EP2114112 - Apparatus for industrial plasma processes [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 29.07.2016 Database last updated on 20.12.2024 | Most recent event Tooltip | 17.08.2018 | Lapse of the patent in a contracting state New state(s): BG | published on 19.09.2018 [2018/38] | Applicant(s) | For all designated states Plasmetrex GmbH Schwarzschildstrasse 3 12489 Berlin / DE | [2009/45] | Inventor(s) | 01 /
Klick, Michael, Dr. Semmelweisstrasse 57 12524 Berlin / DE | 02 /
Rothe, Ralf, Dr. Herderstrasse 6 15890 Eisenhüttenstadt / DE | 03 /
Eichhorn, Lutz Kaulsdorfer Strasse 148 12555 Berlin / DE | [2009/45] | Representative(s) | Zeitler Volpert Kandlbinder Patentanwälte Partnerschaft mbB Postfach 10 02 37 80076 München / DE | [N/P] |
Former [2015/39] | Zeitler Volpert Kandlbinder Patent- und Rechtsanwälte Partnerschaft mbB Postfach 26 02 51 80059 München / DE | ||
Former [2009/45] | Volpert, Marcus, et al Zeitler - Volpert - Kandlbinder Patentanwälte Herrnstrasse 44 80539 München / DE | Application number, filing date | 08008191.2 | 29.04.2008 | [2009/45] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP2114112 | Date: | 04.11.2009 | Language: | EN | [2009/45] | Type: | B1 Patent specification | No.: | EP2114112 | Date: | 23.09.2015 | Language: | EN | [2015/39] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 09.10.2008 | Classification | IPC: | H05H1/00 | [2009/45] | CPC: |
H05H1/0081 (EP,KR);
H01J37/32935 (KR)
| Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR [2015/39] |
Former [2009/45] | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR | Title | German: | Vorrichtung für industrielle Plasmaprozesse | [2009/45] | English: | Apparatus for industrial plasma processes | [2009/45] | French: | Appareil pour procédés industriels au plasma | [2015/17] |
Former [2009/45] | Appareil pour processus industriels au plasma | Examination procedure | 24.11.2009 | Examination requested [2010/01] | 15.02.2010 | Despatch of a communication from the examining division (Time limit: M04) | 07.05.2010 | Reply to a communication from the examining division | 03.03.2014 | Despatch of a communication from the examining division (Time limit: M04) | 08.07.2014 | Reply to a communication from the examining division | 29.09.2014 | Despatch of a communication from the examining division (Time limit: M04) | 29.01.2015 | Reply to a communication from the examining division | 15.04.2015 | Communication of intention to grant the patent | 10.08.2015 | Fee for grant paid | 10.08.2015 | Fee for publishing/printing paid | 10.08.2015 | Receipt of the translation of the claim(s) | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 15.02.2010 | Opposition(s) | 24.06.2016 | No opposition filed within time limit [2016/35] | Fees paid | Renewal fee | 29.03.2010 | Renewal fee patent year 03 | 29.04.2011 | Renewal fee patent year 04 | 29.03.2012 | Renewal fee patent year 05 | 30.04.2013 | Renewal fee patent year 06 | 24.04.2014 | Renewal fee patent year 07 | 21.04.2015 | Renewal fee patent year 08 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 29.04.2008 | AT | 23.09.2015 | BE | 23.09.2015 | BG | 23.09.2015 | CY | 23.09.2015 | CZ | 23.09.2015 | DK | 23.09.2015 | EE | 23.09.2015 | ES | 23.09.2015 | FI | 23.09.2015 | HR | 23.09.2015 | IT | 23.09.2015 | LT | 23.09.2015 | LV | 23.09.2015 | MC | 23.09.2015 | NL | 23.09.2015 | PL | 23.09.2015 | RO | 23.09.2015 | SE | 23.09.2015 | SI | 23.09.2015 | SK | 23.09.2015 | TR | 23.09.2015 | NO | 23.12.2015 | GR | 24.12.2015 | IS | 23.01.2016 | PT | 25.01.2016 | GB | 29.04.2016 | IE | 29.04.2016 | LU | 29.04.2016 | CH | 30.04.2016 | LI | 30.04.2016 | MT | 30.04.2016 | [2018/38] |
Former [2018/32] | HU | 29.04.2008 | |
AT | 23.09.2015 | ||
BE | 23.09.2015 | ||
CY | 23.09.2015 | ||
CZ | 23.09.2015 | ||
DK | 23.09.2015 | ||
EE | 23.09.2015 | ||
ES | 23.09.2015 | ||
FI | 23.09.2015 | ||
HR | 23.09.2015 | ||
IT | 23.09.2015 | ||
LT | 23.09.2015 | ||
LV | 23.09.2015 | ||
MC | 23.09.2015 | ||
NL | 23.09.2015 | ||
PL | 23.09.2015 | ||
RO | 23.09.2015 | ||
SE | 23.09.2015 | ||
SI | 23.09.2015 | ||
SK | 23.09.2015 | ||
TR | 23.09.2015 | ||
NO | 23.12.2015 | ||
GR | 24.12.2015 | ||
IS | 23.01.2016 | ||
PT | 25.01.2016 | ||
GB | 29.04.2016 | ||
IE | 29.04.2016 | ||
LU | 29.04.2016 | ||
CH | 30.04.2016 | ||
LI | 30.04.2016 | ||
MT | 30.04.2016 | ||
Former [2018/29] | HU | 29.04.2008 | |
AT | 23.09.2015 | ||
BE | 23.09.2015 | ||
CY | 23.09.2015 | ||
CZ | 23.09.2015 | ||
DK | 23.09.2015 | ||
EE | 23.09.2015 | ||
ES | 23.09.2015 | ||
FI | 23.09.2015 | ||
HR | 23.09.2015 | ||
IT | 23.09.2015 | ||
LT | 23.09.2015 | ||
LV | 23.09.2015 | ||
MC | 23.09.2015 | ||
NL | 23.09.2015 | ||
PL | 23.09.2015 | ||
RO | 23.09.2015 | ||
SE | 23.09.2015 | ||
SI | 23.09.2015 | ||
SK | 23.09.2015 | ||
TR | 23.09.2015 | ||
NO | 23.12.2015 | ||
GR | 24.12.2015 | ||
IS | 23.01.2016 | ||
PT | 25.01.2016 | ||
GB | 29.04.2016 | ||
IE | 29.04.2016 | ||
LU | 29.04.2016 | ||
CH | 30.04.2016 | ||
LI | 30.04.2016 | ||
Former [2018/28] | HU | 29.04.2008 | |
AT | 23.09.2015 | ||
BE | 23.09.2015 | ||
CY | 23.09.2015 | ||
CZ | 23.09.2015 | ||
DK | 23.09.2015 | ||
EE | 23.09.2015 | ||
ES | 23.09.2015 | ||
FI | 23.09.2015 | ||
HR | 23.09.2015 | ||
IT | 23.09.2015 | ||
LT | 23.09.2015 | ||
LV | 23.09.2015 | ||
MC | 23.09.2015 | ||
NL | 23.09.2015 | ||
PL | 23.09.2015 | ||
RO | 23.09.2015 | ||
SE | 23.09.2015 | ||
SI | 23.09.2015 | ||
SK | 23.09.2015 | ||
NO | 23.12.2015 | ||
GR | 24.12.2015 | ||
IS | 23.01.2016 | ||
PT | 25.01.2016 | ||
GB | 29.04.2016 | ||
IE | 29.04.2016 | ||
LU | 29.04.2016 | ||
CH | 30.04.2016 | ||
LI | 30.04.2016 | ||
Former [2017/38] | AT | 23.09.2015 | |
BE | 23.09.2015 | ||
CZ | 23.09.2015 | ||
DK | 23.09.2015 | ||
EE | 23.09.2015 | ||
ES | 23.09.2015 | ||
FI | 23.09.2015 | ||
HR | 23.09.2015 | ||
IT | 23.09.2015 | ||
LT | 23.09.2015 | ||
LV | 23.09.2015 | ||
NL | 23.09.2015 | ||
PL | 23.09.2015 | ||
RO | 23.09.2015 | ||
SE | 23.09.2015 | ||
SI | 23.09.2015 | ||
SK | 23.09.2015 | ||
NO | 23.12.2015 | ||
GR | 24.12.2015 | ||
IS | 23.01.2016 | ||
PT | 25.01.2016 | ||
GB | 29.04.2016 | ||
IE | 29.04.2016 | ||
LU | 29.04.2016 | ||
CH | 30.04.2016 | ||
LI | 30.04.2016 | ||
Former [2017/08] | AT | 23.09.2015 | |
BE | 23.09.2015 | ||
CZ | 23.09.2015 | ||
DK | 23.09.2015 | ||
EE | 23.09.2015 | ||
ES | 23.09.2015 | ||
FI | 23.09.2015 | ||
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LT | 23.09.2015 | ||
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NL | 23.09.2015 | ||
PL | 23.09.2015 | ||
RO | 23.09.2015 | ||
SE | 23.09.2015 | ||
SI | 23.09.2015 | ||
SK | 23.09.2015 | ||
NO | 23.12.2015 | ||
GR | 24.12.2015 | ||
IS | 23.01.2016 | ||
PT | 25.01.2016 | ||
GB | 29.04.2016 | ||
LU | 29.04.2016 | ||
CH | 30.04.2016 | ||
LI | 30.04.2016 | ||
Former [2017/07] | AT | 23.09.2015 | |
BE | 23.09.2015 | ||
CZ | 23.09.2015 | ||
DK | 23.09.2015 | ||
EE | 23.09.2015 | ||
ES | 23.09.2015 | ||
FI | 23.09.2015 | ||
HR | 23.09.2015 | ||
IT | 23.09.2015 | ||
LT | 23.09.2015 | ||
LV | 23.09.2015 | ||
NL | 23.09.2015 | ||
PL | 23.09.2015 | ||
RO | 23.09.2015 | ||
SE | 23.09.2015 | ||
SI | 23.09.2015 | ||
SK | 23.09.2015 | ||
NO | 23.12.2015 | ||
GR | 24.12.2015 | ||
IS | 23.01.2016 | ||
PT | 25.01.2016 | ||
LU | 29.04.2016 | ||
CH | 30.04.2016 | ||
LI | 30.04.2016 | ||
Former [2017/04] | AT | 23.09.2015 | |
BE | 23.09.2015 | ||
CZ | 23.09.2015 | ||
DK | 23.09.2015 | ||
EE | 23.09.2015 | ||
ES | 23.09.2015 | ||
FI | 23.09.2015 | ||
HR | 23.09.2015 | ||
IT | 23.09.2015 | ||
LT | 23.09.2015 | ||
LV | 23.09.2015 | ||
NL | 23.09.2015 | ||
PL | 23.09.2015 | ||
RO | 23.09.2015 | ||
SE | 23.09.2015 | ||
SI | 23.09.2015 | ||
SK | 23.09.2015 | ||
NO | 23.12.2015 | ||
GR | 24.12.2015 | ||
IS | 23.01.2016 | ||
PT | 25.01.2016 | ||
LU | 29.04.2016 | ||
Former [2017/03] | AT | 23.09.2015 | |
BE | 23.09.2015 | ||
CZ | 23.09.2015 | ||
DK | 23.09.2015 | ||
EE | 23.09.2015 | ||
ES | 23.09.2015 | ||
FI | 23.09.2015 | ||
HR | 23.09.2015 | ||
IT | 23.09.2015 | ||
LT | 23.09.2015 | ||
LV | 23.09.2015 | ||
NL | 23.09.2015 | ||
PL | 23.09.2015 | ||
RO | 23.09.2015 | ||
SE | 23.09.2015 | ||
SI | 23.09.2015 | ||
SK | 23.09.2015 | ||
NO | 23.12.2015 | ||
GR | 24.12.2015 | ||
IS | 23.01.2016 | ||
PT | 25.01.2016 | ||
Former [2016/49] | AT | 23.09.2015 | |
CZ | 23.09.2015 | ||
DK | 23.09.2015 | ||
EE | 23.09.2015 | ||
ES | 23.09.2015 | ||
FI | 23.09.2015 | ||
HR | 23.09.2015 | ||
IT | 23.09.2015 | ||
LT | 23.09.2015 | ||
LV | 23.09.2015 | ||
NL | 23.09.2015 | ||
PL | 23.09.2015 | ||
RO | 23.09.2015 | ||
SE | 23.09.2015 | ||
SI | 23.09.2015 | ||
SK | 23.09.2015 | ||
NO | 23.12.2015 | ||
GR | 24.12.2015 | ||
IS | 23.01.2016 | ||
PT | 25.01.2016 | ||
BE | 30.04.2016 | ||
Former [2016/39] | AT | 23.09.2015 | |
CZ | 23.09.2015 | ||
DK | 23.09.2015 | ||
EE | 23.09.2015 | ||
ES | 23.09.2015 | ||
FI | 23.09.2015 | ||
HR | 23.09.2015 | ||
IT | 23.09.2015 | ||
LT | 23.09.2015 | ||
LV | 23.09.2015 | ||
NL | 23.09.2015 | ||
PL | 23.09.2015 | ||
RO | 23.09.2015 | ||
SE | 23.09.2015 | ||
SK | 23.09.2015 | ||
NO | 23.12.2015 | ||
GR | 24.12.2015 | ||
IS | 23.01.2016 | ||
PT | 25.01.2016 | ||
BE | 30.04.2016 | ||
Former [2016/37] | AT | 23.09.2015 | |
CZ | 23.09.2015 | ||
EE | 23.09.2015 | ||
ES | 23.09.2015 | ||
FI | 23.09.2015 | ||
HR | 23.09.2015 | ||
IT | 23.09.2015 | ||
LT | 23.09.2015 | ||
LV | 23.09.2015 | ||
NL | 23.09.2015 | ||
PL | 23.09.2015 | ||
RO | 23.09.2015 | ||
SE | 23.09.2015 | ||
SK | 23.09.2015 | ||
NO | 23.12.2015 | ||
GR | 24.12.2015 | ||
IS | 23.01.2016 | ||
PT | 25.01.2016 | ||
BE | 30.04.2016 | ||
Former [2016/24] | AT | 23.09.2015 | |
CZ | 23.09.2015 | ||
EE | 23.09.2015 | ||
ES | 23.09.2015 | ||
FI | 23.09.2015 | ||
HR | 23.09.2015 | ||
IT | 23.09.2015 | ||
LT | 23.09.2015 | ||
LV | 23.09.2015 | ||
NL | 23.09.2015 | ||
PL | 23.09.2015 | ||
RO | 23.09.2015 | ||
SE | 23.09.2015 | ||
SK | 23.09.2015 | ||
NO | 23.12.2015 | ||
GR | 24.12.2015 | ||
IS | 23.01.2016 | ||
PT | 25.01.2016 | ||
Former [2016/23] | CZ | 23.09.2015 | |
EE | 23.09.2015 | ||
ES | 23.09.2015 | ||
FI | 23.09.2015 | ||
HR | 23.09.2015 | ||
IT | 23.09.2015 | ||
LT | 23.09.2015 | ||
LV | 23.09.2015 | ||
NL | 23.09.2015 | ||
RO | 23.09.2015 | ||
SE | 23.09.2015 | ||
SK | 23.09.2015 | ||
NO | 23.12.2015 | ||
GR | 24.12.2015 | ||
IS | 23.01.2016 | ||
Former [2016/22] | CZ | 23.09.2015 | |
EE | 23.09.2015 | ||
ES | 23.09.2015 | ||
FI | 23.09.2015 | ||
HR | 23.09.2015 | ||
IT | 23.09.2015 | ||
LT | 23.09.2015 | ||
LV | 23.09.2015 | ||
NL | 23.09.2015 | ||
SE | 23.09.2015 | ||
NO | 23.12.2015 | ||
GR | 24.12.2015 | ||
IS | 23.01.2016 | ||
Former [2016/21] | ES | 23.09.2015 | |
FI | 23.09.2015 | ||
HR | 23.09.2015 | ||
IT | 23.09.2015 | ||
LT | 23.09.2015 | ||
LV | 23.09.2015 | ||
NL | 23.09.2015 | ||
SE | 23.09.2015 | ||
NO | 23.12.2015 | ||
GR | 24.12.2015 | ||
Former [2016/20] | ES | 23.09.2015 | |
FI | 23.09.2015 | ||
HR | 23.09.2015 | ||
LT | 23.09.2015 | ||
LV | 23.09.2015 | ||
NL | 23.09.2015 | ||
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NO | 23.12.2015 | ||
GR | 24.12.2015 | ||
Former [2016/14] | FI | 23.09.2015 | |
HR | 23.09.2015 | ||
LT | 23.09.2015 | ||
LV | 23.09.2015 | ||
NL | 23.09.2015 | ||
SE | 23.09.2015 | ||
NO | 23.12.2015 | ||
GR | 24.12.2015 | ||
Former [2016/10] | FI | 23.09.2015 | |
HR | 23.09.2015 | ||
LT | 23.09.2015 | ||
LV | 23.09.2015 | ||
SE | 23.09.2015 | ||
NO | 23.12.2015 | ||
GR | 24.12.2015 | ||
Former [2016/09] | FI | 23.09.2015 | |
LT | 23.09.2015 | ||
LV | 23.09.2015 | ||
NO | 23.12.2015 | ||
GR | 24.12.2015 | ||
Former [2016/08] | LT | 23.09.2015 | |
NO | 23.12.2015 | ||
Former [2016/07] | LT | 23.09.2015 | Documents cited: | Search | [XY]US5861752 (KLICK MICHAEL [DE]) [X] 1,2,5 * abstract * * column 9, lines 46-55 * * column 10, lines 41-44 * * column 11, lines 16-18 * [Y] 3-6,8,9; | [X]US5936413 (BOOTH JEAN-PAUL [FR], et al) [X] 1 * figure 4 *; | [A]US2003227283 (COX MICHAEL S [US], et al) [A] 1-9* abstract *; | [Y]US2005009347 (MATSUMOTO NAOKI [JP], et al) [Y] 3-6,8 * paragraph [0126]; figures 1,2,14B *; | [Y]US2007074811 (MOROZ PAUL [US], et al) [Y] 9 * paragraphs [0022] , [0016]; figure 1 *; | [A]US2007227657 (YAMAZAWA YOHEI [JP]) [A] 1-9 * abstract * | by applicant | US5861752 |