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EP1999781
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EP About this file: EP1999781
| EP1999781 - DRY ETCH STOP PROCESS FOR ELIMINATING ELECTRICAL SHORTING IN MRAM DEVICE STRUCTURES [Right-click to bookmark this link] | Status | The application has been withdrawn Status updated on 15.05.2009 Database last updated on 02.11.2024 | Most recent event Tooltip | 15.05.2009 | Withdrawal of application | published on 17.06.2009 [2009/25] | Applicant(s) | For all designated states TEGAL CORPORATION 2201 South McDowell Boulevard Petaluma, CA 94954 / US | [2008/50] | Inventor(s) | 01 /
DITIZIO, Robert 1901 Rainier Circle Petaluma, CA 94954 / US | [2008/50] | Representative(s) | Jennings, Michael John, et al AA Thornton IP LLP 8th Floor, 125 Old Broad Street London EC2N 1AR / GB | [N/P] |
| Former [2008/50] | Jennings, Michael John, et al A.A. Thornton & Co. 235 High Holborn GB-London WC1V 7LE / GB | Application number, filing date | 07753250.5 | 16.03.2007 | [2008/50] | WO2007US06607 | Priority number, date | US20060783157P | 16.03.2006 Original published format: US 783157 P | US20070724556 | 14.03.2007 Original published format: US 724556 | [2008/50] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | WO2007109117 | Date: | 27.09.2007 | Language: | EN | [2007/39] | Type: | A2 Application without search report | No.: | EP1999781 | Date: | 10.12.2008 | Language: | EN | The application published by WIPO in one of the EPO official languages on 27.09.2007 takes the place of the publication of the European patent application. | [2008/50] | Search report(s) | International search report - published on: | US | 13.12.2007 | Classification | IPC: | H01L21/00 | [2008/50] | CPC: |
H10N50/01 (EP,KR);
H10N52/00 (KR)
| Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MT, NL, PL, PT, RO, SE, SI, SK, TR [2008/50] | Extension states | AL | Not yet paid | BA | Not yet paid | HR | Not yet paid | MK | Not yet paid | RS | Not yet paid | Title | German: | TROCKENÄTZVERFAHREN ZUR BESEITIGUNG ELEKTRISCHER KURZSCHLÜSSE BEI MRAM-GERÄTESTRUKTUREN | [2008/50] | English: | DRY ETCH STOP PROCESS FOR ELIMINATING ELECTRICAL SHORTING IN MRAM DEVICE STRUCTURES | [2008/50] | French: | PROCEDE D'ARRET DE GRAVURE A SEC POUR ELIMINER UN COURT-CIRCUIT ELECTRIQUE DANS DES STRUCTURES DE DISPOSITIF MRAM | [2008/50] | Entry into regional phase | 06.10.2008 | National basic fee paid | 06.10.2008 | Search fee paid | 06.10.2008 | Designation fee(s) paid | 06.10.2008 | Examination fee paid | Examination procedure | 06.10.2008 | Amendment by applicant (claims and/or description) | 06.10.2008 | Examination requested [2008/50] | 07.05.2009 | Application withdrawn by applicant [2009/25] | Fees paid | Renewal fee | 23.12.2008 | Renewal fee patent year 03 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | International search | [Y]US3911579 (LANE GEORGE C, et al); | [Y]US5980686 (GOTO HARUHIRO H [US]); | [X]US6114719 (DILL FREDERICK HAYES [US], et al); | [Y]US6139702 (YANG CHAN-LON [TW], et al); | [Y]US6281538 (SLAUGHTER JON [US]); | [Y]US6326637 (PARKIN STUART STEPHEN PAPWORTH [US], et al); | [A]US6531404 (NALLAN PADMAPANI [US], et al); | [Y]US2004242005 (YING CHENTSAU [US], et al); | [Y]US2005051820 (STOJAKOVIC GEORGE [US], et al) |