EP2188411 - SPUTTERING SYSTEM [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 31.08.2012 Database last updated on 02.09.2024 | Most recent event Tooltip | 18.07.2014 | Lapse of the patent in a contracting state New state(s): HU | published on 20.08.2014 [2014/34] | Applicant(s) | For:AT
BE
BG
CH
CY
CZ
DK
EE
ES
FI
FR
GB
GR
HR
HU
IE
IS
IT
LI
LT
LU
LV
MC
MT
NL
NO
PL
PT
RO
SE
SI
SK
TR
Koninklijke Philips Electronics N.V. Groenewoudseweg 1 5621 BA Eindhoven / NL | For:DE
Philips Intellectual Property & Standards GmbH Steindamm 94 20099 Hamburg / DE | [2011/43] |
Former [2010/21] | For:SI
SK
TR
FR
AT
BE
BG
CH
LI
CY
CZ
DK
EE
ES
FI
GB
GR
HR
HU
IE
IS
IT
LT
LU
LV
MC
MT
NL
NO
PL
PT
RO
SE
Koninklijke Philips Electronics N.V. Groenewoudseweg 1 5621 BA Eindhoven / NL | ||
For:DE
Philips Intellectual Property & Standards GmbH Steindamm 94 20099 Hamburg / DE | |||
Former [2009/47] | For:DE
Philips Intellectual Property & Standards GmbH Steindamm 94 20099 Hamburg / DE | Inventor(s) | 01 /
HENNINGER, Georg c/o High Tech Campus building 44 NL-5656 AE Eindhoven / NL | 02 /
HUNSCHE, Berno c/o High Tech Campus building 44 NL-5656 AE Eindhoven / NL | 03 /
SELL, Konrad c/o High Tech Campus building 44 NL-5656 AE Eindhoven / NL | 04 /
RUSKE, Manfred c/o High Tech Campus building 44 NL-5656 AE Eindhoven / NL | 05 /
DIEDERICH, Thomas c/o High Tech Campus building 44 NL-5656 AE Eindhoven / NL | [2011/43] |
Former [2010/21] | 01 /
HENNINGER, Georg c/o High Tech Campus building 44 NL-5656 AE Eindhoven / NL | ||
02 /
HUNSCHE, Berno c/o High Tech Campus building 44 NL-5656 AE Eindhoven / NL | |||
03 /
SELL, Konrad c/o High Tech Campus building 44 NL-5656 AE Eindhoven / NL | |||
04 /
RUSKE, Manfred c/o High Tech Campus building 44 NL-5656 AE Eindhoven / NL | |||
05 /
DIEDERICH, Thomas c/o High Tech Campus building 44 NL-5656 AE Eindhoven / NL | Representative(s) | Bekkers, Joost J.J. Philips Intellectual Property & Standards High Tech Campus 5 5656 AE Eindhoven / NL | [N/P] |
Former [2011/43] | Bekkers, Joost J.J Philips Intellectual Property & Standards P.O. Box 220 5600 AE Eindhoven / NL | ||
Former [2010/21] | Bekkers, Joost J.J Philips Intellectual Property & Standards P.O. Box 220 5600 AE Eindhoven / NL | Application number, filing date | 08807390.3 | 21.08.2008 | [2010/21] | WO2008IB53354 | Priority number, date | EP20070115308 | 30.08.2007 Original published format: EP 07115308 | [2010/21] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | WO2009027905 | Date: | 05.03.2009 | Language: | EN | [2009/10] | Type: | A2 Application without search report | No.: | EP2188411 | Date: | 26.05.2010 | Language: | EN | The application published by WIPO in one of the EPO official languages on 05.03.2009 takes the place of the publication of the European patent application. | [2010/21] | Type: | B1 Patent specification | No.: | EP2188411 | Date: | 26.10.2011 | Language: | EN | [2011/43] | Search report(s) | International search report - published on: | EP | 30.04.2009 | Classification | IPC: | C23C14/34, H01J37/34 | [2010/21] | CPC: |
H01J37/3408 (EP,US);
H01J37/32678 (EP,US)
| Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR [2010/21] | Title | German: | SPUTTERSYSTEM | [2010/21] | English: | SPUTTERING SYSTEM | [2010/21] | French: | SYSTÈME DE PULVÉRISATION CATHODIQUE | [2010/21] | Entry into regional phase | 30.03.2010 | National basic fee paid | 30.03.2010 | Designation fee(s) paid | 30.03.2010 | Examination fee paid | Examination procedure | 30.03.2010 | Examination requested [2010/21] | 26.04.2011 | Communication of intention to grant the patent | 06.09.2011 | Fee for grant paid | 06.09.2011 | Fee for publishing/printing paid | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 26.04.2011 | Opposition(s) | 27.07.2012 | No opposition filed within time limit [2012/40] | Fees paid | Renewal fee | 31.08.2010 | Renewal fee patent year 03 | 31.08.2011 | Renewal fee patent year 04 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 21.08.2008 | AT | 26.10.2011 | BE | 26.10.2011 | CY | 26.10.2011 | CZ | 26.10.2011 | DK | 26.10.2011 | EE | 26.10.2011 | FI | 26.10.2011 | HR | 26.10.2011 | IT | 26.10.2011 | LT | 26.10.2011 | LV | 26.10.2011 | MT | 26.10.2011 | NL | 26.10.2011 | PL | 26.10.2011 | RO | 26.10.2011 | SE | 26.10.2011 | SI | 26.10.2011 | SK | 26.10.2011 | TR | 26.10.2011 | BG | 26.01.2012 | NO | 26.01.2012 | GR | 27.01.2012 | ES | 06.02.2012 | IS | 26.02.2012 | PT | 27.02.2012 | [2014/34] |
Former [2014/21] | AT | 26.10.2011 | |
BE | 26.10.2011 | ||
CY | 26.10.2011 | ||
CZ | 26.10.2011 | ||
DK | 26.10.2011 | ||
EE | 26.10.2011 | ||
FI | 26.10.2011 | ||
HR | 26.10.2011 | ||
IT | 26.10.2011 | ||
LT | 26.10.2011 | ||
LV | 26.10.2011 | ||
MT | 26.10.2011 | ||
NL | 26.10.2011 | ||
PL | 26.10.2011 | ||
RO | 26.10.2011 | ||
SE | 26.10.2011 | ||
SI | 26.10.2011 | ||
SK | 26.10.2011 | ||
TR | 26.10.2011 | ||
BG | 26.01.2012 | ||
NO | 26.01.2012 | ||
GR | 27.01.2012 | ||
ES | 06.02.2012 | ||
IS | 26.02.2012 | ||
PT | 27.02.2012 | ||
Former [2013/51] | AT | 26.10.2011 | |
BE | 26.10.2011 | ||
CY | 26.10.2011 | ||
CZ | 26.10.2011 | ||
DK | 26.10.2011 | ||
EE | 26.10.2011 | ||
FI | 26.10.2011 | ||
HR | 26.10.2011 | ||
IT | 26.10.2011 | ||
LT | 26.10.2011 | ||
LV | 26.10.2011 | ||
MT | 26.10.2011 | ||
NL | 26.10.2011 | ||
PL | 26.10.2011 | ||
RO | 26.10.2011 | ||
SE | 26.10.2011 | ||
SI | 26.10.2011 | ||
SK | 26.10.2011 | ||
BG | 26.01.2012 | ||
NO | 26.01.2012 | ||
GR | 27.01.2012 | ||
ES | 06.02.2012 | ||
IS | 26.02.2012 | ||
PT | 27.02.2012 | ||
Former [2013/29] | AT | 26.10.2011 | |
BE | 26.10.2011 | ||
CY | 26.10.2011 | ||
CZ | 26.10.2011 | ||
DK | 26.10.2011 | ||
EE | 26.10.2011 | ||
FI | 26.10.2011 | ||
HR | 26.10.2011 | ||
IT | 26.10.2011 | ||
LT | 26.10.2011 | ||
LV | 26.10.2011 | ||
NL | 26.10.2011 | ||
PL | 26.10.2011 | ||
RO | 26.10.2011 | ||
SE | 26.10.2011 | ||
SI | 26.10.2011 | ||
SK | 26.10.2011 | ||
BG | 26.01.2012 | ||
NO | 26.01.2012 | ||
GR | 27.01.2012 | ||
ES | 06.02.2012 | ||
IS | 26.02.2012 | ||
PT | 27.02.2012 | ||
Former [2013/22] | AT | 26.10.2011 | |
BE | 26.10.2011 | ||
CY | 26.10.2011 | ||
CZ | 26.10.2011 | ||
DK | 26.10.2011 | ||
EE | 26.10.2011 | ||
HR | 26.10.2011 | ||
IT | 26.10.2011 | ||
LT | 26.10.2011 | ||
LV | 26.10.2011 | ||
NL | 26.10.2011 | ||
PL | 26.10.2011 | ||
RO | 26.10.2011 | ||
SE | 26.10.2011 | ||
SI | 26.10.2011 | ||
SK | 26.10.2011 | ||
BG | 26.01.2012 | ||
NO | 26.01.2012 | ||
GR | 27.01.2012 | ||
ES | 06.02.2012 | ||
IS | 26.02.2012 | ||
PT | 27.02.2012 | ||
Former [2013/07] | AT | 26.10.2011 | |
BE | 26.10.2011 | ||
CY | 26.10.2011 | ||
CZ | 26.10.2011 | ||
DK | 26.10.2011 | ||
EE | 26.10.2011 | ||
HR | 26.10.2011 | ||
IT | 26.10.2011 | ||
LT | 26.10.2011 | ||
LV | 26.10.2011 | ||
NL | 26.10.2011 | ||
PL | 26.10.2011 | ||
RO | 26.10.2011 | ||
SE | 26.10.2011 | ||
SI | 26.10.2011 | ||
SK | 26.10.2011 | ||
BG | 26.01.2012 | ||
NO | 26.01.2012 | ||
GR | 27.01.2012 | ||
IS | 26.02.2012 | ||
PT | 27.02.2012 | ||
Former [2012/37] | BE | 26.10.2011 | |
CY | 26.10.2011 | ||
CZ | 26.10.2011 | ||
DK | 26.10.2011 | ||
EE | 26.10.2011 | ||
HR | 26.10.2011 | ||
IT | 26.10.2011 | ||
LT | 26.10.2011 | ||
LV | 26.10.2011 | ||
NL | 26.10.2011 | ||
PL | 26.10.2011 | ||
RO | 26.10.2011 | ||
SE | 26.10.2011 | ||
SI | 26.10.2011 | ||
SK | 26.10.2011 | ||
BG | 26.01.2012 | ||
NO | 26.01.2012 | ||
GR | 27.01.2012 | ||
IS | 26.02.2012 | ||
PT | 27.02.2012 | ||
Former [2012/36] | BE | 26.10.2011 | |
CY | 26.10.2011 | ||
CZ | 26.10.2011 | ||
DK | 26.10.2011 | ||
EE | 26.10.2011 | ||
HR | 26.10.2011 | ||
LT | 26.10.2011 | ||
LV | 26.10.2011 | ||
NL | 26.10.2011 | ||
PL | 26.10.2011 | ||
RO | 26.10.2011 | ||
SE | 26.10.2011 | ||
SI | 26.10.2011 | ||
SK | 26.10.2011 | ||
BG | 26.01.2012 | ||
NO | 26.01.2012 | ||
GR | 27.01.2012 | ||
IS | 26.02.2012 | ||
PT | 27.02.2012 | ||
Former [2012/35] | BE | 26.10.2011 | |
CY | 26.10.2011 | ||
CZ | 26.10.2011 | ||
DK | 26.10.2011 | ||
EE | 26.10.2011 | ||
HR | 26.10.2011 | ||
LT | 26.10.2011 | ||
LV | 26.10.2011 | ||
NL | 26.10.2011 | ||
PL | 26.10.2011 | ||
SE | 26.10.2011 | ||
SI | 26.10.2011 | ||
BG | 26.01.2012 | ||
NO | 26.01.2012 | ||
GR | 27.01.2012 | ||
IS | 26.02.2012 | ||
PT | 27.02.2012 | ||
Former [2012/34] | BE | 26.10.2011 | |
CY | 26.10.2011 | ||
CZ | 26.10.2011 | ||
HR | 26.10.2011 | ||
LT | 26.10.2011 | ||
LV | 26.10.2011 | ||
NL | 26.10.2011 | ||
PL | 26.10.2011 | ||
SE | 26.10.2011 | ||
SI | 26.10.2011 | ||
NO | 26.01.2012 | ||
GR | 27.01.2012 | ||
IS | 26.02.2012 | ||
PT | 27.02.2012 | ||
Former [2012/28] | BE | 26.10.2011 | |
CY | 26.10.2011 | ||
HR | 26.10.2011 | ||
LT | 26.10.2011 | ||
LV | 26.10.2011 | ||
NL | 26.10.2011 | ||
PL | 26.10.2011 | ||
SE | 26.10.2011 | ||
SI | 26.10.2011 | ||
NO | 26.01.2012 | ||
GR | 27.01.2012 | ||
IS | 26.02.2012 | ||
PT | 27.02.2012 | ||
Former [2012/27] | BE | 26.10.2011 | |
HR | 26.10.2011 | ||
LT | 26.10.2011 | ||
LV | 26.10.2011 | ||
NL | 26.10.2011 | ||
PL | 26.10.2011 | ||
SE | 26.10.2011 | ||
SI | 26.10.2011 | ||
NO | 26.01.2012 | ||
GR | 27.01.2012 | ||
IS | 26.02.2012 | ||
PT | 27.02.2012 | ||
Former [2012/26] | BE | 26.10.2011 | |
LT | 26.10.2011 | ||
LV | 26.10.2011 | ||
NL | 26.10.2011 | ||
PL | 26.10.2011 | ||
SE | 26.10.2011 | ||
SI | 26.10.2011 | ||
NO | 26.01.2012 | ||
GR | 27.01.2012 | ||
IS | 26.02.2012 | ||
PT | 27.02.2012 | ||
Former [2012/24] | BE | 26.10.2011 | |
LT | 26.10.2011 | ||
LV | 26.10.2011 | ||
NL | 26.10.2011 | ||
SE | 26.10.2011 | ||
SI | 26.10.2011 | ||
NO | 26.01.2012 | ||
GR | 27.01.2012 | ||
IS | 26.02.2012 | ||
PT | 27.02.2012 | ||
Former [2012/23] | BE | 26.10.2011 | |
LT | 26.10.2011 | ||
NL | 26.10.2011 | ||
NO | 26.01.2012 | ||
GR | 27.01.2012 | ||
IS | 26.02.2012 | ||
PT | 27.02.2012 | ||
Former [2012/21] | BE | 26.10.2011 | |
LT | 26.10.2011 | ||
NO | 26.01.2012 | ||
IS | 26.02.2012 | ||
Former [2012/20] | LT | 26.10.2011 | |
NO | 26.01.2012 | Cited in | International search | [A]EP0275965 (HITACHI LTD [JP], et al) [A] 1-15 * figures 11,13,15-19 *; | [A]WO9500677 (DEPOSITION SCIENCES INC [US]) [A] 1-15 * figure 1 * * page 5, line 32 - page 6, line 23 * * page 14, line 18 - line 26 *; | [A]US5466991 (BERRY LEE A [US]) [A] 1-15 * column 5, line 52 - line 61 * * column 7, line 30 - line 48 *; | [A]US6635124 (STOWELL WILLIAM RANDOLPH [US], et al) [A] 1-15 * the whole document *; | [A] - LIMPAECHER R ET AL, "MAGNETIC MULTIPOLE CONTAINMENT OF LARGE UNIFORM COLLISIONLESS QUIESCENT PLASMAS", REVIEW OF SCIENTIFIC INSTRUMENTS, AIP, MELVILLE, NY, US, (19730601), vol. 44, no. 6, ISSN 0034-6748, pages 726 - 731, XP000560655 [A] 1-15 * the whole document * DOI: http://dx.doi.org/10.1063/1.1686231 | by applicant | EP0516436 | EP0516436 |