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EP2312617
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EP About this file: EP2312617
| EP2312617 - VACUUM PROCESSING DEVICE AND GAS SUPPLY METHOD [Right-click to bookmark this link] | Status | The application has been withdrawn Status updated on 06.06.2014 Database last updated on 02.11.2024 | Most recent event Tooltip | 06.06.2014 | Withdrawal of application | published on 09.07.2014 [2014/28] | Applicant(s) | For all designated states Sharp Kabushiki Kaisha 22-22, Nagaike-cho Abeno-ku Osaka-shi, Osaka 545-8522 / JP | [N/P] |
| Former [2011/16] | For all designated states Sharp Kabushiki Kaisha 22-22, Nagaike-cho Abeno-ku Osaka-shi, Osaka 545-8522 / JP | Inventor(s) | 01 /
KISHIMOTO, Katsushi SHARP Kabushiki Kaisha 22-22 Nagaike-cho Abeno-ku Osaka-shi Osaka 545-8522 / JP | 02 /
NISHI, Yutaka SHARP Kabushiki Kaisha 22-22 Nagaike-cho Abeno-ku Osaka-shi Osaka 545-8522 / JP | [2011/16] | Representative(s) | Müller Hoffmann & Partner Patentanwälte mbB St.-Martin-Straße 58 81541 München / DE | [N/P] |
| Former [2011/16] | Müller - Hoffmann & Partner Patentanwälte Innere Wiener Strasse 17 81667 München / DE | Application number, filing date | 09773427.1 | 29.06.2009 | [2011/16] | WO2009JP61834 | Priority number, date | JP20080176045 | 04.07.2008 Original published format: JP 2008176045 | [2011/16] | Filing language | JA | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2010001849 | Date: | 07.01.2010 | Language: | JA | [2010/01] | Type: | A1 Application with search report | No.: | EP2312617 | Date: | 20.04.2011 | Language: | EN | [2011/16] | Search report(s) | International search report - published on: | JP | 07.01.2010 | (Supplementary) European search report - dispatched on: | EP | 07.11.2012 | Classification | IPC: | H01L21/67, C23C16/455, C23C16/52, C23C16/44 | [2012/49] | CPC: |
C23C16/4408 (EP,US);
C23C16/45561 (EP,US);
C23C16/52 (EP,US);
H01L21/67017 (EP,US);
Y10T137/0379 (EP,US);
Y10T137/7761 (EP,US)
|
| Former IPC [2011/16] | H01L21/205, C23C16/448, H01L21/31 | Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR [2011/16] | Title | German: | UNTERDRUCKVERARBEITUNGSEINRICHTUNG UND GASVERSORGUNGSVERFAHREN | [2011/16] | English: | VACUUM PROCESSING DEVICE AND GAS SUPPLY METHOD | [2011/16] | French: | DISPOSITIF DE TRAITEMENT SOUS VIDE ET PROCÉDÉ D'ALIMENTATION EN GAZ | [2011/16] | Entry into regional phase | 03.02.2011 | Translation filed | 03.02.2011 | National basic fee paid | 03.02.2011 | Search fee paid | 03.02.2011 | Designation fee(s) paid | 03.02.2011 | Examination fee paid | Examination procedure | 03.02.2011 | Examination requested [2011/16] | 24.05.2013 | Amendment by applicant (claims and/or description) | 02.06.2014 | Application withdrawn by applicant [2014/28] | Fees paid | Renewal fee | 29.06.2011 | Renewal fee patent year 03 | 31.03.2012 | Renewal fee patent year 04 | 26.06.2013 | Renewal fee patent year 05 | 31.03.2014 | Renewal fee patent year 06 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [XDA]JP2003031507 (CANON KK) [XD] 1 * figures 2,4,5 *[A] 5 | International search | [A]JPH09909 (KOKUSAI ELECTRIC CO LTD, et al); | [X]JPH101776 (CANON KK); | [A]JP2002222770 (CANON KK); | [A]JP2005216982 (KANSAI NIPPON ELECTRIC) | by applicant | JP2003031507 |