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EP2034595
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EP About this file: EP2034595
| EP2034595 - Driving apparatus, exposure apparatus, and device manufacturing method [Right-click to bookmark this link] | Status | The application has been withdrawn Status updated on 03.09.2010 Database last updated on 06.07.2024 | Most recent event Tooltip | 03.09.2010 | Withdrawal of application | published on 06.10.2010 [2010/40] | Applicant(s) | For all designated states Canon Kabushiki Kaisha 30-2 Shimomaruko 3-chome Ohta-ku Tokyo 146-8501 / JP | [2009/11] | Inventor(s) | 01 /
Ito, Atsushi c/o CANON KABUSHIKI KAISHA 3-30-2, Shimomaruko Ohta-ku Tokyo / JP | [2009/11] | Representative(s) | Hitching, Peter Matthew, et al Canon Europe Ltd European Patent Department 3 The Square Stockley Park Uxbridge Middlesex UB11 1ET / GB | [N/P] |
| Former [2009/36] | Hitching, Peter Matthew, et al Canon Europe Ltd 3 The Square Stockley Park Uxbridge Middlesex UB11 1ET / GB | ||
| Former [2009/11] | Sharp, Alan Cooper, et al Canon Europe Ltd. European Patent Department 6 Roundwood Avenue Stockley Park Uxbridge, Middlesex UB11 1JA / GB | Application number, filing date | 08163713.4 | 04.09.2008 | [2009/11] | Priority number, date | JP20070228543 | 04.09.2007 Original published format: JP 2007228543 | [2009/11] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP2034595 | Date: | 11.03.2009 | Language: | EN | [2009/11] | Classification | IPC: | H02K41/02 | [2009/11] | CPC: |
H02K41/031 (EP,KR,US);
G03F7/70758 (KR);
H01L21/027 (KR);
H02K1/182 (EP,KR,US);
H02K3/24 (EP,KR,US);
H02K55/00 (EP,KR,US);
H02K9/19 (EP,KR,US);
H02K2201/18 (EP,KR,US);
H02K2213/09 (EP,KR,US);
Y02E40/60 (EP,KR,US)
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| Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR [2009/11] | Extension states | AL | Not yet paid | BA | Not yet paid | MK | Not yet paid | RS | Not yet paid | Title | German: | Antriebsvorrichtung, Beschichtungsvorrichtung und Herstellungsverfahren | [2009/11] | English: | Driving apparatus, exposure apparatus, and device manufacturing method | [2009/11] | French: | Appareil d'entrainement, appareil d'exposition, et procédé de fabrication | [2009/11] | Examination procedure | 26.08.2010 | Application withdrawn by applicant [2010/40] |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | by applicant | JP2004235653 | JP2004254489 |