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Extract from the Register of European Patents

EP About this file: EP2283960

EP2283960 - Gas-assisted laser ablation [Right-click to bookmark this link]
StatusOpposition rejected
Status updated on  03.04.2020
Database last updated on 22.08.2024
FormerThe patent has been granted
Status updated on  20.12.2016
Most recent event   Tooltip03.04.2020Opposition rejectedpublished on 06.05.2020  [2020/19]
Applicant(s)For all designated states
FEI Company
5350 NE Dawson Creek Drive
Hillsboro, OR 97124-5793 / US
[2011/07]
Inventor(s)01 / Straw, Marcus
4521SE Clay Street
Portland, OR 97215 / US
02 / Toth, Milos
2386 NW Glisan Street Apt 7
Portland, OR 97210 / US
 [2014/17]
Former [2011/07]01 / Straw, Marcus
4521SE Clay Street
Portland, OR 97215 / US
02 / Toth, Milos
2386 NW Glisan Street Apt 7
Portland, OR 97210 / US
Representative(s)Pollard, Peter Julian
Fireball Patents
De Verver 54
5506 BG Veldhoven / NL
[N/P]
Former [2014/17]Bakker, Hendrik
FEI Company Patent Department P.O. Box 1745
5602 BS Eindhoven / NL
Former [2011/07]Bakker, Hendrik
FEI Company Patent Department P.O. Box 1745
5602 BS Eindhoven / NL
Application number, filing date10171819.504.08.2010
[2011/07]
Priority number, dateUS20090232780P10.08.2009         Original published format: US 232780 P
US2010082824330.06.2010         Original published format: US 828243
[2011/07]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report 
No.:EP2283960
Date:16.02.2011
Language:EN
[2011/07]
Type: B1 Patent specification 
No.:EP2283960
Date:23.04.2014
Language:EN
[2014/17]
Search report(s)(Supplementary) European search report - dispatched on:EP20.12.2010
ClassificationIPC:B23K26/12, B23K26/16, B23K26/36, B23K26/06
[2011/07]
CPC:
B23K26/12 (EP,US); B29C35/08 (US); B23K26/0624 (EP,US);
B23K26/126 (US); B23K26/127 (EP,US); B23K26/16 (EP,US);
B23K26/36 (EP,US); B41M5/24 (EP,US) (-)
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   SE,   SI,   SK,   SM,   TR [2011/07]
TitleGerman:Gasunterstützte Laserablation[2011/07]
English:Gas-assisted laser ablation[2011/07]
French:Ablation au laser assistée au gaz[2011/07]
Examination procedure12.08.2011Amendment by applicant (claims and/or description)
12.08.2011Examination requested  [2011/38]
02.01.2013Despatch of a communication from the examining division (Time limit: M04)
22.04.2013Reply to a communication from the examining division
10.01.2014Communication of intention to grant the patent
17.03.2014Fee for grant paid
17.03.2014Fee for publishing/printing paid
Divisional application(s)EP13193643.7  / EP2700470
The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  02.01.2013
Opposition(s)Opponent(s)01  22.01.2015  26.01.2015  ADMISSIBLE
Carl Zeiss Microscopy GmbH
Carl-Zeiss-Promenade 10
07745 Jena / DE
Opponent's representative
Carl Zeiss AG - Patentabteilung
Carl-Zeiss-Straße 22
73447 Oberkochen / DE
 [N/P]
Former [2015/10]
Opponent(s)01  22.01.2015  26.01.2015  ADMISSIBLE
Carl Zeiss Microscopy GmbH
Carl-Zeiss-Promenade 10
07745 Jena / DE
Opponent's representative
Carl Zeiss AG - Patentabteilung
Carl-Zeiss-Strasse 22
73447 Oberkochen / DE
27.02.2015Invitation to proprietor to file observations on the notice of opposition
07.07.2015Reply of patent proprietor to notice(s) of opposition
06.12.2016Date of oral proceedings
21.12.2016Despatch of minutes of oral proceedings
21.12.2016Date of despatch of rejection of opposition
20.01.2020Legal effect of rejection of opposition [2020/19]
Appeal following opposition22.02.2017Appeal received No.  T0484/17
13.04.2017Statement of grounds filed
20.01.2020Result of appeal procedure: appeal of the opponent was rejected
20.01.2020Date of oral proceedings
31.01.2020Minutes of the oral proceedings despatched
Fees paidRenewal fee
27.08.2012Renewal fee patent year 03
27.08.2013Renewal fee patent year 04
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU04.08.2010
AL23.04.2014
AT23.04.2014
BE23.04.2014
CY23.04.2014
CZ23.04.2014
DK23.04.2014
EE23.04.2014
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FI23.04.2014
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LT23.04.2014
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NL23.04.2014
PL23.04.2014
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BG23.07.2014
NO23.07.2014
GR24.07.2014
IE04.08.2014
LU04.08.2014
IS23.08.2014
PT25.08.2014
CH31.08.2014
LI31.08.2014
[2018/46]
Former [2018/30]HU04.08.2010
AT23.04.2014
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DK23.04.2014
EE23.04.2014
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MC23.04.2014
MK23.04.2014
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PL23.04.2014
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BG23.07.2014
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GR24.07.2014
IE04.08.2014
LU04.08.2014
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PT25.08.2014
CH31.08.2014
LI31.08.2014
Former [2016/33]HU04.08.2010
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BG23.07.2014
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GR24.07.2014
IE04.08.2014
LU04.08.2014
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PT25.08.2014
CH31.08.2014
LI31.08.2014
Former [2016/32]HU04.08.2010
AT23.04.2014
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CZ23.04.2014
DK23.04.2014
EE23.04.2014
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FI23.04.2014
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MC23.04.2014
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PL23.04.2014
RO23.04.2014
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SK23.04.2014
SM23.04.2014
BG23.07.2014
NO23.07.2014
GR24.07.2014
IE04.08.2014
LU04.08.2014
IS23.08.2014
PT25.08.2014
CH31.08.2014
LI31.08.2014
Former [2016/28]AT23.04.2014
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FI23.04.2014
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NL23.04.2014
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BG23.07.2014
NO23.07.2014
GR24.07.2014
IE04.08.2014
LU04.08.2014
IS23.08.2014
PT25.08.2014
CH31.08.2014
LI31.08.2014
Former [2016/22]AT23.04.2014
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EE23.04.2014
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FI23.04.2014
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SM23.04.2014
BG23.07.2014
NO23.07.2014
GR24.07.2014
IE04.08.2014
LU04.08.2014
IS23.08.2014
PT25.08.2014
CH31.08.2014
LI31.08.2014
Former [2015/37]AT23.04.2014
BE23.04.2014
CY23.04.2014
CZ23.04.2014
DK23.04.2014
EE23.04.2014
ES23.04.2014
FI23.04.2014
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BG23.07.2014
NO23.07.2014
GR24.07.2014
IE04.08.2014
LU04.08.2014
IS23.08.2014
PT25.08.2014
CH31.08.2014
LI31.08.2014
Former [2015/36]AT23.04.2014
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CZ23.04.2014
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SI23.04.2014
SK23.04.2014
BG23.07.2014
NO23.07.2014
GR24.07.2014
LU04.08.2014
IS23.08.2014
PT25.08.2014
CH31.08.2014
LI31.08.2014
Former [2015/20]AT23.04.2014
BE23.04.2014
CY23.04.2014
CZ23.04.2014
DK23.04.2014
EE23.04.2014
ES23.04.2014
FI23.04.2014
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MC23.04.2014
NL23.04.2014
PL23.04.2014
RO23.04.2014
SE23.04.2014
SK23.04.2014
BG23.07.2014
NO23.07.2014
GR24.07.2014
LU04.08.2014
IS23.08.2014
PT25.08.2014
CH31.08.2014
LI31.08.2014
Former [2015/19]AT23.04.2014
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EE23.04.2014
ES23.04.2014
FI23.04.2014
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SK23.04.2014
BG23.07.2014
NO23.07.2014
GR24.07.2014
LU04.08.2014
IS23.08.2014
PT25.08.2014
Former [2015/18]AT23.04.2014
BE23.04.2014
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DK23.04.2014
EE23.04.2014
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FI23.04.2014
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RO23.04.2014
SE23.04.2014
SK23.04.2014
BG23.07.2014
NO23.07.2014
GR24.07.2014
IS23.08.2014
PT25.08.2014
Former [2015/11]AT23.04.2014
BE23.04.2014
CY23.04.2014
CZ23.04.2014
DK23.04.2014
EE23.04.2014
ES23.04.2014
FI23.04.2014
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NL23.04.2014
PL23.04.2014
RO23.04.2014
SE23.04.2014
SK23.04.2014
BG23.07.2014
NO23.07.2014
GR24.07.2014
IS23.08.2014
PT25.08.2014
Former [2015/10]AT23.04.2014
BE23.04.2014
CY23.04.2014
CZ23.04.2014
DK23.04.2014
EE23.04.2014
ES23.04.2014
FI23.04.2014
HR23.04.2014
LT23.04.2014
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NL23.04.2014
PL23.04.2014
SE23.04.2014
SK23.04.2014
BG23.07.2014
NO23.07.2014
GR24.07.2014
IS23.08.2014
PT25.08.2014
Former [2015/08]AT23.04.2014
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CY23.04.2014
DK23.04.2014
ES23.04.2014
FI23.04.2014
HR23.04.2014
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NL23.04.2014
PL23.04.2014
SE23.04.2014
BG23.07.2014
NO23.07.2014
GR24.07.2014
IS23.08.2014
PT25.08.2014
Former [2015/02]AT23.04.2014
CY23.04.2014
ES23.04.2014
FI23.04.2014
HR23.04.2014
LT23.04.2014
LV23.04.2014
NL23.04.2014
PL23.04.2014
SE23.04.2014
BG23.07.2014
NO23.07.2014
GR24.07.2014
IS23.08.2014
PT25.08.2014
Former [2014/51]AT23.04.2014
CY23.04.2014
ES23.04.2014
FI23.04.2014
HR23.04.2014
LT23.04.2014
LV23.04.2014
NL23.04.2014
PL23.04.2014
SE23.04.2014
BG23.07.2014
NO23.07.2014
GR24.07.2014
IS23.08.2014
Former [2014/50]CY23.04.2014
ES23.04.2014
FI23.04.2014
HR23.04.2014
LT23.04.2014
LV23.04.2014
NL23.04.2014
PL23.04.2014
SE23.04.2014
BG23.07.2014
NO23.07.2014
GR24.07.2014
IS23.08.2014
Former [2014/49]CY23.04.2014
FI23.04.2014
LT23.04.2014
BG23.07.2014
NO23.07.2014
IS23.08.2014
Former [2014/48]CY23.04.2014
LT23.04.2014
BG23.07.2014
Former [2014/47]CY23.04.2014
Documents cited:Search[AD]US5496985  (FOLTZ ROBERT S [US], et al) [AD] 1-17 * column 3, lines 18-25 *;
 [AD]USRE37585E  (MOUROU GERARD [US], et al) [AD] 1-17* paragraph [0008] *;
 [XA]US2005250292  (BALUSWAMY PARY [US], et al) [X] 17 * paragraph [0026]; figure 4 * * paragraph [0030] * * paragraph [0031] * [A] 1-16;
 [AD]US2008241425  (LI MING [US], et al) [AD] 1-17 * paragraph [0001] * * paragraph [0008] - paragraph [0009] * * paragraphs [0026] - [0030] * * paragraph [0034] - paragraph [0035] *;
 [AD]  - GM ROBINSON, MJ JACKSON, "Femtosecond Laser Micromachining of Aluminum Surfaces Under Controlled Gas Atmospheres", JOURNAL OF MATERIALS ENGINEERING AND PERFORMANCE, (20060401), vol. 15, no. 2, doi:10.1361/105994906X95805, pages 155 - 159, XP009141345 [AD] 1-17 * the whole document *
 [AD]  - HONGPING GUO ET AL, "STUDY OF GAS-STREAM-ASSISTED LASER ABLATION OF COPPER", THIN SOLID FILMS, ELSEVIER-SEQUOIA S.A. LAUSANNE, CH, (19921015), vol. 218, no. 1 / 02, doi:10.1016/0040-6090(92)90927-4, ISSN 0040-6090, pages 274 - 276, XP000327944 [AD] 1-17 * the whole document *

DOI:   http://dx.doi.org/10.1016/0040-6090(92)90927-4
 [AD]  - EHRLICH D ET AL, "LASER ETCHING FOR FLIP-CHIP DE-BUG AND INVERSE STEREOLITHOGRAPHY FOR MEMS", SOLID STATE TECHNOLOGY, PENNWELL CORPORATION, TULSA, OK, US, (20010601), vol. 44, no. 6, ISSN 0038-111X, XP001058614 [AD] 1-17 * the whole document *
by applicantUS5496985
 USRE37585E
 US2008241425
    - ROBINSON, G.M. ET AL., "Femtosecond Laser Micromachining of Aluminum Surfaces Under Controlled Gas Atmospheres", J. MATER. ENG. & PERF., (200604), vol. 15, no. 2, pages 155 - 160
    - DANIEL EHRLICH ET AL., "Laser Etching for Flip-Chip De-Bug and Inverse Stereolithography for MEMS", SOLID STATE TECH., (200106), pages 145 - 150
 US20090525908
 US20080079304
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