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EP2063462
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EP About this file: EP2063462
| EP2063462 - APPARATUS AND METHOD FOR DRY ETCHING [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 27.05.2016 Database last updated on 19.07.2024 | Most recent event Tooltip | 27.05.2016 | Application deemed to be withdrawn | published on 29.06.2016 [2016/26] | Applicant(s) | For all designated states ULVAC, INC. 2500 Hagisono Chigasaki-shi, Kanagawa 253-8543 / JP | [2009/22] | Inventor(s) | 01 /
MORIKAWA, Yasuhiro c/o ULVAC, INC., Institute for Semiconductor Techn ologies, 1220-1, Suyama Susono-shi, Shizuoka 410-1231 / JP | 02 /
SUU, Koukou c/o ULVAC, INC., Institute for Semiconductor Techn ologies, 1220-1, Suyama Susono-shi, Shizuoka 410-1231 / JP | [2009/22] | Representative(s) | AMMANN PATENTANWÄLTE AG Schwarztorstrasse 31 3001 Bern / CH | [N/P] |
| Former [2009/22] | AMMANN PATENTANWÄLTE AG BERN Schwarztorstrasse 31 3001 Bern / CH | Application number, filing date | 07806775.8 | 05.09.2007 | [2009/22] | WO2007JP67333 | Priority number, date | JP20060243976 | 08.09.2006 Original published format: JP 2006243976 | [2009/22] | Filing language | JA | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2008029854 | Date: | 13.03.2008 | Language: | JA | [2008/11] | Type: | A1 Application with search report | No.: | EP2063462 | Date: | 27.05.2009 | Language: | EN | [2009/22] | Search report(s) | International search report - published on: | JP | 13.03.2008 | (Supplementary) European search report - dispatched on: | EP | 26.10.2010 | Classification | IPC: | H01L21/3065, C01B33/12, C03C15/00, H03H3/02, H03H3/08, H05H1/46 | [2009/22] | CPC: |
H01J37/321 (EP,US);
H01L21/3065 (KR);
C01B33/12 (KR);
C03C15/00 (EP,KR,US);
H01J37/32009 (EP,US);
H01J37/32541 (EP,US);
H01J37/3266 (EP,US);
H01J37/32706 (EP,US);
H01L21/67069 (EP,US);
H05H1/46 (KR)
(-)
| Designated contracting states | DE, FR [2010/44] |
| Former [2009/22] | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MT, NL, PL, PT, RO, SE, SI, SK, TR | Title | German: | VORRICHTUNG UND VERFAHREN ZUR TROCKENÄTZUNG | [2009/22] | English: | APPARATUS AND METHOD FOR DRY ETCHING | [2009/22] | French: | APPAREIL ET PROCÉDÉ DE GRAVURE SÈCHE | [2009/22] | Entry into regional phase | 17.03.2009 | Translation filed | 17.03.2009 | National basic fee paid | 17.03.2009 | Search fee paid | 17.03.2009 | Designation fee(s) paid | 17.03.2009 | Examination fee paid | Examination procedure | 17.03.2009 | Examination requested [2009/22] | 09.06.2009 | Despatch of communication of loss of particular rights: designated state(s) AT, BE, BG, CH, CY, CZ, DK, EE, ES, FI, GB, GR, HU, IE, IS, IT, LT, LU, LV, MC, MT, NL, PL, PT, RO, SE, SI, SK, TR | 09.04.2010 | Loss of particular rights, legal effect: designated state(s) | 23.05.2011 | Amendment by applicant (claims and/or description) | 17.09.2015 | Despatch of a communication from the examining division (Time limit: M04) | 28.01.2016 | Application deemed to be withdrawn, date of legal effect [2016/26] | 23.02.2016 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2016/26] | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 17.09.2015 | Fees paid | Renewal fee | 05.09.2009 | Renewal fee patent year 03 | 09.09.2010 | Renewal fee patent year 04 | 15.09.2011 | Renewal fee patent year 05 | 14.09.2012 | Renewal fee patent year 06 | 17.09.2013 | Renewal fee patent year 07 | 29.09.2014 | Renewal fee patent year 08 | 15.09.2015 | Renewal fee patent year 09 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [XY]US5695566 (SUZUKI MASAKI [JP], et al) [X] 1,2,7,8 * column 4, line 32 - column 8, line 67 * * figure - * [Y] 3-6; | [X]EP0323620 (TOKYO ELECTRON LTD [JP]) [X] 1 * column 6, line 1 - column 8, line 15 * * figure 1 *; | [X]US4615755 (TRACY DAVID H [US], et al) [X] 1 * column 2, line 43 - column 3, line 68 * * figure 1 *; | [Y]JP2006114933 (ULVAC CORP) [Y] 3,4 * abstract * * figure - *; | [Y]JP2002343775 (ULVAC CORP) [Y] 5,6 * abstract * * figure - *; | [A]US6251792 (COLLINS KENNETH S [US], et al) [A] 3,5 * column 6, line 63 - column 20, line 52 * * figure - * | International search | [X]JPH08316215 (MATSUSHITA ELECTRIC IND CO LTD); | [Y]JP2002216945 (SONY CORP); | [Y]JPH07263192 (ULVAC CORP); | [Y]JP2002343775 (ULVAC CORP) | by applicant | JPH05315881 |