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EP1997136
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EP About this file: EP1997136
| EP1997136 - APPARATUS AND METHOD FOR CARRYING SUBSTRATES [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 15.12.2017 Database last updated on 13.11.2024 | |
| Former | Examination is in progress Status updated on 18.04.2017 | Most recent event Tooltip | 15.12.2017 | Application deemed to be withdrawn | published on 17.01.2018 [2018/03] | Applicant(s) | For all designated states Plasma-Therm, LLC 10050 16th Street North, Suite 200 St. Petersburg, FL 33716 / US | [2013/29] |
| Former [2008/49] | For all designated states Oerlikon USA Inc. 10050 16th Street North St. Petersburg, FL 33716 / US | Inventor(s) | 01 /
JOHNSON, David 920 Belted Kingfisher Drive Palm Harbor, FL 34683 / US | 02 /
LAI, Shouliang 11909 Keating Drive Tampa, FL 33626 / US | [2008/49] | Representative(s) | Schmid, Wolfgang Lorenz & Kollegen Patentanwälte Partnerschaftsgesellschaft mbB Alte Ulmer Strasse 2 89522 Heidenheim / DE | [N/P] |
| Former [2008/49] | Schmid, Wolfgang Lorenz & Kollegen Patent- und Rechtsanwaltskanzlei Alte Ulmer Strasse 2 D-89522 Heidenheim / DE | Application number, filing date | 07758351.6 | 12.03.2007 | [2008/49] | WO2007US63794 | Priority number, date | US20060783614P | 17.03.2006 Original published format: US 783614 P | US20070681805 | 05.03.2007 Original published format: US 681805 | [2008/49] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | WO2007109448 | Date: | 27.09.2007 | Language: | EN | [2007/39] | Type: | A2 Application without search report | No.: | EP1997136 | Date: | 03.12.2008 | Language: | EN | The application published by WIPO in one of the EPO official languages on 27.09.2007 takes the place of the publication of the European patent application. | [2008/49] | Search report(s) | International search report - published on: | EP | 15.11.2007 | Classification | IPC: | H01L21/683 | [2008/49] | CPC: |
H01L21/6831 (EP,US);
B25B11/00 (US);
H01L21/68771 (EP,US);
Y10T279/23 (EP,US);
Y10T29/49998 (EP,US)
| Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MT, NL, PL, PT, RO, SE, SI, SK, TR [2008/49] | Title | German: | VORRICHTUNG UND VERFAHREN ZUR FÖRDERUNG VON SUBSTRATEN | [2008/49] | English: | APPARATUS AND METHOD FOR CARRYING SUBSTRATES | [2008/49] | French: | APPAREIL ET PROCEDE DESTINES A SUPPORTER DES SUBSTRATS | [2008/49] | Entry into regional phase | 06.09.2008 | National basic fee paid | 06.09.2008 | Designation fee(s) paid | 06.09.2008 | Examination fee paid | Examination procedure | 04.09.2007 | Request for preliminary examination filed International Preliminary Examining Authority: US | 06.09.2008 | Amendment by applicant (claims and/or description) | 06.09.2008 | Examination requested [2008/49] | 11.11.2010 | Despatch of a communication from the examining division (Time limit: M06) | 20.05.2011 | Reply to a communication from the examining division | 06.04.2017 | Despatch of a communication from the examining division (Time limit: M04) | 17.08.2017 | Application deemed to be withdrawn, date of legal effect [2018/03] | 12.09.2017 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2018/03] | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 11.11.2010 | Fees paid | Renewal fee | 21.03.2009 | Renewal fee patent year 03 | 23.03.2010 | Renewal fee patent year 04 | 30.09.2011 | Renewal fee patent year 05 | 14.03.2012 | Renewal fee patent year 06 | 11.03.2013 | Renewal fee patent year 07 | 19.02.2014 | Renewal fee patent year 08 | 10.03.2015 | Renewal fee patent year 09 | 10.03.2016 | Renewal fee patent year 10 | 10.03.2017 | Renewal fee patent year 11 | Penalty fee | Additional fee for renewal fee | 31.03.2011 | 05 M06 Fee paid on 30.09.2011 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | International search | [YA]US5382311 (ISHIKAWA KENJI [JP], et al) [Y] 5,13,29-31 * abstract * * column 4, lines 46-58 * [A] 1,6,15; | [X]US5703493 (WEEKS ANTHONY R [US], et al) [X] 1-3,6-10,15-17,19,22-25 * abstract * * column 1, lines 65-67 * * column 2, lines 30-67 *; | [XAY]US6187134 (CHOW EUGENE M [US], et al) [X] 1-4,6,9-12,14,15,19,22-28 * column 2, lines 51-58 * * column 5, lines 17-25 * * column 5, lines 45-65 * * claim 18 * * figures 3a-3c,5a-5d,9,10 * [A] 18,20,21 [Y] 5,13,29-31; | [A]US2004187791 (BUSSE KARL-HERMANN [DE], et al) [A] 1,6,15 * abstract *; | [A]US2005018169 (MATSUI SHIN [JP]) [A] 1,6,15* paragraph [0067] * | Examination | US2005000453 |