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Extract from the Register of European Patents

EP About this file: EP2146246

EP2146246 - Negative resist composition and patterning process [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  04.07.2014
Database last updated on 16.09.2024
Most recent event   Tooltip04.07.2014No opposition filed within time limitpublished on 06.08.2014  [2014/32]
Applicant(s)For all designated states
Shin-Etsu Chemical Co., Ltd.
6-1, Ohtemachi 2-chome
Chiyoda-ku
Tokyo / JP
[2013/35]
Former [2010/03]For all designated states
Shin-Etsu Chemical Co., Ltd.
6-1 Ohtemachi 2-chome Chiyoda-ku
Tokyo / JP
Inventor(s)01 / Takeda, Takanobu
c/o New Functional Materials Research Centre
Shin-Etsu Chemical Co., Ltd.
28-1 Nishi Fukushima
Kubiki-ku
Joetsu-shi, Niigata-ken / JP
02 / Watanabe, Osamu
c/o New Functional Materials Research Centre
Shin-Etsu Chemical Co., Ltd.
28-1 Nishi Fukushima
Kubiki-ku
Joetsu-shi, Niigata-ken / JP
03 / Watanabe, Satoshi
c/o New Functional Materials Research Centre
Shin-Etsu Chemical Co., Ltd.
28-1 Nishi Fukushima
Kubiki-ku
Joetsu-shi, Niigata-ken / JP
04 / Koitabashi, Ryuji
c/o New Functional Materials Research Centre
Shin-Etsu Chemical Co., Ltd.
28-1 Nishi Fukushima
Kubiki-ku
Joetsu-shi, Niigata-ken / JP
05 / Watanabe, Tamotsu
c/o New Functional Materials Research Centre
Shin-Etsu Chemical Co., Ltd.
28-1 Nishi Fukushima
Kubiki-ku
Joetsu-shi, Niigata-ken / JP
 [2013/35]
Former [2010/03]01 / Takeda, Takanobu
c/o New Functional Materials Research Centre, Shin-Etsu Chemical Co., Ltd., 28-1 Nishi Fukushima, Kubiki-ku
Joetsu-shi, Niigata-ken / JP
02 / Watanabe, Osamu
c/o New Functional Materials Research Centre, Shin-Etsu Chemical Co., Ltd., 28-1 Nishi Fukushima, Kubiki-ku
Joetsu-shi, Niigata-ken / JP
03 / Watanabe, Satoshi
c/o New Functional Materials Research Centre, Shin-Etsu Chemical Co., Ltd., 28-1 Nishi Fukushima, Kubiki-ku
Joetsu-shi, Niigata-ken / JP
04 / Koitabashi, Ryuji
c/o New Functional Materials Research Centre, Shin-Etsu Chemical Co., Ltd., 28-1 Nishi Fukushima, Kubiki-ku
Joetsu-shi, Niigata-ken / JP
05 / Watanabe, Tamotsu
c/o New Functional Materials Research Centre, Shin-Etsu Chemical Co., Ltd., 28-1 Nishi Fukushima, Kubiki-ku
Joetsu-shi, Niigata-ken / JP
Representative(s)Stoner, Gerard Patrick, et al
Mewburn Ellis LLP
City Tower
40 Basinghall Street
London EC2V 5DE / GB
[N/P]
Former [2013/35]Stoner, Gerard Patrick, et al
Mewburn Ellis LLP
33 Gutter Lane
London
EC2V 8AS / GB
Former [2010/03]Stoner, Gerard Patrick, et al
Mewburn Ellis LLP 33 Gutter Lane London
EC2V 8AS / GB
Application number, filing date09011118.826.10.2006
[2010/03]
Priority number, dateJP2005033313517.11.2005         Original published format: JP 2005333135
[2010/03]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report 
No.:EP2146246
Date:20.01.2010
Language:EN
[2010/03]
Type: B1 Patent specification 
No.:EP2146246
Date:28.08.2013
Language:EN
[2013/35]
Search report(s)(Supplementary) European search report - dispatched on:EP16.12.2009
ClassificationIPC:G03F7/038
[2010/03]
CPC:
G03F7/0382 (EP,KR,US); G03F7/0045 (KR)
Designated contracting statesDE,   FR,   GB [2010/03]
TitleGerman:Negativ arbeitende Resist-Zusammensetzung und Bildaufzeichnungsverfahren[2010/03]
English:Negative resist composition and patterning process[2010/03]
French:Composition pour réserve de type négatif et procédé d'enregistrement d'images[2010/03]
Examination procedure23.02.2010Examination requested  [2010/14]
31.03.2010Amendment by applicant (claims and/or description)
04.09.2012Despatch of a communication from the examining division (Time limit: M04)
17.12.2012Reply to a communication from the examining division
11.04.2013Communication of intention to grant the patent
16.07.2013Fee for grant paid
16.07.2013Fee for publishing/printing paid
Parent application(s)   TooltipEP06255530.5  / EP1791025
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued (EP20060255530) is  24.07.2012
Opposition(s)30.05.2014No opposition filed within time limit [2014/32]
Fees paidRenewal fee
16.09.2009Renewal fee patent year 03
16.09.2009Renewal fee patent year 04
12.10.2010Renewal fee patent year 05
11.10.2011Renewal fee patent year 06
11.10.2012Renewal fee patent year 07
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:Search[XA]JPH1016423  (FUJI PHOTO FILM CO LTD) [X] 10 * page 22, resin BP-6 * * page 26; example 10; table 3 * [A] 1-9;
 [XI]JP2001174994  (FUJI PHOTO FILM CO LTD) [X] 10 * page 24, table 1, example 1-16 * * page 28, resin P-16 * [I] 1-9;
 [X]EP1285751  (FUJI PHOTO FILM CO LTD [JP]) [X] 12 * page 34 ** page 39; example 1; table 4 *;
 [XA]JP2003295437  (FUJI PHOTO FILM CO LTD) [X] 10 * page 62, resin GP-5 * * page 67, table 1, example 5 * [A] 1-9;
 [XA]JP2004101811  (FUJI PHOTO FILM CO LTD) [X] 10,12 * page 85; example 1; table 1 * * page 86, resin P-1 * [A] 1-9;
 [A]US6861198  (TAKEDA TAKANOBU [JP], et al) [A] 11 * claim - *
by applicantUS4491628
 JPS6327829
 JPH0227660B
 US5310619
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.