EP2002470 - Method fo growing nanofin transistors [Right-click to bookmark this link] | |||
Former [2008/51] | GROWN NANOFIN TRANSISTORS | ||
[2015/35] | Status | No opposition filed within time limit Status updated on 13.01.2017 Database last updated on 31.08.2024 | Most recent event Tooltip | 20.07.2018 | Lapse of the patent in a contracting state New state(s): MT | published on 22.08.2018 [2018/34] | Applicant(s) | For all designated states Micron Technology, Inc. 8000 South Federal Way Boise, ID 83716-9632 / US | [2016/10] |
Former [2008/51] | For all designated states Micron Technology, Inc. 8000 South Federal Way Boise Idaho 83716-9632 / US | Inventor(s) | 01 /
FORBES, Leonard 7340 Nw Mountain View Drive Corvallis, OR 97330 / US | [2008/51] | Representative(s) | Maury, Richard Philip Marks & Clerk LLP 90 Long Acre London WC2E 9RA / GB | [2016/10] |
Former [2012/36] | Maury, Richard Philip Marks & Clerk LLP 90 Long Acre London WC2E 9RA / GB | ||
Former [2008/51] | Collins, John David Marks & Clerk 90 Long Acre London WC2E 9RA / GB | Application number, filing date | 07809002.4 | 03.04.2007 | [2008/51] | WO2007US08084 | Priority number, date | US20060397527 | 04.04.2006 Original published format: US 397527 | US20060397430 | 04.04.2006 Original published format: US 397430 | US20060397358 | 04.04.2006 Original published format: US 397358 | US20060397413 | 04.04.2006 Original published format: US 397413 | US20060397406 | 04.04.2006 Original published format: US 397406 | [2008/51] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | WO2007136461 | Date: | 29.11.2007 | Language: | EN | [2007/48] | Type: | A2 Application without search report | No.: | EP2002470 | Date: | 17.12.2008 | Language: | EN | The application published by WIPO in one of the EPO official languages on 29.11.2007 takes the place of the publication of the European patent application. | [2008/51] | Type: | B1 Patent specification | No.: | EP2002470 | Date: | 09.03.2016 | Language: | EN | [2016/10] | Search report(s) | International search report - published on: | EP | 17.01.2008 | Classification | IPC: | H01L29/66, H01L29/786, H01L27/105, H01L27/108, H01L29/423, H01L29/78, H01L29/06 | [2015/35] | CPC: |
H01L29/0665 (EP,KR);
H01L29/66666 (EP,KR);
B82Y10/00 (EP);
H01L29/0673 (EP,KR);
H01L29/42392 (EP,KR);
H01L29/66742 (EP,KR);
H01L29/66825 (EP,KR);
H01L29/7827 (EP,KR);
H01L29/78642 (EP,KR);
H10B12/053 (EP,KR)
(-)
|
Former IPC [2008/51] | H01L21/336, H01L29/786, H01L29/78, H01L21/8242, H01L29/06 | Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MT, NL, PL, PT, RO, SE, SI, SK, TR [2016/10] |
Former [2008/51] | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MT, NL, PL, PT, RO, SE, SI, SK, TR | Extension states | AL | Not yet paid | BA | Not yet paid | HR | Not yet paid | MK | Not yet paid | RS | Not yet paid | Title | German: | Methode zum Aufwachsen von Nanofin Transistoren | [2015/40] | English: | Method fo growing nanofin transistors | [2015/35] | French: | Méthode pour la croissance de transistors à nano-ailettes | [2015/35] |
Former [2008/51] | GEWACHSENE NANOFIN-TRANSISTOREN | ||
Former [2008/51] | GROWN NANOFIN TRANSISTORS | ||
Former [2008/51] | TRANSISTORS À NANO-AILETTES DE CROISSANCE | Entry into regional phase | 25.09.2008 | National basic fee paid | 25.09.2008 | Designation fee(s) paid | 25.09.2008 | Examination fee paid | Examination procedure | 29.09.2008 | Amendment by applicant (claims and/or description) | 29.09.2008 | Examination requested [2008/51] | 04.02.2011 | Despatch of a communication from the examining division (Time limit: M04) | 25.05.2011 | Reply to a communication from the examining division | 20.02.2013 | Despatch of a communication from the examining division (Time limit: M04) | 01.07.2013 | Reply to a communication from the examining division | 23.07.2014 | Despatch of a communication from the examining division (Time limit: M04) | 28.11.2014 | Reply to a communication from the examining division | 10.03.2015 | Despatch of a communication from the examining division (Time limit: M04) | 16.07.2015 | Reply to a communication from the examining division | 07.09.2015 | Communication of intention to grant the patent | 06.01.2016 | Fee for grant paid | 06.01.2016 | Fee for publishing/printing paid | 06.01.2016 | Receipt of the translation of the claim(s) | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 04.02.2011 | Opposition(s) | 12.12.2016 | No opposition filed within time limit [2017/07] | Fees paid | Renewal fee | 25.09.2008 | Renewal fee patent year 03 | 26.04.2010 | Renewal fee patent year 04 | 12.04.2011 | Renewal fee patent year 05 | 28.03.2012 | Renewal fee patent year 06 | 12.04.2013 | Renewal fee patent year 07 | 25.03.2014 | Renewal fee patent year 08 | 10.04.2015 | Renewal fee patent year 09 |
Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 03.04.2007 | AT | 09.03.2016 | BE | 09.03.2016 | CY | 09.03.2016 | CZ | 09.03.2016 | DK | 09.03.2016 | EE | 09.03.2016 | ES | 09.03.2016 | FI | 09.03.2016 | IT | 09.03.2016 | LT | 09.03.2016 | LV | 09.03.2016 | MC | 09.03.2016 | NL | 09.03.2016 | PL | 09.03.2016 | RO | 09.03.2016 | SE | 09.03.2016 | SI | 09.03.2016 | SK | 09.03.2016 | TR | 09.03.2016 | IE | 03.04.2016 | LU | 03.04.2016 | CH | 30.04.2016 | LI | 30.04.2016 | MT | 30.04.2016 | BG | 09.06.2016 | GR | 10.06.2016 | IS | 09.07.2016 | PT | 11.07.2016 | [2018/32] |
Former [2018/29] | HU | 03.04.2007 | |
AT | 09.03.2016 | ||
BE | 09.03.2016 | ||
CY | 09.03.2016 | ||
CZ | 09.03.2016 | ||
DK | 09.03.2016 | ||
EE | 09.03.2016 | ||
ES | 09.03.2016 | ||
FI | 09.03.2016 | ||
IT | 09.03.2016 | ||
LT | 09.03.2016 | ||
LV | 09.03.2016 | ||
MC | 09.03.2016 | ||
NL | 09.03.2016 | ||
PL | 09.03.2016 | ||
RO | 09.03.2016 | ||
SE | 09.03.2016 | ||
SI | 09.03.2016 | ||
SK | 09.03.2016 | ||
TR | 09.03.2016 | ||
IE | 03.04.2016 | ||
LU | 03.04.2016 | ||
CH | 30.04.2016 | ||
LI | 30.04.2016 | ||
BG | 09.06.2016 | ||
GR | 10.06.2016 | ||
IS | 09.07.2016 | ||
PT | 11.07.2016 | ||
Former [2018/28] | HU | 03.04.2007 | |
AT | 09.03.2016 | ||
BE | 09.03.2016 | ||
CY | 09.03.2016 | ||
CZ | 09.03.2016 | ||
DK | 09.03.2016 | ||
EE | 09.03.2016 | ||
ES | 09.03.2016 | ||
FI | 09.03.2016 | ||
IT | 09.03.2016 | ||
LT | 09.03.2016 | ||
LV | 09.03.2016 | ||
MC | 09.03.2016 | ||
NL | 09.03.2016 | ||
PL | 09.03.2016 | ||
RO | 09.03.2016 | ||
SE | 09.03.2016 | ||
SI | 09.03.2016 | ||
SK | 09.03.2016 | ||
IE | 03.04.2016 | ||
CH | 30.04.2016 | ||
LI | 30.04.2016 | ||
BG | 09.06.2016 | ||
GR | 10.06.2016 | ||
IS | 09.07.2016 | ||
PT | 11.07.2016 | ||
Former [2017/37] | AT | 09.03.2016 | |
BE | 09.03.2016 | ||
CZ | 09.03.2016 | ||
DK | 09.03.2016 | ||
EE | 09.03.2016 | ||
ES | 09.03.2016 | ||
FI | 09.03.2016 | ||
IT | 09.03.2016 | ||
LT | 09.03.2016 | ||
LV | 09.03.2016 | ||
NL | 09.03.2016 | ||
PL | 09.03.2016 | ||
RO | 09.03.2016 | ||
SE | 09.03.2016 | ||
SI | 09.03.2016 | ||
SK | 09.03.2016 | ||
IE | 03.04.2016 | ||
CH | 30.04.2016 | ||
LI | 30.04.2016 | ||
BG | 09.06.2016 | ||
GR | 10.06.2016 | ||
IS | 09.07.2016 | ||
PT | 11.07.2016 | ||
Former [2017/20] | AT | 09.03.2016 | |
BE | 09.03.2016 | ||
CZ | 09.03.2016 | ||
DK | 09.03.2016 | ||
EE | 09.03.2016 | ||
ES | 09.03.2016 | ||
FI | 09.03.2016 | ||
IT | 09.03.2016 | ||
LT | 09.03.2016 | ||
LV | 09.03.2016 | ||
NL | 09.03.2016 | ||
PL | 09.03.2016 | ||
RO | 09.03.2016 | ||
SE | 09.03.2016 | ||
SK | 09.03.2016 | ||
CH | 30.04.2016 | ||
LI | 30.04.2016 | ||
BG | 09.06.2016 | ||
GR | 10.06.2016 | ||
IS | 09.07.2016 | ||
PT | 11.07.2016 | ||
Former [2017/07] | AT | 09.03.2016 | |
BE | 09.03.2016 | ||
CZ | 09.03.2016 | ||
DK | 09.03.2016 | ||
EE | 09.03.2016 | ||
ES | 09.03.2016 | ||
FI | 09.03.2016 | ||
IT | 09.03.2016 | ||
LT | 09.03.2016 | ||
LV | 09.03.2016 | ||
NL | 09.03.2016 | ||
PL | 09.03.2016 | ||
RO | 09.03.2016 | ||
SE | 09.03.2016 | ||
SK | 09.03.2016 | ||
CH | 30.04.2016 | ||
LI | 30.04.2016 | ||
GR | 10.06.2016 | ||
IS | 09.07.2016 | ||
PT | 11.07.2016 | ||
Former [2017/03] | AT | 09.03.2016 | |
BE | 09.03.2016 | ||
CZ | 09.03.2016 | ||
EE | 09.03.2016 | ||
ES | 09.03.2016 | ||
FI | 09.03.2016 | ||
IT | 09.03.2016 | ||
LT | 09.03.2016 | ||
LV | 09.03.2016 | ||
NL | 09.03.2016 | ||
PL | 09.03.2016 | ||
RO | 09.03.2016 | ||
SE | 09.03.2016 | ||
SK | 09.03.2016 | ||
GR | 10.06.2016 | ||
IS | 09.07.2016 | ||
PT | 11.07.2016 | ||
Former [2016/51] | AT | 09.03.2016 | |
CZ | 09.03.2016 | ||
EE | 09.03.2016 | ||
ES | 09.03.2016 | ||
FI | 09.03.2016 | ||
LT | 09.03.2016 | ||
LV | 09.03.2016 | ||
NL | 09.03.2016 | ||
PL | 09.03.2016 | ||
RO | 09.03.2016 | ||
SE | 09.03.2016 | ||
SK | 09.03.2016 | ||
BE | 30.04.2016 | ||
GR | 10.06.2016 | ||
IS | 09.07.2016 | ||
PT | 11.07.2016 | ||
Former [2016/50] | AT | 09.03.2016 | |
CZ | 09.03.2016 | ||
EE | 09.03.2016 | ||
ES | 09.03.2016 | ||
FI | 09.03.2016 | ||
LT | 09.03.2016 | ||
LV | 09.03.2016 | ||
NL | 09.03.2016 | ||
PL | 09.03.2016 | ||
RO | 09.03.2016 | ||
SE | 09.03.2016 | ||
SK | 09.03.2016 | ||
BE | 30.04.2016 | ||
GR | 10.06.2016 | ||
IS | 09.07.2016 | ||
Former [2016/49] | EE | 09.03.2016 | |
ES | 09.03.2016 | ||
FI | 09.03.2016 | ||
LT | 09.03.2016 | ||
LV | 09.03.2016 | ||
NL | 09.03.2016 | ||
PL | 09.03.2016 | ||
SE | 09.03.2016 | ||
BE | 30.04.2016 | ||
GR | 10.06.2016 | ||
IS | 09.07.2016 | ||
Former [2016/48] | ES | 09.03.2016 | |
FI | 09.03.2016 | ||
LT | 09.03.2016 | ||
LV | 09.03.2016 | ||
NL | 09.03.2016 | ||
PL | 09.03.2016 | ||
SE | 09.03.2016 | ||
BE | 30.04.2016 | ||
GR | 10.06.2016 | ||
IS | 09.07.2016 | ||
Former [2016/40] | ES | 09.03.2016 | |
FI | 09.03.2016 | ||
LT | 09.03.2016 | ||
LV | 09.03.2016 | ||
NL | 09.03.2016 | ||
PL | 09.03.2016 | ||
SE | 09.03.2016 | ||
BE | 30.04.2016 | ||
GR | 10.06.2016 | ||
Former [2016/39] | ES | 09.03.2016 | |
FI | 09.03.2016 | ||
LT | 09.03.2016 | ||
LV | 09.03.2016 | ||
PL | 09.03.2016 | ||
SE | 09.03.2016 | ||
BE | 30.04.2016 | ||
GR | 10.06.2016 | ||
Former [2016/36] | ES | 09.03.2016 | |
FI | 09.03.2016 | ||
LT | 09.03.2016 | ||
PL | 09.03.2016 | ||
BE | 30.04.2016 | ||
GR | 10.06.2016 | ||
Former [2016/35] | ES | 09.03.2016 | |
FI | 09.03.2016 | ||
GR | 10.06.2016 | Cited in | International search | [YA]DE19943390 (HANSCH WALTER [DE]); | [A]US2002060338 (ZHANG ZHIBO [US]); | [A]US6747313 (GIL GYOUNG-SEON [KR]); | [X]US2005032297 (KAMINS THEODORE I [US]); | [X]US6855582 (DAKSHINA-MURTHY SRIKANTESWARA [US], et al); | [X]WO2005079182 (IBM [US], et al); | [XY]US2006046391 (TANG SANH D [US], et al) | Examination | US5545586 | by applicant | US5545586 | US2002060338 |