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Extract from the Register of European Patents

EP About this file: EP2267756

EP2267756 - Vacuum plasma sources [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  08.01.2016
Database last updated on 03.01.2025
Most recent event   Tooltip13.10.2017Lapse of the patent in a contracting state
New state(s): BG, CY, HU, MT, TR		published on 15.11.2017  [2017/46]
Applicant(s)For all designated states
Oerlikon Surface Solutions AG, Trübbach
Hauptstrasse 53
9477 Trübbach / CH
[2015/24]
Former [2010/52]For all designated states
Oerlikon Trading AG, Trübbach
Hauptstrasse
9477 Trübbach / CH
Inventor(s)01 / Ramm, Jürgen
Muehlebuendtestrasse 12
7304, Maienfeld / CH
02 / Widrig, Benno
Rheinstrasse 13
7310, Bad Ragaz / CH
03 / Kurapov, Denis
Hanfländerweg 5
8880, Walenstadt / CH
 [2014/40]
Former [2010/52]01 / RAamm, Jürgen
Muehlebuendtestrasse 12
7304, Maienfeld / CH
02 / Widrig, Benno
Rheinstrasse 13
7310, Bad Ragaz / CH
03 / Kurapov, Denis
Hanfländerweg 5
8880, Walenstadt / CH
Representative(s)Troesch Scheidegger Werner AG
Schwäntenmos 14
8126 Zumikon / CH
[N/P]
Former [2015/10]Troesch, Jacques J.
Troesch Scheidegger Werner AG
Schwäntenmos 14
8126 Zumikon / CH
Former [2010/52]Troesch, Jacques J.
Troesch Scheidegger Werner AG Schwäntenmos 14
8126 Zumikon / CH
Application number, filing date10178841.201.11.2007
[2010/52]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report 
No.:EP2267756
Date:29.12.2010
Language:EN
[2010/52]
Type: B1 Patent specification 
No.:EP2267756
Date:04.03.2015
Language:EN
[2015/10]
Search report(s)(Supplementary) European search report - dispatched on:EP25.11.2010
ClassificationIPC:H01J37/32
[2010/52]
CPC:
H01J37/32009 (EP,KR,US); C23C14/54 (KR,US); C23C14/0036 (KR,US);
C23C14/228 (KR,US); C23C14/35 (US); C23C14/351 (US);
H01J37/32 (KR); H01J37/32055 (EP,KR,US); H01J37/32477 (EP,KR,US);
H01J37/32541 (EP,KR,US) (-)
Designated contracting statesAT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MT,   NL,   PL,   PT,   RO,   SE,   SI,   SK,   TR [2010/52]
TitleGerman:Vakuumplasmaquellen[2010/52]
English:Vacuum plasma sources[2010/52]
French:Sources de plasma sous vide[2010/52]
Examination procedure29.06.2011Amendment by applicant (claims and/or description)
29.06.2011Examination requested  [2011/32]
12.12.2013Despatch of a communication from the examining division (Time limit: M04)
14.04.2014Reply to a communication from the examining division
04.09.2014Communication of intention to grant the patent
17.12.2014Fee for grant paid
17.12.2014Fee for publishing/printing paid
17.12.2014Receipt of the translation of the claim(s)
Parent application(s)   TooltipEP07822148.8  / EP2206138
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued (EP20070822148) is  19.05.2016
Opposition(s)07.12.2015No opposition filed within time limit [2016/06]
Fees paidRenewal fee
23.09.2010Renewal fee patent year 03
23.09.2010Renewal fee patent year 04
01.09.2011Renewal fee patent year 05
04.09.2012Renewal fee patent year 06
31.08.2013Renewal fee patent year 07
23.01.2015Renewal fee patent year 08
Penalty fee
Additional fee for renewal fee
30.11.201408   M06   Fee paid on   23.01.2015
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU01.11.2007
AT04.03.2015
BE04.03.2015
BG04.03.2015
CY04.03.2015
CZ04.03.2015
DK04.03.2015
EE04.03.2015
ES04.03.2015
FI04.03.2015
IT04.03.2015
LT04.03.2015
LV04.03.2015
MC04.03.2015
MT04.03.2015
PL04.03.2015
RO04.03.2015
SI04.03.2015
SK04.03.2015
TR04.03.2015
GR05.06.2015
IS04.07.2015
PT06.07.2015
IE01.11.2015
LU01.11.2015
[2017/39]
Former [2016/45]AT04.03.2015
BE04.03.2015
CZ04.03.2015
DK04.03.2015
EE04.03.2015
ES04.03.2015
FI04.03.2015
IT04.03.2015
LT04.03.2015
LV04.03.2015
MC04.03.2015
PL04.03.2015
RO04.03.2015
SI04.03.2015
SK04.03.2015
GR05.06.2015
IS04.07.2015
PT06.07.2015
IE01.11.2015
LU01.11.2015
Former [2016/37]AT04.03.2015
BE04.03.2015
CZ04.03.2015
DK04.03.2015
EE04.03.2015
ES04.03.2015
FI04.03.2015
IT04.03.2015
LT04.03.2015
LV04.03.2015
MC04.03.2015
PL04.03.2015
RO04.03.2015
SI04.03.2015
SK04.03.2015
GR05.06.2015
IS04.07.2015
PT06.07.2015
LU01.11.2015
Former [2016/31]AT04.03.2015
CZ04.03.2015
DK04.03.2015
EE04.03.2015
ES04.03.2015
FI04.03.2015
IT04.03.2015
LT04.03.2015
LV04.03.2015
MC04.03.2015
PL04.03.2015
RO04.03.2015
SI04.03.2015
SK04.03.2015
GR05.06.2015
IS04.07.2015
PT06.07.2015
LU01.11.2015
Former [2016/28]AT04.03.2015
CZ04.03.2015
DK04.03.2015
EE04.03.2015
ES04.03.2015
FI04.03.2015
IT04.03.2015
LT04.03.2015
LV04.03.2015
MC04.03.2015
PL04.03.2015
RO04.03.2015
SI04.03.2015
SK04.03.2015
GR05.06.2015
IS04.07.2015
PT06.07.2015
Former [2016/12]AT04.03.2015
CZ04.03.2015
DK04.03.2015
EE04.03.2015
ES04.03.2015
FI04.03.2015
IT04.03.2015
LT04.03.2015
LV04.03.2015
PL04.03.2015
RO04.03.2015
SI04.03.2015
SK04.03.2015
GR05.06.2015
IS04.07.2015
PT06.07.2015
Former [2016/07]AT04.03.2015
CZ04.03.2015
DK04.03.2015
EE04.03.2015
ES04.03.2015
FI04.03.2015
IT04.03.2015
LT04.03.2015
LV04.03.2015
PL04.03.2015
RO04.03.2015
SK04.03.2015
GR05.06.2015
IS04.07.2015
PT06.07.2015
Former [2016/03]AT04.03.2015
CZ04.03.2015
EE04.03.2015
ES04.03.2015
FI04.03.2015
IT04.03.2015
LT04.03.2015
LV04.03.2015
PL04.03.2015
RO04.03.2015
SK04.03.2015
GR05.06.2015
IS04.07.2015
PT06.07.2015
Former [2015/50]AT04.03.2015
CZ04.03.2015
EE04.03.2015
ES04.03.2015
FI04.03.2015
LT04.03.2015
LV04.03.2015
PL04.03.2015
RO04.03.2015
SK04.03.2015
GR05.06.2015
IS04.07.2015
PT06.07.2015
Former [2015/49]AT04.03.2015
CZ04.03.2015
EE04.03.2015
ES04.03.2015
FI04.03.2015
LT04.03.2015
LV04.03.2015
RO04.03.2015
SK04.03.2015
GR05.06.2015
PT06.07.2015
Former [2015/39]AT04.03.2015
ES04.03.2015
FI04.03.2015
LT04.03.2015
LV04.03.2015
GR05.06.2015
Former [2015/38]AT04.03.2015
ES04.03.2015
FI04.03.2015
LT04.03.2015
GR05.06.2015
Former [2015/37]ES04.03.2015
FI04.03.2015
LT04.03.2015
GR05.06.2015
Former [2015/36]ES04.03.2015
FI04.03.2015
LT04.03.2015
Former [2015/35]ES04.03.2015
LT04.03.2015
Former [2015/33]ES04.03.2015
Documents cited:Search[X]US4038171  (MOSS RONALD W, et al) [X] 1,6,16,20 * column 3, line 1 - line 67; figure 1 * * column 5, line 44 - column 6, line 14; figures 1,2 *;
 [YD]DE4306611  (LEYBOLD AG [DE]) [YD] 4,12 * page 4, line 11 - line 31; figure 1 ** page 4, line 55 - page 5, line 50; figure 4 *;
 [X]US5605637  (SHAN HONGCHING [US], et al) [X] 1,2,6,8,10,14 * column 3, line 55 - column 4, line 30; figure 1 *;
 [X]US6010636  (DONOHUE JOHN F [US], et al) [X] 1,6,7,18 * column 4, line 22 - line 50; figure 2 * * column 5, line 15 - column 6, line 39; figures 3-5C *;
 [X]US6495000  (ATKINSON JAMES MIKEL [US], et al) [X] 1,6,16 * column 2, line 20 - column 3, line 13; figure 3 *;
 [X]EP1628323  (JDS UNIPHASE CORP [US]) [X] 1,2,8,10,11,16,18 * paragraphs [0051] , [0052]; figures 1a,1b * * paragraph [0086]; figure 11 *;
 [XY]US2007034501  (BENDER EFIM [IL]) [X] 1,6,16,17,19 * paragraph [0100] * * paragraph [0117] - paragraphs [0120] , [0122]; figure 3B * [Y] 4,12
ExaminationUS5268056
by applicantUS5103766
 DE4306611
 US5518597
 WO2006099758
    - L. DORF ET AL., "Experimental studies of anode sheath phenomena in a Hall thruster discharge", JOURNAL OF APPLIED PHYSICS, (2005), vol. 97, page 103309
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.