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Extract from the Register of European Patents

EP About this file: EP2002470

EP2002470 - Method fo growing nanofin transistors [Right-click to bookmark this link]
Former [2008/51]GROWN NANOFIN TRANSISTORS
[2015/35]
StatusNo opposition filed within time limit
Status updated on  13.01.2017
Database last updated on 31.08.2024
Most recent event   Tooltip20.07.2018Lapse of the patent in a contracting state
New state(s): MT		published on 22.08.2018  [2018/34]
Applicant(s)For all designated states
Micron Technology, Inc.
8000 South Federal Way
Boise, ID 83716-9632 / US
[2016/10]
Former [2008/51]For all designated states
Micron Technology, Inc.
8000 South Federal Way Boise
Idaho 83716-9632 / US
Inventor(s)01 / FORBES, Leonard
7340 Nw Mountain View Drive
Corvallis, OR 97330 / US
 [2008/51]
Representative(s)Maury, Richard Philip
Marks & Clerk LLP
90 Long Acre
London WC2E 9RA / GB
[2016/10]
Former [2012/36]Maury, Richard Philip
Marks & Clerk LLP
90 Long Acre
London
WC2E 9RA / GB
Former [2008/51]Collins, John David
Marks & Clerk 90 Long Acre London
WC2E 9RA / GB
Application number, filing date07809002.403.04.2007
[2008/51]
WO2007US08084
Priority number, dateUS2006039752704.04.2006         Original published format: US 397527
US2006039743004.04.2006         Original published format: US 397430
US2006039735804.04.2006         Original published format: US 397358
US2006039741304.04.2006         Original published format: US 397413
US2006039740604.04.2006         Original published format: US 397406
[2008/51]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report
No.:WO2007136461
Date:29.11.2007
Language:EN
[2007/48]
Type: A2 Application without search report 
No.:EP2002470
Date:17.12.2008
Language:EN
The application published by WIPO in one of the EPO official languages on 29.11.2007 takes the place of the publication of the European patent application.
[2008/51]
Type: B1 Patent specification 
No.:EP2002470
Date:09.03.2016
Language:EN
[2016/10]
Search report(s)International search report - published on:EP17.01.2008
ClassificationIPC:H01L29/66, H01L29/786, H01L27/105, H01L27/108, H01L29/423, H01L29/78, H01L29/06
[2015/35]
CPC:
H01L29/0665 (EP,KR); H01L29/66666 (EP,KR); B82Y10/00 (EP);
H01L29/0673 (EP,KR); H01L29/42392 (EP,KR); H01L29/66742 (EP,KR);
H01L29/66825 (EP,KR); H01L29/7827 (EP,KR); H01L29/78642 (EP,KR);
H10B12/053 (EP,KR) (-)
Former IPC [2008/51]H01L21/336, H01L29/786, H01L29/78, H01L21/8242, H01L29/06
Designated contracting statesAT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MT,   NL,   PL,   PT,   RO,   SE,   SI,   SK,   TR [2016/10]
Former [2008/51]AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HU,  IE,  IS,  IT,  LI,  LT,  LU,  LV,  MC,  MT,  NL,  PL,  PT,  RO,  SE,  SI,  SK,  TR 
Extension statesALNot yet paid
BANot yet paid
HRNot yet paid
MKNot yet paid
RSNot yet paid
TitleGerman:Methode zum Aufwachsen von Nanofin Transistoren[2015/40]
English:Method fo growing nanofin transistors[2015/35]
French:Méthode pour la croissance de transistors à nano-ailettes[2015/35]
Former [2008/51]GEWACHSENE NANOFIN-TRANSISTOREN
Former [2008/51]GROWN NANOFIN TRANSISTORS
Former [2008/51]TRANSISTORS À NANO-AILETTES DE CROISSANCE
Entry into regional phase25.09.2008National basic fee paid 
25.09.2008Designation fee(s) paid 
25.09.2008Examination fee paid 
Examination procedure29.09.2008Amendment by applicant (claims and/or description)
29.09.2008Examination requested  [2008/51]
04.02.2011Despatch of a communication from the examining division (Time limit: M04)
25.05.2011Reply to a communication from the examining division
20.02.2013Despatch of a communication from the examining division (Time limit: M04)
01.07.2013Reply to a communication from the examining division
23.07.2014Despatch of a communication from the examining division (Time limit: M04)
28.11.2014Reply to a communication from the examining division
10.03.2015Despatch of a communication from the examining division (Time limit: M04)
16.07.2015Reply to a communication from the examining division
07.09.2015Communication of intention to grant the patent
06.01.2016Fee for grant paid
06.01.2016Fee for publishing/printing paid
06.01.2016Receipt of the translation of the claim(s)
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  04.02.2011
Opposition(s)12.12.2016No opposition filed within time limit [2017/07]
Fees paidRenewal fee
25.09.2008Renewal fee patent year 03
26.04.2010Renewal fee patent year 04
12.04.2011Renewal fee patent year 05
28.03.2012Renewal fee patent year 06
12.04.2013Renewal fee patent year 07
25.03.2014Renewal fee patent year 08
10.04.2015Renewal fee patent year 09
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU03.04.2007
AT09.03.2016
BE09.03.2016
CY09.03.2016
CZ09.03.2016
DK09.03.2016
EE09.03.2016
ES09.03.2016
FI09.03.2016
IT09.03.2016
LT09.03.2016
LV09.03.2016
MC09.03.2016
NL09.03.2016
PL09.03.2016
RO09.03.2016
SE09.03.2016
SI09.03.2016
SK09.03.2016
TR09.03.2016
IE03.04.2016
LU03.04.2016
CH30.04.2016
LI30.04.2016
MT30.04.2016
BG09.06.2016
GR10.06.2016
IS09.07.2016
PT11.07.2016
[2018/32]
Former [2018/29]HU03.04.2007
AT09.03.2016
BE09.03.2016
CY09.03.2016
CZ09.03.2016
DK09.03.2016
EE09.03.2016
ES09.03.2016
FI09.03.2016
IT09.03.2016
LT09.03.2016
LV09.03.2016
MC09.03.2016
NL09.03.2016
PL09.03.2016
RO09.03.2016
SE09.03.2016
SI09.03.2016
SK09.03.2016
TR09.03.2016
IE03.04.2016
LU03.04.2016
CH30.04.2016
LI30.04.2016
BG09.06.2016
GR10.06.2016
IS09.07.2016
PT11.07.2016
Former [2018/28]HU03.04.2007
AT09.03.2016
BE09.03.2016
CY09.03.2016
CZ09.03.2016
DK09.03.2016
EE09.03.2016
ES09.03.2016
FI09.03.2016
IT09.03.2016
LT09.03.2016
LV09.03.2016
MC09.03.2016
NL09.03.2016
PL09.03.2016
RO09.03.2016
SE09.03.2016
SI09.03.2016
SK09.03.2016
IE03.04.2016
CH30.04.2016
LI30.04.2016
BG09.06.2016
GR10.06.2016
IS09.07.2016
PT11.07.2016
Former [2017/37]AT09.03.2016
BE09.03.2016
CZ09.03.2016
DK09.03.2016
EE09.03.2016
ES09.03.2016
FI09.03.2016
IT09.03.2016
LT09.03.2016
LV09.03.2016
NL09.03.2016
PL09.03.2016
RO09.03.2016
SE09.03.2016
SI09.03.2016
SK09.03.2016
IE03.04.2016
CH30.04.2016
LI30.04.2016
BG09.06.2016
GR10.06.2016
IS09.07.2016
PT11.07.2016
Former [2017/20]AT09.03.2016
BE09.03.2016
CZ09.03.2016
DK09.03.2016
EE09.03.2016
ES09.03.2016
FI09.03.2016
IT09.03.2016
LT09.03.2016
LV09.03.2016
NL09.03.2016
PL09.03.2016
RO09.03.2016
SE09.03.2016
SK09.03.2016
CH30.04.2016
LI30.04.2016
BG09.06.2016
GR10.06.2016
IS09.07.2016
PT11.07.2016
Former [2017/07]AT09.03.2016
BE09.03.2016
CZ09.03.2016
DK09.03.2016
EE09.03.2016
ES09.03.2016
FI09.03.2016
IT09.03.2016
LT09.03.2016
LV09.03.2016
NL09.03.2016
PL09.03.2016
RO09.03.2016
SE09.03.2016
SK09.03.2016
CH30.04.2016
LI30.04.2016
GR10.06.2016
IS09.07.2016
PT11.07.2016
Former [2017/03]AT09.03.2016
BE09.03.2016
CZ09.03.2016
EE09.03.2016
ES09.03.2016
FI09.03.2016
IT09.03.2016
LT09.03.2016
LV09.03.2016
NL09.03.2016
PL09.03.2016
RO09.03.2016
SE09.03.2016
SK09.03.2016
GR10.06.2016
IS09.07.2016
PT11.07.2016
Former [2016/51]AT09.03.2016
CZ09.03.2016
EE09.03.2016
ES09.03.2016
FI09.03.2016
LT09.03.2016
LV09.03.2016
NL09.03.2016
PL09.03.2016
RO09.03.2016
SE09.03.2016
SK09.03.2016
BE30.04.2016
GR10.06.2016
IS09.07.2016
PT11.07.2016
Former [2016/50]AT09.03.2016
CZ09.03.2016
EE09.03.2016
ES09.03.2016
FI09.03.2016
LT09.03.2016
LV09.03.2016
NL09.03.2016
PL09.03.2016
RO09.03.2016
SE09.03.2016
SK09.03.2016
BE30.04.2016
GR10.06.2016
IS09.07.2016
Former [2016/49]EE09.03.2016
ES09.03.2016
FI09.03.2016
LT09.03.2016
LV09.03.2016
NL09.03.2016
PL09.03.2016
SE09.03.2016
BE30.04.2016
GR10.06.2016
IS09.07.2016
Former [2016/48]ES09.03.2016
FI09.03.2016
LT09.03.2016
LV09.03.2016
NL09.03.2016
PL09.03.2016
SE09.03.2016
BE30.04.2016
GR10.06.2016
IS09.07.2016
Former [2016/40]ES09.03.2016
FI09.03.2016
LT09.03.2016
LV09.03.2016
NL09.03.2016
PL09.03.2016
SE09.03.2016
BE30.04.2016
GR10.06.2016
Former [2016/39]ES09.03.2016
FI09.03.2016
LT09.03.2016
LV09.03.2016
PL09.03.2016
SE09.03.2016
BE30.04.2016
GR10.06.2016
Former [2016/36]ES09.03.2016
FI09.03.2016
LT09.03.2016
PL09.03.2016
BE30.04.2016
GR10.06.2016
Former [2016/35]ES09.03.2016
FI09.03.2016
GR10.06.2016
Cited inInternational search[YA]DE19943390  (HANSCH WALTER [DE]);
 [A]US2002060338  (ZHANG ZHIBO [US]);
 [A]US6747313  (GIL GYOUNG-SEON [KR]);
 [X]US2005032297  (KAMINS THEODORE I [US]);
 [X]US6855582  (DAKSHINA-MURTHY SRIKANTESWARA [US], et al);
 [X]WO2005079182  (IBM [US], et al);
 [XY]US2006046391  (TANG SANH D [US], et al)
ExaminationUS5545586
by applicantUS5545586
 US2002060338
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.