EP2283960 - Gas-assisted laser ablation [Right-click to bookmark this link] | Status | Opposition rejected Status updated on 03.04.2020 Database last updated on 22.08.2024 | |
Former | The patent has been granted Status updated on 20.12.2016 | Most recent event Tooltip | 03.04.2020 | Opposition rejected | published on 06.05.2020 [2020/19] | Applicant(s) | For all designated states FEI Company 5350 NE Dawson Creek Drive Hillsboro, OR 97124-5793 / US | [2011/07] | Inventor(s) | 01 /
Straw, Marcus 4521SE Clay Street Portland, OR 97215 / US | 02 /
Toth, Milos 2386 NW Glisan Street Apt 7 Portland, OR 97210 / US | [2014/17] |
Former [2011/07] | 01 /
Straw, Marcus 4521SE Clay Street Portland, OR 97215 / US | ||
02 /
Toth, Milos 2386 NW Glisan Street Apt 7 Portland, OR 97210 / US | Representative(s) | Pollard, Peter Julian Fireball Patents De Verver 54 5506 BG Veldhoven / NL | [N/P] |
Former [2014/17] | Bakker, Hendrik FEI Company Patent Department P.O. Box 1745 5602 BS Eindhoven / NL | ||
Former [2011/07] | Bakker, Hendrik FEI Company Patent Department P.O. Box 1745 5602 BS Eindhoven / NL | Application number, filing date | 10171819.5 | 04.08.2010 | [2011/07] | Priority number, date | US20090232780P | 10.08.2009 Original published format: US 232780 P | US20100828243 | 30.06.2010 Original published format: US 828243 | [2011/07] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP2283960 | Date: | 16.02.2011 | Language: | EN | [2011/07] | Type: | B1 Patent specification | No.: | EP2283960 | Date: | 23.04.2014 | Language: | EN | [2014/17] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 20.12.2010 | Classification | IPC: | B23K26/12, B23K26/16, B23K26/36, B23K26/06 | [2011/07] | CPC: |
B23K26/12 (EP,US);
B29C35/08 (US);
B23K26/0624 (EP,US);
B23K26/126 (US);
B23K26/127 (EP,US);
B23K26/16 (EP,US);
| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, SM, TR [2011/07] | Title | German: | Gasunterstützte Laserablation | [2011/07] | English: | Gas-assisted laser ablation | [2011/07] | French: | Ablation au laser assistée au gaz | [2011/07] | Examination procedure | 12.08.2011 | Amendment by applicant (claims and/or description) | 12.08.2011 | Examination requested [2011/38] | 02.01.2013 | Despatch of a communication from the examining division (Time limit: M04) | 22.04.2013 | Reply to a communication from the examining division | 10.01.2014 | Communication of intention to grant the patent | 17.03.2014 | Fee for grant paid | 17.03.2014 | Fee for publishing/printing paid | Divisional application(s) | EP13193643.7 / EP2700470 | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 02.01.2013 | Opposition(s) | Opponent(s) | 01
22.01.2015
26.01.2015
ADMISSIBLE Carl Zeiss Microscopy GmbH Carl-Zeiss-Promenade 10 07745 Jena / DE Opponent's representative Carl Zeiss AG - Patentabteilung Carl-Zeiss-Straße 22 73447 Oberkochen / DE | [N/P] |
Former [2015/10] | |||
Opponent(s) | 01
22.01.2015
26.01.2015
ADMISSIBLE Carl Zeiss Microscopy GmbH Carl-Zeiss-Promenade 10 07745 Jena / DE Opponent's representative Carl Zeiss AG - Patentabteilung Carl-Zeiss-Strasse 22 73447 Oberkochen / DE | 27.02.2015 | Invitation to proprietor to file observations on the notice of opposition | 07.07.2015 | Reply of patent proprietor to notice(s) of opposition | 06.12.2016 | Date of oral proceedings | 21.12.2016 | Despatch of minutes of oral proceedings | 21.12.2016 | Date of despatch of rejection of opposition | 20.01.2020 | Legal effect of rejection of opposition [2020/19] | Appeal following opposition | 22.02.2017 | Appeal received No. T0484/17 | 13.04.2017 | Statement of grounds filed | 20.01.2020 | Result of appeal procedure: appeal of the opponent was rejected | 20.01.2020 | Date of oral proceedings | 31.01.2020 | Minutes of the oral proceedings despatched | Fees paid | Renewal fee | 27.08.2012 | Renewal fee patent year 03 | 27.08.2013 | Renewal fee patent year 04 |
Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 04.08.2010 | AL | 23.04.2014 | AT | 23.04.2014 | BE | 23.04.2014 | CY | 23.04.2014 | CZ | 23.04.2014 | DK | 23.04.2014 | EE | 23.04.2014 | ES | 23.04.2014 | FI | 23.04.2014 | HR | 23.04.2014 | IT | 23.04.2014 | LT | 23.04.2014 | LV | 23.04.2014 | MC | 23.04.2014 | MK | 23.04.2014 | MT | 23.04.2014 | NL | 23.04.2014 | PL | 23.04.2014 | RO | 23.04.2014 | SE | 23.04.2014 | SI | 23.04.2014 | SK | 23.04.2014 | SM | 23.04.2014 | TR | 23.04.2014 | BG | 23.07.2014 | NO | 23.07.2014 | GR | 24.07.2014 | IE | 04.08.2014 | LU | 04.08.2014 | IS | 23.08.2014 | PT | 25.08.2014 | CH | 31.08.2014 | LI | 31.08.2014 | [2018/46] |
Former [2018/30] | HU | 04.08.2010 | |
AT | 23.04.2014 | ||
BE | 23.04.2014 | ||
CY | 23.04.2014 | ||
CZ | 23.04.2014 | ||
DK | 23.04.2014 | ||
EE | 23.04.2014 | ||
ES | 23.04.2014 | ||
FI | 23.04.2014 | ||
HR | 23.04.2014 | ||
IT | 23.04.2014 | ||
LT | 23.04.2014 | ||
LV | 23.04.2014 | ||
MC | 23.04.2014 | ||
MK | 23.04.2014 | ||
MT | 23.04.2014 | ||
NL | 23.04.2014 | ||
PL | 23.04.2014 | ||
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SM | 23.04.2014 | ||
TR | 23.04.2014 | ||
BG | 23.07.2014 | ||
NO | 23.07.2014 | ||
GR | 24.07.2014 | ||
IE | 04.08.2014 | ||
LU | 04.08.2014 | ||
IS | 23.08.2014 | ||
PT | 25.08.2014 | ||
CH | 31.08.2014 | ||
LI | 31.08.2014 | ||
Former [2016/33] | HU | 04.08.2010 | |
AT | 23.04.2014 | ||
BE | 23.04.2014 | ||
CY | 23.04.2014 | ||
CZ | 23.04.2014 | ||
DK | 23.04.2014 | ||
EE | 23.04.2014 | ||
ES | 23.04.2014 | ||
FI | 23.04.2014 | ||
HR | 23.04.2014 | ||
IT | 23.04.2014 | ||
LT | 23.04.2014 | ||
LV | 23.04.2014 | ||
MC | 23.04.2014 | ||
MT | 23.04.2014 | ||
NL | 23.04.2014 | ||
PL | 23.04.2014 | ||
RO | 23.04.2014 | ||
SE | 23.04.2014 | ||
SI | 23.04.2014 | ||
SK | 23.04.2014 | ||
SM | 23.04.2014 | ||
TR | 23.04.2014 | ||
BG | 23.07.2014 | ||
NO | 23.07.2014 | ||
GR | 24.07.2014 | ||
IE | 04.08.2014 | ||
LU | 04.08.2014 | ||
IS | 23.08.2014 | ||
PT | 25.08.2014 | ||
CH | 31.08.2014 | ||
LI | 31.08.2014 | ||
Former [2016/32] | HU | 04.08.2010 | |
AT | 23.04.2014 | ||
BE | 23.04.2014 | ||
CY | 23.04.2014 | ||
CZ | 23.04.2014 | ||
DK | 23.04.2014 | ||
EE | 23.04.2014 | ||
ES | 23.04.2014 | ||
FI | 23.04.2014 | ||
HR | 23.04.2014 | ||
IT | 23.04.2014 | ||
LT | 23.04.2014 | ||
LV | 23.04.2014 | ||
MC | 23.04.2014 | ||
MT | 23.04.2014 | ||
NL | 23.04.2014 | ||
PL | 23.04.2014 | ||
RO | 23.04.2014 | ||
SE | 23.04.2014 | ||
SI | 23.04.2014 | ||
SK | 23.04.2014 | ||
SM | 23.04.2014 | ||
BG | 23.07.2014 | ||
NO | 23.07.2014 | ||
GR | 24.07.2014 | ||
IE | 04.08.2014 | ||
LU | 04.08.2014 | ||
IS | 23.08.2014 | ||
PT | 25.08.2014 | ||
CH | 31.08.2014 | ||
LI | 31.08.2014 | ||
Former [2016/28] | AT | 23.04.2014 | |
BE | 23.04.2014 | ||
CY | 23.04.2014 | ||
CZ | 23.04.2014 | ||
DK | 23.04.2014 | ||
EE | 23.04.2014 | ||
ES | 23.04.2014 | ||
FI | 23.04.2014 | ||
HR | 23.04.2014 | ||
IT | 23.04.2014 | ||
LT | 23.04.2014 | ||
LV | 23.04.2014 | ||
MC | 23.04.2014 | ||
MT | 23.04.2014 | ||
NL | 23.04.2014 | ||
PL | 23.04.2014 | ||
RO | 23.04.2014 | ||
SE | 23.04.2014 | ||
SI | 23.04.2014 | ||
SK | 23.04.2014 | ||
SM | 23.04.2014 | ||
BG | 23.07.2014 | ||
NO | 23.07.2014 | ||
GR | 24.07.2014 | ||
IE | 04.08.2014 | ||
LU | 04.08.2014 | ||
IS | 23.08.2014 | ||
PT | 25.08.2014 | ||
CH | 31.08.2014 | ||
LI | 31.08.2014 | ||
Former [2016/22] | AT | 23.04.2014 | |
BE | 23.04.2014 | ||
CY | 23.04.2014 | ||
CZ | 23.04.2014 | ||
DK | 23.04.2014 | ||
EE | 23.04.2014 | ||
ES | 23.04.2014 | ||
FI | 23.04.2014 | ||
HR | 23.04.2014 | ||
IT | 23.04.2014 | ||
LT | 23.04.2014 | ||
LV | 23.04.2014 | ||
MC | 23.04.2014 | ||
NL | 23.04.2014 | ||
PL | 23.04.2014 | ||
RO | 23.04.2014 | ||
SE | 23.04.2014 | ||
SI | 23.04.2014 | ||
SK | 23.04.2014 | ||
SM | 23.04.2014 | ||
BG | 23.07.2014 | ||
NO | 23.07.2014 | ||
GR | 24.07.2014 | ||
IE | 04.08.2014 | ||
LU | 04.08.2014 | ||
IS | 23.08.2014 | ||
PT | 25.08.2014 | ||
CH | 31.08.2014 | ||
LI | 31.08.2014 | ||
Former [2015/37] | AT | 23.04.2014 | |
BE | 23.04.2014 | ||
CY | 23.04.2014 | ||
CZ | 23.04.2014 | ||
DK | 23.04.2014 | ||
EE | 23.04.2014 | ||
ES | 23.04.2014 | ||
FI | 23.04.2014 | ||
HR | 23.04.2014 | ||
IT | 23.04.2014 | ||
LT | 23.04.2014 | ||
LV | 23.04.2014 | ||
MC | 23.04.2014 | ||
NL | 23.04.2014 | ||
PL | 23.04.2014 | ||
RO | 23.04.2014 | ||
SE | 23.04.2014 | ||
SI | 23.04.2014 | ||
SK | 23.04.2014 | ||
BG | 23.07.2014 | ||
NO | 23.07.2014 | ||
GR | 24.07.2014 | ||
IE | 04.08.2014 | ||
LU | 04.08.2014 | ||
IS | 23.08.2014 | ||
PT | 25.08.2014 | ||
CH | 31.08.2014 | ||
LI | 31.08.2014 | ||
Former [2015/36] | AT | 23.04.2014 | |
BE | 23.04.2014 | ||
CY | 23.04.2014 | ||
CZ | 23.04.2014 | ||
DK | 23.04.2014 | ||
EE | 23.04.2014 | ||
ES | 23.04.2014 | ||
FI | 23.04.2014 | ||
HR | 23.04.2014 | ||
IT | 23.04.2014 | ||
LT | 23.04.2014 | ||
LV | 23.04.2014 | ||
MC | 23.04.2014 | ||
NL | 23.04.2014 | ||
PL | 23.04.2014 | ||
RO | 23.04.2014 | ||
SE | 23.04.2014 | ||
SI | 23.04.2014 | ||
SK | 23.04.2014 | ||
BG | 23.07.2014 | ||
NO | 23.07.2014 | ||
GR | 24.07.2014 | ||
LU | 04.08.2014 | ||
IS | 23.08.2014 | ||
PT | 25.08.2014 | ||
CH | 31.08.2014 | ||
LI | 31.08.2014 | ||
Former [2015/20] | AT | 23.04.2014 | |
BE | 23.04.2014 | ||
CY | 23.04.2014 | ||
CZ | 23.04.2014 | ||
DK | 23.04.2014 | ||
EE | 23.04.2014 | ||
ES | 23.04.2014 | ||
FI | 23.04.2014 | ||
HR | 23.04.2014 | ||
IT | 23.04.2014 | ||
LT | 23.04.2014 | ||
LV | 23.04.2014 | ||
MC | 23.04.2014 | ||
NL | 23.04.2014 | ||
PL | 23.04.2014 | ||
RO | 23.04.2014 | ||
SE | 23.04.2014 | ||
SK | 23.04.2014 | ||
BG | 23.07.2014 | ||
NO | 23.07.2014 | ||
GR | 24.07.2014 | ||
LU | 04.08.2014 | ||
IS | 23.08.2014 | ||
PT | 25.08.2014 | ||
CH | 31.08.2014 | ||
LI | 31.08.2014 | ||
Former [2015/19] | AT | 23.04.2014 | |
BE | 23.04.2014 | ||
CY | 23.04.2014 | ||
CZ | 23.04.2014 | ||
DK | 23.04.2014 | ||
EE | 23.04.2014 | ||
ES | 23.04.2014 | ||
FI | 23.04.2014 | ||
HR | 23.04.2014 | ||
IT | 23.04.2014 | ||
LT | 23.04.2014 | ||
LV | 23.04.2014 | ||
MC | 23.04.2014 | ||
NL | 23.04.2014 | ||
PL | 23.04.2014 | ||
RO | 23.04.2014 | ||
SE | 23.04.2014 | ||
SK | 23.04.2014 | ||
BG | 23.07.2014 | ||
NO | 23.07.2014 | ||
GR | 24.07.2014 | ||
LU | 04.08.2014 | ||
IS | 23.08.2014 | ||
PT | 25.08.2014 | ||
Former [2015/18] | AT | 23.04.2014 | |
BE | 23.04.2014 | ||
CY | 23.04.2014 | ||
CZ | 23.04.2014 | ||
DK | 23.04.2014 | ||
EE | 23.04.2014 | ||
ES | 23.04.2014 | ||
FI | 23.04.2014 | ||
HR | 23.04.2014 | ||
IT | 23.04.2014 | ||
LT | 23.04.2014 | ||
LV | 23.04.2014 | ||
MC | 23.04.2014 | ||
NL | 23.04.2014 | ||
PL | 23.04.2014 | ||
RO | 23.04.2014 | ||
SE | 23.04.2014 | ||
SK | 23.04.2014 | ||
BG | 23.07.2014 | ||
NO | 23.07.2014 | ||
GR | 24.07.2014 | ||
IS | 23.08.2014 | ||
PT | 25.08.2014 | ||
Former [2015/11] | AT | 23.04.2014 | |
BE | 23.04.2014 | ||
CY | 23.04.2014 | ||
CZ | 23.04.2014 | ||
DK | 23.04.2014 | ||
EE | 23.04.2014 | ||
ES | 23.04.2014 | ||
FI | 23.04.2014 | ||
HR | 23.04.2014 | ||
LT | 23.04.2014 | ||
LV | 23.04.2014 | ||
NL | 23.04.2014 | ||
PL | 23.04.2014 | ||
RO | 23.04.2014 | ||
SE | 23.04.2014 | ||
SK | 23.04.2014 | ||
BG | 23.07.2014 | ||
NO | 23.07.2014 | ||
GR | 24.07.2014 | ||
IS | 23.08.2014 | ||
PT | 25.08.2014 | ||
Former [2015/10] | AT | 23.04.2014 | |
BE | 23.04.2014 | ||
CY | 23.04.2014 | ||
CZ | 23.04.2014 | ||
DK | 23.04.2014 | ||
EE | 23.04.2014 | ||
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FI | 23.04.2014 | ||
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LT | 23.04.2014 | ||
LV | 23.04.2014 | ||
NL | 23.04.2014 | ||
PL | 23.04.2014 | ||
SE | 23.04.2014 | ||
SK | 23.04.2014 | ||
BG | 23.07.2014 | ||
NO | 23.07.2014 | ||
GR | 24.07.2014 | ||
IS | 23.08.2014 | ||
PT | 25.08.2014 | ||
Former [2015/08] | AT | 23.04.2014 | |
BE | 23.04.2014 | ||
CY | 23.04.2014 | ||
DK | 23.04.2014 | ||
ES | 23.04.2014 | ||
FI | 23.04.2014 | ||
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NL | 23.04.2014 | ||
PL | 23.04.2014 | ||
SE | 23.04.2014 | ||
BG | 23.07.2014 | ||
NO | 23.07.2014 | ||
GR | 24.07.2014 | ||
IS | 23.08.2014 | ||
PT | 25.08.2014 | ||
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LT | 23.04.2014 | ||
LV | 23.04.2014 | ||
NL | 23.04.2014 | ||
PL | 23.04.2014 | ||
SE | 23.04.2014 | ||
BG | 23.07.2014 | ||
NO | 23.07.2014 | ||
GR | 24.07.2014 | ||
IS | 23.08.2014 | ||
PT | 25.08.2014 | ||
Former [2014/51] | AT | 23.04.2014 | |
CY | 23.04.2014 | ||
ES | 23.04.2014 | ||
FI | 23.04.2014 | ||
HR | 23.04.2014 | ||
LT | 23.04.2014 | ||
LV | 23.04.2014 | ||
NL | 23.04.2014 | ||
PL | 23.04.2014 | ||
SE | 23.04.2014 | ||
BG | 23.07.2014 | ||
NO | 23.07.2014 | ||
GR | 24.07.2014 | ||
IS | 23.08.2014 | ||
Former [2014/50] | CY | 23.04.2014 | |
ES | 23.04.2014 | ||
FI | 23.04.2014 | ||
HR | 23.04.2014 | ||
LT | 23.04.2014 | ||
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NL | 23.04.2014 | ||
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SE | 23.04.2014 | ||
BG | 23.07.2014 | ||
NO | 23.07.2014 | ||
GR | 24.07.2014 | ||
IS | 23.08.2014 | ||
Former [2014/49] | CY | 23.04.2014 | |
FI | 23.04.2014 | ||
LT | 23.04.2014 | ||
BG | 23.07.2014 | ||
NO | 23.07.2014 | ||
IS | 23.08.2014 | ||
Former [2014/48] | CY | 23.04.2014 | |
LT | 23.04.2014 | ||
BG | 23.07.2014 | ||
Former [2014/47] | CY | 23.04.2014 | Documents cited: | Search | [AD]US5496985 (FOLTZ ROBERT S [US], et al) [AD] 1-17 * column 3, lines 18-25 *; | [AD]USRE37585E (MOUROU GERARD [US], et al) [AD] 1-17* paragraph [0008] *; | [XA]US2005250292 (BALUSWAMY PARY [US], et al) [X] 17 * paragraph [0026]; figure 4 * * paragraph [0030] * * paragraph [0031] * [A] 1-16; | [AD]US2008241425 (LI MING [US], et al) [AD] 1-17 * paragraph [0001] * * paragraph [0008] - paragraph [0009] * * paragraphs [0026] - [0030] * * paragraph [0034] - paragraph [0035] *; | [AD] - GM ROBINSON, MJ JACKSON, "Femtosecond Laser Micromachining of Aluminum Surfaces Under Controlled Gas Atmospheres", JOURNAL OF MATERIALS ENGINEERING AND PERFORMANCE, (20060401), vol. 15, no. 2, doi:10.1361/105994906X95805, pages 155 - 159, XP009141345 [AD] 1-17 * the whole document * | [AD] - HONGPING GUO ET AL, "STUDY OF GAS-STREAM-ASSISTED LASER ABLATION OF COPPER", THIN SOLID FILMS, ELSEVIER-SEQUOIA S.A. LAUSANNE, CH, (19921015), vol. 218, no. 1 / 02, doi:10.1016/0040-6090(92)90927-4, ISSN 0040-6090, pages 274 - 276, XP000327944 [AD] 1-17 * the whole document * DOI: http://dx.doi.org/10.1016/0040-6090(92)90927-4 | [AD] - EHRLICH D ET AL, "LASER ETCHING FOR FLIP-CHIP DE-BUG AND INVERSE STEREOLITHOGRAPHY FOR MEMS", SOLID STATE TECHNOLOGY, PENNWELL CORPORATION, TULSA, OK, US, (20010601), vol. 44, no. 6, ISSN 0038-111X, XP001058614 [AD] 1-17 * the whole document * | by applicant | US5496985 | USRE37585E | US2008241425 | - ROBINSON, G.M. ET AL., "Femtosecond Laser Micromachining of Aluminum Surfaces Under Controlled Gas Atmospheres", J. MATER. ENG. & PERF., (200604), vol. 15, no. 2, pages 155 - 160 | - DANIEL EHRLICH ET AL., "Laser Etching for Flip-Chip De-Bug and Inverse Stereolithography for MEMS", SOLID STATE TECH., (200106), pages 145 - 150 | US20090525908 | US20080079304 |