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Extract from the Register of European Patents

EP About this file: EP2351076

EP2351076 - METHOD AND APPARATUS FOR WAFER BONDING WITH ENHANCED WAFER MATING [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  04.08.2017
Database last updated on 03.01.2025
Most recent event   Tooltip21.09.2018Lapse of the patent in a contracting state
New state(s): MT		published on 24.10.2018  [2018/43]
Applicant(s)For all designated states
Suss MicroTec Lithography GmbH
Schleißheimer Straße 90
85748 Garching / DE
[2015/41]
Former [2011/31]For all designated states
Süss MicroTec Lithography GmbH
Schleissheimer Strasse 90
85748 Garching / DE
Inventor(s)01 / GEORGE, Gregory
c/o Suss Microtec Inc.
430 Indio Way
Sunnyvale, CA 94085 / US
 [2016/39]
Former [2011/31]01 / GEORGE, Gregory
c/o Suss Microtec Inc. 430 Indio Way
Sunnyvale, CA 94085 / US
Representative(s)Prinz & Partner mbB
Patent- und Rechtsanwälte
Rundfunkplatz 2
80335 München / DE
[2016/39]
Former [2011/31]Vossius & Partner
Siebertstrasse 4
81675 München / DE
Application number, filing date09826887.316.11.2009
[2011/31]
WO2009US64509
Priority number, dateUS20080115101P16.11.2008         Original published format: US 115101 P
US2009061884616.11.2009         Original published format: US 618846
[2011/31]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report
No.:WO2010057068
Date:20.05.2010
Language:EN
[2010/20]
Type: A2 Application without search report 
No.:EP2351076
Date:03.08.2011
Language:EN
The application published by WIPO in one of the EPO official languages on 20.05.2010 takes the place of the publication of the European patent application.
[2011/31]
Type: B1 Patent specification 
No.:EP2351076
Date:28.09.2016
Language:EN
[2016/39]
Search report(s)International search report - published on:KR12.08.2010
(Supplementary) European search report - dispatched on:EP05.04.2012
ClassificationIPC:H01L23/12, H01L21/20, B81B7/00, H01L21/67, H01L21/18
[2012/19]
CPC:
H01L21/67092 (EP,US); H01L21/30 (KR); B81B7/00 (KR);
H01L21/187 (EP,US); H01L23/12 (KR); Y10T29/49131 (EP,US)
Former IPC [2011/31]H01L23/12, H01L21/20, B81B7/00
Designated contracting statesAT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   SE,   SI,   SK,   SM,   TR [2016/39]
Former [2011/31]AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HR,  HU,  IE,  IS,  IT,  LI,  LT,  LU,  LV,  MC,  MK,  MT,  NL,  NO,  PL,  PT,  RO,  SE,  SI,  SK,  SM,  TR 
Extension statesALNot yet paid
BANot yet paid
RSNot yet paid
TitleGerman:VERFAHREN UND VORRICHTUNG ZUR WAFERBONDUNG MIT VERBESSERTER WAFERVERBINDUNG[2011/31]
English:METHOD AND APPARATUS FOR WAFER BONDING WITH ENHANCED WAFER MATING[2011/31]
French:PROCÉDÉ ET APPAREIL DE LIAISON DE PLAQUETTE À CONNEXION DE PLAQUETTE AMÉLIORÉE[2011/31]
Entry into regional phase12.05.2011National basic fee paid 
12.05.2011Search fee paid 
12.05.2011Designation fee(s) paid 
12.05.2011Examination fee paid 
Examination procedure12.05.2011Examination requested  [2011/31]
05.11.2012Amendment by applicant (claims and/or description)
25.04.2016Communication of intention to grant the patent
16.08.2016Fee for grant paid
16.08.2016Fee for publishing/printing paid
16.08.2016Receipt of the translation of the claim(s)
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  25.04.2016
Opposition(s)29.06.2017No opposition filed within time limit [2017/36]
Fees paidRenewal fee
23.11.2011Renewal fee patent year 03
23.11.2012Renewal fee patent year 04
25.11.2013Renewal fee patent year 05
24.11.2014Renewal fee patent year 06
30.11.2015Renewal fee patent year 07
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU16.11.2009
BE28.09.2016
CY28.09.2016
CZ28.09.2016
DK28.09.2016
EE28.09.2016
ES28.09.2016
FI28.09.2016
HR28.09.2016
IT28.09.2016
LT28.09.2016
LV28.09.2016
MC28.09.2016
MK28.09.2016
NL28.09.2016
PL28.09.2016
RO28.09.2016
SE28.09.2016
SI28.09.2016
SK28.09.2016
SM28.09.2016
TR28.09.2016
IE16.11.2016
MT16.11.2016
CH30.11.2016
FR30.11.2016
LI30.11.2016
LU30.11.2016
BG28.12.2016
GB28.12.2016
NO28.12.2016
GR29.12.2016
IS28.01.2017
PT30.01.2017
[2018/43]
Former [2018/29]HU16.11.2009
BE28.09.2016
CY28.09.2016
CZ28.09.2016
DK28.09.2016
EE28.09.2016
ES28.09.2016
FI28.09.2016
HR28.09.2016
IT28.09.2016
LT28.09.2016
LV28.09.2016
MC28.09.2016
MK28.09.2016
NL28.09.2016
PL28.09.2016
RO28.09.2016
SE28.09.2016
SI28.09.2016
SK28.09.2016
SM28.09.2016
TR28.09.2016
IE16.11.2016
CH30.11.2016
FR30.11.2016
LI30.11.2016
LU30.11.2016
BG28.12.2016
GB28.12.2016
NO28.12.2016
GR29.12.2016
IS28.01.2017
PT30.01.2017
Former [2018/28]HU16.11.2009
BE28.09.2016
CY28.09.2016
CZ28.09.2016
DK28.09.2016
EE28.09.2016
ES28.09.2016
FI28.09.2016
HR28.09.2016
IT28.09.2016
LT28.09.2016
LV28.09.2016
MC28.09.2016
MK28.09.2016
NL28.09.2016
PL28.09.2016
RO28.09.2016
SE28.09.2016
SI28.09.2016
SK28.09.2016
SM28.09.2016
IE16.11.2016
CH30.11.2016
FR30.11.2016
LI30.11.2016
LU30.11.2016
BG28.12.2016
GB28.12.2016
NO28.12.2016
GR29.12.2016
IS28.01.2017
PT30.01.2017
Former [2017/51]BE28.09.2016
CZ28.09.2016
DK28.09.2016
EE28.09.2016
ES28.09.2016
FI28.09.2016
HR28.09.2016
IT28.09.2016
LT28.09.2016
LV28.09.2016
NL28.09.2016
PL28.09.2016
RO28.09.2016
SE28.09.2016
SI28.09.2016
SK28.09.2016
SM28.09.2016
IE16.11.2016
CH30.11.2016
FR30.11.2016
LI30.11.2016
LU30.11.2016
BG28.12.2016
GB28.12.2016
NO28.12.2016
GR29.12.2016
IS28.01.2017
PT30.01.2017
Former [2017/50]BE28.09.2016
CZ28.09.2016
DK28.09.2016
EE28.09.2016
ES28.09.2016
FI28.09.2016
HR28.09.2016
IT28.09.2016
LT28.09.2016
LV28.09.2016
NL28.09.2016
PL28.09.2016
RO28.09.2016
SE28.09.2016
SI28.09.2016
SK28.09.2016
SM28.09.2016
IE16.11.2016
CH30.11.2016
FR30.11.2016
LI30.11.2016
LU30.11.2016
BG28.12.2016
NO28.12.2016
GR29.12.2016
IS28.01.2017
PT30.01.2017
Former [2017/43]BE28.09.2016
CZ28.09.2016
DK28.09.2016
EE28.09.2016
ES28.09.2016
FI28.09.2016
HR28.09.2016
IT28.09.2016
LT28.09.2016
LV28.09.2016
NL28.09.2016
PL28.09.2016
RO28.09.2016
SE28.09.2016
SK28.09.2016
SM28.09.2016
CH30.11.2016
LI30.11.2016
LU30.11.2016
BG28.12.2016
NO28.12.2016
GR29.12.2016
IS28.01.2017
PT30.01.2017
Former [2017/35]BE28.09.2016
CZ28.09.2016
DK28.09.2016
EE28.09.2016
ES28.09.2016
FI28.09.2016
HR28.09.2016
IT28.09.2016
LT28.09.2016
LV28.09.2016
NL28.09.2016
PL28.09.2016
RO28.09.2016
SE28.09.2016
SK28.09.2016
SM28.09.2016
CH30.11.2016
LI30.11.2016
BG28.12.2016
NO28.12.2016
GR29.12.2016
IS28.01.2017
PT30.01.2017
Former [2017/34]BE28.09.2016
CZ28.09.2016
DK28.09.2016
EE28.09.2016
ES28.09.2016
FI28.09.2016
HR28.09.2016
IT28.09.2016
LT28.09.2016
LV28.09.2016
NL28.09.2016
PL28.09.2016
RO28.09.2016
SE28.09.2016
SK28.09.2016
SM28.09.2016
BG28.12.2016
NO28.12.2016
GR29.12.2016
IS28.01.2017
PT30.01.2017
Former [2017/23]BE28.09.2016
CZ28.09.2016
EE28.09.2016
ES28.09.2016
FI28.09.2016
HR28.09.2016
IT28.09.2016
LT28.09.2016
LV28.09.2016
NL28.09.2016
PL28.09.2016
RO28.09.2016
SE28.09.2016
SK28.09.2016
SM28.09.2016
BG28.12.2016
NO28.12.2016
GR29.12.2016
IS28.01.2017
PT30.01.2017
Former [2017/23]BE28.09.2016
CZ28.09.2016
EE28.09.2016
FI28.09.2016
HR28.09.2016
LT28.09.2016
LV28.09.2016
NL28.09.2016
PL28.09.2016
RO28.09.2016
SE28.09.2016
SK28.09.2016
BG28.12.2016
NO28.12.2016
GR29.12.2016
IS28.01.2017
Former [2017/13]FI28.09.2016
HR28.09.2016
LT28.09.2016
LV28.09.2016
NL28.09.2016
SE28.09.2016
BE30.11.2016
NO28.12.2016
GR29.12.2016
Former [2017/11]FI28.09.2016
HR28.09.2016
LT28.09.2016
SE28.09.2016
BE30.11.2016
NO28.12.2016
GR29.12.2016
Former [2017/10]FI28.09.2016
HR28.09.2016
LT28.09.2016
SE28.09.2016
BE30.11.2016
NO28.12.2016
Former [2017/09]FI28.09.2016
LT28.09.2016
NO28.12.2016
Former [2017/07]LT28.09.2016
Documents cited:Search[Y]US2007287264  (ROGERS TONY [GB]) [Y] 1-15 * abstract * * paragraph [0041] - paragraph [0045] *;
 [Y]US2006205179  (FOURNEL FRANCK [FR], et al) [Y] 1-15 * abstract * * paragraph [0101] - paragraph [0102] *
International search[A]US2007296035  (GEORGE GREGORY [US], et al);
 [A]US2007287264  (ROGERS TONY [GB]);
 [A]US2008164606  (GREISEN CHRISTOFFER GRAAE [DK], et al);
 [A]US2003168145  (SUGA TADATOMO [JP], et al)
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.