | Not yet paid | RS | Not yet paid | Title | German: | VERRFAHREN UND VORRICHTUNG ZUR ATOMLAGENABSCHEIDUNG UNTER VERWENDUNG EINES ATMOSPHÄRENDRUCKGLIMMENTLADUNGSPLASMAS | [2009/11] | English: | METHOD AND APPARATUS FOR ATOMIC LAYER DEPOSITION USING AN ATMOSPHERIC PRESSURE GLOW DISCHARGE PLASMA | [2009/11] | French: | PROCÉDÉ ET APPAREIL POUR LA DÉPOSITION D'UNE COUCHE ATOMIQUE UTILISANT UN PLASMA À DÉCHARGE LUMINESCENTE À PRESSION ATMOSPHÉRIQUE | [2009/11] | Entry into regional phase | 12.12.2008 | National basic fee paid | 12.12.2008 | Designation fee(s) paid | 12.12.2008 | Examination fee paid | Examination procedure | 12.12.2008 | Amendment by applicant (claims and/or description) | 12.12.2008 | Examination requested [2009/11] | 17.01.2009 | Loss of particular rights, legal effect: designated state(s) | 20.02.2009 | Despatch of communication of loss of particular rights: designated state(s) AT, BE, BG, CH, CY, CZ, DK, EE, ES, FI, GR, HU, IE, IS, IT, LT, LU, LV, MC, MT, PL, PT, RO, SE, SI, SK, TR | 28.09.2012 | Despatch of a communication from the examining division (Time limit: M04) | 03.01.2013 | Reply to a communication from the examining division | 09.04.2014 | Despatch of a communication from the examining division (Time limit: M04) | 15.07.2014 | Reply to a communication from the examining division | 20.11.2015 | Despatch of a communication from the examining division (Time limit: M04) | 04.02.2016 | Reply to a communication from the examining division | 31.10.2016 | Despatch of a communication from the examining division (Time limit: M04) | 10.02.2017 | Reply to a communication from the examining division | 25.10.2018 | Cancellation of oral proceeding that was planned for 30.11.2018 | 13.11.2018 | Despatch of communication that the application is refused, reason: substantive examination [2019/14] | 23.11.2018 | Application refused, date of legal effect [2019/14] | 30.11.2018 | Date of oral proceedings (cancelled) | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 28.09.2012 | Fees paid | Renewal fee | 31.03.2009 | Renewal fee patent year 03 | 29.04.2010 | Renewal fee patent year 04 | 26.04.2011 | Renewal fee patent year 05 | 31.03.2012 | Renewal fee patent year 06 | 22.04.2013 | Renewal fee patent year 07 | 31.03.2014 | Renewal fee patent year 08 | 20.05.2015 | Renewal fee patent year 09 | 29.03.2016 | Renewal fee patent year 10 | 27.06.2017 | Renewal fee patent year 11 | 27.06.2018 | Renewal fee patent year 12 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | International search | [XY]US6464779 (POWELL RONALD A [US], et al) [X] 1,4-8,12,16,17,21,22,30,33,36,38 * column 2, line 10 - line 57 * * column 5, line 10 - line 34 * * column 6, line 5 - line 33; claims 1-20 * [Y] 18-20,31,32; | [A]WO2004019381 (SIGMA TECHNOLOGIES INTERNATION [US], et al) [A] 1-38* claims 1-32 *; | [AY]EP1403902 (FUJI PHOTO FILM BV [NL]) [A] 1-38 * figure 2; claims 1-38 * [Y] 2,3,18-20,31,32,34,35,37; | [XAY]US2005084610 (SELITSER SIMON I [US]) [X] 1,4-17,21-28,30,33,36,38 * the whole document * [A] 29 [Y] 2,3,18-20,31,32,34,35,37 | Examination | US2002098627 | US2003082412 | US6774569 | US2004221798 | US2005208215 | by applicant | WO0115220 | US2003049375 | EP1383359 | US6774569 | US2004219784 | US2005084610 | EP1547123 | EP1626613 |