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EP2022091
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EP About this file: EP2022091
| EP2022091 - METHOD FOR FABRICATING A GATE DIELECTRIC OF A FIELD EFFECT TRANSISTOR [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 14.05.2010 Database last updated on 19.10.2024 | Most recent event Tooltip | 14.05.2010 | Application deemed to be withdrawn | published on 16.06.2010 [2010/24] | Applicant(s) | For all designated states Applied Materials, Inc. 3050 Bowers Avenue Santa Clara, CA 95054 / US | [N/P] |
| Former [2009/07] | For all designated states Applied Materials, Inc. 3050 Bowers Avenue Santa Clara, CA 95054 / US | Inventor(s) | 01 /
CHUA, Thai Cheng 19351 Calle De Barcelona Cupertino, CA 95014 / US | 02 /
CZARNIK, Cory 12468 Titus Ave. Saratoga, CA 95070 / US | 03 /
HEGEDUS, Andreas G. 149 Commonwealth Drive Menlo Park, CA 94025 / US | 04 /
OLSEN, Christopher Sean 38642 Moore Dr. Fremont, CA 95363 / US | 05 /
AHMED, Khaled Z. 2366 W. Broadway Anaheim, CA 92804 / US | 06 /
KRAUS, Philip Allan 2691 Villa Cortona Way San Jose, CA 95125 / US | [2009/12] |
| Former [2009/07] | 01 /
CHUA, Thai Cheng 19351 Calle De Barcelona Cupertino, CA 95014 / US | ||
| 02 /
CZARNIK, Cory 12468 Titus Ave. Saratoga, CA 95070 / US | |||
| 03 /
HEGEDUS, Andreas G. 149 Commonwealth Drive Menlo Park, CA 94025 / US | |||
| 04 /
OLSEN, Christopher Sean 38642 Moore Dr. Fremont, CA 95363 / US | |||
| 05 /
AHMED, Khaled Z. 2366 W. Broadway Anaheim, CA 92804 / US | |||
| 06 /
KRAUS, Philip Allan 5697 Makati Circle, Apt. B San Jose, CA 95123 / US | Representative(s) | Zimmermann & Partner Patentanwälte mbB Postfach 330 920 80069 München / DE | [N/P] |
| Former [2009/07] | Zimmermann & Partner Postfach 330 920 80069 München / DE | Application number, filing date | 07783126.1 | 02.05.2007 | [2009/07] | WO2007US68056 | Priority number, date | US20060381960 | 05.05.2006 Original published format: US 381960 | [2009/07] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2007131051 | Date: | 15.11.2007 | Language: | EN | [2007/46] | Type: | A1 Application with search report | No.: | EP2022091 | Date: | 11.02.2009 | Language: | EN | The application published by WIPO in one of the EPO official languages on 15.11.2007 takes the place of the publication of the European patent application. | [2009/07] | Search report(s) | International search report - published on: | US | 15.11.2007 | Classification | IPC: | H01L21/8234, H01L21/336 | [2009/07] | CPC: |
H01L21/0214 (EP,KR,US);
H01L21/28185 (EP,KR,US);
H01L21/3144 (US);
H01L21/02164 (EP,KR,US);
H01L21/0217 (EP,KR,US);
H01L21/022 (EP,KR,US);
H01L21/02211 (EP,KR,US);
H01L21/02238 (EP,KR,US);
H01L21/02252 (EP,KR,US);
H01L21/02255 (EP,US);
H01L21/02271 (EP,US);
H01L21/02274 (EP,KR,US);
H01L21/02332 (EP,US);
H01L21/02337 (EP,KR,US);
H01L21/0234 (EP,KR,US);
H01L21/28202 (EP,KR,US);
H01L21/31662 (US);
H01L21/3185 (US);
| Designated contracting states | DE, FR [2009/25] |
| Former [2009/07] | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MT, NL, PL, PT, RO, SE, SI, SK, TR | Extension states | AL | Not yet paid | BA | Not yet paid | HR | Not yet paid | MK | Not yet paid | RS | Not yet paid | Title | German: | VERFAHREN ZUR HERSTELLUNG EINES GATE-DIELEKTRIKUMS EINES FELDEFFEKTTRANSISTORS | [2009/07] | English: | METHOD FOR FABRICATING A GATE DIELECTRIC OF A FIELD EFFECT TRANSISTOR | [2009/07] | French: | PROCEDE DE FABRICATION DIELECTRIQUE DE GRILLE POUR TRANSISTOR A EFFET DE CHAMP | [2009/07] | Entry into regional phase | 27.11.2008 | National basic fee paid | 27.11.2008 | Search fee paid | 27.11.2008 | Designation fee(s) paid | 27.11.2008 | Examination fee paid | Examination procedure | 27.11.2008 | Amendment by applicant (claims and/or description) | 27.11.2008 | Examination requested [2009/07] | 06.12.2008 | Loss of particular rights, legal effect: designated state(s) | 13.01.2009 | Despatch of communication of loss of particular rights: designated state(s) AT, BE, BG, CH, CY, CZ, DK, EE, ES, FI, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, MT, NL, PL, PT, RO, SE, SI, SK, TR | 02.12.2009 | Application deemed to be withdrawn, date of legal effect [2010/24] | 25.01.2010 | Despatch of communication that the application is deemed to be withdrawn, reason: renewal fee not paid in time [2010/24] | Fees paid | Penalty fee | Additional fee for renewal fee | 31.05.2009 | 03 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | International search | [Y]US6818517 (MAES JAN WILLEM [BE]); | [Y]US6821868 (CHENG JUING-YI [TW], et al); | [X]US2005136604 (AL-BAYATI AMIR [US], et al); | [X]US6991989 (LEE LURNG-SHEHNG [TW], et al) |