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Extract from the Register of European Patents

EP About this file: EP2256779

EP2256779 - Dual beam system [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  13.05.2016
Database last updated on 02.11.2024
Most recent event   Tooltip19.10.2018Lapse of the patent in a contracting state
New state(s): AL		published on 21.11.2018  [2018/47]
Applicant(s)For all designated states
FEI COMPANY
5350 NE Dawson Creek Drive
Hillsboro, Oregon 97124-5793 / US
[2010/48]
Inventor(s)01 / Miller, Tom
10810 NW La Cassel Crest Ln
Portland, OR 97229 / US
 [2015/28]
Former [2010/48]01 / Miller, Tom
10810 NW La Cassel Crest Ln
Portland, OR 97229 / US
Representative(s)Bakker, Hendrik
FEI Company
Patent Department
P.O. Box 1745
5602 BS Eindhoven / NL
[N/P]
Former [2015/28]Bakker, Hendrik
FEI Company Patent Department P.O. Box 1745
5602 BS Eindhoven / NL
Former [2010/48]Bakker, Hendrik
FEI Company Patent Department P.O. Box 1745
5602 BS Eindhoven / NL
Application number, filing date10164011.827.05.2010
[2010/48]
Priority number, dateUS20090181989P28.05.2009         Original published format: US 181989 P
[2010/48]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report 
No.:EP2256779
Date:01.12.2010
Language:EN
[2010/48]
Type: A3 Search report 
No.:EP2256779
Date:07.12.2011
Language:EN
[2011/49]
Type: B1 Patent specification 
No.:EP2256779
Date:08.07.2015
Language:EN
[2015/28]
Search report(s)(Supplementary) European search report - dispatched on:EP08.11.2011
ClassificationIPC:H01J37/09, H01J37/147, H01J37/302, H01J37/305
[2010/48]
CPC:
H01J37/3056 (EP,US); H01J37/09 (EP,US); H01J37/1471 (EP,US);
H01J37/302 (EP,US); H01J2237/30472 (EP,US)
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   SE,   SI,   SK,   SM,   TR [2015/28]
Former [2010/48]AL,  AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HR,  HU,  IE,  IS,  IT,  LI,  LT,  LU,  LV,  MC,  MK,  MT,  NL,  NO,  PL,  PT,  RO,  SE,  SI,  SK,  SM,  TR 
TitleGerman:Zweistrahlsystem[2010/48]
English:Dual beam system[2010/48]
French:Système à deux faisceaux[2010/48]
Examination procedure05.06.2012Amendment by applicant (claims and/or description)
05.06.2012Examination requested  [2012/29]
31.01.2013Despatch of a communication from the examining division (Time limit: M04)
19.04.2013Reply to a communication from the examining division
07.01.2014Despatch of a communication from the examining division (Time limit: M06)
02.06.2014Reply to a communication from the examining division
09.01.2015Communication of intention to grant the patent
16.03.2015Disapproval of the communication of intention to grant the patent by the applicant or resumption of examination proceedings by the EPO
16.03.2015Fee for grant paid
16.03.2015Fee for publishing/printing paid
08.04.2015Communication of intention to grant the patent
01.06.2015Receipt of the translation of the claim(s)
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  31.01.2013
Opposition(s)11.04.2016No opposition filed within time limit [2016/24]
Fees paidRenewal fee
25.05.2012Renewal fee patent year 03
28.05.2013Renewal fee patent year 04
27.05.2014Renewal fee patent year 05
27.05.2015Renewal fee patent year 06
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU27.05.2010
AL08.07.2015
AT08.07.2015
BE08.07.2015
BG08.07.2015
CY08.07.2015
CZ08.07.2015
DK08.07.2015
EE08.07.2015
ES08.07.2015
FI08.07.2015
HR08.07.2015
IT08.07.2015
LT08.07.2015
LV08.07.2015
MC08.07.2015
MK08.07.2015
NL08.07.2015
PL08.07.2015
RO08.07.2015
SE08.07.2015
SI08.07.2015
SK08.07.2015
SM08.07.2015
TR08.07.2015
NO08.10.2015
GR09.10.2015
IS08.11.2015
PT09.11.2015
[2018/47]
Former [2018/38]HU27.05.2010
AT08.07.2015
BE08.07.2015
BG08.07.2015
CY08.07.2015
CZ08.07.2015
DK08.07.2015
EE08.07.2015
ES08.07.2015
FI08.07.2015
HR08.07.2015
IT08.07.2015
LT08.07.2015
LV08.07.2015
MC08.07.2015
MK08.07.2015
NL08.07.2015
PL08.07.2015
RO08.07.2015
SE08.07.2015
SI08.07.2015
SK08.07.2015
SM08.07.2015
TR08.07.2015
NO08.10.2015
GR09.10.2015
IS08.11.2015
PT09.11.2015
Former [2018/32]HU27.05.2010
AT08.07.2015
BE08.07.2015
CY08.07.2015
CZ08.07.2015
DK08.07.2015
EE08.07.2015
ES08.07.2015
FI08.07.2015
HR08.07.2015
IT08.07.2015
LT08.07.2015
LV08.07.2015
MC08.07.2015
MK08.07.2015
NL08.07.2015
PL08.07.2015
RO08.07.2015
SE08.07.2015
SI08.07.2015
SK08.07.2015
SM08.07.2015
TR08.07.2015
NO08.10.2015
GR09.10.2015
IS08.11.2015
PT09.11.2015
Former [2018/29]HU27.05.2010
AT08.07.2015
BE08.07.2015
CY08.07.2015
CZ08.07.2015
DK08.07.2015
EE08.07.2015
ES08.07.2015
FI08.07.2015
HR08.07.2015
IT08.07.2015
LT08.07.2015
LV08.07.2015
MC08.07.2015
MK08.07.2015
NL08.07.2015
PL08.07.2015
RO08.07.2015
SE08.07.2015
SI08.07.2015
SK08.07.2015
SM08.07.2015
TR08.07.2015
NO08.10.2015
GR09.10.2015
IS08.11.2015
PT09.11.2015
Former [2018/28]HU27.05.2010
AT08.07.2015
BE08.07.2015
CY08.07.2015
CZ08.07.2015
DK08.07.2015
EE08.07.2015
ES08.07.2015
FI08.07.2015
HR08.07.2015
IT08.07.2015
LT08.07.2015
LV08.07.2015
MC08.07.2015
MK08.07.2015
NL08.07.2015
PL08.07.2015
RO08.07.2015
SE08.07.2015
SI08.07.2015
SK08.07.2015
SM08.07.2015
NO08.10.2015
GR09.10.2015
IS08.11.2015
PT09.11.2015
Former [2017/40]AT08.07.2015
BE08.07.2015
CZ08.07.2015
DK08.07.2015
EE08.07.2015
ES08.07.2015
FI08.07.2015
HR08.07.2015
IT08.07.2015
LT08.07.2015
LV08.07.2015
NL08.07.2015
PL08.07.2015
RO08.07.2015
SE08.07.2015
SI08.07.2015
SK08.07.2015
NO08.10.2015
GR09.10.2015
IS08.11.2015
PT09.11.2015
Former [2017/03]AT08.07.2015
BE08.07.2015
CZ08.07.2015
DK08.07.2015
EE08.07.2015
ES08.07.2015
FI08.07.2015
HR08.07.2015
IT08.07.2015
LT08.07.2015
LV08.07.2015
PL08.07.2015
RO08.07.2015
SE08.07.2015
SI08.07.2015
SK08.07.2015
NO08.10.2015
GR09.10.2015
IS08.11.2015
PT09.11.2015
Former [2016/36]AT08.07.2015
CZ08.07.2015
DK08.07.2015
EE08.07.2015
ES08.07.2015
FI08.07.2015
HR08.07.2015
IT08.07.2015
LT08.07.2015
LV08.07.2015
PL08.07.2015
RO08.07.2015
SE08.07.2015
SI08.07.2015
SK08.07.2015
NO08.10.2015
GR09.10.2015
IS08.11.2015
PT09.11.2015
Former [2016/23]AT08.07.2015
CZ08.07.2015
DK08.07.2015
EE08.07.2015
ES08.07.2015
FI08.07.2015
HR08.07.2015
IT08.07.2015
LT08.07.2015
LV08.07.2015
PL08.07.2015
RO08.07.2015
SE08.07.2015
SK08.07.2015
NO08.10.2015
GR09.10.2015
IS08.11.2015
PT09.11.2015
Former [2016/22]AT08.07.2015
CZ08.07.2015
DK08.07.2015
EE08.07.2015
ES08.07.2015
FI08.07.2015
HR08.07.2015
IT08.07.2015
LT08.07.2015
LV08.07.2015
PL08.07.2015
SE08.07.2015
NO08.10.2015
GR09.10.2015
IS08.11.2015
PT09.11.2015
Former [2016/21]AT08.07.2015
DK08.07.2015
ES08.07.2015
FI08.07.2015
HR08.07.2015
IT08.07.2015
LT08.07.2015
LV08.07.2015
PL08.07.2015
SE08.07.2015
NO08.10.2015
GR09.10.2015
IS08.11.2015
PT09.11.2015
Former [2016/20]AT08.07.2015
DK08.07.2015
ES08.07.2015
FI08.07.2015
HR08.07.2015
LT08.07.2015
LV08.07.2015
PL08.07.2015
SE08.07.2015
NO08.10.2015
GR09.10.2015
IS08.11.2015
PT09.11.2015
Former [2016/11]AT08.07.2015
ES08.07.2015
FI08.07.2015
HR08.07.2015
LT08.07.2015
LV08.07.2015
PL08.07.2015
SE08.07.2015
NO08.10.2015
GR09.10.2015
IS08.11.2015
PT09.11.2015
Former [2016/10]ES08.07.2015
FI08.07.2015
HR08.07.2015
LT08.07.2015
LV08.07.2015
PL08.07.2015
SE08.07.2015
NO08.10.2015
GR09.10.2015
IS08.11.2015
PT09.11.2015
Former [2016/09]FI08.07.2015
LT08.07.2015
LV08.07.2015
NO08.10.2015
GR09.10.2015
Former [2016/08]LT08.07.2015
NO08.10.2015
Former [2016/07]LT08.07.2015
Documents cited:Search[XI]US6218663  (NISCH WILFRIED [DE], et al) [X] 1,2,10-12,15 * abstract * * column 2, line 67 - column 3, line 49 * * column 3, line 65 - column 4, line 8 * * column 5, line 50 - column 6, line 54; figures 1,2 * * column 7, line 23 - column 8, line 28; figures 5-8 * [I] 9;
 [XI]US2005035291  (HILL RAYMOND [US], et al) [X] 1,11-13,15 * paragraphs [0013] , [0034] , [0057] - [0063]; figures 1,2,12,13A,13B,14, 15A, 15B; claim 8 * [I] 2-7,9,14;
 [A]  - "Focused ion beam technology, capabilities and applications", (20060101), URL: http://www.fei.com/uploadedFiles/Documents/Content/2006_06_FIB_Overview_pb.pdf, (20111028), XP055010755 [A] 2-7,9,14 * figure 8 *
 [A]  - SAGHI ZINEB ET AL, "Tomographic nanofabrication of ultrasharp three-dimensional nanostructures", APPLIED PHYSICS LETTERS, AIP, AMERICAN INSTITUTE OF PHYSICS, MELVILLE, NY, US, (20081013), vol. 93, no. 15, doi:10.1063/1.2998360, ISSN 0003-6951, pages 153102 - 153102, XP012111906 [A] 8 * pages 153102-1, column r - pages 153102-2, column r *

DOI:   http://dx.doi.org/10.1063/1.2998360
ExaminationJP2005038853
 US2001053605
by applicantUS7411192
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.