EP2154710 - Substrate joining method and 3-D semiconductor device [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 22.09.2017 Database last updated on 22.08.2024 | Most recent event Tooltip | 10.07.2020 | Lapse of the patent in a contracting state New state(s): IS | published on 12.08.2020 [2020/33] | Applicant(s) | For all designated states Shin-Etsu Chemical Co., Ltd. 6-1, Otemachi 2-chome Chiyoda-ku Tokyo / JP | [2016/46] |
Former [2010/07] | For all designated states Shin-Etsu Chemical Co., Ltd. 6-1, Otemachi 2-chome Chiyoda-ku, Tokyo / JP | Inventor(s) | 01 /
Yagihashi, Fujio New Functional Materials Research Center Shin-Etsu Chemical Co., Ltd. 28-1, Nishi Fukushima Kubiki-ku Joetsu-shi Niigata-ken / JP | 02 /
Hamada, Yoshitaka New Functional Materials Research Center Shin-Etsu Chemical Co., Ltd. 28-1, Nishi Fukushima Kubiki-ku Joetsu-shi Niigata-ken / JP | 03 /
Asano, Takeshi New Functional Materials Research Center Shin-Etsu Chemical Co., Ltd. 28-1, Nishi Fukushima Kubiki-ku Joetsu-shi Niigata-ken / JP | [2016/46] |
Former [2010/07] | 01 /
Yagihashi, Fujio New Functional Materials Research Center Shin-Etsu Chemical Co., Ltd. 28-1, Nishi Fukushima Kubiki-ku Joetsu-shi Niigata-ken / JP | ||
02 /
Hamada, Yoshitaka New Functional Materials Research Center Shin-Etsu Chemical Co., Ltd. 28-1, Nishi Fukushima Kubiki-ku Joetsu-shi Niigata-ken / JP | |||
03 /
Asano, Takeshi New Functional Materials Research Center Shin-Etsu Chemical Co., Ltd. 28-1, Nishi Fukushima Kubiki-ku Joetsu-shi Niigata-ken / JP | Representative(s) | Ter Meer Steinmeister & Partner Patentanwälte mbB Nymphenburger Straße 4 80335 München / DE | [2016/46] |
Former [2013/20] | Ter Meer Steinmeister & Partner Patentanwälte Mauerkircherstrasse 45 81679 München / DE | ||
Former [2010/07] | TER MEER - STEINMEISTER & PARTNER GbR Mauerkircherstrasse 45 81679 München / DE | Application number, filing date | 09009944.1 | 31.07.2009 | [2010/07] | Priority number, date | JP20080209194 | 15.08.2008 Original published format: JP 2008209194 | [2010/07] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP2154710 | Date: | 17.02.2010 | Language: | EN | [2010/07] | Type: | A3 Search report | No.: | EP2154710 | Date: | 05.11.2014 | Language: | EN | [2014/45] | Type: | B1 Patent specification | No.: | EP2154710 | Date: | 16.11.2016 | Language: | EN | [2016/46] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 02.10.2014 | Classification | IPC: | H01L25/07, H01L21/20 | [2016/27] | CPC: |
H01L21/2007 (EP,US);
C09J163/00 (KR);
C09J201/00 (KR);
H01L21/30 (KR);
H01L21/52 (KR);
H01L2924/0002 (EP,US);
Y10T156/10 (EP,US)
(-)
| C-Set: |
H01L2924/0002, H01L2924/00 (EP,US)
|
Former IPC [2010/07] | H01L21/20 | Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, SM, TR [2015/23] |
Former [2010/07] | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, SM, TR | Title | German: | Substratverbindungsverfahren und 3-D-Halbleitervorrichtung | [2010/07] | English: | Substrate joining method and 3-D semiconductor device | [2010/07] | French: | Procédé de jonction de substrat et dispositif semi-conducteur en 3D | [2010/07] | Examination procedure | 23.04.2015 | Amendment by applicant (claims and/or description) | 23.04.2015 | Examination requested [2015/23] | 15.06.2016 | Communication of intention to grant the patent | 05.10.2016 | Fee for grant paid | 05.10.2016 | Fee for publishing/printing paid | 05.10.2016 | Receipt of the translation of the claim(s) | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 15.06.2016 | Opposition(s) | 17.08.2017 | No opposition filed within time limit [2017/43] | Fees paid | Renewal fee | 12.07.2011 | Renewal fee patent year 03 | 13.07.2012 | Renewal fee patent year 04 | 10.07.2013 | Renewal fee patent year 05 | 14.07.2014 | Renewal fee patent year 06 | 10.07.2015 | Renewal fee patent year 07 | 11.07.2016 | Renewal fee patent year 08 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 31.07.2009 | AT | 16.11.2016 | BE | 16.11.2016 | CY | 16.11.2016 | CZ | 16.11.2016 | DK | 16.11.2016 | EE | 16.11.2016 | ES | 16.11.2016 | FI | 16.11.2016 | HR | 16.11.2016 | IT | 16.11.2016 | LT | 16.11.2016 | LV | 16.11.2016 | MC | 16.11.2016 | MK | 16.11.2016 | NL | 16.11.2016 | PL | 16.11.2016 | RO | 16.11.2016 | SE | 16.11.2016 | SI | 16.11.2016 | SK | 16.11.2016 | SM | 16.11.2016 | TR | 16.11.2016 | BG | 16.02.2017 | NO | 16.02.2017 | GR | 17.02.2017 | IS | 16.03.2017 | PT | 16.03.2017 | CH | 31.07.2017 | GB | 31.07.2017 | IE | 31.07.2017 | LI | 31.07.2017 | LU | 31.07.2017 | MT | 31.07.2017 | [2020/33] |
Former [2020/15] | HU | 31.07.2009 | |
AT | 16.11.2016 | ||
BE | 16.11.2016 | ||
CY | 16.11.2016 | ||
CZ | 16.11.2016 | ||
DK | 16.11.2016 | ||
EE | 16.11.2016 | ||
ES | 16.11.2016 | ||
FI | 16.11.2016 | ||
HR | 16.11.2016 | ||
IT | 16.11.2016 | ||
LT | 16.11.2016 | ||
LV | 16.11.2016 | ||
MC | 16.11.2016 | ||
MK | 16.11.2016 | ||
NL | 16.11.2016 | ||
PL | 16.11.2016 | ||
RO | 16.11.2016 | ||
SE | 16.11.2016 | ||
SI | 16.11.2016 | ||
SK | 16.11.2016 | ||
SM | 16.11.2016 | ||
TR | 16.11.2016 | ||
BG | 16.02.2017 | ||
NO | 16.02.2017 | ||
GR | 17.02.2017 | ||
PT | 16.03.2017 | ||
CH | 31.07.2017 | ||
GB | 31.07.2017 | ||
IE | 31.07.2017 | ||
LI | 31.07.2017 | ||
LU | 31.07.2017 | ||
MT | 31.07.2017 | ||
Former [2019/52] | HU | 31.07.2009 | |
AT | 16.11.2016 | ||
BE | 16.11.2016 | ||
CY | 16.11.2016 | ||
CZ | 16.11.2016 | ||
DK | 16.11.2016 | ||
EE | 16.11.2016 | ||
ES | 16.11.2016 | ||
FI | 16.11.2016 | ||
HR | 16.11.2016 | ||
IT | 16.11.2016 | ||
LT | 16.11.2016 | ||
LV | 16.11.2016 | ||
MC | 16.11.2016 | ||
MK | 16.11.2016 | ||
NL | 16.11.2016 | ||
PL | 16.11.2016 | ||
RO | 16.11.2016 | ||
SE | 16.11.2016 | ||
SI | 16.11.2016 | ||
SK | 16.11.2016 | ||
SM | 16.11.2016 | ||
BG | 16.02.2017 | ||
NO | 16.02.2017 | ||
GR | 17.02.2017 | ||
PT | 16.03.2017 | ||
CH | 31.07.2017 | ||
GB | 31.07.2017 | ||
IE | 31.07.2017 | ||
LI | 31.07.2017 | ||
LU | 31.07.2017 | ||
MT | 31.07.2017 | ||
Former [2019/46] | HU | 31.07.2009 | |
AT | 16.11.2016 | ||
BE | 16.11.2016 | ||
CY | 16.11.2016 | ||
CZ | 16.11.2016 | ||
DK | 16.11.2016 | ||
EE | 16.11.2016 | ||
ES | 16.11.2016 | ||
FI | 16.11.2016 | ||
HR | 16.11.2016 | ||
IT | 16.11.2016 | ||
LT | 16.11.2016 | ||
LV | 16.11.2016 | ||
MC | 16.11.2016 | ||
NL | 16.11.2016 | ||
PL | 16.11.2016 | ||
RO | 16.11.2016 | ||
SE | 16.11.2016 | ||
SI | 16.11.2016 | ||
SK | 16.11.2016 | ||
SM | 16.11.2016 | ||
BG | 16.02.2017 | ||
NO | 16.02.2017 | ||
GR | 17.02.2017 | ||
PT | 16.03.2017 | ||
CH | 31.07.2017 | ||
GB | 31.07.2017 | ||
IE | 31.07.2017 | ||
LI | 31.07.2017 | ||
LU | 31.07.2017 | ||
MT | 31.07.2017 | ||
Former [2019/31] | HU | 31.07.2009 | |
AT | 16.11.2016 | ||
BE | 16.11.2016 | ||
CZ | 16.11.2016 | ||
DK | 16.11.2016 | ||
EE | 16.11.2016 | ||
ES | 16.11.2016 | ||
FI | 16.11.2016 | ||
HR | 16.11.2016 | ||
IT | 16.11.2016 | ||
LT | 16.11.2016 | ||
LV | 16.11.2016 | ||
MC | 16.11.2016 | ||
NL | 16.11.2016 | ||
PL | 16.11.2016 | ||
RO | 16.11.2016 | ||
SE | 16.11.2016 | ||
SI | 16.11.2016 | ||
SK | 16.11.2016 | ||
SM | 16.11.2016 | ||
BG | 16.02.2017 | ||
NO | 16.02.2017 | ||
GR | 17.02.2017 | ||
PT | 16.03.2017 | ||
CH | 31.07.2017 | ||
GB | 31.07.2017 | ||
IE | 31.07.2017 | ||
LI | 31.07.2017 | ||
LU | 31.07.2017 | ||
MT | 31.07.2017 | ||
Former [2019/30] | AT | 16.11.2016 | |
BE | 16.11.2016 | ||
CZ | 16.11.2016 | ||
DK | 16.11.2016 | ||
EE | 16.11.2016 | ||
ES | 16.11.2016 | ||
FI | 16.11.2016 | ||
HR | 16.11.2016 | ||
IT | 16.11.2016 | ||
LT | 16.11.2016 | ||
LV | 16.11.2016 | ||
MC | 16.11.2016 | ||
NL | 16.11.2016 | ||
PL | 16.11.2016 | ||
RO | 16.11.2016 | ||
SE | 16.11.2016 | ||
SI | 16.11.2016 | ||
SK | 16.11.2016 | ||
SM | 16.11.2016 | ||
BG | 16.02.2017 | ||
NO | 16.02.2017 | ||
GR | 17.02.2017 | ||
PT | 16.03.2017 | ||
CH | 31.07.2017 | ||
GB | 31.07.2017 | ||
IE | 31.07.2017 | ||
LI | 31.07.2017 | ||
LU | 31.07.2017 | ||
MT | 31.07.2017 | ||
Former [2018/43] | AT | 16.11.2016 | |
BE | 16.11.2016 | ||
CZ | 16.11.2016 | ||
DK | 16.11.2016 | ||
EE | 16.11.2016 | ||
ES | 16.11.2016 | ||
FI | 16.11.2016 | ||
HR | 16.11.2016 | ||
IT | 16.11.2016 | ||
LT | 16.11.2016 | ||
LV | 16.11.2016 | ||
NL | 16.11.2016 | ||
PL | 16.11.2016 | ||
RO | 16.11.2016 | ||
SE | 16.11.2016 | ||
SI | 16.11.2016 | ||
SK | 16.11.2016 | ||
SM | 16.11.2016 | ||
BG | 16.02.2017 | ||
NO | 16.02.2017 | ||
GR | 17.02.2017 | ||
PT | 16.03.2017 | ||
CH | 31.07.2017 | ||
GB | 31.07.2017 | ||
IE | 31.07.2017 | ||
LI | 31.07.2017 | ||
LU | 31.07.2017 | ||
MT | 31.07.2017 | ||
Former [2018/34] | AT | 16.11.2016 | |
BE | 16.11.2016 | ||
CZ | 16.11.2016 | ||
DK | 16.11.2016 | ||
EE | 16.11.2016 | ||
ES | 16.11.2016 | ||
FI | 16.11.2016 | ||
HR | 16.11.2016 | ||
IT | 16.11.2016 | ||
LT | 16.11.2016 | ||
LV | 16.11.2016 | ||
NL | 16.11.2016 | ||
PL | 16.11.2016 | ||
RO | 16.11.2016 | ||
SE | 16.11.2016 | ||
SI | 16.11.2016 | ||
SK | 16.11.2016 | ||
SM | 16.11.2016 | ||
BG | 16.02.2017 | ||
NO | 16.02.2017 | ||
GR | 17.02.2017 | ||
PT | 16.03.2017 | ||
CH | 31.07.2017 | ||
GB | 31.07.2017 | ||
IE | 31.07.2017 | ||
LI | 31.07.2017 | ||
LU | 31.07.2017 | ||
Former [2018/21] | AT | 16.11.2016 | |
BE | 16.11.2016 | ||
CZ | 16.11.2016 | ||
DK | 16.11.2016 | ||
EE | 16.11.2016 | ||
ES | 16.11.2016 | ||
FI | 16.11.2016 | ||
HR | 16.11.2016 | ||
IT | 16.11.2016 | ||
LT | 16.11.2016 | ||
LV | 16.11.2016 | ||
NL | 16.11.2016 | ||
PL | 16.11.2016 | ||
RO | 16.11.2016 | ||
SE | 16.11.2016 | ||
SI | 16.11.2016 | ||
SK | 16.11.2016 | ||
SM | 16.11.2016 | ||
BG | 16.02.2017 | ||
NO | 16.02.2017 | ||
GR | 17.02.2017 | ||
PT | 16.03.2017 | ||
CH | 31.07.2017 | ||
GB | 31.07.2017 | ||
LI | 31.07.2017 | ||
Former [2017/52] | AT | 16.11.2016 | |
BE | 16.11.2016 | ||
CZ | 16.11.2016 | ||
DK | 16.11.2016 | ||
EE | 16.11.2016 | ||
ES | 16.11.2016 | ||
FI | 16.11.2016 | ||
HR | 16.11.2016 | ||
IT | 16.11.2016 | ||
LT | 16.11.2016 | ||
LV | 16.11.2016 | ||
NL | 16.11.2016 | ||
PL | 16.11.2016 | ||
RO | 16.11.2016 | ||
SE | 16.11.2016 | ||
SI | 16.11.2016 | ||
SK | 16.11.2016 | ||
SM | 16.11.2016 | ||
BG | 16.02.2017 | ||
NO | 16.02.2017 | ||
GR | 17.02.2017 | ||
PT | 16.03.2017 | ||
Former [2017/38] | AT | 16.11.2016 | |
BE | 16.11.2016 | ||
CZ | 16.11.2016 | ||
DK | 16.11.2016 | ||
EE | 16.11.2016 | ||
ES | 16.11.2016 | ||
FI | 16.11.2016 | ||
HR | 16.11.2016 | ||
IT | 16.11.2016 | ||
LT | 16.11.2016 | ||
LV | 16.11.2016 | ||
NL | 16.11.2016 | ||
PL | 16.11.2016 | ||
RO | 16.11.2016 | ||
SE | 16.11.2016 | ||
SK | 16.11.2016 | ||
SM | 16.11.2016 | ||
BG | 16.02.2017 | ||
NO | 16.02.2017 | ||
GR | 17.02.2017 | ||
PT | 16.03.2017 | ||
Former [2017/37] | AT | 16.11.2016 | |
BE | 16.11.2016 | ||
CZ | 16.11.2016 | ||
DK | 16.11.2016 | ||
EE | 16.11.2016 | ||
ES | 16.11.2016 | ||
FI | 16.11.2016 | ||
HR | 16.11.2016 | ||
IT | 16.11.2016 | ||
LT | 16.11.2016 | ||
LV | 16.11.2016 | ||
NL | 16.11.2016 | ||
PL | 16.11.2016 | ||
RO | 16.11.2016 | ||
SE | 16.11.2016 | ||
SK | 16.11.2016 | ||
SM | 16.11.2016 | ||
NO | 16.02.2017 | ||
GR | 17.02.2017 | ||
PT | 16.03.2017 | ||
Former [2017/36] | AT | 16.11.2016 | |
BE | 16.11.2016 | ||
CZ | 16.11.2016 | ||
DK | 16.11.2016 | ||
EE | 16.11.2016 | ||
ES | 16.11.2016 | ||
FI | 16.11.2016 | ||
HR | 16.11.2016 | ||
LT | 16.11.2016 | ||
LV | 16.11.2016 | ||
NL | 16.11.2016 | ||
PL | 16.11.2016 | ||
RO | 16.11.2016 | ||
SE | 16.11.2016 | ||
SK | 16.11.2016 | ||
NO | 16.02.2017 | ||
GR | 17.02.2017 | ||
PT | 16.03.2017 | ||
Former [2017/35] | AT | 16.11.2016 | |
CZ | 16.11.2016 | ||
DK | 16.11.2016 | ||
EE | 16.11.2016 | ||
ES | 16.11.2016 | ||
FI | 16.11.2016 | ||
HR | 16.11.2016 | ||
LT | 16.11.2016 | ||
LV | 16.11.2016 | ||
NL | 16.11.2016 | ||
PL | 16.11.2016 | ||
RO | 16.11.2016 | ||
SE | 16.11.2016 | ||
NO | 16.02.2017 | ||
GR | 17.02.2017 | ||
PT | 16.03.2017 | ||
Former [2017/33] | AT | 16.11.2016 | |
DK | 16.11.2016 | ||
ES | 16.11.2016 | ||
FI | 16.11.2016 | ||
HR | 16.11.2016 | ||
LT | 16.11.2016 | ||
LV | 16.11.2016 | ||
NL | 16.11.2016 | ||
PL | 16.11.2016 | ||
SE | 16.11.2016 | ||
NO | 16.02.2017 | ||
GR | 17.02.2017 | ||
PT | 16.03.2017 | ||
Former [2017/26] | AT | 16.11.2016 | |
ES | 16.11.2016 | ||
FI | 16.11.2016 | ||
HR | 16.11.2016 | ||
LT | 16.11.2016 | ||
LV | 16.11.2016 | ||
NL | 16.11.2016 | ||
PL | 16.11.2016 | ||
SE | 16.11.2016 | ||
NO | 16.02.2017 | ||
GR | 17.02.2017 | ||
PT | 16.03.2017 | ||
Former [2017/12] | LV | 16.11.2016 | Documents cited: | Search | [XI]US5744852 (LINN JACK H [US], et al) [X] 1-4,6,8 * column 3, line 9 - column 4, line 20; figures 1-4 * [I] 5,7,12; | [X]EP0975012 (CANON KK [JP]) [X] 9-11,13 * paragraph [0116] - paragraph [0127]; figures 7a-7f *; | [A]US2004110395 (UEDA TETSUZO [JP], et al) [A] 1-13 * paragraph [0059] - paragraph [0136]; figures 1a-7d * | by applicant | JP2007270125 | WO2004059720 | JP2006522461 | WO2005053009 | JP2005216895 | JP2007324283 | JP2007314778 | US6268457 | JP2004311532 | JP2004269693 | JP2004292643 | JP2008019423 | JPH0971654C |