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Extract from the Register of European Patents

EP About this file: EP2096658

EP2096658 - Discharge lamp, in particular for exposure apparatus [Right-click to bookmark this link]
Former [2009/36]DISCHARGE LAMP, LIGHT SOURCE APPARATUS, EXPOSURE APPARATUS AND EXPOSURE APPARATUS MANUFACTURING METHOD
[2012/29]
StatusNo opposition filed within time limit
Status updated on  01.11.2013
Database last updated on 03.09.2024
Most recent event   Tooltip17.07.2015Lapse of the patent in a contracting state
New state(s): HU, LU		published on 19.08.2015  [2015/34]
Applicant(s)For all designated states
Nikon Corporation
12-1, Yurakucho 1-chome
Chiyoda-ku
Tokyo 100-8331 / JP
[N/P]
Former [2010/30]For all designated states
Nikon Corporation
12-1, Yurakucho 1-chome Chiyoda-ku
Tokyo 100-8331 / JP
Former [2009/36]For all designated states
Nikon Corporation
2-3, Marunouchi 3-chome Chiyoda-ku
Tokyo 100-8331 / JP
Inventor(s)01 / SHIRASU, Hiroshi
c/o NIKON CORPORATION
Intellectual Property Headquarter
12-1, Yurakucho 1-chome
Chiyoda-ku Tokyo 100-8331 / JP
02 / AOKI, Yasuo
c/o NIKON CORPORATION
Intellectual Property Headquarter
12-1, Yurakucho 1-chome
Chiyoda-ku Tokyo 100-8331 / JP
03 / KOYAMA, Motoo
c/o NIKON CORPORATION
Intellectual Property Headquarter
12-1, Yurakucho 1-chome
Chiyoda-ku Tokyo 100-8331 / JP
04 / KIKUCHI, Takayuki
c/o NIKON CORPORATION
Intellectual Property Headquarter
12-1, Yurakucho 1-chome
Chiyoda-ku Tokyo 100-8331 / JP
 [2012/52]
Former [2009/36]01 / SHIRASU, Hiroshi
NIKON CORPORATION Intellectual Property Department 2-3 Marunouchi 3-chome
Chiyoda-ku Tokyo 100-8331 / JP
02 / AOKI, Yasuo
NIKON CORPORATION Intellectual Property Department 2-3 Marunouchi 3-chome
Chiyoda-ku Tokyo 100-8331 / JP
03 / KOYAMA, Motoo
NIKON CORPORATION Intellectual Property Department 2-3 Marunouchi 3-chome
Chiyoda-ku Tokyo 100-8331 / JP
04 / KIKUCHI, Takayuki
NIKON CORPORATION Intellectual Property Department 2-3 Marunouchi 3-chome
Chiyoda-ku Tokyo 100-8331 / JP
Representative(s)Hooiveld, Arjen Jan Winfried, et al
Arnold & Siedsma
Bezuidenhoutseweg 57
2594 AC The Hague / NL
[N/P]
Former [2009/36]Hooiveld, Arjen Jan Winfried, et al
Arnold & Siedsma Sweelinckplein 1
2517 GK Den Haag / NL
Application number, filing date07806424.330.08.2007
[2009/36]
WO2007JP66947
Priority number, dateJP2006023725201.09.2006         Original published format: JP 2006237252
JP2007000646215.01.2007         Original published format: JP 2007006462
JP2007012745111.05.2007         Original published format: JP 2007127451
[2009/36]
Filing languageJA
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2008026709
Date:06.03.2008
Language:JA
[2008/10]
Type: A1 Application with search report 
No.:EP2096658
Date:02.09.2009
Language:EN
[2009/36]
Type: B1 Patent specification 
No.:EP2096658
Date:26.12.2012
Language:EN
[2012/52]
Search report(s)International search report - published on:JP06.03.2008
(Supplementary) European search report - dispatched on:EP20.10.2010
ClassificationIPC:H01J61/52, H01J5/56, F21V19/00
[2012/29]
CPC:
F21V19/006 (EP,KR,US); G03F7/70016 (EP,KR,US); G03F7/70833 (KR);
H01J5/56 (EP,KR,US); H01J61/523 (EP,KR,US); H01J61/822 (EP,KR,US)
Former IPC [2010/46]H01J61/52, H01J5/50, F21V29/00, H01J61/86, H01L21/027, H01R33/22
Former IPC [2009/36]H01J5/50, F21V29/00, H01J61/52, H01J61/86, H01L21/027, H01R33/22
Designated contracting statesAT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MT,   NL,   PL,   PT,   RO,   SE,   SI,   SK,   TR [2009/36]
TitleGerman:Entladungslampe, insbesondere für Belichtungsvorrichtung[2012/29]
English:Discharge lamp, in particular for exposure apparatus[2012/29]
French:Lampe à décharge, notamment pour un'appareil d'exposition[2012/29]
Former [2009/36]ENTLADUNGSLAMPE, LICHTQUELLENVORRICHTUNG, BELICHTUNGSVORRICHTUNG UND BELICHTUNGSVORRICHTUNGSHERSTELLUNGSVERFAHREN
Former [2009/36]DISCHARGE LAMP, LIGHT SOURCE APPARATUS, EXPOSURE APPARATUS AND EXPOSURE APPARATUS MANUFACTURING METHOD
Former [2009/36]LAMPE À DÉCHARGE, APPAREIL DE SOURCE DE LUMIÈRE, APPAREIL D'EXPOSITION ET PROCÉDÉ DE FABRICATION DE L'APPAREIL D'EXPOSITION
Entry into regional phase02.04.2009Translation filed 
30.03.2009National basic fee paid 
30.03.2009Search fee paid 
30.03.2009Designation fee(s) paid 
30.03.2009Examination fee paid 
Examination procedure30.03.2009Examination requested  [2009/36]
09.05.2011Amendment by applicant (claims and/or description)
06.02.2012Despatch of a communication from the examining division (Time limit: M04)
06.06.2012Reply to a communication from the examining division
20.07.2012Communication of intention to grant the patent
14.11.2012Fee for grant paid
14.11.2012Fee for publishing/printing paid
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  06.02.2012
Opposition(s)27.09.2013No opposition filed within time limit [2013/49]
Request for further processing for:The application is deemed to be withdrawn due to failure to file the translation
27.07.2009Request for further processing filed
27.07.2009Full payment received (date of receipt of payment)
Fees paidRenewal fee
30.03.2009Renewal fee patent year 03
31.08.2010Renewal fee patent year 04
30.08.2011Renewal fee patent year 05
29.08.2012Renewal fee patent year 06
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU30.08.2007
AT26.12.2012
BE26.12.2012
CY26.12.2012
CZ26.12.2012
DK26.12.2012
EE26.12.2012
FI26.12.2012
IT26.12.2012
LT26.12.2012
LV26.12.2012
MC26.12.2012
MT26.12.2012
NL26.12.2012
PL26.12.2012
RO26.12.2012
SE26.12.2012
SI26.12.2012
SK26.12.2012
TR26.12.2012
BG26.03.2013
GR27.03.2013
ES06.04.2013
IS26.04.2013
PT26.04.2013
GB30.08.2013
IE30.08.2013
LU30.08.2013
CH31.08.2013
LI31.08.2013
FR02.09.2013
[2015/34]
Former [2015/32]AT26.12.2012
BE26.12.2012
CY26.12.2012
CZ26.12.2012
DK26.12.2012
EE26.12.2012
FI26.12.2012
IT26.12.2012
LT26.12.2012
LV26.12.2012
MC26.12.2012
MT26.12.2012
NL26.12.2012
PL26.12.2012
RO26.12.2012
SE26.12.2012
SI26.12.2012
SK26.12.2012
TR26.12.2012
BG26.03.2013
GR27.03.2013
ES06.04.2013
IS26.04.2013
PT26.04.2013
GB30.08.2013
IE30.08.2013
CH31.08.2013
LI31.08.2013
FR02.09.2013
Former [2014/37]AT26.12.2012
BE26.12.2012
CY26.12.2012
CZ26.12.2012
DK26.12.2012
EE26.12.2012
FI26.12.2012
IT26.12.2012
LT26.12.2012
LV26.12.2012
MC26.12.2012
NL26.12.2012
PL26.12.2012
RO26.12.2012
SE26.12.2012
SI26.12.2012
SK26.12.2012
BG26.03.2013
GR27.03.2013
ES06.04.2013
IS26.04.2013
PT26.04.2013
GB30.08.2013
IE30.08.2013
CH31.08.2013
LI31.08.2013
FR02.09.2013
Former [2014/34]AT26.12.2012
BE26.12.2012
CY26.12.2012
CZ26.12.2012
DK26.12.2012
EE26.12.2012
FI26.12.2012
IT26.12.2012
LT26.12.2012
LV26.12.2012
MC26.12.2012
NL26.12.2012
PL26.12.2012
RO26.12.2012
SE26.12.2012
SI26.12.2012
SK26.12.2012
BG26.03.2013
GR27.03.2013
ES06.04.2013
IS26.04.2013
PT26.04.2013
GB30.08.2013
IE30.08.2013
CH31.08.2013
LI31.08.2013
Former [2014/33]AT26.12.2012
BE26.12.2012
CY26.12.2012
CZ26.12.2012
DK26.12.2012
EE26.12.2012
FI26.12.2012
IT26.12.2012
LT26.12.2012
LV26.12.2012
MC26.12.2012
NL26.12.2012
PL26.12.2012
RO26.12.2012
SE26.12.2012
SI26.12.2012
SK26.12.2012
BG26.03.2013
GR27.03.2013
ES06.04.2013
IS26.04.2013
PT26.04.2013
IE30.08.2013
CH31.08.2013
LI31.08.2013
Former [2014/20]AT26.12.2012
BE26.12.2012
CY26.12.2012
CZ26.12.2012
DK26.12.2012
EE26.12.2012
FI26.12.2012
IT26.12.2012
LT26.12.2012
LV26.12.2012
MC26.12.2012
NL26.12.2012
PL26.12.2012
RO26.12.2012
SE26.12.2012
SI26.12.2012
SK26.12.2012
BG26.03.2013
GR27.03.2013
ES06.04.2013
IS26.04.2013
PT26.04.2013
CH31.08.2013
LI31.08.2013
Former [2014/03]AT26.12.2012
BE26.12.2012
CY26.12.2012
CZ26.12.2012
DK26.12.2012
EE26.12.2012
FI26.12.2012
IT26.12.2012
LT26.12.2012
LV26.12.2012
NL26.12.2012
PL26.12.2012
RO26.12.2012
SE26.12.2012
SI26.12.2012
SK26.12.2012
BG26.03.2013
GR27.03.2013
ES06.04.2013
IS26.04.2013
PT26.04.2013
Former [2013/52]AT26.12.2012
BE26.12.2012
CY26.12.2012
CZ26.12.2012
DK26.12.2012
EE26.12.2012
FI26.12.2012
LT26.12.2012
LV26.12.2012
NL26.12.2012
PL26.12.2012
RO26.12.2012
SE26.12.2012
SI26.12.2012
SK26.12.2012
BG26.03.2013
GR27.03.2013
ES06.04.2013
IS26.04.2013
PT26.04.2013
Former [2013/48]AT26.12.2012
BE26.12.2012
CZ26.12.2012
DK26.12.2012
EE26.12.2012
FI26.12.2012
LT26.12.2012
LV26.12.2012
NL26.12.2012
PL26.12.2012
RO26.12.2012
SE26.12.2012
SI26.12.2012
SK26.12.2012
BG26.03.2013
GR27.03.2013
ES06.04.2013
IS26.04.2013
PT26.04.2013
Former [2013/40]AT26.12.2012
BE26.12.2012
CZ26.12.2012
EE26.12.2012
FI26.12.2012
LT26.12.2012
LV26.12.2012
NL26.12.2012
PL26.12.2012
RO26.12.2012
SE26.12.2012
SI26.12.2012
SK26.12.2012
BG26.03.2013
GR27.03.2013
ES06.04.2013
IS26.04.2013
PT26.04.2013
Former [2013/37]AT26.12.2012
BE26.12.2012
CZ26.12.2012
EE26.12.2012
FI26.12.2012
LT26.12.2012
LV26.12.2012
NL26.12.2012
PL26.12.2012
RO26.12.2012
SE26.12.2012
SI26.12.2012
SK26.12.2012
BG26.03.2013
GR27.03.2013
ES06.04.2013
IS26.04.2013
Former [2013/36]AT26.12.2012
BE26.12.2012
CZ26.12.2012
EE26.12.2012
FI26.12.2012
LT26.12.2012
LV26.12.2012
PL26.12.2012
SE26.12.2012
SI26.12.2012
SK26.12.2012
BG26.03.2013
GR27.03.2013
ES06.04.2013
IS26.04.2013
Former [2013/35]BE26.12.2012
CZ26.12.2012
EE26.12.2012
FI26.12.2012
LT26.12.2012
LV26.12.2012
SE26.12.2012
SI26.12.2012
SK26.12.2012
BG26.03.2013
GR27.03.2013
IS26.04.2013
Former [2013/34]BE26.12.2012
FI26.12.2012
LT26.12.2012
LV26.12.2012
SE26.12.2012
SI26.12.2012
BG26.03.2013
GR27.03.2013
IS26.04.2013
Former [2013/33]BE26.12.2012
FI26.12.2012
LT26.12.2012
LV26.12.2012
SE26.12.2012
SI26.12.2012
GR27.03.2013
Former [2013/26]FI26.12.2012
LT26.12.2012
LV26.12.2012
SE26.12.2012
SI26.12.2012
GR27.03.2013
Former [2013/24]FI26.12.2012
LT26.12.2012
LV26.12.2012
SE26.12.2012
GR27.03.2013
Former [2013/23]FI26.12.2012
LT26.12.2012
LV26.12.2012
SE26.12.2012
Former [2013/22]FI26.12.2012
LT26.12.2012
SE26.12.2012
Former [2013/21]LT26.12.2012
SE26.12.2012
Former [2013/20]LT26.12.2012
Documents cited:Search[A]GB359468  (SIEMENS & HALSKE AG) [A] 68* figures 1-3 *;
 [A]US5493168  (SEEDORF RALF [DE]) [A] 68 * abstract *;
 [Y]JPH1055713  (USHIO ELECTRIC INC) [Y] 68-72,74,76,78,82-84,86 * paragraphs [0010] - [0017]; figures 1-4 *;
 [Y]JP2003297228  (ORC MFG CO LTD) [Y] 68-72,74,76,78,82-84,86 * abstract * * paragraphs [0020] - [0038] *
International search[Y]JPH0528968  (IWASAKI ELECTRIC CO LTD);
 [Y]JPH1055713  (USHIO ELECTRIC INC);
 [Y]JPH11283898  (CANON KK);
 [Y]JP2001216938  (USHIO ELECTRIC INC)
ExaminationJPH09213129
by applicantEP0497883
 JPH09213129
 JPH1055713
 WO9949504
 JPH11283898
 JP2003045219
 JP2003297228
 WO2004019128
 US6778257
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.