EP2031651 - Container changing system and container changing method [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 31.01.2014 Database last updated on 03.09.2024 | Most recent event Tooltip | 31.01.2014 | Application deemed to be withdrawn | published on 05.03.2014 [2014/10] | Applicant(s) | For all designated states Tokyo Electron Limited 3-1 Akasaka 5-chome Minato-ku Tokyo 107-6325 / JP | [2009/10] | Inventor(s) | 01 /
Wakabayashi, Shinji c/o Tokyo Electron At Limited 2381-1 Kitagejo, Fujii-cho Nirasaki-shi Yamanashi 407-8511 / JP | [2013/07] |
Former [2009/10] | 01 /
Wakabayashi, Shinji c/o Tokyo Electron At Limited 2381-1 Kitagejo, Fujii-cho Nirasaki-shi Yamanashi 407-8511 / JP | Representative(s) | Hoffmann Eitle Patent- und Rechtsanwälte PartmbB Arabellastrasse 30 81925 München / DE | [N/P] |
Former [2009/10] | HOFFMANN EITLE Patent- und Rechtsanwälte Arabellastrasse 4 81925 München / DE | Application number, filing date | 08015110.3 | 27.08.2008 | [2009/10] | Priority number, date | JP20070224014 | 30.08.2007 Original published format: JP 2007224014 | [2009/10] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP2031651 | Date: | 04.03.2009 | Language: | EN | [2009/10] | Type: | A3 Search report | No.: | EP2031651 | Date: | 02.05.2012 | Language: | EN | [2012/18] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 29.03.2012 | Classification | IPC: | H01L21/677 | [2009/10] | CPC: |
H01L21/67766 (EP,US);
H01L21/02 (KR);
H01L21/67 (KR);
H01L21/67733 (EP,US);
H01L21/67769 (EP,US);
H01L21/67775 (EP,US);
Y10S414/14 (EP,US)
(-)
| Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR [2009/10] | Title | German: | Behälterwechselsystem und Verfahren zum Wechseln eines Behälters | [2009/10] | English: | Container changing system and container changing method | [2009/10] | French: | Système de changement de conteneur et procédé de changement de conteneur | [2009/10] | Examination procedure | 27.08.2008 | Examination requested [2009/10] | 02.11.2012 | Amendment by applicant (claims and/or description) | 16.01.2013 | Communication of intention to grant the patent | 21.02.2013 | Disapproval of the communication of intention to grant the patent by the applicant or resumption of examination proceedings by the EPO | 22.03.2013 | Communication of intention to grant the patent | 05.04.2013 | Disapproval of the communication of intention to grant the patent by the applicant or resumption of examination proceedings by the EPO | 23.04.2013 | Communication of intention to grant the patent | 04.07.2013 | Application deemed to be withdrawn, date of legal effect [2014/10] | 11.10.2013 | Despatch of communication that the application is deemed to be withdrawn, reason: fee for grant / fee for printing not paid in time [2014/10] | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 16.01.2013 | Fees paid | Renewal fee | 26.08.2010 | Renewal fee patent year 03 | 29.08.2011 | Renewal fee patent year 04 | 20.08.2012 | Renewal fee patent year 05 | Penalty fee | Additional fee for renewal fee | 31.08.2013 | 06   M06   Not yet paid |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [A]US2006045662 (AALUND MARTIN P [US], et al) [A] 1-4* paragraph [0032] - paragraph [0033]; figure 2 *; | [A]EP1683745 (MURATA MACHINERY LTD [JP]) [A] 1-4 * paragraph [0033] - paragraph [0034]; figure 6 *; | [XA]WO2006124982 (ASYST TECHNOLOGIES [US], et al) [X] 1,2 * page 8, line 21 - page 8, line 30; figure 3 * [A] 3,4 | Examination | US2003156928 | by applicant | JP2000150622 |