EP2096658 - Discharge lamp, in particular for exposure apparatus [Right-click to bookmark this link] | |||
Former [2009/36] | DISCHARGE LAMP, LIGHT SOURCE APPARATUS, EXPOSURE APPARATUS AND EXPOSURE APPARATUS MANUFACTURING METHOD | ||
[2012/29] | Status | No opposition filed within time limit Status updated on 01.11.2013 Database last updated on 03.09.2024 | Most recent event Tooltip | 17.07.2015 | Lapse of the patent in a contracting state New state(s): HU, LU | published on 19.08.2015 [2015/34] | Applicant(s) | For all designated states Nikon Corporation 12-1, Yurakucho 1-chome Chiyoda-ku Tokyo 100-8331 / JP | [N/P] |
Former [2010/30] | For all designated states Nikon Corporation 12-1, Yurakucho 1-chome Chiyoda-ku Tokyo 100-8331 / JP | ||
Former [2009/36] | For all designated states Nikon Corporation 2-3, Marunouchi 3-chome Chiyoda-ku Tokyo 100-8331 / JP | Inventor(s) | 01 /
SHIRASU, Hiroshi c/o NIKON CORPORATION Intellectual Property Headquarter 12-1, Yurakucho 1-chome Chiyoda-ku Tokyo 100-8331 / JP | 02 /
AOKI, Yasuo c/o NIKON CORPORATION Intellectual Property Headquarter 12-1, Yurakucho 1-chome Chiyoda-ku Tokyo 100-8331 / JP | 03 /
KOYAMA, Motoo c/o NIKON CORPORATION Intellectual Property Headquarter 12-1, Yurakucho 1-chome Chiyoda-ku Tokyo 100-8331 / JP | 04 /
KIKUCHI, Takayuki c/o NIKON CORPORATION Intellectual Property Headquarter 12-1, Yurakucho 1-chome Chiyoda-ku Tokyo 100-8331 / JP | [2012/52] |
Former [2009/36] | 01 /
SHIRASU, Hiroshi NIKON CORPORATION Intellectual Property Department 2-3 Marunouchi 3-chome Chiyoda-ku Tokyo 100-8331 / JP | ||
02 /
AOKI, Yasuo NIKON CORPORATION Intellectual Property Department 2-3 Marunouchi 3-chome Chiyoda-ku Tokyo 100-8331 / JP | |||
03 /
KOYAMA, Motoo NIKON CORPORATION Intellectual Property Department 2-3 Marunouchi 3-chome Chiyoda-ku Tokyo 100-8331 / JP | |||
04 /
KIKUCHI, Takayuki NIKON CORPORATION Intellectual Property Department 2-3 Marunouchi 3-chome Chiyoda-ku Tokyo 100-8331 / JP | Representative(s) | Hooiveld, Arjen Jan Winfried, et al Arnold & Siedsma Bezuidenhoutseweg 57 2594 AC The Hague / NL | [N/P] |
Former [2009/36] | Hooiveld, Arjen Jan Winfried, et al Arnold & Siedsma Sweelinckplein 1 2517 GK Den Haag / NL | Application number, filing date | 07806424.3 | 30.08.2007 | [2009/36] | WO2007JP66947 | Priority number, date | JP20060237252 | 01.09.2006 Original published format: JP 2006237252 | JP20070006462 | 15.01.2007 Original published format: JP 2007006462 | JP20070127451 | 11.05.2007 Original published format: JP 2007127451 | [2009/36] | Filing language | JA | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2008026709 | Date: | 06.03.2008 | Language: | JA | [2008/10] | Type: | A1 Application with search report | No.: | EP2096658 | Date: | 02.09.2009 | Language: | EN | [2009/36] | Type: | B1 Patent specification | No.: | EP2096658 | Date: | 26.12.2012 | Language: | EN | [2012/52] | Search report(s) | International search report - published on: | JP | 06.03.2008 | (Supplementary) European search report - dispatched on: | EP | 20.10.2010 | Classification | IPC: | H01J61/52, H01J5/56, F21V19/00 | [2012/29] | CPC: |
F21V19/006 (EP,KR,US);
G03F7/70016 (EP,KR,US);
G03F7/70833 (KR);
H01J5/56 (EP,KR,US);
H01J61/523 (EP,KR,US);
H01J61/822 (EP,KR,US)
|
Former IPC [2010/46] | H01J61/52, H01J5/50, F21V29/00, H01J61/86, H01L21/027, H01R33/22 | ||
Former IPC [2009/36] | H01J5/50, F21V29/00, H01J61/52, H01J61/86, H01L21/027, H01R33/22 | Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MT, NL, PL, PT, RO, SE, SI, SK, TR [2009/36] | Title | German: | Entladungslampe, insbesondere für Belichtungsvorrichtung | [2012/29] | English: | Discharge lamp, in particular for exposure apparatus | [2012/29] | French: | Lampe à décharge, notamment pour un'appareil d'exposition | [2012/29] |
Former [2009/36] | ENTLADUNGSLAMPE, LICHTQUELLENVORRICHTUNG, BELICHTUNGSVORRICHTUNG UND BELICHTUNGSVORRICHTUNGSHERSTELLUNGSVERFAHREN | ||
Former [2009/36] | DISCHARGE LAMP, LIGHT SOURCE APPARATUS, EXPOSURE APPARATUS AND EXPOSURE APPARATUS MANUFACTURING METHOD | ||
Former [2009/36] | LAMPE À DÉCHARGE, APPAREIL DE SOURCE DE LUMIÈRE, APPAREIL D'EXPOSITION ET PROCÉDÉ DE FABRICATION DE L'APPAREIL D'EXPOSITION | Entry into regional phase | 02.04.2009 | Translation filed | 30.03.2009 | National basic fee paid | 30.03.2009 | Search fee paid | 30.03.2009 | Designation fee(s) paid | 30.03.2009 | Examination fee paid | Examination procedure | 30.03.2009 | Examination requested [2009/36] | 09.05.2011 | Amendment by applicant (claims and/or description) | 06.02.2012 | Despatch of a communication from the examining division (Time limit: M04) | 06.06.2012 | Reply to a communication from the examining division | 20.07.2012 | Communication of intention to grant the patent | 14.11.2012 | Fee for grant paid | 14.11.2012 | Fee for publishing/printing paid | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 06.02.2012 | Opposition(s) | 27.09.2013 | No opposition filed within time limit [2013/49] | Request for further processing for: | The application is deemed to be withdrawn due to failure to file the translation | 27.07.2009 | Request for further processing filed | 27.07.2009 | Full payment received (date of receipt of payment) | Fees paid | Renewal fee | 30.03.2009 | Renewal fee patent year 03 | 31.08.2010 | Renewal fee patent year 04 | 30.08.2011 | Renewal fee patent year 05 | 29.08.2012 | Renewal fee patent year 06 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 30.08.2007 | AT | 26.12.2012 | BE | 26.12.2012 | CY | 26.12.2012 | CZ | 26.12.2012 | DK | 26.12.2012 | EE | 26.12.2012 | FI | 26.12.2012 | IT | 26.12.2012 | LT | 26.12.2012 | LV | 26.12.2012 | MC | 26.12.2012 | MT | 26.12.2012 | NL | 26.12.2012 | PL | 26.12.2012 | RO | 26.12.2012 | SE | 26.12.2012 | SI | 26.12.2012 | SK | 26.12.2012 | TR | 26.12.2012 | BG | 26.03.2013 | GR | 27.03.2013 | ES | 06.04.2013 | IS | 26.04.2013 | PT | 26.04.2013 | GB | 30.08.2013 | IE | 30.08.2013 | LU | 30.08.2013 | CH | 31.08.2013 | LI | 31.08.2013 | FR | 02.09.2013 | [2015/34] |
Former [2015/32] | AT | 26.12.2012 | |
BE | 26.12.2012 | ||
CY | 26.12.2012 | ||
CZ | 26.12.2012 | ||
DK | 26.12.2012 | ||
EE | 26.12.2012 | ||
FI | 26.12.2012 | ||
IT | 26.12.2012 | ||
LT | 26.12.2012 | ||
LV | 26.12.2012 | ||
MC | 26.12.2012 | ||
MT | 26.12.2012 | ||
NL | 26.12.2012 | ||
PL | 26.12.2012 | ||
RO | 26.12.2012 | ||
SE | 26.12.2012 | ||
SI | 26.12.2012 | ||
SK | 26.12.2012 | ||
TR | 26.12.2012 | ||
BG | 26.03.2013 | ||
GR | 27.03.2013 | ||
ES | 06.04.2013 | ||
IS | 26.04.2013 | ||
PT | 26.04.2013 | ||
GB | 30.08.2013 | ||
IE | 30.08.2013 | ||
CH | 31.08.2013 | ||
LI | 31.08.2013 | ||
FR | 02.09.2013 | ||
Former [2014/37] | AT | 26.12.2012 | |
BE | 26.12.2012 | ||
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CZ | 26.12.2012 | ||
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PL | 26.12.2012 | ||
RO | 26.12.2012 | ||
SE | 26.12.2012 | ||
SI | 26.12.2012 | ||
SK | 26.12.2012 | ||
BG | 26.03.2013 | ||
GR | 27.03.2013 | ||
ES | 06.04.2013 | ||
IS | 26.04.2013 | ||
PT | 26.04.2013 | ||
GB | 30.08.2013 | ||
IE | 30.08.2013 | ||
CH | 31.08.2013 | ||
LI | 31.08.2013 | ||
FR | 02.09.2013 | ||
Former [2014/34] | AT | 26.12.2012 | |
BE | 26.12.2012 | ||
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CZ | 26.12.2012 | ||
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MC | 26.12.2012 | ||
NL | 26.12.2012 | ||
PL | 26.12.2012 | ||
RO | 26.12.2012 | ||
SE | 26.12.2012 | ||
SI | 26.12.2012 | ||
SK | 26.12.2012 | ||
BG | 26.03.2013 | ||
GR | 27.03.2013 | ||
ES | 06.04.2013 | ||
IS | 26.04.2013 | ||
PT | 26.04.2013 | ||
GB | 30.08.2013 | ||
IE | 30.08.2013 | ||
CH | 31.08.2013 | ||
LI | 31.08.2013 | ||
Former [2014/33] | AT | 26.12.2012 | |
BE | 26.12.2012 | ||
CY | 26.12.2012 | ||
CZ | 26.12.2012 | ||
DK | 26.12.2012 | ||
EE | 26.12.2012 | ||
FI | 26.12.2012 | ||
IT | 26.12.2012 | ||
LT | 26.12.2012 | ||
LV | 26.12.2012 | ||
MC | 26.12.2012 | ||
NL | 26.12.2012 | ||
PL | 26.12.2012 | ||
RO | 26.12.2012 | ||
SE | 26.12.2012 | ||
SI | 26.12.2012 | ||
SK | 26.12.2012 | ||
BG | 26.03.2013 | ||
GR | 27.03.2013 | ||
ES | 06.04.2013 | ||
IS | 26.04.2013 | ||
PT | 26.04.2013 | ||
IE | 30.08.2013 | ||
CH | 31.08.2013 | ||
LI | 31.08.2013 | ||
Former [2014/20] | AT | 26.12.2012 | |
BE | 26.12.2012 | ||
CY | 26.12.2012 | ||
CZ | 26.12.2012 | ||
DK | 26.12.2012 | ||
EE | 26.12.2012 | ||
FI | 26.12.2012 | ||
IT | 26.12.2012 | ||
LT | 26.12.2012 | ||
LV | 26.12.2012 | ||
MC | 26.12.2012 | ||
NL | 26.12.2012 | ||
PL | 26.12.2012 | ||
RO | 26.12.2012 | ||
SE | 26.12.2012 | ||
SI | 26.12.2012 | ||
SK | 26.12.2012 | ||
BG | 26.03.2013 | ||
GR | 27.03.2013 | ||
ES | 06.04.2013 | ||
IS | 26.04.2013 | ||
PT | 26.04.2013 | ||
CH | 31.08.2013 | ||
LI | 31.08.2013 | ||
Former [2014/03] | AT | 26.12.2012 | |
BE | 26.12.2012 | ||
CY | 26.12.2012 | ||
CZ | 26.12.2012 | ||
DK | 26.12.2012 | ||
EE | 26.12.2012 | ||
FI | 26.12.2012 | ||
IT | 26.12.2012 | ||
LT | 26.12.2012 | ||
LV | 26.12.2012 | ||
NL | 26.12.2012 | ||
PL | 26.12.2012 | ||
RO | 26.12.2012 | ||
SE | 26.12.2012 | ||
SI | 26.12.2012 | ||
SK | 26.12.2012 | ||
BG | 26.03.2013 | ||
GR | 27.03.2013 | ||
ES | 06.04.2013 | ||
IS | 26.04.2013 | ||
PT | 26.04.2013 | ||
Former [2013/52] | AT | 26.12.2012 | |
BE | 26.12.2012 | ||
CY | 26.12.2012 | ||
CZ | 26.12.2012 | ||
DK | 26.12.2012 | ||
EE | 26.12.2012 | ||
FI | 26.12.2012 | ||
LT | 26.12.2012 | ||
LV | 26.12.2012 | ||
NL | 26.12.2012 | ||
PL | 26.12.2012 | ||
RO | 26.12.2012 | ||
SE | 26.12.2012 | ||
SI | 26.12.2012 | ||
SK | 26.12.2012 | ||
BG | 26.03.2013 | ||
GR | 27.03.2013 | ||
ES | 06.04.2013 | ||
IS | 26.04.2013 | ||
PT | 26.04.2013 | ||
Former [2013/48] | AT | 26.12.2012 | |
BE | 26.12.2012 | ||
CZ | 26.12.2012 | ||
DK | 26.12.2012 | ||
EE | 26.12.2012 | ||
FI | 26.12.2012 | ||
LT | 26.12.2012 | ||
LV | 26.12.2012 | ||
NL | 26.12.2012 | ||
PL | 26.12.2012 | ||
RO | 26.12.2012 | ||
SE | 26.12.2012 | ||
SI | 26.12.2012 | ||
SK | 26.12.2012 | ||
BG | 26.03.2013 | ||
GR | 27.03.2013 | ||
ES | 06.04.2013 | ||
IS | 26.04.2013 | ||
PT | 26.04.2013 | ||
Former [2013/40] | AT | 26.12.2012 | |
BE | 26.12.2012 | ||
CZ | 26.12.2012 | ||
EE | 26.12.2012 | ||
FI | 26.12.2012 | ||
LT | 26.12.2012 | ||
LV | 26.12.2012 | ||
NL | 26.12.2012 | ||
PL | 26.12.2012 | ||
RO | 26.12.2012 | ||
SE | 26.12.2012 | ||
SI | 26.12.2012 | ||
SK | 26.12.2012 | ||
BG | 26.03.2013 | ||
GR | 27.03.2013 | ||
ES | 06.04.2013 | ||
IS | 26.04.2013 | ||
PT | 26.04.2013 | ||
Former [2013/37] | AT | 26.12.2012 | |
BE | 26.12.2012 | ||
CZ | 26.12.2012 | ||
EE | 26.12.2012 | ||
FI | 26.12.2012 | ||
LT | 26.12.2012 | ||
LV | 26.12.2012 | ||
NL | 26.12.2012 | ||
PL | 26.12.2012 | ||
RO | 26.12.2012 | ||
SE | 26.12.2012 | ||
SI | 26.12.2012 | ||
SK | 26.12.2012 | ||
BG | 26.03.2013 | ||
GR | 27.03.2013 | ||
ES | 06.04.2013 | ||
IS | 26.04.2013 | ||
Former [2013/36] | AT | 26.12.2012 | |
BE | 26.12.2012 | ||
CZ | 26.12.2012 | ||
EE | 26.12.2012 | ||
FI | 26.12.2012 | ||
LT | 26.12.2012 | ||
LV | 26.12.2012 | ||
PL | 26.12.2012 | ||
SE | 26.12.2012 | ||
SI | 26.12.2012 | ||
SK | 26.12.2012 | ||
BG | 26.03.2013 | ||
GR | 27.03.2013 | ||
ES | 06.04.2013 | ||
IS | 26.04.2013 | ||
Former [2013/35] | BE | 26.12.2012 | |
CZ | 26.12.2012 | ||
EE | 26.12.2012 | ||
FI | 26.12.2012 | ||
LT | 26.12.2012 | ||
LV | 26.12.2012 | ||
SE | 26.12.2012 | ||
SI | 26.12.2012 | ||
SK | 26.12.2012 | ||
BG | 26.03.2013 | ||
GR | 27.03.2013 | ||
IS | 26.04.2013 | ||
Former [2013/34] | BE | 26.12.2012 | |
FI | 26.12.2012 | ||
LT | 26.12.2012 | ||
LV | 26.12.2012 | ||
SE | 26.12.2012 | ||
SI | 26.12.2012 | ||
BG | 26.03.2013 | ||
GR | 27.03.2013 | ||
IS | 26.04.2013 | ||
Former [2013/33] | BE | 26.12.2012 | |
FI | 26.12.2012 | ||
LT | 26.12.2012 | ||
LV | 26.12.2012 | ||
SE | 26.12.2012 | ||
SI | 26.12.2012 | ||
GR | 27.03.2013 | ||
Former [2013/26] | FI | 26.12.2012 | |
LT | 26.12.2012 | ||
LV | 26.12.2012 | ||
SE | 26.12.2012 | ||
SI | 26.12.2012 | ||
GR | 27.03.2013 | ||
Former [2013/24] | FI | 26.12.2012 | |
LT | 26.12.2012 | ||
LV | 26.12.2012 | ||
SE | 26.12.2012 | ||
GR | 27.03.2013 | ||
Former [2013/23] | FI | 26.12.2012 | |
LT | 26.12.2012 | ||
LV | 26.12.2012 | ||
SE | 26.12.2012 | ||
Former [2013/22] | FI | 26.12.2012 | |
LT | 26.12.2012 | ||
SE | 26.12.2012 | ||
Former [2013/21] | LT | 26.12.2012 | |
SE | 26.12.2012 | ||
Former [2013/20] | LT | 26.12.2012 | Documents cited: | Search | [A]GB359468 (SIEMENS & HALSKE AG) [A] 68* figures 1-3 *; | [A]US5493168 (SEEDORF RALF [DE]) [A] 68 * abstract *; | [Y]JPH1055713 (USHIO ELECTRIC INC) [Y] 68-72,74,76,78,82-84,86 * paragraphs [0010] - [0017]; figures 1-4 *; | [Y]JP2003297228 (ORC MFG CO LTD) [Y] 68-72,74,76,78,82-84,86 * abstract * * paragraphs [0020] - [0038] * | International search | [Y]JPH0528968 (IWASAKI ELECTRIC CO LTD); | [Y]JPH1055713 (USHIO ELECTRIC INC); | [Y]JPH11283898 (CANON KK); | [Y]JP2001216938 (USHIO ELECTRIC INC) | Examination | JPH09213129 | by applicant | EP0497883 | JPH09213129 | JPH1055713 | WO9949504 | JPH11283898 | JP2003045219 | JP2003297228 | WO2004019128 | US6778257 |