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EP2111631
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EP About this file: EP2111631
| EP2111631 - MICROWAVE HYBRID AND PLASMA RAPID THERMAL PROCESSING OR SEMICONDUCTOR WAFERS [Right-click to bookmark this link] | Status | The application has been withdrawn Status updated on 02.04.2010 Database last updated on 18.11.2024 | Most recent event Tooltip | 02.04.2010 | Withdrawal of application | published on 05.05.2010 [2010/18] | Applicant(s) | For all designated states BTU International, Inc. 23 Esquire Road North Billerica, MA 01862-2596 / US | [2009/44] | Inventor(s) | 01 /
PEELAMEDU, Ramesh 800 bullfinch Drive, Apt 314 Andover, Massachusetts 01810 / US | 02 /
KUMAR, Satyendra 3740 Edenderry Drive Troy, MI 48083 / US | 03 /
KUMAR, Devendra 850 Rambling Drive Rochester Hills, MI 48307 / US | 04 /
WONG, David, C. 9 Northbriar Road Acton, MA 01720 / US | 05 /
SECCOMBE, Donald, A. 52 Old Nugent Farm Road Gloucester, MA 01930 / US | 06 /
DEMCHAK, Michael 145 South Liverois Rochester Hills, MI 48307 / US | 07 /
HESTER, Michael, K. 452 Marion Avenue Waterford, MI 48328 / US | [2010/07] |
| Former [2009/44] | 01 /
PEELAMEDU, Ramesh 390 Woodside Court 1 Rochester Hills, MI 48309 / US | ||
| 02 /
KUMAR, Satyendra 3740 Edenderry Drive Troy, MI 48083 / US | |||
| 03 /
KUMAR, Devendra 850 Rambling Drive Rochester Hills, MI 48307 / US | |||
| 04 /
WONG, David, C. 9 Northbriar Road Acton, MA 01720 / US | |||
| 05 /
SECCOMBE, Donald, A. 52 Old Nugent Farm Road Gloucester, MA 01930 / US | |||
| 06 /
DEMCHAK, Michael 145 South Liverois Rochester Hills, MI 48307 / US | |||
| 07 /
HESTER, Michael, K. 452 Marion Avenue Waterford, MI 48328 / US | Representative(s) | Hatzmann, Martin V.O. Johan de Wittlaan 7 2517 JR Den Haag / NL | [N/P] |
| Former [2009/44] | Hatzmann, Martin Vereenigde Johan de Wittlaan 7 2517 JR Den Haag / NL | Application number, filing date | 08713219.7 | 23.01.2008 | [2009/44] | WO2008US00839 | Priority number, date | US20070897450P | 25.01.2007 Original published format: US 897450 P | [2009/44] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2008091613 | Date: | 31.07.2008 | Language: | EN | [2008/31] | Type: | A1 Application with search report | No.: | EP2111631 | Date: | 28.10.2009 | Language: | EN | The application published by WIPO in one of the EPO official languages on 31.07.2008 takes the place of the publication of the European patent application. | [2009/44] | Search report(s) | International search report - published on: | US | 31.07.2008 | Classification | IPC: | H01L21/00 | [2009/44] | CPC: |
H01L21/67115 (EP,US);
H01L21/324 (KR);
H01J37/32192 (EP,US);
H01J37/32825 (EP,US);
H01L21/00 (KR)
| Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR [2009/44] | Title | German: | SCHNELLE THERMISCHE MIKROWELLEN-HYBRID- UND PLASMAVERARBEITUNG VON HALBLEITERWAFERN | [2009/44] | English: | MICROWAVE HYBRID AND PLASMA RAPID THERMAL PROCESSING OR SEMICONDUCTOR WAFERS | [2009/44] | French: | TRAITEMENT THERMIQUE RAPIDE AU PLASMA ET HYBRIDE MICRO-ONDE DE PLAQUETTES SEMI-CONDUCTRICES | [2009/44] | Entry into regional phase | 21.08.2009 | National basic fee paid | 21.08.2009 | Search fee paid | 21.08.2009 | Designation fee(s) paid | 21.08.2009 | Examination fee paid | Examination procedure | 21.08.2009 | Amendment by applicant (claims and/or description) | 21.08.2009 | Examination requested [2009/44] | 29.03.2010 | Application withdrawn by applicant [2010/18] | Fees paid | Renewal fee | 13.01.2010 | Renewal fee patent year 03 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | International search | [Y]US4687895 (CHITRE SANJEEV R [US], et al); | [Y]US2002073925 (NOBLE DAVID B [US], et al) |