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Extract from the Register of European Patents

EP About this file: EP2275868

EP2275868 - Interferometric analysis of surfaces [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  04.01.2019
Database last updated on 31.08.2024
FormerThe patent has been granted
Status updated on  26.01.2018
FormerGrant of patent is intended
Status updated on  14.09.2017
FormerExamination is in progress
Status updated on  14.04.2017
FormerGrant of patent is intended
Status updated on  19.12.2016
Most recent event   Tooltip05.06.2020Lapse of the patent in a contracting state
New state(s): HU, PT		published on 08.07.2020  [2020/28]
Applicant(s)For all designated states
Zygo Corporation
21 Laurel Brook Road
Middlefield, CT 06455-0448 / US
[2011/03]
Inventor(s)01 / De Groot, Peter J.
355 Laurel Grove Road
Middletown, CT 06457 / US
 [2018/09]
Former [2011/03]01 / De Groot, Peter J.
355 Laurel Grove Road
Middletown, CT 06457 / US
Representative(s)Epping - Hermann - Fischer
Patentanwaltsgesellschaft mbH
Schloßschmidstraße 5
80639 München / DE
[2018/09]
Former [2011/03]Epping - Hermann - Fischer
Patentanwaltsgesellschaft mbH Ridlerstrasse 55
80339 München / DE
Application number, filing date10177299.415.09.2004
[2011/03]
Priority number, dateUS20030502932P15.09.2003         Original published format: US 502932 P
US20030502933P15.09.2003         Original published format: US 502933 P
US20030502907P15.09.2003         Original published format: US 502907 P
US20030502930P15.09.2003         Original published format: US 502930 P
US20040539437P26.01.2004         Original published format: US 539437 P
[2011/03]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report 
No.:EP2275868
Date:19.01.2011
Language:EN
[2011/03]
Type: B1 Patent specification 
No.:EP2275868
Date:28.02.2018
Language:EN
[2018/09]
Search report(s)(Supplementary) European search report - dispatched on:EP14.12.2010
ClassificationIPC:G03F7/20, G01B9/02, G01B11/00
[2011/03]
CPC:
G03F7/70491 (EP,US); G03F7/20 (KR); G01B11/0675 (EP,US);
G01B9/02 (KR); G01B9/02019 (EP,US); G01B9/02022 (EP,US);
G01B9/02084 (EP,US); G01B9/02087 (EP,US); G01B9/0209 (EP,US);
G03F7/00 (KR); G03F7/70608 (EP,US); G03F7/70641 (EP,US);
G03F7/70775 (EP,US); G03F9/7003 (EP,US); G03F9/7049 (EP,US);
G03F9/7088 (EP,US); G01B2290/30 (EP,US); G01B2290/70 (EP,US) (-)
Designated contracting statesAT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HU,   IE,   IT,   LI,   LU,   MC,   NL,   PL,   PT,   RO,   SE,   SI,   SK,   TR [2018/09]
Former [2011/03]AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HU,  IE,  IT,  LI,  LU,  MC,  NL,  PL,  PT,  RO,  SE,  SI,  SK,  TR 
TitleGerman:Interferometrische Analyse von Oberflächen[2017/02]
English:Interferometric analysis of surfaces[2011/03]
French:Analyse interférométrique des surfaces[2011/03]
Former [2011/03]Interferometrisceh Analyse von Oberflächen
Examination procedure19.07.2011Amendment by applicant (claims and/or description)
19.07.2011Examination requested  [2011/35]
06.10.2011Despatch of a communication from the examining division (Time limit: M04)
10.02.2012Reply to a communication from the examining division
25.02.2013Despatch of a communication from the examining division (Time limit: M06)
22.08.2013Reply to a communication from the examining division
12.08.2015Despatch of a communication from the examining division (Time limit: M04)
10.12.2015Reply to a communication from the examining division
20.12.2016Communication of intention to grant the patent
06.04.2017Disapproval of the communication of intention to grant the patent by the applicant or resumption of examination proceedings by the EPO
19.06.2017Despatch of a communication from the examining division (Time limit: M02)
17.08.2017Reply to a communication from the examining division
15.09.2017Communication of intention to grant the patent
15.01.2018Fee for grant paid
15.01.2018Fee for publishing/printing paid
15.01.2018Receipt of the translation of the claim(s)
Parent application(s)   TooltipEP04788766.6  / EP1664932
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued (EP20040788766) is  06.07.2006
Opposition(s)29.11.2018No opposition filed within time limit [2019/06]
Fees paidRenewal fee
17.09.2010Renewal fee patent year 03
17.09.2010Renewal fee patent year 04
17.09.2010Renewal fee patent year 05
17.09.2010Renewal fee patent year 06
17.09.2010Renewal fee patent year 07
26.09.2011Renewal fee patent year 08
25.09.2012Renewal fee patent year 09
27.09.2013Renewal fee patent year 10
29.09.2014Renewal fee patent year 11
28.09.2015Renewal fee patent year 12
27.09.2016Renewal fee patent year 13
27.09.2017Renewal fee patent year 14
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU15.09.2004
AT28.02.2018
CY28.02.2018
CZ28.02.2018
DK28.02.2018
EE28.02.2018
ES28.02.2018
FI28.02.2018
IT28.02.2018
MC28.02.2018
NL28.02.2018
PL28.02.2018
PT28.02.2018
RO28.02.2018
SE28.02.2018
SI28.02.2018
SK28.02.2018
TR28.02.2018
BG28.05.2018
GR29.05.2018
IE15.09.2018
LU15.09.2018
BE30.09.2018
CH30.09.2018
LI30.09.2018
[2020/27]
Former [2020/16]AT28.02.2018
CY28.02.2018
CZ28.02.2018
DK28.02.2018
EE28.02.2018
ES28.02.2018
FI28.02.2018
IT28.02.2018
MC28.02.2018
NL28.02.2018
PL28.02.2018
RO28.02.2018
SE28.02.2018
SI28.02.2018
SK28.02.2018
TR28.02.2018
BG28.05.2018
GR29.05.2018
IE15.09.2018
LU15.09.2018
BE30.09.2018
CH30.09.2018
LI30.09.2018
Former [2019/40]AT28.02.2018
CY28.02.2018
CZ28.02.2018
DK28.02.2018
EE28.02.2018
ES28.02.2018
FI28.02.2018
IT28.02.2018
MC28.02.2018
NL28.02.2018
PL28.02.2018
RO28.02.2018
SE28.02.2018
SI28.02.2018
SK28.02.2018
BG28.05.2018
GR29.05.2018
IE15.09.2018
LU15.09.2018
BE30.09.2018
CH30.09.2018
LI30.09.2018
Former [2019/38]AT28.02.2018
CY28.02.2018
CZ28.02.2018
DK28.02.2018
EE28.02.2018
ES28.02.2018
FI28.02.2018
IT28.02.2018
MC28.02.2018
NL28.02.2018
PL28.02.2018
RO28.02.2018
SE28.02.2018
SI28.02.2018
SK28.02.2018
BG28.05.2018
GR29.05.2018
IE15.09.2018
LU15.09.2018
BE30.09.2018
Former [2019/33]AT28.02.2018
CY28.02.2018
CZ28.02.2018
DK28.02.2018
EE28.02.2018
ES28.02.2018
FI28.02.2018
IT28.02.2018
MC28.02.2018
NL28.02.2018
PL28.02.2018
RO28.02.2018
SE28.02.2018
SI28.02.2018
SK28.02.2018
BG28.05.2018
GR29.05.2018
IE15.09.2018
LU15.09.2018
Former [2019/30]AT28.02.2018
CY28.02.2018
CZ28.02.2018
DK28.02.2018
EE28.02.2018
ES28.02.2018
FI28.02.2018
IT28.02.2018
MC28.02.2018
NL28.02.2018
PL28.02.2018
RO28.02.2018
SE28.02.2018
SI28.02.2018
SK28.02.2018
BG28.05.2018
GR29.05.2018
LU15.09.2018
Former [2019/24]AT28.02.2018
CY28.02.2018
CZ28.02.2018
DK28.02.2018
EE28.02.2018
ES28.02.2018
FI28.02.2018
IT28.02.2018
MC28.02.2018
NL28.02.2018
PL28.02.2018
RO28.02.2018
SE28.02.2018
SI28.02.2018
SK28.02.2018
BG28.05.2018
GR29.05.2018
Former [2019/13]AT28.02.2018
CY28.02.2018
CZ28.02.2018
DK28.02.2018
EE28.02.2018
ES28.02.2018
FI28.02.2018
IT28.02.2018
NL28.02.2018
PL28.02.2018
RO28.02.2018
SE28.02.2018
SI28.02.2018
SK28.02.2018
BG28.05.2018
GR29.05.2018
Former [2018/51]AT28.02.2018
CY28.02.2018
CZ28.02.2018
DK28.02.2018
EE28.02.2018
ES28.02.2018
FI28.02.2018
IT28.02.2018
NL28.02.2018
PL28.02.2018
RO28.02.2018
SE28.02.2018
SK28.02.2018
BG28.05.2018
GR29.05.2018
Former [2018/50]AT28.02.2018
CY28.02.2018
CZ28.02.2018
EE28.02.2018
ES28.02.2018
FI28.02.2018
IT28.02.2018
NL28.02.2018
PL28.02.2018
RO28.02.2018
SE28.02.2018
SK28.02.2018
BG28.05.2018
GR29.05.2018
Former [2018/47]AT28.02.2018
CY28.02.2018
ES28.02.2018
FI28.02.2018
IT28.02.2018
NL28.02.2018
SE28.02.2018
BG28.05.2018
GR29.05.2018
Former [2018/40]AT28.02.2018
CY28.02.2018
ES28.02.2018
FI28.02.2018
NL28.02.2018
SE28.02.2018
BG28.05.2018
GR29.05.2018
Former [2018/38]AT28.02.2018
CY28.02.2018
ES28.02.2018
FI28.02.2018
NL28.02.2018
GR29.05.2018
Former [2018/37]CY28.02.2018
ES28.02.2018
FI28.02.2018
NL28.02.2018
GR29.05.2018
Former [2018/36]CY28.02.2018
ES28.02.2018
FI28.02.2018
NL28.02.2018
Documents cited:Search[A]WO9009557  (CAMBRIDGE CONSULTANTS [GB]) [A] 1-15 * page 21, lines 10-16 ** figures 6,7 *;
 [X]  - ERIK NOVAK, MICHAEL B. KRELL,. TRISHA BROWNE, "Template-based software for accurate MEMS characterization", PROCEEDINGS OF SPIE, (20030129), vol. 4980, doi:10.1117/12.478204, ISSN 0277-786X, pages 75 - 80, XP002608351 [X] 1,2,6,10,12 * paragraphs [0001] , [02.1] , [0004]; figure 2 *

DOI:   http://dx.doi.org/10.1117/12.478204
by applicant   - "Determination of fringe order in white-light interference microscopy", APPL. OPT., (2002), vol. 41, no. 22, page 4571
 US20010053106
 US20030429175
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.