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Extract from the Register of European Patents

EP About this file: EP2243047

EP2243047 - FACET MIRROR FOR USE IN A PROJECTION EXPOSURE APPARATUS FOR MICROLITHOGRAPHY [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  04.02.2022
Database last updated on 16.11.2024
FormerThe patent has been granted
Status updated on  26.02.2021
FormerGrant of patent is intended
Status updated on  13.01.2021
FormerExamination is in progress
Status updated on  20.11.2020
FormerGrant of patent is intended
Status updated on  28.07.2020
FormerExamination is in progress
Status updated on  16.12.2016
Most recent event   Tooltip06.09.2024Lapse of the patent in a contracting state
New state(s): MT		published on 09.10.2024  [2024/41]
Applicant(s)For all designated states
Carl Zeiss SMT GmbH
Rudolf-Eber-Strasse 2
73447 Oberkochen / DE
[2011/10]
Former [2010/43]For all designated states
Carl Zeiss SMT AG
Rudolf-Eber-Strasse 2
73447 Oberkochen / DE
Inventor(s)01 / DINGER, Udo
Heinz-Küppenbender-Strasse 4
73447 Oberkochen / DE
02 / ENDRES, Martin
Goethestrasse 3
89551 Königsbronn / DE
03 / WERBER, Armin
Thielstrasse 29
79288 Gottenheim / DE
04 / MÜHLBERGER, Norbert
Württembergerstrasse 21
73432 Aalen-Ebnat / DE
05 / BACH, Florian
Jenaer Strasse 31
73447 Oberkochen / DE
 [2010/43]
Representative(s)Rau, Schneck & Hübner Patentanwälte Rechtsanwälte PartGmbB
Königstraße 2
90402 Nürnberg / DE
[2021/13]
Former [2010/43]Rau, Schneck & Hübner
Patentanwälte - Rechtsanwälte Königstraße 2
90402 Nürnberg / DE
Application number, filing date09709960.006.02.2009
[2010/43]
WO2009EP00825
Priority number, dateDE2008100960015.02.2008         Original published format: DE102008009600
US20080028931P15.02.2008         Original published format: US 28931 P
DE2009100009909.01.2009         Original published format: DE102009000099
US20090143456P09.01.2009         Original published format: US 143456 P
[2010/43]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2009100856
Date:20.08.2009
Language:EN
[2009/34]
Type: A1 Application with search report 
No.:EP2243047
Date:27.10.2010
Language:EN
The application published by WIPO in one of the EPO official languages on 20.08.2009 takes the place of the publication of the European patent application.
[2010/43]
Type: B1 Patent specification 
No.:EP2243047
Date:31.03.2021
Language:EN
[2021/13]
Search report(s)International search report - published on:EP20.08.2009
ClassificationIPC:G02B5/09, G03F7/20
[2010/43]
CPC:
G02B26/06 (EP,US); G03F7/702 (US); G02B26/0816 (US);
G02B26/0833 (EP,US); G02B27/0927 (US); G02B5/09 (US);
G03F7/70075 (EP,US); G03F7/70116 (EP,US) (-)
Designated contracting statesAT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   SE,   SI,   SK,   TR [2021/13]
Former [2010/43]AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HR,  HU,  IE,  IS,  IT,  LI,  LT,  LU,  LV,  MC,  MK,  MT,  NL,  NO,  PL,  PT,  RO,  SE,  SI,  SK,  TR 
TitleGerman:FACETTENSPIEGEL ZUR VERWENDUNG IN EINER PROJEKTIONSBELICHTUNGSVORRICHTUNG FÜR DIE MIKROLITHOGRAFIE[2010/43]
English:FACET MIRROR FOR USE IN A PROJECTION EXPOSURE APPARATUS FOR MICROLITHOGRAPHY[2010/43]
French:MIROIR À FACETTES DESTINÉ À ÊTRE UTILISÉ DANS UN APPAREIL D'EXPOSITION PAR PROJECTION POUR UNE MICROLITHOGRAPHIE[2010/43]
Entry into regional phase12.08.2010National basic fee paid 
12.08.2010Designation fee(s) paid 
12.08.2010Examination fee paid 
Examination procedure12.08.2010Amendment by applicant (claims and/or description)
12.08.2010Examination requested  [2010/43]
19.12.2016Despatch of a communication from the examining division (Time limit: M06)
27.06.2017Reply to a communication from the examining division
09.02.2018Despatch of a communication from the examining division (Time limit: M04)
19.06.2018Reply to a communication from the examining division
08.01.2019Despatch of a communication from the examining division (Time limit: M06)
18.07.2019Reply to a communication from the examining division
27.03.2020Cancellation of oral proceeding that was planned for 22.04.2020
07.04.2020Despatch of a communication from the examining division (Time limit: M02)
22.04.2020Date of oral proceedings (cancelled)
16.06.2020Reply to a communication from the examining division
29.07.2020Communication of intention to grant the patent
19.11.2020Disapproval of the communication of intention to grant the patent by the applicant or resumption of examination proceedings by the EPO
19.11.2020Fee for grant paid
19.11.2020Fee for publishing/printing paid
21.01.2021Communication of intention to grant the patent
17.02.2021Receipt of the translation of the claim(s)
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  19.12.2016
Opposition(s)04.01.2022No opposition filed within time limit [2022/10]
Fees paidRenewal fee
22.02.2011Renewal fee patent year 03
22.02.2012Renewal fee patent year 04
21.02.2013Renewal fee patent year 05
20.02.2014Renewal fee patent year 06
23.02.2015Renewal fee patent year 07
22.02.2016Renewal fee patent year 08
17.02.2017Renewal fee patent year 09
22.02.2018Renewal fee patent year 10
21.02.2019Renewal fee patent year 11
24.02.2020Renewal fee patent year 12
22.02.2021Renewal fee patent year 13
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU06.02.2009
AT31.03.2021
CY31.03.2021
CZ31.03.2021
DK31.03.2021
EE31.03.2021
ES31.03.2021
FI31.03.2021
HR31.03.2021
IT31.03.2021
LT31.03.2021
LV31.03.2021
MC31.03.2021
MK31.03.2021
MT31.03.2021
PL31.03.2021
RO31.03.2021
SE31.03.2021
SI31.03.2021
SK31.03.2021
TR31.03.2021
BG30.06.2021
NO30.06.2021
IS31.07.2021
PT02.08.2021
[2024/41]
Former [2024/29]HU06.02.2009
AT31.03.2021
CY31.03.2021
CZ31.03.2021
DK31.03.2021
EE31.03.2021
ES31.03.2021
FI31.03.2021
HR31.03.2021
IT31.03.2021
LT31.03.2021
LV31.03.2021
MC31.03.2021
MK31.03.2021
PL31.03.2021
RO31.03.2021
SE31.03.2021
SI31.03.2021
SK31.03.2021
TR31.03.2021
BG30.06.2021
NO30.06.2021
IS31.07.2021
PT02.08.2021
Former [2024/22]HU06.02.2009
AT31.03.2021
CY31.03.2021
CZ31.03.2021
DK31.03.2021
EE31.03.2021
ES31.03.2021
FI31.03.2021
HR31.03.2021
IT31.03.2021
LT31.03.2021
LV31.03.2021
MC31.03.2021
MK31.03.2021
PL31.03.2021
RO31.03.2021
SE31.03.2021
SI31.03.2021
SK31.03.2021
BG30.06.2021
NO30.06.2021
IS31.07.2021
PT02.08.2021
Former [2024/20]HU06.02.2009
AT31.03.2021
CY31.03.2021
CZ31.03.2021
DK31.03.2021
EE31.03.2021
ES31.03.2021
FI31.03.2021
HR31.03.2021
IT31.03.2021
LT31.03.2021
LV31.03.2021
MC31.03.2021
PL31.03.2021
RO31.03.2021
SE31.03.2021
SI31.03.2021
SK31.03.2021
BG30.06.2021
NO30.06.2021
IS31.07.2021
PT02.08.2021
Former [2024/18]HU06.02.2009
AT31.03.2021
CZ31.03.2021
DK31.03.2021
EE31.03.2021
ES31.03.2021
FI31.03.2021
HR31.03.2021
IT31.03.2021
LT31.03.2021
LV31.03.2021
MC31.03.2021
PL31.03.2021
RO31.03.2021
SE31.03.2021
SI31.03.2021
SK31.03.2021
BG30.06.2021
NO30.06.2021
IS31.07.2021
PT02.08.2021
Former [2022/44]AT31.03.2021
CZ31.03.2021
DK31.03.2021
EE31.03.2021
ES31.03.2021
FI31.03.2021
HR31.03.2021
IT31.03.2021
LT31.03.2021
LV31.03.2021
MC31.03.2021
PL31.03.2021
RO31.03.2021
SE31.03.2021
SI31.03.2021
SK31.03.2021
BG30.06.2021
NO30.06.2021
IS31.07.2021
PT02.08.2021
Former [2022/36]AT31.03.2021
CZ31.03.2021
DK31.03.2021
EE31.03.2021
ES31.03.2021
FI31.03.2021
HR31.03.2021
IT31.03.2021
LT31.03.2021
LV31.03.2021
PL31.03.2021
RO31.03.2021
SE31.03.2021
SI31.03.2021
SK31.03.2021
BG30.06.2021
NO30.06.2021
IS31.07.2021
PT02.08.2021
Former [2022/29]AT31.03.2021
CZ31.03.2021
DK31.03.2021
EE31.03.2021
ES31.03.2021
FI31.03.2021
HR31.03.2021
LT31.03.2021
LV31.03.2021
PL31.03.2021
RO31.03.2021
SE31.03.2021
SI31.03.2021
SK31.03.2021
BG30.06.2021
NO30.06.2021
IS31.07.2021
PT02.08.2021
Former [2022/23]AT31.03.2021
CZ31.03.2021
DK31.03.2021
EE31.03.2021
ES31.03.2021
FI31.03.2021
HR31.03.2021
LT31.03.2021
LV31.03.2021
PL31.03.2021
RO31.03.2021
SE31.03.2021
SK31.03.2021
BG30.06.2021
NO30.06.2021
IS31.07.2021
PT02.08.2021
Former [2022/10]AT31.03.2021
CZ31.03.2021
DK31.03.2021
EE31.03.2021
ES31.03.2021
FI31.03.2021
HR31.03.2021
LT31.03.2021
LV31.03.2021
PL31.03.2021
RO31.03.2021
SE31.03.2021
SK31.03.2021
BG30.06.2021
NO30.06.2021
PT02.08.2021
IS23.12.2021
Former [2022/08]AT31.03.2021
CZ31.03.2021
DK31.03.2021
EE31.03.2021
ES31.03.2021
FI31.03.2021
HR31.03.2021
LT31.03.2021
LV31.03.2021
PL31.03.2021
RO31.03.2021
SE31.03.2021
SK31.03.2021
BG30.06.2021
NO30.06.2021
IS31.07.2021
PT02.08.2021
Former [2021/52]AT31.03.2021
CZ31.03.2021
EE31.03.2021
ES31.03.2021
FI31.03.2021
HR31.03.2021
LT31.03.2021
LV31.03.2021
PL31.03.2021
RO31.03.2021
SE31.03.2021
SK31.03.2021
BG30.06.2021
NO30.06.2021
IS31.07.2021
PT02.08.2021
Former [2021/51]AT31.03.2021
CZ31.03.2021
EE31.03.2021
ES31.03.2021
FI31.03.2021
HR31.03.2021
LT31.03.2021
LV31.03.2021
RO31.03.2021
SE31.03.2021
SK31.03.2021
BG30.06.2021
NO30.06.2021
IS31.07.2021
PT02.08.2021
Former [2021/50]AT31.03.2021
CZ31.03.2021
EE31.03.2021
FI31.03.2021
HR31.03.2021
LT31.03.2021
LV31.03.2021
RO31.03.2021
SE31.03.2021
SK31.03.2021
BG30.06.2021
NO30.06.2021
PT02.08.2021
Former [2021/48]AT31.03.2021
CZ31.03.2021
EE31.03.2021
FI31.03.2021
HR31.03.2021
LT31.03.2021
LV31.03.2021
SE31.03.2021
BG30.06.2021
NO30.06.2021
Former [2021/46]AT31.03.2021
FI31.03.2021
HR31.03.2021
LT31.03.2021
LV31.03.2021
SE31.03.2021
BG30.06.2021
NO30.06.2021
Former [2021/38]FI31.03.2021
HR31.03.2021
LV31.03.2021
SE31.03.2021
BG30.06.2021
NO30.06.2021
Former [2021/36]FI31.03.2021
HR31.03.2021
BG30.06.2021
NO30.06.2021
Former [2021/35]FI31.03.2021
HR31.03.2021
NO30.06.2021
Former [2021/33]FI31.03.2021
NO30.06.2021
Cited inInternational search[XY]US2002136351  (SINGER WOLFGANG [DE]);
 [A]US2003012333  (SCHULTZ JORG [DE], et al);
 [Y]US2003227606  (SWEATT WILLIAM C [US]);
 [Y]US2006132747  (SINGER WOLFGANG [DE], et al)
ExaminationUS6977718
 DE102006036064
by applicantEP1225481
 US6438299
 US6438199
 EP1289273
 US6658084
 US6859515
 US7061582
 US2006132747
 DE102006036064
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.