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Extract from the Register of European Patents

EP About this file: EP2102896

EP2102896 - DEVICE AND METHOD FOR CLEANING ARTICLES, ESPECIALLY THIN WAFERS [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  08.06.2012
Database last updated on 11.09.2024
Most recent event   Tooltip04.10.2013Lapse of the patent in a contracting state
New state(s): HU		published on 06.11.2013  [2013/45]
Applicant(s)For all designated states
RENA GmbH
Ob der Eck 5
78148 Gütenbach / DE
[2011/19]
Former [2009/39]For all designated states
Rena Sondermaschinen GmbH
Ob der Eck 5
78148 Gütenbach / DE
Inventor(s)01 / BÜRGER, Norbert
Alemannenhof 5
79199 Kirchzarten / DE
 [2009/39]
Representative(s)Stürken, Joachim, et al
Joachim Stürken Patentanwaltsgesellschaft mbH Kirchenhölzle 18
79104 Freiburg / DE
[N/P]
Former [2009/39]Stürken, Joachim, et al
Joachim Stürken Patentanwaltsges. mbH Kirchenhölzle 18
79104 Freiburg / DE
Application number, filing date07856509.010.12.2007
[2009/39]
WO2007EP10734
Priority number, dateDE2006105981015.12.2006         Original published format: DE102006059810
[2009/39]
Filing languageDE
Procedural languageDE
PublicationType: A1 Application with search report
No.:WO2008071364
Date:19.06.2008
Language:DE
[2008/25]
Type: A1 Application with search report 
No.:EP2102896
Date:23.09.2009
Language:DE
The application published by WIPO in one of the EPO official languages on 19.06.2008 takes the place of the publication of the European patent application.
[2009/39]
Type: B1 Patent specification 
No.:EP2102896
Date:03.08.2011
Language:DE
[2011/31]
Search report(s)International search report - published on:EP19.06.2008
ClassificationIPC:H01L21/00
[2009/39]
CPC:
H01L21/67051 (EP,US); H01L21/302 (KR); B08B11/02 (EP,US);
B08B3/02 (EP,US); B08B3/10 (EP,US); H01L21/67023 (EP,US);
H01L21/67057 (EP,US); H01L21/67313 (EP,US); H01L21/67326 (EP,US) (-)
Designated contracting statesAT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MT,   NL,   PL,   PT,   RO,   SE,   SI,   SK,   TR [2009/39]
TitleGerman:VORRICHTUNG UND VERFAHREN ZUM REINIGEN VON GEGENSTÄNDEN, INSBESONDERE VON DÜNNEN SCHEIBEN[2009/39]
English:DEVICE AND METHOD FOR CLEANING ARTICLES, ESPECIALLY THIN WAFERS[2009/39]
French:DISPOSITIF ET PROCÉDÉ POUR NETTOYER DES OBJETS, EN PARTICULIER DES PLAQUETTES MINCES[2009/39]
Entry into regional phase06.02.2009National basic fee paid 
06.02.2009Designation fee(s) paid 
06.02.2009Examination fee paid 
Examination procedure06.02.2009Amendment by applicant (claims and/or description)
06.02.2009Examination requested  [2009/39]
27.11.2009Despatch of a communication from the examining division (Time limit: M04)
11.03.2010Reply to a communication from the examining division
25.03.2011Communication of intention to grant the patent
22.06.2011Fee for grant paid
22.06.2011Fee for publishing/printing paid
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  27.11.2009
Opposition(s)04.05.2012No opposition filed within time limit [2012/28]
Fees paidRenewal fee
30.12.2009Renewal fee patent year 03
29.12.2010Renewal fee patent year 04
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipCY03.08.2011
CZ03.08.2011
EE03.08.2011
FI03.08.2011
HU03.08.2011
IE03.08.2011
LT03.08.2011
LV03.08.2011
MT03.08.2011
PL03.08.2011
RO03.08.2011
SE03.08.2011
SI03.08.2011
SK03.08.2011
TR03.08.2011
BG03.11.2011
GR04.11.2011
IS03.12.2011
PT05.12.2011
LU10.12.2011
BE31.12.2011
MC31.12.2011
[2013/45]
Former [2013/44]CY03.08.2011
CZ03.08.2011
EE03.08.2011
FI03.08.2011
IE03.08.2011
LT03.08.2011
LV03.08.2011
MT03.08.2011
PL03.08.2011
RO03.08.2011
SE03.08.2011
SI03.08.2011
SK03.08.2011
TR03.08.2011
BG03.11.2011
GR04.11.2011
IS03.12.2011
PT05.12.2011
LU10.12.2011
BE31.12.2011
MC31.12.2011
Former [2013/29]CY03.08.2011
CZ03.08.2011
EE03.08.2011
FI03.08.2011
IE03.08.2011
LT03.08.2011
LV03.08.2011
MT03.08.2011
PL03.08.2011
RO03.08.2011
SE03.08.2011
SI03.08.2011
SK03.08.2011
BG03.11.2011
GR04.11.2011
IS03.12.2011
PT05.12.2011
LU10.12.2011
BE31.12.2011
MC31.12.2011
Former [2013/25]CY03.08.2011
CZ03.08.2011
EE03.08.2011
FI03.08.2011
IE03.08.2011
LT03.08.2011
LV03.08.2011
MT03.08.2011
PL03.08.2011
RO03.08.2011
SE03.08.2011
SI03.08.2011
SK03.08.2011
GR04.11.2011
IS03.12.2011
PT05.12.2011
LU10.12.2011
BE31.12.2011
MC31.12.2011
Former [2013/14]CY03.08.2011
CZ03.08.2011
EE03.08.2011
FI03.08.2011
IE03.08.2011
LT03.08.2011
LV03.08.2011
MT03.08.2011
PL03.08.2011
RO03.08.2011
SE03.08.2011
SI03.08.2011
SK03.08.2011
GR04.11.2011
IS03.12.2011
PT05.12.2011
BE31.12.2011
MC31.12.2011
Former [2012/46]CY03.08.2011
CZ03.08.2011
EE03.08.2011
FI03.08.2011
IE03.08.2011
LT03.08.2011
LV03.08.2011
PL03.08.2011
RO03.08.2011
SE03.08.2011
SI03.08.2011
SK03.08.2011
GR04.11.2011
IS03.12.2011
PT05.12.2011
BE31.12.2011
MC31.12.2011
Former [2012/34]CY03.08.2011
CZ03.08.2011
EE03.08.2011
FI03.08.2011
IE03.08.2011
LT03.08.2011
LV03.08.2011
PL03.08.2011
RO03.08.2011
SE03.08.2011
SI03.08.2011
SK03.08.2011
GR04.11.2011
IS03.12.2011
PT05.12.2011
MC31.12.2011
Former [2012/23]CY03.08.2011
CZ03.08.2011
EE03.08.2011
FI03.08.2011
IE03.08.2011
LT03.08.2011
LV03.08.2011
PL03.08.2011
RO03.08.2011
SE03.08.2011
SI03.08.2011
SK03.08.2011
GR04.11.2011
IS03.12.2011
PT05.12.2011
Former [2012/21]CY03.08.2011
CZ03.08.2011
FI03.08.2011
IE03.08.2011
LT03.08.2011
LV03.08.2011
PL03.08.2011
SE03.08.2011
SI03.08.2011
GR04.11.2011
IS03.12.2011
PT05.12.2011
Former [2012/20]CY03.08.2011
FI03.08.2011
IE03.08.2011
LT03.08.2011
LV03.08.2011
PL03.08.2011
SE03.08.2011
SI03.08.2011
GR04.11.2011
IS03.12.2011
PT05.12.2011
Former [2012/12]CY03.08.2011
FI03.08.2011
LT03.08.2011
LV03.08.2011
PL03.08.2011
SE03.08.2011
SI03.08.2011
GR04.11.2011
IS03.12.2011
PT05.12.2011
Cited inInternational search[X]US5069235  (VETTER WILLIAM L [US], et al) [X] 1-10,12-17 * abstract * * column 6, line 40 - column 7, line 37; figure 3 *;
 [XY]US6139591  (NAKAURA KENICHI [JP], et al) [X] 1-10,12-17 * abstract * * column 10, line 9 - line 52 * [Y] 11;
 [X]DE10020523  (TOKYO ELECTRON LTD [JP]) [X] 1-10,12-17 * abstract * * column 8, line 49 - column 10 *;
 [Y]US6423146  (FUKAZAWA YUJI [JP]) [Y] 11 * abstract ** column 4, line 35 - column 5, line 20 *
by applicantUS5069235
 US6139591
 DE10020523
 US6423146
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.