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Extract from the Register of European Patents

EP About this file: EP2098490

EP2098490 - METHOD FOR FINISHING SURFACE OF PRELIMINARY POLISHED GLASS SUBSTRATE [Right-click to bookmark this link]
StatusThe application has been withdrawn
Status updated on  13.02.2015
Database last updated on 06.11.2024
Most recent event   Tooltip13.02.2015Withdrawal of applicationpublished on 18.03.2015  [2015/12]
Applicant(s)For all designated states
Asahi Glass Company, Limited
Shin-Marunouchi Building
1-5-1 Marunouchi
Chiyoda-ku
Tokyo 100-8405 / JP
[2011/43]
Former [2009/37]For all designated states
Asahi Glass Company, Limited
12-1 Yurakucho 1-chome Chiyoda-ku
Tokyo 100-8405 / JP
Inventor(s)01 / OTSUKA, Koji
ASAHI GLASS CO., LTD. 12-1, Yurakucho 1-chome
Chiyoda-ku Tokyo 100-8405 / JP
02 / OKAMURA, Kenji
ASAHI GLASS CO., LTD. 12-1, Yurakucho 1-chome
Chiyoda-ku Tokyo 100-8405 / JP
 [2009/37]
Representative(s)Müller-Boré & Partner Patentanwälte PartG mbB
Friedenheimer Brücke 21
80639 München / DE
[N/P]
Former [2009/37]Müller-Boré & Partner Patentanwälte
Grafinger Strasse 2
81671 München / DE
Application number, filing date07832417.522.11.2007
[2009/37]
WO2007JP72689
Priority number, dateJP2006032528601.12.2006         Original published format: JP 2006325286
[2009/37]
Filing languageJA
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2008065973
Date:05.06.2008
Language:JA
[2008/23]
Type: A1 Application with search report 
No.:EP2098490
Date:09.09.2009
Language:EN
[2009/37]
Search report(s)International search report - published on:JP05.06.2008
(Supplementary) European search report - dispatched on:EP03.12.2014
ClassificationIPC:C03C15/00, G01B9/02, G01B11/24, G01B11/30, G03F7/20, H01L21/027
[2015/01]
CPC:
G01B9/02065 (EP,KR,US); C03C15/02 (EP,KR,US); B24B9/10 (KR);
C03C19/00 (EP,KR,US); C03C23/006 (EP,KR,US); G01B11/30 (EP,KR,US);
G01B9/02057 (EP,KR,US); G01B9/0209 (EP,KR,US); G03F1/60 (EP,KR,US);
G03F1/62 (KR); C03C2204/08 (EP,US); H01J2237/0812 (EP,US);
Y10T428/24355 (EP,US) (-)
Former IPC [2009/37]C03C15/00, G01B9/02, G01B11/24, G01B11/30, G03F1/14, G03F7/20, H01L21/027
Designated contracting statesAT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MT,   NL,   PL,   PT,   RO,   SE,   SI,   SK,   TR [2009/37]
TitleGerman:VERFAHREN ZUR ENDBEARBEITUNG DER OBERFLÄCHE EINES VORLÄUFIGEN POLIERTEN GLASSUBSTRATS[2009/37]
English:METHOD FOR FINISHING SURFACE OF PRELIMINARY POLISHED GLASS SUBSTRATE[2009/37]
French:PROCÉDÉ DE FINITION DE SURFACE D'UN SUBSTRAT DE VERRE PRÉALABLEMEENT POLI[2009/37]
Entry into regional phase29.05.2009Translation filed 
04.06.2009National basic fee paid 
04.06.2009Search fee paid 
04.06.2009Designation fee(s) paid 
04.06.2009Examination fee paid 
Examination procedure29.05.2009Amendment by applicant (claims and/or description)
04.06.2009Examination requested  [2009/37]
06.02.2015Application withdrawn by applicant  [2015/12]
Fees paidRenewal fee
26.11.2009Renewal fee patent year 03
30.11.2010Renewal fee patent year 04
29.11.2011Renewal fee patent year 05
28.11.2012Renewal fee patent year 06
28.11.2013Renewal fee patent year 07
26.11.2014Renewal fee patent year 08
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Documents cited:Search[Y]US2005245383  (IWAHASHI YASUTOMI [JP], et al) [Y] 1 * paragraph [0007] - paragraph [0012] * * paragraph [0037] * * paragraph [0044] - paragraph [0046] *;
 [IAY]WO2005123617  (ASAHI GLASS CO LTD [JP], et al) [I] 11-15 * the whole document * [A] 2,3 [Y] 4-10;
 [XI]WO2005123857  (ASAHI GLASS CO LTD [JP], et al) [X] 13-15 * abstract * * page 17, line 13 - page 17, line 17 * * TABLE 2 (continued); column "Surface roughness (nm)"; page 26 * [I] 11,12;
 [Y]US2006126077  (UEKI NOBUAKI [JP], et al) [Y] 1 * paragraph [0046] - paragraph [0048]; figure 1 *;
 [IAY]WO2006082751  (ASAHI GLASS CO LTD [JP], et al) [I] 11-15 * the whole document * [A] 2,3 [Y] 4-10;
 [XI]  - PHIL SEIDEL, "EUV MASK BLANK READINESS FOR 45NM HP 2009 MANUFACTURING", SPIE, PO BOX 10 BELLINGHAM WA 98227-0010 USA, (20051231), pages 178 - 189, XP040201746 [X] 13-15 * abstract * * chapter "1. INTRODUCTION"; page 178 * * page 187; table 3 * [I] 11,12
 [I]  - "SEMI P37-1102", SEMI, 3081 ZANKER ROAD, SAN JOSE, CA 95134, USA, (20021231), XP040460047 [I] 11-15 * chapters 1-8 * * table 4 *
International search[Y]JPH0921606  (FUJI PHOTO OPTICAL CO LTD);
 [Y]JPH09266186  (SHINETSU HANDOTAI KK);
 [Y]JP2001110767  (SUMITOMO METAL IND);
 [A]JP2002316835  (SHINETSU CHEMICAL CO);
 [Y]JP2004315351  (ASAHI GLASS CO LTD);
 [Y]JP2006008426  (ASAHI GLASS CO LTD);
 [A]JP2006076816  (TOSOH CORP, et al);
 [Y]JP2006126082  (FUJINON CORP, et al);
 [A]JP2006133629  (HOYA CORP);
 [Y]JP2006240977  (ASAHI GLASS CO LTD)
by applicantJP2003050589
 JP2003159636
 JP2004037165
 JP2006133629
 JP2006325286
 JP2007022903
    - PROCEEDINGS OFLIGHT WAVE SENSING, (199505), pages 75 - 82
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.