EP2242122 - Operating method and control unit of a linear piezo drive [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 07.10.2016 Database last updated on 09.09.2024 | Most recent event Tooltip | 17.08.2018 | Lapse of the patent in a contracting state New state(s): BG | published on 19.09.2018 [2018/38] | Applicant(s) | For all designated states Physik Instrumente (PI) GmbH & Co. KG Auf der Römerstrasse 1 76228 Karlsruhe / DE | [2010/42] | Inventor(s) | 01 /
Mock, Christopher Kinzigstrasse 12 76337 Waldbronn / DE | [2010/42] | Representative(s) | Kruspig, Volkmar, et al Meissner Bolte Patentanwälte Rechtsanwälte Partnerschaft mbB Widenmayerstraße 47 80538 München / DE | [N/P] |
Former [2015/49] | Meissner, Bolte & Partner GbR Widenmayerstrasse 47 80538 München / DE | ||
Former [2010/42] | Meissner, Bolte & Partner Anwaltssozietät GbR Widenmayerstrasse 48 80538 München / DE | Application number, filing date | 10159339.0 | 08.04.2010 | [2010/42] | Priority number, date | DE20091017637 | 16.04.2009 Original published format: DE102009017637 | [2010/42] | Filing language | DE | Procedural language | DE | Publication | Type: | A2 Application without search report | No.: | EP2242122 | Date: | 20.10.2010 | Language: | DE | [2010/42] | Type: | A3 Search report | No.: | EP2242122 | Date: | 07.05.2014 | Language: | DE | [2014/19] | Type: | B1 Patent specification | No.: | EP2242122 | Date: | 02.12.2015 | Language: | DE | [2015/49] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 03.04.2014 | Classification | IPC: | H02N2/02, H02N2/06 | [2014/19] | CPC: |
H02N2/021 (EP,US);
H02N2/0075 (US);
H02N2/06 (EP,US)
|
Former IPC [2010/42] | H01L41/04, H02N2/06 | Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, SM, TR [2015/49] |
Former [2010/42] | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, SM, TR | Title | German: | Betriebsverfahren und Ansteuereinrichtung eines Piezolinearantriebes | [2010/42] | English: | Operating method and control unit of a linear piezo drive | [2010/42] | French: | Procédé d'opération et dispositif de commande d'un entraînement linéaire piézoélectrique | [2010/42] | Examination procedure | 05.11.2014 | Amendment by applicant (claims and/or description) | 05.11.2014 | Examination requested [2014/51] | 06.07.2015 | Communication of intention to grant the patent | 13.10.2015 | Fee for grant paid | 13.10.2015 | Fee for publishing/printing paid | 13.10.2015 | Receipt of the translation of the claim(s) | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 06.07.2015 | Opposition(s) | 05.09.2016 | No opposition filed within time limit [2016/45] | Fees paid | Renewal fee | 26.04.2012 | Renewal fee patent year 03 | 26.04.2013 | Renewal fee patent year 04 | 28.03.2014 | Renewal fee patent year 05 | 29.04.2015 | Renewal fee patent year 06 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 08.04.2010 | BG | 02.12.2015 | CY | 02.12.2015 | CZ | 02.12.2015 | DK | 02.12.2015 | EE | 02.12.2015 | ES | 02.12.2015 | FI | 02.12.2015 | HR | 02.12.2015 | IT | 02.12.2015 | LT | 02.12.2015 | LV | 02.12.2015 | MC | 02.12.2015 | MK | 02.12.2015 | MT | 02.12.2015 | PL | 02.12.2015 | RO | 02.12.2015 | SE | 02.12.2015 | SI | 02.12.2015 | SK | 02.12.2015 | SM | 02.12.2015 | TR | 02.12.2015 | NO | 02.03.2016 | GR | 03.03.2016 | IS | 02.04.2016 | PT | 04.04.2016 | AT | 08.04.2016 | GB | 08.04.2016 | IE | 08.04.2016 | LU | 08.04.2016 | BE | 30.04.2016 | CH | 30.04.2016 | LI | 30.04.2016 | FR | 02.05.2016 | [2018/38] |
Former [2018/32] | HU | 08.04.2010 | |
CY | 02.12.2015 | ||
CZ | 02.12.2015 | ||
DK | 02.12.2015 | ||
EE | 02.12.2015 | ||
ES | 02.12.2015 | ||
FI | 02.12.2015 | ||
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LT | 02.12.2015 | ||
LV | 02.12.2015 | ||
MC | 02.12.2015 | ||
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MT | 02.12.2015 | ||
PL | 02.12.2015 | ||
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TR | 02.12.2015 | ||
NO | 02.03.2016 | ||
GR | 03.03.2016 | ||
IS | 02.04.2016 | ||
PT | 04.04.2016 | ||
AT | 08.04.2016 | ||
GB | 08.04.2016 | ||
IE | 08.04.2016 | ||
LU | 08.04.2016 | ||
BE | 30.04.2016 | ||
CH | 30.04.2016 | ||
LI | 30.04.2016 | ||
FR | 02.05.2016 | ||
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SM | 02.12.2015 | ||
TR | 02.12.2015 | ||
NO | 02.03.2016 | ||
GR | 03.03.2016 | ||
IS | 02.04.2016 | ||
PT | 04.04.2016 | ||
AT | 08.04.2016 | ||
GB | 08.04.2016 | ||
IE | 08.04.2016 | ||
LU | 08.04.2016 | ||
BE | 30.04.2016 | ||
CH | 30.04.2016 | ||
LI | 30.04.2016 | ||
FR | 02.05.2016 | ||
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SI | 02.12.2015 | ||
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SM | 02.12.2015 | ||
NO | 02.03.2016 | ||
GR | 03.03.2016 | ||
IS | 02.04.2016 | ||
PT | 04.04.2016 | ||
AT | 08.04.2016 | ||
GB | 08.04.2016 | ||
IE | 08.04.2016 | ||
LU | 08.04.2016 | ||
BE | 30.04.2016 | ||
CH | 30.04.2016 | ||
LI | 30.04.2016 | ||
FR | 02.05.2016 | ||
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SI | 02.12.2015 | ||
SK | 02.12.2015 | ||
SM | 02.12.2015 | ||
NO | 02.03.2016 | ||
GR | 03.03.2016 | ||
IS | 02.04.2016 | ||
PT | 04.04.2016 | ||
AT | 08.04.2016 | ||
GB | 08.04.2016 | ||
IE | 08.04.2016 | ||
LU | 08.04.2016 | ||
BE | 30.04.2016 | ||
CH | 30.04.2016 | ||
LI | 30.04.2016 | ||
FR | 02.05.2016 | ||
Former [2017/10] | CZ | 02.12.2015 | |
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SM | 02.12.2015 | ||
NO | 02.03.2016 | ||
GR | 03.03.2016 | ||
IS | 02.04.2016 | ||
PT | 04.04.2016 | ||
GB | 08.04.2016 | ||
LU | 08.04.2016 | ||
BE | 30.04.2016 | ||
CH | 30.04.2016 | ||
LI | 30.04.2016 | ||
FR | 02.05.2016 | ||
Former [2017/08] | CZ | 02.12.2015 | |
DK | 02.12.2015 | ||
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ES | 02.12.2015 | ||
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SI | 02.12.2015 | ||
SK | 02.12.2015 | ||
SM | 02.12.2015 | ||
NO | 02.03.2016 | ||
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IS | 02.04.2016 | ||
PT | 04.04.2016 | ||
GB | 08.04.2016 | ||
LU | 08.04.2016 | ||
BE | 30.04.2016 | ||
CH | 30.04.2016 | ||
LI | 30.04.2016 | ||
Former [2017/07] | CZ | 02.12.2015 | |
DK | 02.12.2015 | ||
EE | 02.12.2015 | ||
ES | 02.12.2015 | ||
FI | 02.12.2015 | ||
IT | 02.12.2015 | ||
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PL | 02.12.2015 | ||
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SI | 02.12.2015 | ||
SK | 02.12.2015 | ||
SM | 02.12.2015 | ||
NO | 02.03.2016 | ||
GR | 03.03.2016 | ||
IS | 02.04.2016 | ||
PT | 04.04.2016 | ||
LU | 08.04.2016 | ||
BE | 30.04.2016 | ||
CH | 30.04.2016 | ||
LI | 30.04.2016 | ||
Former [2017/04] | CZ | 02.12.2015 | |
DK | 02.12.2015 | ||
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SI | 02.12.2015 | ||
SK | 02.12.2015 | ||
SM | 02.12.2015 | ||
NO | 02.03.2016 | ||
GR | 03.03.2016 | ||
IS | 02.04.2016 | ||
PT | 04.04.2016 | ||
LU | 08.04.2016 | ||
BE | 30.04.2016 | ||
Former [2016/49] | CZ | 02.12.2015 | |
DK | 02.12.2015 | ||
EE | 02.12.2015 | ||
ES | 02.12.2015 | ||
FI | 02.12.2015 | ||
IT | 02.12.2015 | ||
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PL | 02.12.2015 | ||
RO | 02.12.2015 | ||
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SI | 02.12.2015 | ||
SK | 02.12.2015 | ||
SM | 02.12.2015 | ||
NO | 02.03.2016 | ||
GR | 03.03.2016 | ||
IS | 02.04.2016 | ||
PT | 04.04.2016 | ||
BE | 30.04.2016 | ||
Former [2016/46] | CZ | 02.12.2015 | |
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SM | 02.12.2015 | ||
NO | 02.03.2016 | ||
GR | 03.03.2016 | ||
IS | 02.04.2016 | ||
PT | 04.04.2016 | ||
BE | 30.04.2016 | ||
Former [2016/38] | CZ | 02.12.2015 | |
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ES | 02.12.2015 | ||
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BE | 30.04.2016 | ||
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NO | 02.03.2016 | ||
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BE | 30.04.2016 | ||
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LT | 02.12.2015 | Documents cited: | Search | [Y]US5268621 (HAMERS ROBERT J [US], et al) [Y] 5,9* column 5, lines 2-7 *; | [Y]EP1548855 (ASML NETHERLANDS BV [NL]) [Y] 5,9 * paragraph [0078]; figure 3 *; | [XAYI] - EGASHIRA Y ET AL, "SUB-NANOMETER RESOLUTION ULTRASONIC MOTOR FOR 300 NM WAFER LITHOGRAPHY PRECISION STAGE", JAPANESE JOURNAL OF APPLIED PHYSICS, JAPAN SOCIETY OF APPLIED PHYSICS, JP, (20020901), vol. 41, no. 9, PART 01, doi:10.1143/JJAP.41.5858, ISSN 0021-4922, pages 5858 - 5863, XP001163829 [X] 1,2,6,7 * page 5859, column 1, paragraph 4 - page 5863, paragraph 1; figures 1,3,5,7,11-13 * [A] 3,8,10 [Y] 5,9 [I] 4 DOI: http://dx.doi.org/10.1143/JJAP.41.5858 | by applicant | US5241235 | DE4036287 | DE19605214 | DE69302084T | DE19806127 | US6150750 | DE10148267 |