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Extract from the Register of European Patents

EP About this file: EP2188411

EP2188411 - SPUTTERING SYSTEM [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  31.08.2012
Database last updated on 02.09.2024
Most recent event   Tooltip18.07.2014Lapse of the patent in a contracting state
New state(s): HU		published on 20.08.2014  [2014/34]
Applicant(s)For:AT  BE  BG  CH  CY  CZ  DK  EE  ES  FI  FR  GB  GR  HR  HU  IE  IS  IT  LI  LT  LU  LV  MC  MT  NL  NO  PL  PT  RO  SE  SI  SK  TR 
Koninklijke Philips Electronics N.V.
Groenewoudseweg 1
5621 BA Eindhoven / NL
For:DE 
Philips Intellectual Property & Standards GmbH
Steindamm 94
20099 Hamburg / DE
[2011/43]
Former [2010/21]For:SI  SK  TR  FR  AT  BE  BG  CH  LI  CY  CZ  DK  EE  ES  FI  GB  GR  HR  HU  IE  IS  IT  LT  LU  LV  MC  MT  NL  NO  PL  PT  RO  SE 
Koninklijke Philips Electronics N.V.
Groenewoudseweg 1
5621 BA Eindhoven / NL
For:DE 
Philips Intellectual Property & Standards GmbH
Steindamm 94
20099 Hamburg / DE
Former [2009/47]For:DE 
Philips Intellectual Property & Standards GmbH
Steindamm 94
20099 Hamburg / DE
Inventor(s)01 / HENNINGER, Georg
c/o High Tech Campus
building 44
NL-5656 AE Eindhoven / NL
02 / HUNSCHE, Berno
c/o High Tech Campus
building 44
NL-5656 AE Eindhoven / NL
03 / SELL, Konrad
c/o High Tech Campus
building 44
NL-5656 AE Eindhoven / NL
04 / RUSKE, Manfred
c/o High Tech Campus
building 44
NL-5656 AE Eindhoven / NL
05 / DIEDERICH, Thomas
c/o High Tech Campus
building 44
NL-5656 AE Eindhoven / NL
 [2011/43]
Former [2010/21]01 / HENNINGER, Georg
c/o High Tech Campus building 44
NL-5656 AE Eindhoven / NL
02 / HUNSCHE, Berno
c/o High Tech Campus building 44
NL-5656 AE Eindhoven / NL
03 / SELL, Konrad
c/o High Tech Campus building 44
NL-5656 AE Eindhoven / NL
04 / RUSKE, Manfred
c/o High Tech Campus building 44
NL-5656 AE Eindhoven / NL
05 / DIEDERICH, Thomas
c/o High Tech Campus building 44
NL-5656 AE Eindhoven / NL
Representative(s)Bekkers, Joost J.J.
Philips Intellectual Property & Standards
High Tech Campus 5
5656 AE Eindhoven / NL
[N/P]
Former [2011/43]Bekkers, Joost J.J
Philips Intellectual Property & Standards P.O. Box 220
5600 AE Eindhoven / NL
Former [2010/21]Bekkers, Joost J.J
Philips Intellectual Property & Standards P.O. Box 220
5600 AE Eindhoven / NL
Application number, filing date08807390.321.08.2008
[2010/21]
WO2008IB53354
Priority number, dateEP2007011530830.08.2007         Original published format: EP 07115308
[2010/21]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report
No.:WO2009027905
Date:05.03.2009
Language:EN
[2009/10]
Type: A2 Application without search report 
No.:EP2188411
Date:26.05.2010
Language:EN
The application published by WIPO in one of the EPO official languages on 05.03.2009 takes the place of the publication of the European patent application.
[2010/21]
Type: B1 Patent specification 
No.:EP2188411
Date:26.10.2011
Language:EN
[2011/43]
Search report(s)International search report - published on:EP30.04.2009
ClassificationIPC:C23C14/34, H01J37/34
[2010/21]
CPC:
H01J37/3408 (EP,US); H01J37/32678 (EP,US)
Designated contracting statesAT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MT,   NL,   NO,   PL,   PT,   RO,   SE,   SI,   SK,   TR [2010/21]
TitleGerman:SPUTTERSYSTEM[2010/21]
English:SPUTTERING SYSTEM[2010/21]
French:SYSTÈME DE PULVÉRISATION CATHODIQUE[2010/21]
Entry into regional phase30.03.2010National basic fee paid 
30.03.2010Designation fee(s) paid 
30.03.2010Examination fee paid 
Examination procedure30.03.2010Examination requested  [2010/21]
26.04.2011Communication of intention to grant the patent
06.09.2011Fee for grant paid
06.09.2011Fee for publishing/printing paid
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  26.04.2011
Opposition(s)27.07.2012No opposition filed within time limit [2012/40]
Fees paidRenewal fee
31.08.2010Renewal fee patent year 03
31.08.2011Renewal fee patent year 04
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU21.08.2008
AT26.10.2011
BE26.10.2011
CY26.10.2011
CZ26.10.2011
DK26.10.2011
EE26.10.2011
FI26.10.2011
HR26.10.2011
IT26.10.2011
LT26.10.2011
LV26.10.2011
MT26.10.2011
NL26.10.2011
PL26.10.2011
RO26.10.2011
SE26.10.2011
SI26.10.2011
SK26.10.2011
TR26.10.2011
BG26.01.2012
NO26.01.2012
GR27.01.2012
ES06.02.2012
IS26.02.2012
PT27.02.2012
[2014/34]
Former [2014/21]AT26.10.2011
BE26.10.2011
CY26.10.2011
CZ26.10.2011
DK26.10.2011
EE26.10.2011
FI26.10.2011
HR26.10.2011
IT26.10.2011
LT26.10.2011
LV26.10.2011
MT26.10.2011
NL26.10.2011
PL26.10.2011
RO26.10.2011
SE26.10.2011
SI26.10.2011
SK26.10.2011
TR26.10.2011
BG26.01.2012
NO26.01.2012
GR27.01.2012
ES06.02.2012
IS26.02.2012
PT27.02.2012
Former [2013/51]AT26.10.2011
BE26.10.2011
CY26.10.2011
CZ26.10.2011
DK26.10.2011
EE26.10.2011
FI26.10.2011
HR26.10.2011
IT26.10.2011
LT26.10.2011
LV26.10.2011
MT26.10.2011
NL26.10.2011
PL26.10.2011
RO26.10.2011
SE26.10.2011
SI26.10.2011
SK26.10.2011
BG26.01.2012
NO26.01.2012
GR27.01.2012
ES06.02.2012
IS26.02.2012
PT27.02.2012
Former [2013/29]AT26.10.2011
BE26.10.2011
CY26.10.2011
CZ26.10.2011
DK26.10.2011
EE26.10.2011
FI26.10.2011
HR26.10.2011
IT26.10.2011
LT26.10.2011
LV26.10.2011
NL26.10.2011
PL26.10.2011
RO26.10.2011
SE26.10.2011
SI26.10.2011
SK26.10.2011
BG26.01.2012
NO26.01.2012
GR27.01.2012
ES06.02.2012
IS26.02.2012
PT27.02.2012
Former [2013/22]AT26.10.2011
BE26.10.2011
CY26.10.2011
CZ26.10.2011
DK26.10.2011
EE26.10.2011
HR26.10.2011
IT26.10.2011
LT26.10.2011
LV26.10.2011
NL26.10.2011
PL26.10.2011
RO26.10.2011
SE26.10.2011
SI26.10.2011
SK26.10.2011
BG26.01.2012
NO26.01.2012
GR27.01.2012
ES06.02.2012
IS26.02.2012
PT27.02.2012
Former [2013/07]AT26.10.2011
BE26.10.2011
CY26.10.2011
CZ26.10.2011
DK26.10.2011
EE26.10.2011
HR26.10.2011
IT26.10.2011
LT26.10.2011
LV26.10.2011
NL26.10.2011
PL26.10.2011
RO26.10.2011
SE26.10.2011
SI26.10.2011
SK26.10.2011
BG26.01.2012
NO26.01.2012
GR27.01.2012
IS26.02.2012
PT27.02.2012
Former [2012/37]BE26.10.2011
CY26.10.2011
CZ26.10.2011
DK26.10.2011
EE26.10.2011
HR26.10.2011
IT26.10.2011
LT26.10.2011
LV26.10.2011
NL26.10.2011
PL26.10.2011
RO26.10.2011
SE26.10.2011
SI26.10.2011
SK26.10.2011
BG26.01.2012
NO26.01.2012
GR27.01.2012
IS26.02.2012
PT27.02.2012
Former [2012/36]BE26.10.2011
CY26.10.2011
CZ26.10.2011
DK26.10.2011
EE26.10.2011
HR26.10.2011
LT26.10.2011
LV26.10.2011
NL26.10.2011
PL26.10.2011
RO26.10.2011
SE26.10.2011
SI26.10.2011
SK26.10.2011
BG26.01.2012
NO26.01.2012
GR27.01.2012
IS26.02.2012
PT27.02.2012
Former [2012/35]BE26.10.2011
CY26.10.2011
CZ26.10.2011
DK26.10.2011
EE26.10.2011
HR26.10.2011
LT26.10.2011
LV26.10.2011
NL26.10.2011
PL26.10.2011
SE26.10.2011
SI26.10.2011
BG26.01.2012
NO26.01.2012
GR27.01.2012
IS26.02.2012
PT27.02.2012
Former [2012/34]BE26.10.2011
CY26.10.2011
CZ26.10.2011
HR26.10.2011
LT26.10.2011
LV26.10.2011
NL26.10.2011
PL26.10.2011
SE26.10.2011
SI26.10.2011
NO26.01.2012
GR27.01.2012
IS26.02.2012
PT27.02.2012
Former [2012/28]BE26.10.2011
CY26.10.2011
HR26.10.2011
LT26.10.2011
LV26.10.2011
NL26.10.2011
PL26.10.2011
SE26.10.2011
SI26.10.2011
NO26.01.2012
GR27.01.2012
IS26.02.2012
PT27.02.2012
Former [2012/27]BE26.10.2011
HR26.10.2011
LT26.10.2011
LV26.10.2011
NL26.10.2011
PL26.10.2011
SE26.10.2011
SI26.10.2011
NO26.01.2012
GR27.01.2012
IS26.02.2012
PT27.02.2012
Former [2012/26]BE26.10.2011
LT26.10.2011
LV26.10.2011
NL26.10.2011
PL26.10.2011
SE26.10.2011
SI26.10.2011
NO26.01.2012
GR27.01.2012
IS26.02.2012
PT27.02.2012
Former [2012/24]BE26.10.2011
LT26.10.2011
LV26.10.2011
NL26.10.2011
SE26.10.2011
SI26.10.2011
NO26.01.2012
GR27.01.2012
IS26.02.2012
PT27.02.2012
Former [2012/23]BE26.10.2011
LT26.10.2011
NL26.10.2011
NO26.01.2012
GR27.01.2012
IS26.02.2012
PT27.02.2012
Former [2012/21]BE26.10.2011
LT26.10.2011
NO26.01.2012
IS26.02.2012
Former [2012/20]LT26.10.2011
NO26.01.2012
Cited inInternational search[A]EP0275965  (HITACHI LTD [JP], et al) [A] 1-15 * figures 11,13,15-19 *;
 [A]WO9500677  (DEPOSITION SCIENCES INC [US]) [A] 1-15 * figure 1 * * page 5, line 32 - page 6, line 23 * * page 14, line 18 - line 26 *;
 [A]US5466991  (BERRY LEE A [US]) [A] 1-15 * column 5, line 52 - line 61 * * column 7, line 30 - line 48 *;
 [A]US6635124  (STOWELL WILLIAM RANDOLPH [US], et al) [A] 1-15 * the whole document *;
 [A]  - LIMPAECHER R ET AL, "MAGNETIC MULTIPOLE CONTAINMENT OF LARGE UNIFORM COLLISIONLESS QUIESCENT PLASMAS", REVIEW OF SCIENTIFIC INSTRUMENTS, AIP, MELVILLE, NY, US, (19730601), vol. 44, no. 6, ISSN 0034-6748, pages 726 - 731, XP000560655 [A] 1-15 * the whole document *

DOI:   http://dx.doi.org/10.1063/1.1686231
by applicantEP0516436
 EP0516436
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.