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EP2186117
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EP About this file: EP2186117
| EP2186117 - VAPOR BASED COMBINATORIAL PROCESSING [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 02.06.2017 Database last updated on 20.07.2024 | |
| Former | Request for examination was made Status updated on 08.02.2017 | Most recent event Tooltip | 02.06.2017 | Application deemed to be withdrawn | published on 05.07.2017 [2017/27] | Applicant(s) | For all designated states Intermolecular, Inc. 2865 Zanker Road San Jose, CA 95134 / US | [2010/20] | Inventor(s) | 01 /
CHIANG, Tony, P. 2865 Zanker Road San Jose, CA 95134 / US | 02 /
SHANKER, Sunil 2865 Zanker Road San Jose, CA 95134 / US | 03 /
LANG, Chi-I 2865 Zanker Road San Jose, CA 95134 / US | [2010/20] | Representative(s) | Lau, Sarah Jane, et al Kilburn & Strode LLP Lacon London 84 Theobalds Road London WC1X 8NL / GB | [N/P] |
| Former [2013/49] | Lau, Sarah Jane, et al Kilburn & Strode LLP 20 Red Lion Street London WC1R 4PJ / GB | ||
| Former [2013/42] | Hart, Deborah Mary, et al Kilburn & Strode LLP 20 Red Lion Street London WC1R 4PJ / GB | ||
| Former [2013/30] | Chapman, Paul William, et al Kilburn & Strode LLP 20 Red Lion Street London WC1R 4PJ / GB | ||
| Former [2010/20] | Maggs, Michael Norman, et al Kilburn & Strode LLP 20 Red Lion Street London WC1R 4PJ / GB | Application number, filing date | 08829663.7 | 05.09.2008 | [2010/20] | WO2008US75301 | Priority number, date | US20070970199P | 05.09.2007 Original published format: US 970199 P | US20080013729 | 14.01.2008 Original published format: US 13729 | US20080013759 | 14.01.2008 Original published format: US 13759 | [2010/20] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2009032958 | Date: | 12.03.2009 | Language: | EN | [2009/11] | Type: | A1 Application with search report | No.: | EP2186117 | Date: | 19.05.2010 | Language: | EN | The application published by WIPO in one of the EPO official languages on 12.03.2009 takes the place of the publication of the European patent application. | [2010/20] | Search report(s) | International search report - published on: | KR | 12.03.2009 | (Supplementary) European search report - dispatched on: | EP | 06.06.2016 | Classification | IPC: | H01L21/205, C23C16/455 | [2016/27] | CPC: |
C23C16/45574 (EP,KR,US);
C23C16/45548 (EP,KR,US);
C23C16/45544 (EP,US)
|
| Former IPC [2010/20] | H01L21/205 | Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR [2010/20] | Title | German: | KOMBINIERTE VERARBEITUNG AUF DAMPFBASIS | [2010/20] | English: | VAPOR BASED COMBINATORIAL PROCESSING | [2010/20] | French: | TRAITEMENT COMBINATOIRE A BASE DE VAPEUR | [2010/20] | Entry into regional phase | 02.03.2010 | National basic fee paid | 02.03.2010 | Search fee paid | 02.03.2010 | Designation fee(s) paid | 02.03.2010 | Examination fee paid | Examination procedure | 02.03.2010 | Examination requested [2010/20] | 04.01.2017 | Application deemed to be withdrawn, date of legal effect [2017/27] | 09.02.2017 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2017/27] | Fees paid | Renewal fee | 27.09.2010 | Renewal fee patent year 03 | 22.09.2011 | Renewal fee patent year 04 | 20.09.2012 | Renewal fee patent year 05 | 20.09.2013 | Renewal fee patent year 06 | 26.09.2014 | Renewal fee patent year 07 | 25.09.2015 | Renewal fee patent year 08 | Penalty fee | Additional fee for renewal fee | 30.09.2016 | 09 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [X]US2004099213 (ADOMAITIS RAYMOND A [US], et al) [X] 1-17 * the whole document *; | [A]US2004255855 (SELVAMANICKAM VENKAT [US], et al) [A] 1-17 * paragraph [0077] - paragraph [0084]; figure 1; claims 1-10 ** paragraph [0044] - paragraph [0045] *; | [XA]US2007082508 (CHIANG TONY P [US], et al) [X] 1-9 * paragraph [0128] - paragraph [0129]; figure 1a; claims 1-24 * * paragraph [0080] - paragraph [0083] * [A] 10-17 | International search | [A]US6444039 (NGUYEN TUE [US]) [A] 1-17 * see the abstract, claim 1, Figs. 7-10 *; | [A]US6565661 (NGUYEN TUE [US]) [A] 1-17 * see the abstract, claims 1, 10, Figs. 12-15 *; | [A]KR20060056285 (SUPERPOWER INC [US]) [A] 1-17* see the abstract, claims 1,22, Figs. 1-3 * |