EP2115535 - METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 05.07.2013 Database last updated on 22.08.2024 | Most recent event Tooltip | 17.07.2015 | Lapse of the patent in a contracting state New state(s): HU, LU | published on 19.08.2015 [2015/34] | Applicant(s) | For all designated states Carl Zeiss SMT GmbH Rudolf-Eber-Strasse 2 73447 Oberkochen / DE | [2011/10] |
Former [2009/46] | For all designated states Carl Zeiss SMT AG Rudof-Eber-Str. 2 73447 Oberkochen / DE | Inventor(s) | 01 /
XALTER, Stefan Frühlingstr. 7 73447 Oberkochen / DE | 02 /
KWAN, Yim-Bun-Patrick Warthelandstr. 68 73431 Aalen / DE | 03 /
MAJOR, András, G. Adolph-Kolping-Str. 49 73447 Oberkochen / DE | 04 /
MAUL, Manfred Elchweg 29 73434 Aalen / DE | 05 /
EISENMENGER, Johannes Johannes-Mynsinger-Weg 18 89075 Ulm / DE | 06 /
FIOLKA, Damian Heckenrosenweg 36 73447 Oberkochen / DE | 07 /
HORN, Jan Heilmeyersteige 158/4 89075 Ulm / DE | 08 /
DEGÜNTHER, Markus Langäckerweg 20 73432 Aalen / DE | 09 /
BACH, Florian Jenaer Str. 31 73447 Oberkochen / DE | 10 /
PATRA, Michael Schubartweg 41 73447 Oberkochen / DE | 11 /
WANGLER, Johannes An der Reute 15 89551 Königsbronn / DE | 12 /
LAYH, Michael Himmlinger Weg 33 73432 Aalen / DE | [2009/46] | Representative(s) | Schwanhäußer, Gernot, et al Ostertag & Partner Patentanwälte mbB Epplestraße 14 70597 Stuttgart / DE | [N/P] |
Former [2012/35] | Schwanhäußer, Gernot, et al Ostertag & Partner Patentanwälte Epplestr. 14 70597 Stuttgart / DE | ||
Former [2009/46] | Schwanhäusser, Gernot, et al Ostertag & Partner Patentanwälte Epplestr. 14 70597 Stuttgart / DE | Application number, filing date | 08715697.2 | 06.02.2008 | [2009/46] | WO2008EP00920 | Priority number, date | DE20071005875 | 06.02.2007 Original published format: DE102007005875 | DE20071036245 | 02.08.2007 Original published format: DE102007036245 | US20070954150P | 06.08.2007 Original published format: US 954150 P | US20070015999P | 21.12.2007 Original published format: US 15999 P | [2009/46] | Filing language | DE | Procedural language | DE | Publication | Type: | A2 Application without search report | No.: | WO2008095695 | Date: | 14.08.2008 | Language: | DE | [2008/33] | Type: | A2 Application without search report | No.: | EP2115535 | Date: | 11.11.2009 | Language: | DE | The application published by WIPO in one of the EPO official languages on 14.08.2008 takes the place of the publication of the European patent application. | [2009/46] | Type: | B1 Patent specification | No.: | EP2115535 | Date: | 29.08.2012 | Language: | DE | [2012/35] | Type: | B9 Corrected patent specification | No.: | EP2115535 | Date: | 09.01.2013 | [2013/02] | Search report(s) | International search report - published on: | EP | 30.10.2008 | Classification | IPC: | G03F7/20, G02B26/08 | [2009/46] | CPC: |
G02B26/0833 (EP,US);
G03F7/20 (KR);
G03F7/70258 (US);
G01B11/002 (US);
G01B11/272 (US);
G01M11/30 (US);
G01N21/55 (US);
G02B26/08 (KR);
G03F7/70058 (US);
G03F7/70116 (EP,US);
G03F7/70133 (US);
G03F7/702 (US);
G03F7/70291 (US);
G03F7/70516 (US);
G03F7/7085 (EP,US);
| Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR [2009/46] | Title | German: | VERFAHREN UND VORRICHTUNG ZUR ÜBERWACHUNG VON MEHRFACHSPIEGELANORDNUNGEN IN EINEM BELEUCHTUNGSSYSTEM EINER MIKROLITHOGRAPHISCHEN PROJEKTIONSBELICHTUNGSANLAGE | [2009/46] | English: | METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS | [2009/46] | French: | PROCÉDÉ ET DISPOSITIF POUR SURVEILLER DES SYSTÈMES À MIROIRS MULTIPLES DANS UNE INSTALLATION D'ÉCLAIRAGE D'UN APPAREIL DE PROJECTION MICROLITHOGRAPHIQUE | [2012/12] |
Former [2009/46] | PROCÉDÉ ET DISPOSITIF POUR SURVEILLER DES SYSTÈMES À MIROIRS MULTIPLES DANS UNE INSTALLATION D'ÉCLAIRAGE D'INSTALLATION D'ÉCLAIRAGE DE PROJECTION MICROLITHOGRAPHIQUE | Entry into regional phase | 24.07.2009 | National basic fee paid | 24.07.2009 | Designation fee(s) paid | 24.07.2009 | Examination fee paid | Examination procedure | 24.07.2009 | Amendment by applicant (claims and/or description) | 24.07.2009 | Examination requested [2009/46] | 01.03.2012 | Communication of intention to grant the patent | 13.06.2012 | Fee for grant paid | 13.06.2012 | Fee for publishing/printing paid | Divisional application(s) | EP12005054.7 / EP2511765 | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 01.03.2012 | Opposition(s) | 30.05.2013 | No opposition filed within time limit [2013/32] | Fees paid | Renewal fee | 24.02.2010 | Renewal fee patent year 03 | 22.02.2011 | Renewal fee patent year 04 | 22.02.2012 | Renewal fee patent year 05 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 06.02.2008 | CY | 29.08.2012 | CZ | 29.08.2012 | DK | 29.08.2012 | EE | 29.08.2012 | FI | 29.08.2012 | HR | 29.08.2012 | IT | 29.08.2012 | LT | 29.08.2012 | LV | 29.08.2012 | MT | 29.08.2012 | PL | 29.08.2012 | RO | 29.08.2012 | SE | 29.08.2012 | SI | 29.08.2012 | SK | 29.08.2012 | TR | 29.08.2012 | BG | 29.11.2012 | NO | 29.11.2012 | GR | 30.11.2012 | ES | 10.12.2012 | IS | 29.12.2012 | PT | 31.12.2012 | AT | 06.02.2013 | GB | 06.02.2013 | IE | 06.02.2013 | LU | 06.02.2013 | BE | 28.02.2013 | CH | 28.02.2013 | FR | 28.02.2013 | LI | 28.02.2013 | MC | 28.02.2013 | [2015/34] |
Former [2015/32] | CY | 29.08.2012 | |
CZ | 29.08.2012 | ||
DK | 29.08.2012 | ||
EE | 29.08.2012 | ||
FI | 29.08.2012 | ||
HR | 29.08.2012 | ||
IT | 29.08.2012 | ||
LT | 29.08.2012 | ||
LV | 29.08.2012 | ||
MT | 29.08.2012 | ||
PL | 29.08.2012 | ||
RO | 29.08.2012 | ||
SE | 29.08.2012 | ||
SI | 29.08.2012 | ||
SK | 29.08.2012 | ||
TR | 29.08.2012 | ||
BG | 29.11.2012 | ||
NO | 29.11.2012 | ||
GR | 30.11.2012 | ||
ES | 10.12.2012 | ||
IS | 29.12.2012 | ||
PT | 31.12.2012 | ||
AT | 06.02.2013 | ||
GB | 06.02.2013 | ||
IE | 06.02.2013 | ||
BE | 28.02.2013 | ||
CH | 28.02.2013 | ||
FR | 28.02.2013 | ||
LI | 28.02.2013 | ||
MC | 28.02.2013 | ||
Former [2014/32] | CY | 29.08.2012 | |
CZ | 29.08.2012 | ||
DK | 29.08.2012 | ||
EE | 29.08.2012 | ||
FI | 29.08.2012 | ||
HR | 29.08.2012 | ||
IT | 29.08.2012 | ||
LT | 29.08.2012 | ||
LV | 29.08.2012 | ||
MT | 29.08.2012 | ||
PL | 29.08.2012 | ||
RO | 29.08.2012 | ||
SE | 29.08.2012 | ||
SI | 29.08.2012 | ||
SK | 29.08.2012 | ||
BG | 29.11.2012 | ||
NO | 29.11.2012 | ||
GR | 30.11.2012 | ||
ES | 10.12.2012 | ||
IS | 29.12.2012 | ||
PT | 31.12.2012 | ||
AT | 06.02.2013 | ||
GB | 06.02.2013 | ||
IE | 06.02.2013 | ||
BE | 28.02.2013 | ||
CH | 28.02.2013 | ||
FR | 28.02.2013 | ||
LI | 28.02.2013 | ||
MC | 28.02.2013 | ||
Former [2014/24] | CY | 29.08.2012 | |
CZ | 29.08.2012 | ||
DK | 29.08.2012 | ||
EE | 29.08.2012 | ||
FI | 29.08.2012 | ||
HR | 29.08.2012 | ||
IT | 29.08.2012 | ||
LT | 29.08.2012 | ||
LV | 29.08.2012 | ||
PL | 29.08.2012 | ||
RO | 29.08.2012 | ||
SE | 29.08.2012 | ||
SI | 29.08.2012 | ||
SK | 29.08.2012 | ||
BG | 29.11.2012 | ||
NO | 29.11.2012 | ||
GR | 30.11.2012 | ||
ES | 10.12.2012 | ||
IS | 29.12.2012 | ||
PT | 31.12.2012 | ||
AT | 06.02.2013 | ||
GB | 06.02.2013 | ||
IE | 06.02.2013 | ||
BE | 28.02.2013 | ||
CH | 28.02.2013 | ||
FR | 28.02.2013 | ||
LI | 28.02.2013 | ||
MC | 28.02.2013 | ||
Former [2014/09] | CY | 29.08.2012 | |
CZ | 29.08.2012 | ||
DK | 29.08.2012 | ||
EE | 29.08.2012 | ||
FI | 29.08.2012 | ||
HR | 29.08.2012 | ||
IT | 29.08.2012 | ||
LT | 29.08.2012 | ||
LV | 29.08.2012 | ||
PL | 29.08.2012 | ||
RO | 29.08.2012 | ||
SE | 29.08.2012 | ||
SI | 29.08.2012 | ||
SK | 29.08.2012 | ||
BG | 29.11.2012 | ||
NO | 29.11.2012 | ||
GR | 30.11.2012 | ||
ES | 10.12.2012 | ||
IS | 29.12.2012 | ||
PT | 31.12.2012 | ||
GB | 06.02.2013 | ||
IE | 06.02.2013 | ||
BE | 28.02.2013 | ||
CH | 28.02.2013 | ||
FR | 28.02.2013 | ||
LI | 28.02.2013 | ||
MC | 28.02.2013 | ||
Former [2014/07] | CY | 29.08.2012 | |
CZ | 29.08.2012 | ||
DK | 29.08.2012 | ||
EE | 29.08.2012 | ||
FI | 29.08.2012 | ||
HR | 29.08.2012 | ||
IT | 29.08.2012 | ||
LT | 29.08.2012 | ||
LV | 29.08.2012 | ||
PL | 29.08.2012 | ||
RO | 29.08.2012 | ||
SE | 29.08.2012 | ||
SI | 29.08.2012 | ||
SK | 29.08.2012 | ||
BG | 29.11.2012 | ||
NO | 29.11.2012 | ||
GR | 30.11.2012 | ||
ES | 10.12.2012 | ||
IS | 29.12.2012 | ||
PT | 31.12.2012 | ||
IE | 06.02.2013 | ||
BE | 28.02.2013 | ||
CH | 28.02.2013 | ||
FR | 28.02.2013 | ||
LI | 28.02.2013 | ||
MC | 28.02.2013 | ||
Former [2014/06] | CY | 29.08.2012 | |
CZ | 29.08.2012 | ||
DK | 29.08.2012 | ||
EE | 29.08.2012 | ||
FI | 29.08.2012 | ||
HR | 29.08.2012 | ||
IT | 29.08.2012 | ||
LT | 29.08.2012 | ||
LV | 29.08.2012 | ||
PL | 29.08.2012 | ||
RO | 29.08.2012 | ||
SE | 29.08.2012 | ||
SI | 29.08.2012 | ||
SK | 29.08.2012 | ||
BG | 29.11.2012 | ||
NO | 29.11.2012 | ||
GR | 30.11.2012 | ||
ES | 10.12.2012 | ||
IS | 29.12.2012 | ||
PT | 31.12.2012 | ||
BE | 28.02.2013 | ||
CH | 28.02.2013 | ||
LI | 28.02.2013 | ||
MC | 28.02.2013 | ||
Former [2013/48] | CY | 29.08.2012 | |
CZ | 29.08.2012 | ||
DK | 29.08.2012 | ||
EE | 29.08.2012 | ||
FI | 29.08.2012 | ||
HR | 29.08.2012 | ||
IT | 29.08.2012 | ||
LT | 29.08.2012 | ||
LV | 29.08.2012 | ||
PL | 29.08.2012 | ||
RO | 29.08.2012 | ||
SE | 29.08.2012 | ||
SI | 29.08.2012 | ||
SK | 29.08.2012 | ||
BG | 29.11.2012 | ||
NO | 29.11.2012 | ||
GR | 30.11.2012 | ||
ES | 10.12.2012 | ||
IS | 29.12.2012 | ||
PT | 31.12.2012 | ||
CH | 28.02.2013 | ||
LI | 28.02.2013 | ||
MC | 28.02.2013 | ||
Former [2013/42] | CY | 29.08.2012 | |
CZ | 29.08.2012 | ||
DK | 29.08.2012 | ||
EE | 29.08.2012 | ||
FI | 29.08.2012 | ||
HR | 29.08.2012 | ||
IT | 29.08.2012 | ||
LT | 29.08.2012 | ||
LV | 29.08.2012 | ||
PL | 29.08.2012 | ||
RO | 29.08.2012 | ||
SE | 29.08.2012 | ||
SI | 29.08.2012 | ||
SK | 29.08.2012 | ||
BG | 29.11.2012 | ||
NO | 29.11.2012 | ||
GR | 30.11.2012 | ||
ES | 10.12.2012 | ||
IS | 29.12.2012 | ||
PT | 31.12.2012 | ||
MC | 28.02.2013 | ||
Former [2013/34] | CY | 29.08.2012 | |
CZ | 29.08.2012 | ||
DK | 29.08.2012 | ||
EE | 29.08.2012 | ||
FI | 29.08.2012 | ||
HR | 29.08.2012 | ||
IT | 29.08.2012 | ||
LT | 29.08.2012 | ||
LV | 29.08.2012 | ||
PL | 29.08.2012 | ||
RO | 29.08.2012 | ||
SE | 29.08.2012 | ||
SI | 29.08.2012 | ||
SK | 29.08.2012 | ||
BG | 29.11.2012 | ||
NO | 29.11.2012 | ||
GR | 30.11.2012 | ||
ES | 10.12.2012 | ||
IS | 29.12.2012 | ||
PT | 31.12.2012 | ||
Former [2013/23] | CY | 29.08.2012 | |
CZ | 29.08.2012 | ||
DK | 29.08.2012 | ||
EE | 29.08.2012 | ||
FI | 29.08.2012 | ||
HR | 29.08.2012 | ||
IT | 29.08.2012 | ||
LT | 29.08.2012 | ||
LV | 29.08.2012 | ||
PL | 29.08.2012 | ||
RO | 29.08.2012 | ||
SE | 29.08.2012 | ||
SI | 29.08.2012 | ||
SK | 29.08.2012 | ||
NO | 29.11.2012 | ||
GR | 30.11.2012 | ||
ES | 10.12.2012 | ||
IS | 29.12.2012 | ||
PT | 31.12.2012 | ||
Former [2013/22] | CZ | 29.08.2012 | |
DK | 29.08.2012 | ||
EE | 29.08.2012 | ||
FI | 29.08.2012 | ||
HR | 29.08.2012 | ||
LT | 29.08.2012 | ||
LV | 29.08.2012 | ||
SE | 29.08.2012 | ||
SI | 29.08.2012 | ||
NO | 29.11.2012 | ||
GR | 30.11.2012 | ||
ES | 10.12.2012 | ||
IS | 29.12.2012 | ||
PT | 31.12.2012 | ||
Former [2013/21] | DK | 29.08.2012 | |
FI | 29.08.2012 | ||
HR | 29.08.2012 | ||
LT | 29.08.2012 | ||
LV | 29.08.2012 | ||
SE | 29.08.2012 | ||
SI | 29.08.2012 | ||
NO | 29.11.2012 | ||
GR | 30.11.2012 | ||
IS | 29.12.2012 | ||
PT | 31.12.2012 | ||
Former [2013/13] | FI | 29.08.2012 | |
HR | 29.08.2012 | ||
LT | 29.08.2012 | ||
LV | 29.08.2012 | ||
SE | 29.08.2012 | ||
SI | 29.08.2012 | ||
NO | 29.11.2012 | ||
GR | 30.11.2012 | ||
IS | 29.12.2012 | ||
PT | 31.12.2012 | ||
Former [2013/12] | FI | 29.08.2012 | |
HR | 29.08.2012 | ||
LT | 29.08.2012 | ||
LV | 29.08.2012 | ||
SE | 29.08.2012 | ||
SI | 29.08.2012 | ||
NO | 29.11.2012 | ||
GR | 30.11.2012 | ||
IS | 29.12.2012 | ||
Former [2013/11] | FI | 29.08.2012 | |
HR | 29.08.2012 | ||
LT | 29.08.2012 | ||
LV | 29.08.2012 | ||
SI | 29.08.2012 | ||
NO | 29.11.2012 | ||
GR | 30.11.2012 | ||
IS | 29.12.2012 | ||
Former [2013/10] | FI | 29.08.2012 | |
HR | 29.08.2012 | ||
LT | 29.08.2012 | ||
NO | 29.11.2012 | ||
IS | 29.12.2012 | ||
Former [2013/09] | FI | 29.08.2012 | |
LT | 29.08.2012 | ||
NO | 29.11.2012 | ||
Former [2013/08] | LT | 29.08.2012 | |
NO | 29.11.2012 | Cited in | International search | [A]EP1426826 (ASML NETHERLANDS BV [NL]) [A] 1-32,56 * paragraphs [0037] - [0054]; figures 2,2a *; | [DA]US6965119 (SANDSTROEM TORBJOERN [SE], et al) [DA] 1-32,56 * column 3, line 46 - column 7, line 7; figure 3 *; | [A]US2004057034 (ZINN SHUN YONG [KR], et al) [A] 1-32,56 * paragraphs [0034] - [0044]; figure 3 *; | [A]US2006050261 (BROTSACK MARKUS [DE]) [A] 1-32,56 * paragraphs [0049] - [0058]; figure 1 *; | [A]US2004207386 (DURR PETER [DE]) [A] 1-32,56 * paragraphs [0064] - [0087]; figure 1 * |