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Extract from the Register of European Patents

EP About this file: EP2113805

EP2113805 - Laser irradiation method, laser irradiation apparatus and method for manufacturing crystalline semiconductor film [Right-click to bookmark this link]
Former [2009/45]Laser irradiation apparatus and laser irradiation method
[2010/10]
StatusNo opposition filed within time limit
Status updated on  03.05.2013
Database last updated on 02.11.2024
Most recent event   Tooltip03.05.2013No opposition filed within time limitpublished on 05.06.2013  [2013/23]
Applicant(s)For all designated states
Semiconductor Energy Laboratory Co, Ltd.
398, Hase
Atsugi-shi, Kanagawa-ken 243-0036 / JP
[2009/45]
Inventor(s)01 / Tanaka, Koichiro
c/o Semiconductor Energy Laboratory Co., Ltd.
398, Hase
Atsugi-shi Kanagawa-ken 243-0036 / JP
02 / Oishi, Hirotada
c/o Semiconductor Energy Laboratory Co., Ltd.
398, Hase
Atsugi-shi Kanagawa-ken 243-0036 / JP
 [2012/26]
Former [2009/45]01 / Tanaka, Koichiro
c/o Semiconductor Energy Laboratory Co., Ltd. 398, Hase
Atsugi-shi Kanagawa-ken 243-0036 / JP
02 / Oishi, Hirotada
c/o Semiconductor Energy Laboratory Co., Ltd. 398, Hase
Atsugi-shi Kanagawa-ken 243-0036 / JP
Representative(s)Grünecker Patent- und Rechtsanwälte PartG mbB
Leopoldstraße 4
80802 München / DE
[N/P]
Former [2012/26]Grünecker, Kinkeldey, Stockmair & Schwanhäusser
Leopoldstrasse 4
80802 München / DE
Former [2009/45]Grünecker, Kinkeldey, Stockmair & Schwanhäusser Anwaltssozietät
Leopoldstrasse 4
80802 München / DE
Application number, filing date09010674.121.04.2005
[2009/45]
Priority number, dateJP2004014561214.05.2004         Original published format: JP 2004145612
[2009/45]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report 
No.:EP2113805
Date:04.11.2009
Language:EN
[2009/45]
Type: B1 Patent specification 
No.:EP2113805
Date:27.06.2012
Language:EN
[2012/26]
Search report(s)(Supplementary) European search report - dispatched on:EP28.09.2009
ClassificationIPC:B23K15/00, B23K15/10, B23K26/073, G02B27/09
[2012/04]
CPC:
B23K15/0093 (EP,US); B23K26/0608 (US); B23K15/10 (EP,US);
B23K26/0648 (US); B23K26/0732 (EP,US); B23K26/0738 (EP,US);
G02B27/0927 (EP,US); G02B27/0961 (EP,US); G02B27/0966 (EP,US);
G02B3/0062 (US); B23K2103/56 (EP,US) (-)
Former IPC [2009/45]G02B27/09, B23K26/073
Designated contracting statesDE,   FI,   FR,   GB,   NL [2009/45]
TitleGerman:Laserbestrahlungsmethode, Laserbestrahlungsvorrichtung und Verfahren zur Herstellung einer kristallinen Halbleiter-Schicht[2010/10]
English:Laser irradiation method, laser irradiation apparatus and method for manufacturing crystalline semiconductor film[2010/10]
French:Méthode et appareil d'irradiation par laser et méthode de fabrication d'un film cristallin semiconducteur[2010/10]
Former [2009/45]Laserbestrahlungsgerät und Laserbestrahlungsverfahren
Former [2009/45]Laser irradiation apparatus and laser irradiation method
Former [2009/45]Appareil et procédé d'irradiation laser
Examination procedure19.08.2009Examination requested  [2009/45]
25.05.2010Despatch of a communication from the examining division (Time limit: M04)
04.10.2010Reply to a communication from the examining division
17.06.2011Despatch of a communication from the examining division (Time limit: M04)
26.10.2011Reply to a communication from the examining division
26.01.2012Communication of intention to grant the patent
04.05.2012Fee for grant paid
04.05.2012Fee for publishing/printing paid
Parent application(s)   TooltipEP05008796.4  / EP1596241
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued (EP20050008796) is  28.04.2006
Opposition(s)28.03.2013No opposition filed within time limit [2013/23]
Fees paidRenewal fee
19.08.2009Renewal fee patent year 03
19.08.2009Renewal fee patent year 04
19.08.2009Renewal fee patent year 05
25.03.2010Renewal fee patent year 06
12.04.2011Renewal fee patent year 07
28.03.2012Renewal fee patent year 08
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipFI27.06.2012
NL27.06.2012
[2013/15]
Former [2012/48]FI27.06.2012
Documents cited:Search[XD]JPH10253916  ;
 [A]JPS61156218  (NEC CORP, et al) [A] * abstract *;
 [X]US4769750  (MATSUMOTO KOICHI [JP], et al) [X] 1,6 * figure - * * column 1, line 12 - column 2, line 51 * * column 5, line 42 - column 6, line 11 *;
 [A]US5153773  (MURAKI MASATO [JP], et al) [A] 1-11* figures 1,3A,3B *;
 [A]JP2000111714  (KONISHIROKU PHOTO IND) [A] 3 * abstract *;
 US6239913  [ ] (TANAKA KOICHIRO [JP]) [ ] * figures 4A,4B * * column 1, line 6 - line 54 * * column 4, line 1 - line 67 *;
 [A]US6373633  (BROWN DANIEL M [US]) [A] 1-11 * abstract * * column 1, line 11 - column 2, line 49 * * figures 1a-c,2a-c,3a,5a-c *;
 [X]WO03016963  (HENTZE LISSOTSCHENKO PATENTVER [DE], et al) [X] 1-11 * abstract * * figures 1c,2a-2c * * page 11 - page 13 *;
 [A]EP1400832  (SEMICONDUCTOR ENERGY LAB [JP]) [A] 1-11 * abstract * * figures 2A,2B * * paragraph [0035] - paragraph [0040] *
 [XD]  - PATENT ABSTRACTS OF JAPAN, (19981231), vol. 1998, no. 14, & JP10253916 A 19980925 (SEMICONDUCTOR ENERGY LAB CO LTD) [XD] 1,6 * abstract *
by applicantJPH10253916
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.