EP2275868 - Interferometric analysis of surfaces [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 04.01.2019 Database last updated on 31.08.2024 | |
Former | The patent has been granted Status updated on 26.01.2018 | ||
Former | Grant of patent is intended Status updated on 14.09.2017 | ||
Former | Examination is in progress Status updated on 14.04.2017 | ||
Former | Grant of patent is intended Status updated on 19.12.2016 | Most recent event Tooltip | 05.06.2020 | Lapse of the patent in a contracting state New state(s): HU, PT | published on 08.07.2020 [2020/28] | Applicant(s) | For all designated states Zygo Corporation 21 Laurel Brook Road Middlefield, CT 06455-0448 / US | [2011/03] | Inventor(s) | 01 /
De Groot, Peter J. 355 Laurel Grove Road Middletown, CT 06457 / US | [2018/09] |
Former [2011/03] | 01 /
De Groot, Peter J. 355 Laurel Grove Road Middletown, CT 06457 / US | Representative(s) | Epping - Hermann - Fischer Patentanwaltsgesellschaft mbH Schloßschmidstraße 5 80639 München / DE | [2018/09] |
Former [2011/03] | Epping - Hermann - Fischer Patentanwaltsgesellschaft mbH Ridlerstrasse 55 80339 München / DE | Application number, filing date | 10177299.4 | 15.09.2004 | [2011/03] | Priority number, date | US20030502932P | 15.09.2003 Original published format: US 502932 P | US20030502933P | 15.09.2003 Original published format: US 502933 P | US20030502907P | 15.09.2003 Original published format: US 502907 P | US20030502930P | 15.09.2003 Original published format: US 502930 P | US20040539437P | 26.01.2004 Original published format: US 539437 P | [2011/03] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP2275868 | Date: | 19.01.2011 | Language: | EN | [2011/03] | Type: | B1 Patent specification | No.: | EP2275868 | Date: | 28.02.2018 | Language: | EN | [2018/09] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 14.12.2010 | Classification | IPC: | G03F7/20, G01B9/02, G01B11/00 | [2011/03] | CPC: |
G03F7/70491 (EP,US);
G03F7/20 (KR);
G01B11/0675 (EP,US);
G01B9/02 (KR);
G01B9/02019 (EP,US);
G01B9/02022 (EP,US);
G01B9/02084 (EP,US);
G01B9/02087 (EP,US);
G01B9/0209 (EP,US);
G03F7/00 (KR);
G03F7/70608 (EP,US);
G03F7/70641 (EP,US);
G03F7/70775 (EP,US);
G03F9/7003 (EP,US);
G03F9/7049 (EP,US);
| Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LI, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR [2018/09] |
Former [2011/03] | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LI, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR | Title | German: | Interferometrische Analyse von Oberflächen | [2017/02] | English: | Interferometric analysis of surfaces | [2011/03] | French: | Analyse interférométrique des surfaces | [2011/03] |
Former [2011/03] | Interferometrisceh Analyse von Oberflächen | Examination procedure | 19.07.2011 | Amendment by applicant (claims and/or description) | 19.07.2011 | Examination requested [2011/35] | 06.10.2011 | Despatch of a communication from the examining division (Time limit: M04) | 10.02.2012 | Reply to a communication from the examining division | 25.02.2013 | Despatch of a communication from the examining division (Time limit: M06) | 22.08.2013 | Reply to a communication from the examining division | 12.08.2015 | Despatch of a communication from the examining division (Time limit: M04) | 10.12.2015 | Reply to a communication from the examining division | 20.12.2016 | Communication of intention to grant the patent | 06.04.2017 | Disapproval of the communication of intention to grant the patent by the applicant or resumption of examination proceedings by the EPO | 19.06.2017 | Despatch of a communication from the examining division (Time limit: M02) | 17.08.2017 | Reply to a communication from the examining division | 15.09.2017 | Communication of intention to grant the patent | 15.01.2018 | Fee for grant paid | 15.01.2018 | Fee for publishing/printing paid | 15.01.2018 | Receipt of the translation of the claim(s) | Parent application(s) Tooltip | EP04788766.6 / EP1664932 | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued (EP20040788766) is 06.07.2006 | Opposition(s) | 29.11.2018 | No opposition filed within time limit [2019/06] | Fees paid | Renewal fee | 17.09.2010 | Renewal fee patent year 03 | 17.09.2010 | Renewal fee patent year 04 | 17.09.2010 | Renewal fee patent year 05 | 17.09.2010 | Renewal fee patent year 06 | 17.09.2010 | Renewal fee patent year 07 | 26.09.2011 | Renewal fee patent year 08 | 25.09.2012 | Renewal fee patent year 09 | 27.09.2013 | Renewal fee patent year 10 | 29.09.2014 | Renewal fee patent year 11 | 28.09.2015 | Renewal fee patent year 12 | 27.09.2016 | Renewal fee patent year 13 | 27.09.2017 | Renewal fee patent year 14 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 15.09.2004 | AT | 28.02.2018 | CY | 28.02.2018 | CZ | 28.02.2018 | DK | 28.02.2018 | EE | 28.02.2018 | ES | 28.02.2018 | FI | 28.02.2018 | IT | 28.02.2018 | MC | 28.02.2018 | NL | 28.02.2018 | PL | 28.02.2018 | PT | 28.02.2018 | RO | 28.02.2018 | SE | 28.02.2018 | SI | 28.02.2018 | SK | 28.02.2018 | TR | 28.02.2018 | BG | 28.05.2018 | GR | 29.05.2018 | IE | 15.09.2018 | LU | 15.09.2018 | BE | 30.09.2018 | CH | 30.09.2018 | LI | 30.09.2018 | [2020/27] |
Former [2020/16] | AT | 28.02.2018 | |
CY | 28.02.2018 | ||
CZ | 28.02.2018 | ||
DK | 28.02.2018 | ||
EE | 28.02.2018 | ||
ES | 28.02.2018 | ||
FI | 28.02.2018 | ||
IT | 28.02.2018 | ||
MC | 28.02.2018 | ||
NL | 28.02.2018 | ||
PL | 28.02.2018 | ||
RO | 28.02.2018 | ||
SE | 28.02.2018 | ||
SI | 28.02.2018 | ||
SK | 28.02.2018 | ||
TR | 28.02.2018 | ||
BG | 28.05.2018 | ||
GR | 29.05.2018 | ||
IE | 15.09.2018 | ||
LU | 15.09.2018 | ||
BE | 30.09.2018 | ||
CH | 30.09.2018 | ||
LI | 30.09.2018 | ||
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SI | 28.02.2018 | ||
SK | 28.02.2018 | ||
BG | 28.05.2018 | ||
GR | 29.05.2018 | ||
IE | 15.09.2018 | ||
LU | 15.09.2018 | ||
BE | 30.09.2018 | ||
CH | 30.09.2018 | ||
LI | 30.09.2018 | ||
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CY | 28.02.2018 | ||
CZ | 28.02.2018 | ||
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SI | 28.02.2018 | ||
SK | 28.02.2018 | ||
BG | 28.05.2018 | ||
GR | 29.05.2018 | ||
IE | 15.09.2018 | ||
LU | 15.09.2018 | ||
BE | 30.09.2018 | ||
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CY | 28.02.2018 | ||
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EE | 28.02.2018 | ||
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SE | 28.02.2018 | ||
SI | 28.02.2018 | ||
SK | 28.02.2018 | ||
BG | 28.05.2018 | ||
GR | 29.05.2018 | ||
IE | 15.09.2018 | ||
LU | 15.09.2018 | ||
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BG | 28.05.2018 | ||
GR | 29.05.2018 | ||
LU | 15.09.2018 | ||
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BG | 28.05.2018 | ||
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NL | 28.02.2018 | Documents cited: | Search | [A]WO9009557 (CAMBRIDGE CONSULTANTS [GB]) [A] 1-15 * page 21, lines 10-16 ** figures 6,7 *; | [X] - ERIK NOVAK, MICHAEL B. KRELL,. TRISHA BROWNE, "Template-based software for accurate MEMS characterization", PROCEEDINGS OF SPIE, (20030129), vol. 4980, doi:10.1117/12.478204, ISSN 0277-786X, pages 75 - 80, XP002608351 [X] 1,2,6,10,12 * paragraphs [0001] , [02.1] , [0004]; figure 2 * DOI: http://dx.doi.org/10.1117/12.478204 | by applicant | - "Determination of fringe order in white-light interference microscopy", APPL. OPT., (2002), vol. 41, no. 22, page 4571 | US20010053106 | US20030429175 |