EP2134886 - METHOD FOR THE CREATION OF PLANAR VARIATIONS IN SIZE OR DISTANCE IN NANOSTRUCTURE PATTERNS ON SURFACES [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 06.01.2012 Database last updated on 12.07.2024 | Most recent event Tooltip | 04.10.2013 | Lapse of the patent in a contracting state New state(s): HU | published on 06.11.2013 [2013/45] | Applicant(s) | For all designated states Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. Hofgartenstrasse 8 80539 München / DE | [N/P] |
Former [2011/09] | For all designated states Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. Hofgartenstraße 8 80539 München / DE | ||
Former [2009/52] | For all designated states Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. Hofgartenstraße 8 80539 München / DE | ||
For all designated states Ruprecht-Karls-Universität Heidelberg Grabengasse 1 69117 Heidelberg / DE | Inventor(s) | 01 /
SPATZ, Joachim Emil-Nolde-Strasse 18 89520 Heidenheim / DE | 02 /
LOHMÜLLER, Theobald Coseler Strasse 50 90473 Nürnberg / DE | 03 /
ARNOLD, Marco Hauptstrasse 130 69251 Gaiberg / DE | [2009/52] | Representative(s) | Katzameyer, Michael V. Bezold & Partner Patentanwälte - PartG mbB Akademiestraße 7 80799 München / DE | [N/P] |
Former [2009/52] | Katzameyer, Michael v. Bezold & Partner Patentanwälte Akademiestrasse 7 80799 München / DE | Application number, filing date | 08716484.4 | 12.03.2008 | [2009/52] | WO2008EP01981 | Priority number, date | DE20071017032 | 11.04.2007 Original published format: DE102007017032 | [2009/52] | Filing language | DE | Procedural language | DE | Publication | Type: | A2 Application without search report | No.: | WO2008125172 | Date: | 23.10.2008 | Language: | DE | [2008/43] | Type: | A2 Application without search report | No.: | EP2134886 | Date: | 23.12.2009 | Language: | DE | The application published by WIPO in one of the EPO official languages on 23.10.2008 takes the place of the publication of the European patent application. | [2009/52] | Type: | B1 Patent specification | No.: | EP2134886 | Date: | 02.03.2011 | Language: | DE | [2011/09] | Search report(s) | International search report - published on: | EP | 09.07.2009 | Classification | IPC: | C23C18/08, C23C18/12, C23C18/14, G02B1/12, G02B3/00 | [2009/52] | CPC: |
B82Y5/00 (EP,US);
C23C18/08 (EP,US);
B82Y30/00 (EP,US);
C23C18/1216 (EP,US);
C23C18/1237 (EP,US);
C23C18/1266 (EP,US);
| Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR [2009/52] | Title | German: | VERFAHREN ZUR HERSTELLUNG VON FLÄCHIGEN GRÖSSEN- ODER ABSTANDSVARIATIONEN IN MUSTERN VON NANOSTRUKTUREN AUF OBERFLÄCHEN | [2009/52] | English: | METHOD FOR THE CREATION OF PLANAR VARIATIONS IN SIZE OR DISTANCE IN NANOSTRUCTURE PATTERNS ON SURFACES | [2009/52] | French: | PROCÉDÉ DE PRODUCTION DE VARIATIONS DE TAILLES ET DE DISTANCES PLATES DE MOTIFS DE NANOSTRUCTURES SUR DES SURFACES | [2009/52] | Entry into regional phase | 05.10.2009 | National basic fee paid | 05.10.2009 | Designation fee(s) paid | 12.10.2009 | Examination fee paid | Examination procedure | 12.10.2009 | Examination requested [2009/52] | 29.01.2010 | Despatch of a communication from the examining division (Time limit: M04) | 12.03.2010 | Reply to a communication from the examining division | 01.09.2010 | Communication of intention to grant the patent | 13.12.2010 | Fee for grant paid | 13.12.2010 | Fee for publishing/printing paid | Divisional application(s) | EP10015574.6 / EP2295617 | Opposition(s) | 05.12.2011 | No opposition filed within time limit [2012/06] | Fees paid | Renewal fee | 22.03.2010 | Renewal fee patent year 03 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | CY | 02.03.2011 | CZ | 02.03.2011 | DK | 02.03.2011 | EE | 02.03.2011 | FI | 02.03.2011 | HR | 02.03.2011 | HU | 02.03.2011 | IE | 02.03.2011 | IT | 02.03.2011 | LT | 02.03.2011 | LV | 02.03.2011 | MT | 02.03.2011 | NL | 02.03.2011 | PL | 02.03.2011 | RO | 02.03.2011 | SE | 02.03.2011 | SI | 02.03.2011 | SK | 02.03.2011 | TR | 02.03.2011 | LU | 12.03.2011 | BE | 31.03.2011 | MC | 31.03.2011 | BG | 02.06.2011 | NO | 02.06.2011 | GR | 03.06.2011 | ES | 13.06.2011 | IS | 02.07.2011 | PT | 04.07.2011 | [2013/45] |
Former [2013/44] | CY | 02.03.2011 | |
CZ | 02.03.2011 | ||
DK | 02.03.2011 | ||
EE | 02.03.2011 | ||
FI | 02.03.2011 | ||
HR | 02.03.2011 | ||
IE | 02.03.2011 | ||
IT | 02.03.2011 | ||
LT | 02.03.2011 | ||
LV | 02.03.2011 | ||
MT | 02.03.2011 | ||
NL | 02.03.2011 | ||
PL | 02.03.2011 | ||
RO | 02.03.2011 | ||
SE | 02.03.2011 | ||
SI | 02.03.2011 | ||
SK | 02.03.2011 | ||
TR | 02.03.2011 | ||
LU | 12.03.2011 | ||
BE | 31.03.2011 | ||
MC | 31.03.2011 | ||
BG | 02.06.2011 | ||
NO | 02.06.2011 | ||
GR | 03.06.2011 | ||
ES | 13.06.2011 | ||
IS | 02.07.2011 | ||
PT | 04.07.2011 | ||
Former [2013/25] | CY | 02.03.2011 | |
CZ | 02.03.2011 | ||
DK | 02.03.2011 | ||
EE | 02.03.2011 | ||
FI | 02.03.2011 | ||
HR | 02.03.2011 | ||
IE | 02.03.2011 | ||
IT | 02.03.2011 | ||
LT | 02.03.2011 | ||
LV | 02.03.2011 | ||
MT | 02.03.2011 | ||
NL | 02.03.2011 | ||
PL | 02.03.2011 | ||
RO | 02.03.2011 | ||
SE | 02.03.2011 | ||
SI | 02.03.2011 | ||
SK | 02.03.2011 | ||
LU | 12.03.2011 | ||
BE | 31.03.2011 | ||
MC | 31.03.2011 | ||
BG | 02.06.2011 | ||
NO | 02.06.2011 | ||
GR | 03.06.2011 | ||
ES | 13.06.2011 | ||
IS | 02.07.2011 | ||
PT | 04.07.2011 | ||
Former [2012/24] | CY | 02.03.2011 | |
CZ | 02.03.2011 | ||
DK | 02.03.2011 | ||
EE | 02.03.2011 | ||
FI | 02.03.2011 | ||
HR | 02.03.2011 | ||
IE | 02.03.2011 | ||
IT | 02.03.2011 | ||
LT | 02.03.2011 | ||
LV | 02.03.2011 | ||
MT | 02.03.2011 | ||
NL | 02.03.2011 | ||
PL | 02.03.2011 | ||
RO | 02.03.2011 | ||
SE | 02.03.2011 | ||
SI | 02.03.2011 | ||
SK | 02.03.2011 | ||
BE | 31.03.2011 | ||
MC | 31.03.2011 | ||
BG | 02.06.2011 | ||
NO | 02.06.2011 | ||
GR | 03.06.2011 | ||
ES | 13.06.2011 | ||
IS | 02.07.2011 | ||
PT | 04.07.2011 | ||
Former [2012/13] | CY | 02.03.2011 | |
CZ | 02.03.2011 | ||
DK | 02.03.2011 | ||
EE | 02.03.2011 | ||
FI | 02.03.2011 | ||
HR | 02.03.2011 | ||
IE | 02.03.2011 | ||
LT | 02.03.2011 | ||
LV | 02.03.2011 | ||
MT | 02.03.2011 | ||
NL | 02.03.2011 | ||
PL | 02.03.2011 | ||
RO | 02.03.2011 | ||
SE | 02.03.2011 | ||
SI | 02.03.2011 | ||
SK | 02.03.2011 | ||
BE | 31.03.2011 | ||
MC | 31.03.2011 | ||
BG | 02.06.2011 | ||
NO | 02.06.2011 | ||
GR | 03.06.2011 | ||
ES | 13.06.2011 | ||
IS | 02.07.2011 | ||
PT | 04.07.2011 | ||
Former [2012/05] | CY | 02.03.2011 | |
CZ | 02.03.2011 | ||
EE | 02.03.2011 | ||
FI | 02.03.2011 | ||
HR | 02.03.2011 | ||
IE | 02.03.2011 | ||
LT | 02.03.2011 | ||
LV | 02.03.2011 | ||
MT | 02.03.2011 | ||
NL | 02.03.2011 | ||
RO | 02.03.2011 | ||
SE | 02.03.2011 | ||
SI | 02.03.2011 | ||
SK | 02.03.2011 | ||
BE | 31.03.2011 | ||
MC | 31.03.2011 | ||
BG | 02.06.2011 | ||
NO | 02.06.2011 | ||
GR | 03.06.2011 | ||
ES | 13.06.2011 | ||
IS | 02.07.2011 | ||
PT | 04.07.2011 | ||
PL | 20.07.2011 | ||
Former [2011/50] | CY | 02.03.2011 | |
CZ | 02.03.2011 | ||
EE | 02.03.2011 | ||
FI | 02.03.2011 | ||
HR | 02.03.2011 | ||
IE | 02.03.2011 | ||
LT | 02.03.2011 | ||
LV | 02.03.2011 | ||
NL | 02.03.2011 | ||
RO | 02.03.2011 | ||
SE | 02.03.2011 | ||
SI | 02.03.2011 | ||
SK | 02.03.2011 | ||
MC | 31.03.2011 | ||
BG | 02.06.2011 | ||
NO | 02.06.2011 | ||
GR | 03.06.2011 | ||
ES | 13.06.2011 | ||
IS | 02.07.2011 | ||
PT | 04.07.2011 | ||
PL | 20.07.2011 | ||
Former [2011/49] | CY | 02.03.2011 | |
CZ | 02.03.2011 | ||
EE | 02.03.2011 | ||
FI | 02.03.2011 | ||
HR | 02.03.2011 | ||
IE | 02.03.2011 | ||
LT | 02.03.2011 | ||
LV | 02.03.2011 | ||
NL | 02.03.2011 | ||
RO | 02.03.2011 | ||
SE | 02.03.2011 | ||
SI | 02.03.2011 | ||
SK | 02.03.2011 | ||
MC | 31.03.2011 | ||
BG | 02.06.2011 | ||
NO | 02.06.2011 | ||
GR | 03.06.2011 | ||
ES | 13.06.2011 | ||
PT | 04.07.2011 | ||
Former [2011/47] | CY | 02.03.2011 | |
EE | 02.03.2011 | ||
FI | 02.03.2011 | ||
HR | 02.03.2011 | ||
IE | 02.03.2011 | ||
LT | 02.03.2011 | ||
LV | 02.03.2011 | ||
NL | 02.03.2011 | ||
SE | 02.03.2011 | ||
SI | 02.03.2011 | ||
MC | 31.03.2011 | ||
BG | 02.06.2011 | ||
NO | 02.06.2011 | ||
GR | 03.06.2011 | ||
ES | 13.06.2011 | ||
PT | 04.07.2011 | ||
Former [2011/38] | CY | 02.03.2011 | |
FI | 02.03.2011 | ||
HR | 02.03.2011 | ||
LT | 02.03.2011 | ||
LV | 02.03.2011 | ||
NL | 02.03.2011 | ||
SE | 02.03.2011 | ||
SI | 02.03.2011 | ||
BG | 02.06.2011 | ||
NO | 02.06.2011 | ||
GR | 03.06.2011 | ||
ES | 13.06.2011 | ||
Former [2011/37] | CY | 02.03.2011 | |
FI | 02.03.2011 | ||
HR | 02.03.2011 | ||
LT | 02.03.2011 | ||
LV | 02.03.2011 | ||
SE | 02.03.2011 | ||
SI | 02.03.2011 | ||
BG | 02.06.2011 | ||
NO | 02.06.2011 | ||
GR | 03.06.2011 | ||
ES | 13.06.2011 | ||
Former [2011/36] | HR | 02.03.2011 | |
LT | 02.03.2011 | ||
LV | 02.03.2011 | ||
SE | 02.03.2011 | ||
NO | 02.06.2011 | ||
GR | 03.06.2011 | ||
ES | 13.06.2011 | Cited in | International search | [A]US5891366 (GRUENWALD WERNER [DE], et al) [A] 1,12 * column 3, line 43 - column 5, line 33 * * figures 1,2 * * claims 5-12,18 *; | [A]US2002145132 (WON JONG OK [KR], et al) [A] 1,12-18 * page 2, paragraph 25 - paragraph 30 * * page 3, paragraph 34 - paragraph 44 * * page 5, paragraph 90 - page 6, paragraph 106 * * claims 1-8 * * figure 1 *; | [DA]EP1027157 (UNIV ULM [DE]) [DA] 1-18 * page 5, paragraphs 19,20 * * example 1 * * claims 1-6,11,13 * * figure 7 *; | [A]US2005059760 (DELLWO ULRIKE [DE], et al) [A] 1,12 * page 5, paragraph 79 - paragraph 81 * * page 6, paragraph 95 - page 7, paragraph 100 * * page 7, paragraphs 108,109 * * claim 1 *; | [DA] - MULLER M ET AL, "ORDERING AND PACKING PERIODICITY OF AU- CONTAINING BLOCK COPOLYMER MICELLES", POLYMERIC MATERIALS SCIENCE AND ENGINEERING, WASHINGTON, DC, US, (20040101), vol. 90, ISSN 0743-0515, pages 255 - 256, XP008101682 [DA] 1,2,10,11 * the whole document * | [A] - J. P. SPATZ ET AL., "Micellar Inorganic-Polymer Hybrid Systems - A Tool for Nanolithography", ADVANCED MATERIALS, Weinheim, (1999), vol. 11, no. 2, pages 149 - 153, XP002513693 [A] 1,2,10,11 * the whole document * DOI: http://dx.doi.org/10.1002/(SICI)1521-4095(199902)11:2<149::AID-ADMA149>3.0.CO;2-W | [A] - J. C. MEINERS ET AL., "Adsorption of Block-Copolymer Micelles from a Selective Solvent", MACROMOLECULES, Washington DC, (1997), vol. 30, no. 17, pages 4945 - 4951, XP002513694 [A] 1,2,11 * the whole document * DOI: http://dx.doi.org/10.1021/ma970327t | [A] - G. KÄSTLE ET AL., "Micellar Nanoreactors - Preparation and Characterization of Hexagonally Ordered Arrays of Metallic Nanodots", ADVANCED FUNCTIONAL MATERIALS, Weinheim, (200311), vol. 13, no. 11, pages 853 - 861, XP002513695 [A] 1,2,10,11 * page 857, column RIGHT - page 858, column RIGHT * DOI: http://dx.doi.org/10.1002/ADFM.200304332 | [A] - L. ZHOU ET AL, "Scanning thermal microscopy and atomic force microscopy studies of laer-induced deposited metal lines", APPLIED SURFACE SCIENCE, (1997), vol. 120, pages 149 - 158, XP002523305 [A] 12 * page 154, column LEFT * * figure 3 * DOI: http://dx.doi.org/10.1016/S0169-4332(97)00231-6 | [A] - D. POONDI ET AL, "Synthesis of silver nanoparticles by a laser-liquid-solid interaction technique", JOURNAL OF MATERAILS SYNTHESIS AND PROCESSING, (1998), vol. 6, no. 2, pages 89 - 104, XP002523306 [A] 12 * paragraph [03.3] * * figure 16 * DOI: http://dx.doi.org/10.1023/A:1022691302150 | by applicant | EP1027157 | - M. MöLLER ET AL., POLYM. MAT. SCI. ENG., (2004), vol. 90, pages 2555 - 256 | - J.C. MEINERS ET AL., MACROMOLECULES, (1997), vol. 30, pages 4945 - 4951 | - J.P. SPATZ ET AL., ADVANCED MATERIALS, (1999), vol. 11, no. 2, pages 149 - 153 | - G. KäSTLE ET AL., ADVANCED FUNCTIONAL MATERIALS, (2003), vol. 13, no. 11, pages 853 - 861 |