blank Quick help
blank Maintenance news

Scheduled maintenance

Regular maintenance outages:
between 05.00 and 05.15 hrs CET (Monday to Sunday).

Other outages
Availability
Register Forum

2022.02.11

More...
blank News flashes

News Flashes

New version of the European Patent Register – SPC proceedings information in the Unitary Patent Register.

2024-07-24

More...
blank Related links

Release notes
European Patent Register Assistant
European Patent Register Resource Book
European Patent Register – pocket guide
FAQ - European Patent Register
FAQ - Register Alert
Federated Register (Flyer)
Global Dossier (Flyer)
Register events
Deep link coverage
Federated Register content
The Patent Information Tour
Fair use charter

Extract from the Register of European Patents

EP About this file: EP2200070

EP2200070 - ILLUMINATING OPTICAL APPARATUS, AND EXPOSURE METHOD AND APPARATUS [Right-click to bookmark this link]
StatusThe application is deemed to be withdrawn
Status updated on  11.10.2013
Database last updated on 24.08.2024
Most recent event   Tooltip11.10.2013Application deemed to be withdrawnpublished on 13.11.2013  [2013/46]
Applicant(s)For all designated states
Nikon Corporation
12-1, Yurakucho 1-chome
Chiyoda-ku
Tokyo 100-8331 / JP
[N/P]
Former [2010/30]For all designated states
Nikon Corporation
12-1, Yurakucho 1-chome Chiyoda-ku
Tokyo 100-8331 / JP
Former [2010/25]For all designated states
Nikon Corporation
2-3, Marunouchi 3-chome Chiyoda-ku
Tokyo 100-8331 / JP
Inventor(s)01 / TANAKA, Hirohisa
c/o NIKON CORPORATION Intellectual Property Headquarters 2-3 Marunouchi 3-chome Chiyoda-ku
Tokyo 100-8331 / JP
 [2010/25]
Representative(s)Hoffmann Eitle
Patent- und Rechtsanwälte PartmbB
Arabellastrasse 30
81925 München / DE
[N/P]
Former [2010/25]HOFFMANN EITLE
Patent- und Rechtsanwälte Arabellastrasse 4
81925 München / DE
Application number, filing date08837855.907.10.2008
[2010/25]
WO2008JP68206
Priority number, dateJP2007026725612.10.2007         Original published format: JP 2007267256
[2010/25]
Filing languageJA
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2009048051
Date:16.04.2009
Language:JA
[2009/16]
Type: A1 Application with search report 
No.:EP2200070
Date:23.06.2010
Language:EN
[2010/25]
Search report(s)International search report - published on:JP16.04.2009
(Supplementary) European search report - dispatched on:EP19.10.2012
ClassificationIPC:H01L21/00, G03F7/20
[2012/47]
CPC:
G03F7/70566 (EP,KR,US); H01L21/027 (KR); G03F7/70141 (KR,US);
F21V9/14 (KR,US)
Former IPC [2010/25]H01L21/027, G03F7/20
Designated contracting statesAT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MT,   NL,   NO,   PL,   PT,   RO,   SE,   SI,   SK,   TR [2010/25]
TitleGerman:OPTISCHES BELEUCHTUNGSGERÄT, BELICHTUNGSVERFAHREN UND GERÄT[2010/25]
English:ILLUMINATING OPTICAL APPARATUS, AND EXPOSURE METHOD AND APPARATUS[2010/25]
French:APPAREIL OPTIQUE D'ÉCLAIRAGE, ET PROCÉDÉ ET APPAREIL D'EXPOSITION[2010/25]
Entry into regional phase09.04.2010Translation filed 
09.04.2010National basic fee paid 
09.04.2010Search fee paid 
09.04.2010Designation fee(s) paid 
09.04.2010Examination fee paid 
Examination procedure09.04.2010Amendment by applicant (claims and/or description)
09.04.2010Examination requested  [2010/25]
17.05.2013Application deemed to be withdrawn, date of legal effect  [2013/46]
25.06.2013Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time  [2013/46]
Fees paidRenewal fee
22.10.2010Renewal fee patent year 03
25.10.2011Renewal fee patent year 04
18.10.2012Renewal fee patent year 05
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:Search[XAY]WO2005036619  (NIKON CORP [JP], et al) [X] 1-3 * abstract * [A] 6[Y] 7-18;
 [XY]US2006055834  (TANITSU OSAMU [JP], et al) [X] 1,4,5,19-25 * paragraphs [0105] - [0112] - [000 ] , [0088] , [0151] , [ 167] - [0169] - [ 191]; figures 1, 4, 11, 16; claim 1 * [Y] 7-18
International search[Y]JPS6063751  (OLYMPUS OPTICAL CO);
 [X]WO2004051717  (NIKON CORP [JP], et al);
 [X]WO2005076045  (NIKON CORP [JP], et al);
 [Y]JP2007263897  (NIKON CORP)
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.