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EP2141739
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EP About this file: EP2141739
| EP2141739 - System and method for substrate transport [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 12.12.2014 Database last updated on 20.12.2024 | Most recent event Tooltip | 12.12.2014 | Application deemed to be withdrawn | published on 14.01.2015 [2015/03] | Applicant(s) | For all designated states Intevac, Inc. 3560 Bassett Street Santa Clara, CA 95054 / US | [2010/01] | Inventor(s) | 01 /
Scollay, Stuart 1319 Coniston Court San Jose, CA 95118 / US | 02 /
Bluck, Terry 3128 Butte Street Santa Clara, CA 95051 / US | 03 /
Chen, Xiang BLK275A, No. 14-117 Jurong West Street 25 641275, Singapore / SG | [2010/01] | Representative(s) | Puschmann Borchert Kaiser Klettner Patentanwälte Partnerschaft mbB Postfach 10 12 31 80086 München / DE | [N/P] |
| Former [2014/28] | Puschmann Borchert Bardehle Patentanwälte Partnerschaft mbB Postfach 10 12 31 80086 München / DE | ||
| Former [2010/01] | Kirschner, Klaus Dieter, et al Puschmann Borchert Bardehle Patentanwälte Partnerschaft Bajuwarenring 21 82041 Oberhaching / DE | Application number, filing date | 09164187.8 | 30.06.2009 | [2010/01] | Priority number, date | US20080077067P | 30.06.2008 Original published format: US 77067 P | US20080084600P | 29.07.2008 Original published format: US 84600 P | [2010/01] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP2141739 | Date: | 06.01.2010 | Language: | EN | [2010/01] | Type: | A3 Search report | No.: | EP2141739 | Date: | 12.01.2011 | [2011/02] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 10.12.2010 | Classification | IPC: | H01L21/677, H01L21/67, H01L21/673 | [2014/10] | CPC: |
H01L21/67173 (EP,US);
H01L21/67313 (EP,US);
H01L21/67775 (EP,US);
H01L21/67781 (EP,US);
Y10S414/14 (EP,US)
|
| Former IPC [2011/02] | H01L21/677, H01L21/00 | ||
| Former IPC [2010/01] | H01L21/677 | Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR [2010/01] | Extension states | AL | Not yet paid | BA | Not yet paid | RS | Not yet paid | Title | German: | System und Verfahren für den Substrattransport | [2010/01] | English: | System and method for substrate transport | [2010/01] | French: | Système et procédé pour transport de substrat | [2010/01] | Examination procedure | 08.03.2011 | Amendment by applicant (claims and/or description) | 22.03.2011 | Examination requested [2011/18] | 07.03.2014 | Communication of intention to grant the patent | 18.07.2014 | Application deemed to be withdrawn, date of legal effect [2015/03] | 28.08.2014 | Despatch of communication that the application is deemed to be withdrawn, reason: fee for grant / fee for printing not paid in time [2015/03] | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 07.03.2014 | Fees paid | Renewal fee | 13.06.2011 | Renewal fee patent year 03 | 14.06.2012 | Renewal fee patent year 04 | 10.06.2013 | Renewal fee patent year 05 | Penalty fee | Additional fee for renewal fee | 30.06.2014 | 06 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [XDY]US6319373 (TAKEYAMA TERUSHIGE [JP], et al) [XD] 9-15 * column 7, line 50 - column 10, line 46; figure 2 * [Y] 1-8; | [YA]JP2004179567 (NIKON CORP) [Y] 1-8 * abstract * [A] 9,13; | [XA]EP1526565 (APPLIED MATERIALS INC [US]) [X] 9 * abstract * [A] 1,13; | [A]US2002026984 (MARXER ALEXANDER [LI], et al) [A] 1,3-6,9,13 * paragraph [0059]; figure 6 * | by applicant | US6919001 | US6319373 | US5844195 | JP2004179567 |