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Extract from the Register of European Patents

EP About this file: EP2203783

EP2203783 - THICK FILM RESISTS [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  18.09.2020
Database last updated on 25.09.2024
FormerThe patent has been granted
Status updated on  11.10.2019
FormerGrant of patent is intended
Status updated on  28.05.2019
FormerExamination is in progress
Status updated on  09.02.2018
Most recent event   Tooltip24.06.2022Lapse of the patent in a contracting state
New state(s): CY, HU, MT		published on 27.07.2022  [2022/30]
Applicant(s)For all designated states
Merck Patent GmbH
Frankfurter Strasse 250
64293 Darmstadt / DE
[2015/17]
Former [2010/27]For all designated states
AZ Electronic Materials USA Corp.
70 Meister Avenue
Somerville, New Jersey 08876 / US
Inventor(s)01 / TOUKHY, Medhat A.
10 Ewing Drive
Flemington, NJ 08822 / US
02 / PAUNESCU, Margareta
44 Studer Road
Clinton, NJ 08809 / US
 [2010/27]
Representative(s)Rippel, Hans Christoph
Patentanwälte
Isenbruck Bösl Hörschler PartG mbB
Eastsite One
Seckenheimer Landstrasse 4
68163 Mannheim / DE
[2019/46]
Former [2010/27]Rippel, Hans Christoph
Isenbruck Bösl Hörschler Wichmann LLP Eastsite One Seckenheimer Landstrasse 4
68163 Mannheim / DE
Application number, filing date08833151.724.09.2008
[2010/27]
WO2008IB02593
Priority number, dateUS2007086067525.09.2007         Original published format: US 860675
[2010/27]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report
No.:WO2009040661
Date:02.04.2009
Language:EN
[2009/14]
Type: A2 Application without search report 
No.:EP2203783
Date:07.07.2010
Language:EN
The application published by WIPO in one of the EPO official languages on 02.04.2009 takes the place of the publication of the European patent application.
[2010/27]
Type: B1 Patent specification 
No.:EP2203783
Date:13.11.2019
Language:EN
[2019/46]
Search report(s)International search report - published on:EP04.06.2009
ClassificationIPC:G03F7/039
[2010/27]
CPC:
G03F7/0392 (EP,KR,US); G03F7/004 (KR); G03F7/027 (KR);
G03F7/0275 (KR); H01L21/0273 (KR); H01L21/0274 (KR)
Designated contracting statesAT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MT,   NL,   NO,   PL,   PT,   RO,   SE,   SI,   SK,   TR [2019/46]
Former [2010/27]AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HR,  HU,  IE,  IS,  IT,  LI,  LT,  LU,  LV,  MC,  MT,  NL,  NO,  PL,  PT,  RO,  SE,  SI,  SK,  TR 
Extension statesALNot yet paid
BANot yet paid
MKNot yet paid
RSNot yet paid
TitleGerman:DICKFILMRESISTS[2010/27]
English:THICK FILM RESISTS[2010/27]
French:RÉSINES PHOTOSENSIBLES EN COUCHE ÉPAISSE[2010/27]
Entry into regional phase23.04.2010National basic fee paid 
23.04.2010Designation fee(s) paid 
23.04.2010Examination fee paid 
Examination procedure23.04.2010Amendment by applicant (claims and/or description)
23.04.2010Examination requested  [2010/27]
12.02.2018Despatch of a communication from the examining division (Time limit: M06)
22.08.2018Reply to a communication from the examining division
30.10.2018Despatch of a communication from the examining division (Time limit: M04)
11.03.2019Reply to a communication from the examining division
29.05.2019Communication of intention to grant the patent
02.10.2019Fee for grant paid
02.10.2019Fee for publishing/printing paid
02.10.2019Receipt of the translation of the claim(s)
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  12.02.2018
Opposition(s)14.08.2020No opposition filed within time limit [2020/43]
Fees paidRenewal fee
28.09.2010Renewal fee patent year 03
27.09.2011Renewal fee patent year 04
27.09.2012Renewal fee patent year 05
27.09.2013Renewal fee patent year 06
17.09.2014Renewal fee patent year 07
29.09.2015Renewal fee patent year 08
13.09.2016Renewal fee patent year 09
12.09.2017Renewal fee patent year 10
11.09.2018Renewal fee patent year 11
13.09.2019Renewal fee patent year 12
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU24.09.2008
AT13.11.2019
CY13.11.2019
CZ13.11.2019
DK13.11.2019
EE13.11.2019
ES13.11.2019
FI13.11.2019
HR13.11.2019
IT13.11.2019
LT13.11.2019
LV13.11.2019
MC13.11.2019
MT13.11.2019
NL13.11.2019
PL13.11.2019
RO13.11.2019
SE13.11.2019
SI13.11.2019
SK13.11.2019
TR13.11.2019
BG13.02.2020
NO13.02.2020
GR14.02.2020
IS13.03.2020
PT13.03.2020
[2022/27]
Former [2022/26]AT13.11.2019
CZ13.11.2019
DK13.11.2019
EE13.11.2019
ES13.11.2019
FI13.11.2019
HR13.11.2019
IT13.11.2019
LT13.11.2019
LV13.11.2019
MC13.11.2019
NL13.11.2019
PL13.11.2019
RO13.11.2019
SE13.11.2019
SI13.11.2019
SK13.11.2019
TR13.11.2019
BG13.02.2020
NO13.02.2020
GR14.02.2020
IS13.03.2020
PT13.03.2020
Former [2021/23]AT13.11.2019
CZ13.11.2019
DK13.11.2019
EE13.11.2019
ES13.11.2019
FI13.11.2019
HR13.11.2019
IT13.11.2019
LT13.11.2019
LV13.11.2019
MC13.11.2019
NL13.11.2019
PL13.11.2019
RO13.11.2019
SE13.11.2019
SI13.11.2019
SK13.11.2019
BG13.02.2020
NO13.02.2020
GR14.02.2020
IS13.03.2020
PT13.03.2020
Former [2021/10]AT13.11.2019
CZ13.11.2019
DK13.11.2019
EE13.11.2019
ES13.11.2019
FI13.11.2019
HR13.11.2019
IT13.11.2019
LT13.11.2019
LV13.11.2019
NL13.11.2019
PL13.11.2019
RO13.11.2019
SE13.11.2019
SI13.11.2019
SK13.11.2019
BG13.02.2020
NO13.02.2020
GR14.02.2020
IS13.03.2020
PT13.03.2020
Former [2020/51]AT13.11.2019
CZ13.11.2019
DK13.11.2019
EE13.11.2019
ES13.11.2019
FI13.11.2019
HR13.11.2019
LT13.11.2019
LV13.11.2019
NL13.11.2019
PL13.11.2019
RO13.11.2019
SE13.11.2019
SI13.11.2019
SK13.11.2019
BG13.02.2020
NO13.02.2020
GR14.02.2020
IS13.03.2020
PT13.03.2020
Former [2020/37]CZ13.11.2019
DK13.11.2019
EE13.11.2019
ES13.11.2019
FI13.11.2019
HR13.11.2019
LT13.11.2019
LV13.11.2019
NL13.11.2019
PL13.11.2019
RO13.11.2019
SE13.11.2019
SK13.11.2019
BG13.02.2020
NO13.02.2020
GR14.02.2020
IS13.03.2020
PT13.03.2020
Former [2020/36]CZ13.11.2019
DK13.11.2019
EE13.11.2019
ES13.11.2019
FI13.11.2019
HR13.11.2019
LT13.11.2019
LV13.11.2019
NL13.11.2019
PL13.11.2019
RO13.11.2019
SE13.11.2019
BG13.02.2020
NO13.02.2020
GR14.02.2020
IS13.03.2020
PT13.03.2020
Former [2020/35]CZ13.11.2019
ES13.11.2019
FI13.11.2019
HR13.11.2019
LT13.11.2019
LV13.11.2019
NL13.11.2019
PL13.11.2019
RO13.11.2019
SE13.11.2019
BG13.02.2020
NO13.02.2020
GR14.02.2020
IS13.03.2020
PT13.03.2020
Former [2020/25]ES13.11.2019
FI13.11.2019
HR13.11.2019
LT13.11.2019
LV13.11.2019
NL13.11.2019
PL13.11.2019
SE13.11.2019
BG13.02.2020
NO13.02.2020
GR14.02.2020
IS13.03.2020
PT13.03.2020
Former [2020/24]ES13.11.2019
FI13.11.2019
LT13.11.2019
LV13.11.2019
NL13.11.2019
PL13.11.2019
SE13.11.2019
BG13.02.2020
NO13.02.2020
GR14.02.2020
IS13.03.2020
PT13.03.2020
Former [2020/23]ES13.11.2019
FI13.11.2019
LT13.11.2019
LV13.11.2019
NL13.11.2019
PL13.11.2019
SE13.11.2019
BG13.02.2020
NO13.02.2020
GR14.02.2020
PT13.03.2020
Former [2020/22]FI13.11.2019
LT13.11.2019
SE13.11.2019
BG13.02.2020
NO13.02.2020
PT13.03.2020
Former [2020/21]NO13.02.2020
Cited inInternational search[A]EP0939339  (IBM [US]) [A] 1,2,9-11,16-20 * page 6; example 4 * * claim 1 *;
 [A]EP1126321  (SHIPLEY CO LLC [US]) [A] 1,2,9-11,16-20 * page 7, paragraph 47 *;
 [A]US2003219677  (NAMBA KATSUHIKO [JP], et al) [A] 1,4,9-11,16-20 * page 8, paragraph 175 * * pages 8-9, paragraph 179 - paragraph 182 * * page 9, paragraph 196 ** page 10; example 1; table 1 *;
 [A]EP1415968  (KYOWA YUKA KK [JP]) [A] 1,2,9-11,16-20 * page 8, lines 1,2 *;
 [Y]WO2005081062  (TOKYO OHKA KOGYO CO LTD [JP], et al) [Y] 1,2,9-11,16-20 * page 36, paragraph 77 *;
 [Y]US2006251986  (SATO KAZUFUMI [JP], et al) [Y] 1,2,9-11,16-20 * page 7; example 1 *;
 US2007281243  [ ] (HIRAYAMA TAKU [JP]) [ ] * page 15, paragraph 174 *;
 [A]  - M. TOUKHY ET AL., "Chemically amplified, thick film, i-line positive resist for electroplating and redistribution applications", PROCEEDINGS OF THE SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING, USA, (200602), vol. 6153, no. 2, pages 61534H-1 - 61534H-8, XP002513378 [A] 1,2,9-11,16-20 * the whole document *

DOI:   http://dx.doi.org/10.1117/12.656595
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