EP2200070 - ILLUMINATING OPTICAL APPARATUS, AND EXPOSURE METHOD AND APPARATUS [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 11.10.2013 Database last updated on 24.08.2024 | Most recent event Tooltip | 11.10.2013 | Application deemed to be withdrawn | published on 13.11.2013 [2013/46] | Applicant(s) | For all designated states Nikon Corporation 12-1, Yurakucho 1-chome Chiyoda-ku Tokyo 100-8331 / JP | [N/P] |
Former [2010/30] | For all designated states Nikon Corporation 12-1, Yurakucho 1-chome Chiyoda-ku Tokyo 100-8331 / JP | ||
Former [2010/25] | For all designated states Nikon Corporation 2-3, Marunouchi 3-chome Chiyoda-ku Tokyo 100-8331 / JP | Inventor(s) | 01 /
TANAKA, Hirohisa c/o NIKON CORPORATION Intellectual Property Headquarters 2-3 Marunouchi 3-chome Chiyoda-ku Tokyo 100-8331 / JP | [2010/25] | Representative(s) | Hoffmann Eitle Patent- und Rechtsanwälte PartmbB Arabellastrasse 30 81925 München / DE | [N/P] |
Former [2010/25] | HOFFMANN EITLE Patent- und Rechtsanwälte Arabellastrasse 4 81925 München / DE | Application number, filing date | 08837855.9 | 07.10.2008 | [2010/25] | WO2008JP68206 | Priority number, date | JP20070267256 | 12.10.2007 Original published format: JP 2007267256 | [2010/25] | Filing language | JA | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2009048051 | Date: | 16.04.2009 | Language: | JA | [2009/16] | Type: | A1 Application with search report | No.: | EP2200070 | Date: | 23.06.2010 | Language: | EN | [2010/25] | Search report(s) | International search report - published on: | JP | 16.04.2009 | (Supplementary) European search report - dispatched on: | EP | 19.10.2012 | Classification | IPC: | H01L21/00, G03F7/20 | [2012/47] | CPC: |
G03F7/70566 (EP,KR,US);
H01L21/027 (KR);
G03F7/70141 (KR,US);
F21V9/14 (KR,US)
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Former IPC [2010/25] | H01L21/027, G03F7/20 | Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR [2010/25] | Title | German: | OPTISCHES BELEUCHTUNGSGERÄT, BELICHTUNGSVERFAHREN UND GERÄT | [2010/25] | English: | ILLUMINATING OPTICAL APPARATUS, AND EXPOSURE METHOD AND APPARATUS | [2010/25] | French: | APPAREIL OPTIQUE D'ÉCLAIRAGE, ET PROCÉDÉ ET APPAREIL D'EXPOSITION | [2010/25] | Entry into regional phase | 09.04.2010 | Translation filed | 09.04.2010 | National basic fee paid | 09.04.2010 | Search fee paid | 09.04.2010 | Designation fee(s) paid | 09.04.2010 | Examination fee paid | Examination procedure | 09.04.2010 | Amendment by applicant (claims and/or description) | 09.04.2010 | Examination requested [2010/25] | 17.05.2013 | Application deemed to be withdrawn, date of legal effect [2013/46] | 25.06.2013 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2013/46] | Fees paid | Renewal fee | 22.10.2010 | Renewal fee patent year 03 | 25.10.2011 | Renewal fee patent year 04 | 18.10.2012 | Renewal fee patent year 05 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [XAY]WO2005036619 (NIKON CORP [JP], et al) [X] 1-3 * abstract * [A] 6[Y] 7-18; | [XY]US2006055834 (TANITSU OSAMU [JP], et al) [X] 1,4,5,19-25 * paragraphs [0105] - [0112] - [000 ] , [0088] , [0151] , [ 167] - [0169] - [ 191]; figures 1, 4, 11, 16; claim 1 * [Y] 7-18 | International search | [Y]JPS6063751 (OLYMPUS OPTICAL CO); | [X]WO2004051717 (NIKON CORP [JP], et al); | [X]WO2005076045 (NIKON CORP [JP], et al); | [Y]JP2007263897 (NIKON CORP) |