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EP1986215
European procedure
Extract from the Register of European Patents
EP About this file: EP1986215
| EP1986215 - Substrate processing apparatus [Right-click to bookmark this link] | |||
| Former [2008/44] | Substrate processing apparatus and substrate plating apparatus | ||
| [2009/31] | Status | No opposition filed within time limit Status updated on 26.11.2010 Database last updated on 01.01.2025 | Most recent event Tooltip | 26.11.2010 | No opposition filed within time limit | published on 29.12.2010 [2010/52] | Applicant(s) | For all designated states EBARA CORPORATION 11-1, Haneda Asahi-cho Ohta-ku Tokyo 144-8510 / JP | [2008/44] | Inventor(s) | 01 /
Mishima, Koji 3-22-9, Mirokuji Fujisawa-shi, Kanagawa-ken / JP | 02 /
Kunisawa, Junji 1-7-2-307, Kamisouyagi Yamato-shi, Kanagawa-ken / JP | 03 /
Makino, Natsuki c/o Ebara Corporation, 11-1, Haneda, Ashai-cho, Ohta-ku Tokyo 144-8510 / JP | 04 /
Kimura, Norio 1-5-11-408, Kugenuma Shimei Fujisawa-shi, Kanagawa-ken / JP | 05 /
Inoue, Hiroaki 4-17-18, Tamagawagakuen Machida-shi, Tokio / JP | 06 /
Nakamura, Kenji 1-4-14, Tsujido Higashikaigan Fujisawa-shi, Kanagawa-ken / JP | 07 /
Matsumoto, Moriji c/o Ebara Corporation, 11-1, Haneda, Ashai-cho, Ohta-ku Tokyo 144-8510 / JP | 08 /
Nanjo, Takahiro c/o Ebara Corporation 11-1, Haneda Ashai-cho, Ohta-ku Tokyo 144-8510 / JP | 09 /
Odagaki, Mitsuko 1282-39, Gumisawa-cho, Totsuka-ku Yokohama-shi, Kanagawa-ken / JP | [2009/34] |
| Former [2009/04] | 01 /
Mishima, Koji 3-22-9, Mirokuji Fujisawa-shi, Kanagawa-ken / JP | ||
| 02 /
Kunisawa, Junji 1-7-2-307, Kamisouyagi Yamato-shi, Kanagawa-ken / JP | |||
| 03 /
Makino, Natsuki c/o Ebara Corporation, 11-1, Haneda, Ashai-cho, 1 Ohta-ku Tokyo 144-8510 / JP | |||
| 04 /
Kimura, Norio 1-5-11-408, Kugenuma Shimei Fujisawa-shi, Kanagawa-ken / JP | |||
| 05 /
Inoue, Hiroaki 4-17-18, Tamagawagakuen Machida-shi, Tokio / JP | |||
| 06 /
Nakamura, Kenji 1-4-14, Tsujido Higashikaigan Fujisawa-shi, Kanagawa-ken / JP | |||
| 07 /
Matsumoto, Moriji c/o Ebara Corporation, 11-1, Haneda, Ashai-cho, 1 Ohta-ku Tokyo 144-8510 / JP | |||
| 08 /
Nanjo, Takahiro c/o Ebara Corporation 11-1, Haneda Ashai-cho, 1Ohta-ku Tokyo 144-8510 / JP | |||
| 09 /
Odagaki, Mitsuko 1282-39, Gumisawa-cho, Totsuka-ku Yokohama-shi, Kanagawa-ken / JP | |||
| Former [2008/44] | 01 /
Mishima, Koji 3-22-9, Mirokuji Fujisawa-shi, Kanagawa-ken / JP | ||
| 02 /
Kunisawa, Junji 1-7-2-307, Kamisouyagi Yamato-shi, Kanagawa-ken / JP | |||
| 03 /
Makino, Natsuki 3119-1-202, Ishikawa Fujisawa-shi, Kanagawa-ken / JP | |||
| 04 /
Kimura, Norio 1-5-11-408, Kugenuma Shimei Fujisawa-shi, Kanagawa-ken / JP | |||
| 05 /
Inoue, Hiroaki 4-17-18, Tamagawagakuen Machida-shi, Tokio / JP | |||
| 06 /
Nakamura, Kenji 1-4-14, Tsujido Higashikaigan Fujisawa-shi, Kanagawa-ken / JP | |||
| 07 /
Matsumoto, Moriji 2-14-23-102, Honfujisawa Fujisawa-shi, Kanagawa-ken / JP | |||
| 08 /
Nanjo, Takahiro 3207-722,3-2-3, Shiomidai, Isogo-ku Yokohma-shi, Kanagawa-ken / JP | |||
| 09 /
Odagaki, Mitsuko 1282-39, Gumisawa-cho, Totsuka-ku Yokohama-shi, Kanagawa-ken / JP | Representative(s) | Carstens, Dirk Wilhelm Wagner & Geyer Partnerschaft mbB Patent- und Rechtsanwälte Gewürzmühlstraße 5 80538 München / DE | [N/P] |
| Former [2008/44] | Carstens, Dirk Wilhelm Wagner & Geyer Gewürzmühlstraße 5 D-80538 München / DE | Application number, filing date | 08013566.8 | 28.05.2001 | [2008/44] | Priority number, date | JP20000156691 | 26.05.2000 Original published format: JP 2000156691 | JP20000166577 | 02.06.2000 Original published format: JP 2000166577 | JP20000170076 | 07.06.2000 Original published format: JP 2000170076 | [2008/44] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP1986215 | Date: | 29.10.2008 | Language: | EN | [2008/44] | Type: | B1 Patent specification | No.: | EP1986215 | Date: | 20.01.2010 | Language: | EN | [2010/03] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 26.09.2008 | Classification | IPC: | H01L21/00, H01L21/68 | [2008/44] | CPC: |
H01L21/67109 (EP,KR,US);
C25D17/001 (EP,KR,US);
C25D7/123 (EP,KR,US);
H01L21/2885 (EP,KR,US);
H01L21/67778 (EP,KR,US);
H01L21/681 (EP,KR,US)
| Designated contracting states | DE, FR, GB [2008/44] | Title | German: | Substratverarbeitungsvorrichtung | [2009/31] | English: | Substrate processing apparatus | [2009/31] | French: | Appareil de traitement de substrat | [2009/31] |
| Former [2008/44] | Substratverarbeitungsvorrichtung und Substratbeschichtungsvorrichtung | ||
| Former [2008/44] | Substrate processing apparatus and substrate plating apparatus | ||
| Former [2008/44] | Appareil de traitement de substrat et appareil de placage de substrat | Examination procedure | 28.07.2008 | Examination requested [2008/44] | 29.04.2009 | Amendment by applicant (claims and/or description) | 27.07.2009 | Communication of intention to grant the patent | 07.12.2009 | Fee for grant paid | 07.12.2009 | Fee for publishing/printing paid | Parent application(s) Tooltip | EP01113007.7 / EP1160837 | Opposition(s) | 21.10.2010 | No opposition filed within time limit [2010/52] | Fees paid | Renewal fee | 28.07.2008 | Renewal fee patent year 03 | 28.07.2008 | Renewal fee patent year 04 | 28.07.2008 | Renewal fee patent year 05 | 28.07.2008 | Renewal fee patent year 06 | 28.07.2008 | Renewal fee patent year 07 | 28.07.2008 | Renewal fee patent year 08 | 27.05.2009 | Renewal fee patent year 09 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [A]EP0903774 (EBARA CORP [JP]) [A] 1-5 * abstract * * paragraphs [0051] , [0057] - [0059] *; | [A]WO0020663 (EBARA CORP [JP], et al) [A] 1-5 * abstract *; | EP1048756 [ ] (EBARA CORP [JP]) [ ] * paragraph [0021] - paragraph [0025]; figure 1 * | by applicant | EP0903774 | WO0020663 |